| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/05/2004 | US6800535 Method for forming bottle-shaped trenches |
| 10/05/2004 | US6800534 Method of forming embedded MIM capacitor and zigzag inductor scheme |
| 10/05/2004 | US6800531 Method of fabricating a bipolar transistor |
| 10/05/2004 | US6800530 Triple layer hard mask for gate patterning to fabricate scaled CMOS transistors |
| 10/05/2004 | US6800529 Method for fabricating semiconductor transistor device |
| 10/05/2004 | US6800528 Method of fabricating LDMOS semiconductor devices |
| 10/05/2004 | US6800527 One time programmable semiconductor nonvolatile memory device and method for production of same |
| 10/05/2004 | US6800526 Method for manufacturing a self-aligned split-gate flash memory cell |
| 10/05/2004 | US6800525 Method of manufacturing split gate flash memory device |
| 10/05/2004 | US6800524 Method of manufacturing semiconductor integrated circuit device |
| 10/05/2004 | US6800523 Integrated DRAM process/structure using contact pillars |
| 10/05/2004 | US6800522 Method for fabricating semiconductor device with storage node contact structure |
| 10/05/2004 | US6800521 Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics |
| 10/05/2004 | US6800520 Localized array threshold voltage implant enhance charge storage within DRAM memory cells |
| 10/05/2004 | US6800519 Semiconductor device and method of manufacturing the same |
| 10/05/2004 | US6800518 Formation of patterned silicon-on-insulator (SOI)/silicon-on-nothing (SON) composite structure by porous Si engineering |
| 10/05/2004 | US6800517 Methods of forming conductive interconnects |
| 10/05/2004 | US6800516 Electrostatic discharge device protection structure |
| 10/05/2004 | US6800515 DRAM and MOS transistor manufacturing |
| 10/05/2004 | US6800514 Method of fabricating a MOS transistor with a drain extension and corresponding transistor |
| 10/05/2004 | US6800513 Manufacturing semiconductor device including forming a buried gate covered by an insulative film and a channel layer |
| 10/05/2004 | US6800512 Method of forming insulating film and method of fabricating semiconductor device |
| 10/05/2004 | US6800511 Method for fabricating semiconductor device with negative differential conductance or transconductance |
| 10/05/2004 | US6800510 Method of controlling storage capacitor's capacitance of thin film transistor liquid crystal display |
| 10/05/2004 | US6800509 Process for enhancement of voltage endurance and reduction of parasitic capacitance for a trench power MOSFET |
| 10/05/2004 | US6800508 Semiconductor device, its manufacturing method and electrodeposition frame |
| 10/05/2004 | US6800507 Semiconductor device and a method of manufacturing the same |
| 10/05/2004 | US6800506 Method of making a bumped terminal in a laminated structure for a semiconductor chip assembly |
| 10/05/2004 | US6800505 Semiconductor device including edge bond pads and related methods |
| 10/05/2004 | US6800502 Thin film transistor, method of producing the same, liquid crystal display, and thin film forming apparatus |
| 10/05/2004 | US6800499 Process for preparing a hydrogen sensor |
| 10/05/2004 | US6800494 Method and apparatus for controlling copper barrier/seed deposition processes |
| 10/05/2004 | US6800493 Pre-erase manufacturing method |
| 10/05/2004 | US6800428 Generating enlargement pattern; conveying pattern edges; protective coatings; exposure, development |
| 10/05/2004 | US6800423 Radiation-sensitive composition and method for forming patterns and fabricating semiconductor devices |
| 10/05/2004 | US6800422 Thick film photoresists and methods for use thereof |
| 10/05/2004 | US6800421 Pattern in chip areas of a photomask is transferred onto an internal area of a semiconductor wafer as ship areas including defects among the chip areas of the photomask are shielded with a light shielding body; shortens time |
| 10/05/2004 | US6800418 Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same |
| 10/05/2004 | US6800416 Mixture of fluoropolymer, photoactive material and crosslinking agent |
| 10/05/2004 | US6800415 Negative-acting aqueous photoresist composition |
| 10/05/2004 | US6800414 Radiation-sensitive resin composition |
| 10/05/2004 | US6800408 Use of multiple reticles in lithographic printing tools |
| 10/05/2004 | US6800402 Phase-shifting mask and method of forming pattern using the same |
| 10/05/2004 | US6800330 Composition for film formation, method of film formation, and silica-based film |
| 10/05/2004 | US6800237 Method for machining ceramic green sheet |
| 10/05/2004 | US6800218 Abrasive free formulations for chemical mechanical polishing of copper and associated materials and method of using same |
| 10/05/2004 | US6800214 Computerized adjustment of the thickness of photoresists; semiconductors; integrated circuits |
