Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2004
10/12/2004US6803308 Method of forming a dual damascene pattern in a semiconductor device
10/12/2004US6803307 Method of avoiding enlargement of top critical dimension in contact holes using spacers
10/12/2004US6803306 High density metal capacitor using via etch stopping layer as field dielectric in dual-damascence interconnect process
10/12/2004US6803305 Method for forming a via in a damascene process
10/12/2004US6803304 Methods for producing electrode and semiconductor device
10/12/2004US6803303 Method of fabricating semiconductor component having encapsulated, bonded, interconnect contacts
10/12/2004US6803302 Method for forming a semiconductor device having a mechanically robust pad interface
10/12/2004US6803300 Method of manufacturing a semiconductor device having a ground plane
10/12/2004US6803299 Non-volatile electrically erasable and programmable semiconductor memory cell utilizing asymmetrical charge trapping
10/12/2004US6803298 Method of manufacturing a device with epitaxial base
10/12/2004US6803297 Optimal spike anneal ambient
10/12/2004US6803296 Method of manufacturing a semiconductor device with leveling of a surface of a semiconductor film through irradiation
10/12/2004US6803295 Versatile system for limiting mobile charge ingress in SOI semiconductor structures
10/12/2004US6803294 Semiconductor wafer and manufacturing method of semiconductor device
10/12/2004US6803293 Method of processing a semiconductor wafer
10/12/2004US6803292 Method for manufacturing a semiconductor device and semiconductor device with overlay mark
10/12/2004US6803291 Method to preserve alignment mark optical integrity
10/12/2004US6803289 Bipolar transistor and method for making the same
10/12/2004US6803288 Method of manufacturing field effect transistor
10/12/2004US6803287 Method for forming a semiconductor device having contact wires of different sectional areas
10/12/2004US6803286 Method of forming a local interconnect
10/12/2004US6803285 Method of fabricating dual threshold voltage n-channel and p-channel mosfets with a single extra masked implant operation
10/12/2004US6803284 Method for manufacturing embedded non-volatile memory with two polysilicon layers
10/12/2004US6803283 Method to code flashROM using LDD and source/drain implant
10/12/2004US6803282 Methods for fabricating low CHC degradation mosfet transistors
10/12/2004US6803281 Method of fabricating semiconductor device
10/12/2004US6803280 Method and composite for decreasing charge leakage
10/12/2004US6803279 NROM fabrication method
10/12/2004US6803278 Method of forming memory cells in an array
10/12/2004US6803277 Method of forming gate electrode in flash memory device
10/12/2004US6803276 Semiconductor device having a flash memory cell and fabrication method thereof
10/12/2004US6803275 ONO fabrication process for reducing oxygen vacancy content in bottom oxide layer in flash memory devices
10/12/2004US6803274 Magnetic memory cell having an annular data layer and a soft reference layer
10/12/2004US6803273 Method to salicide source-line in flash memory with STI
10/12/2004US6803272 Use of high-K dielectric material in modified ONO structure for semiconductor devices
10/12/2004US6803271 Method for manufacturing semiconductor integrated circuit device
10/12/2004US6803270 CMOS performance enhancement using localized voids and extended defects
10/12/2004US6803268 EEPROM semiconductor device and method of fabricating the same
10/12/2004US6803266 Process for passivating the semiconductor-dielectric interface of a MOS device and MOS device formed thereby
10/12/2004US6803265 Liner for semiconductor memories and manufacturing method therefor
10/12/2004US6803264 Method of fabricating a semiconductor device
10/12/2004US6803263 Method of fabricating TFT with self-aligned structure
10/12/2004US6803262 Process using self-organizable polymer
10/12/2004US6803260 Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method
10/12/2004US6803255 Dual gauge lead frame
10/12/2004US6803254 Wire bonding method for a semiconductor package
10/12/2004US6803253 Method for laminating and mounting semiconductor chip
10/12/2004US6803250 Image sensor with complementary concave and convex lens layers and method for fabrication thereof
10/12/2004US6803249 Method of making an integrated photodetector in which a silicon nitride layer forms an anti-reflective film and part of multi-layer insulator within transistor structures
10/12/2004US6803248 Chemistry for etching quaternary interface layers on InGaAsP mostly formed between GaAs and InxGa(1-x)P layers
10/12/2004US6803247 Method for dividing semiconductor wafer