| 10/05/2004 | US6800213 Precision dielectric etch using hexafluorobutadiene |
| 10/05/2004 | US6800210 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| 10/05/2004 | US6800189 Does not peel on bending |
| 10/05/2004 | US6800187 Support that controls plating solution flow dynamics and electric field shape during electroplating; uniformity; bubble free |
| 10/05/2004 | US6800180 Resputtering to achieve better step coverage |
| 10/05/2004 | US6800177 Apparatus and method for fabricating carbon thin film |
| 10/05/2004 | US6800174 System for making wallboard or backerboard sheets including aerated concrete |
| 10/05/2004 | US6800173 Variable gas conductance control for a process chamber |
| 10/05/2004 | US6800172 Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor |
| 10/05/2004 | US6800169 Method for joining conductive structures and an electrical conductive article |
| 10/05/2004 | US6800142 Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatment |
| 10/05/2004 | US6800139 Film deposition apparatus and method |
| 10/05/2004 | US6800136 Axial gradient transport apparatus and process |
| 10/05/2004 | US6800133 Process for growing a magnesium oxide film on a silicon (100) substrate coated with a cubic silicon carbide butter layer |
| 10/05/2004 | US6800105 Abrasive for metal |
| 10/05/2004 | US6800020 Web-style pad conditioning system and methods for implementing the same |
| 10/05/2004 | US6799940 Removable semiconductor wafer susceptor |
| 10/05/2004 | US6799939 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
| 10/05/2004 | US6799932 Semiconductor wafer processing apparatus |
| 10/05/2004 | US6799910 Processing method and processing apparatus |
| 10/05/2004 | US6799909 Method of providing for an automated split runcard processing |
| 10/05/2004 | US6799907 Plasma enhanced method for increasing silicon-containing photoresist selectivity |
| 10/05/2004 | US6799883 Method for continuously blending chemical solutions |
| 10/05/2004 | US6799735 Nozzle plate member for supplying fluids in dispersed manner and manufacturing method of the same |
| 10/05/2004 | US6799713 Flip-chip bonding structure and method for making the same |
| 10/05/2004 | US6799711 Minute copper balls and a method for their manufacture |
| 10/05/2004 | US6799590 Error-preventing device and method for semiconductor fabrication equipment |
| 10/05/2004 | US6799589 Method and apparatus for wet-cleaning substrate |
| 10/05/2004 | US6799588 Apparatus for treating substrates |
| 10/05/2004 | US6799586 For semiconductor wafers; substrate waiting portion arranged below a processing portion, and a substrate lifter capable of vertical movement that moves processing portion to the waiting portion |
| 10/05/2004 | US6799584 Applying fluid to surface; removal impurities |
| 10/05/2004 | US6799583 Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
| 10/05/2004 | US6799539 System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment |
| 10/05/2004 | US6799428 Heat exchanger |
| 10/05/2004 | US6799394 Apparatus for sealing a vacuum chamber |
| 09/30/2004 | WO2004084598A1 Structural unit and method for the production of a structural unit |
| 09/30/2004 | WO2004084354A1 Connector |
| 09/30/2004 | WO2004084322A1 Semiconductor element, semiconductor sensor and semiconductor memory element |
| 09/30/2004 | WO2004084318A1 Semiconductor light-emitting element and method for manufacturing same; integrated semiconductor light-emitting device and method for manufacturing same; image display and method for manufacturing same; and illuminating device and method for manufacturing same |
| 09/30/2004 | WO2004084317A2 An optical sub-assembly for a transceiver |
| 09/30/2004 | WO2004084314A1 Semiconductor device and its manufacturing method |
| 09/30/2004 | WO2004084313A1 Semiconductor device having high dielectric film neutralizing fixed charge |
| 09/30/2004 | WO2004084312A2 Semiconductor device with isolation layer |
| 09/30/2004 | WO2004084311A1 A method for making a semiconductor device having a high-k gate dielectric |
| 09/30/2004 | WO2004084310A1 Semiconductor structure comprising a highly doped conductive channel region and method for producing a semiconductor structure |
| 09/30/2004 | WO2004084308A1 Soi wafer and method for manufacturing same |
| 09/30/2004 | WO2004084307A1 Single ended three transistor quasi-static ram cell |
| 09/30/2004 | WO2004084305A1 Semiconductor device, process for producing the same and imaging device |
| 09/30/2004 | WO2004084303A2 Flip-chip arrangment on a substrate carrier |
| 09/30/2004 | WO2004084301A1 Split fin heat sink |
| 09/30/2004 | WO2004084300A1 Electrical connections in substrates |
| 09/30/2004 | WO2004084299A2 Shallow trench isolation in processes with strained silicon |
| 09/30/2004 | WO2004084298A1 Substrate holding mechanism using electrostaic chuck and method of manufacturing the same |