10/12/2004US6803245 Procedure for encapsulation of electronic devices
10/12/2004US6803243 Low temperature formation of backside ohmic contacts for vertical devices
10/12/2004US6803242 Evaluation method of IG effectivity in semiconductor silicon substrates
10/12/2004US6803241 Method of monitoring contact hole of integrated circuit using corona charges
10/12/2004US6803240 Method of measuring crystal defects in thin Si/SiGe bilayers
10/12/2004US6803176 Methods for forming line patterns in semiconductor substrates
10/12/2004US6803173 A polymer having a silicon atom in a side chain, which is insoluble in aqueous alkali solution and becomes soluble in aqueous alkali solution by the action of an acid, generated by acid generator on exposure to active light radiation
10/12/2004US6803172 Organic anti-reflective coating material and preparation thereof
10/12/2004US6803171 For forming relief images; manufacturing electronic and optoelectronic device; useful as photoresists
10/12/2004US6803170 Resist composition and method for manufacturing semiconductor device using the resist composition
10/12/2004US6803169 Deep ultraviolet radiation photoresists
10/12/2004US6803160 Multi-tone photomask and method for manufacturing the same
10/12/2004US6803154 Such as a phase type computer generated hologram (cgh), a two-dimensional binary structure or a phase modulation plate, for example, usable as an optical component of a semiconductor manufacturing reduction exposure apparatus
10/12/2004US6803134 Paraelectric thin film material and method statement of government interest
10/12/2004US6803116 Method of bonding a conductive adhesive and an electrode, and a bonded electrode obtained thereby
10/12/2004US6803080 Method of forming crystalline silicon film by CVD
10/12/2004US6803075 Method employing plurality of particles and pressure differentials to deposit film
10/12/2004US6803074 Dissolving metal compounds in solvent, atomizing metal compound solution, introducing atomized solution into film-forming chamber, forming complex oxide thin film
10/12/2004US6803071 Paraelectric thin film semiconductor material and method for producing the same
10/12/2004US6802986 Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors
10/12/2004US6802985 Method for fabricating metal wirings
10/12/2004US6802955 Polishing pad, platen comprising first conductive layer in contact with polishing pad for coupling to first potential, second conductive layer for coupling to second potential, insulating layer, electrical contact, electrolyte reservoir
10/12/2004US6802947 Apparatus and method for electro chemical plating using backside electrical contacts
10/12/2004US6802946 Apparatus for controlling thickness uniformity of electroplated and electroetched layers
10/12/2004US6802945 Method of metal sputtering for integrated circuit metal routing
10/12/2004US6802944 Etching first with physical sputtering and secondly a chemically reactive gas between deposition of two films; silica deposition
10/12/2004US6802935 Semiconductor chamber process apparatus and method
10/12/2004US6802934 Processing apparatus
10/12/2004US6802933 Loading substrate having exposed layer into etch reactor having deposits formed therein during etch process conducted on another substrate, conducting another etch process on loaded substrate that removes exposed layer
10/12/2004US6802930 Method of making a laminated structure
10/12/2004US6802928 Method for cutting hard and brittle material
10/12/2004US6802926 Method of producing semiconductor thin film and method of producing solar cell using same
10/12/2004US6802918 Fabrication method for adhesive pressure bonding two components together with closed-loop control
10/12/2004US6802911 Dipping a semiconductor device in the vessel containing a solution of hf and ozone water.
10/12/2004US6802906 Emissivity-change-free pumping plate kit in a single wafer chamber
10/12/2004US6802902 Process for producing an epitaxial layer of gallium nitride
10/12/2004US6802900 Liquid phase growth methods and liquid phase growth apparatus
10/12/2004US6802877 Polyvinyl acetal composition roller brush with abrasive outer surface
10/12/2004US6802762 Method for supplying slurry to polishing apparatus
10/12/2004US6802754 Method for precise molding and alignment of structures on a substrate using a stretchable mold
10/12/2004US6802719 Implantation method
10/12/2004US6802712 Heating system, method for heating a deposition or oxidation reactor, and reactor including the heating system
10/12/2004US6802653 Method and apparatus for adapting a miniature form-factor connector to a standard format fiber optic connector plug
10/12/2004US6802368 Temperature control system for a workpiece chuck
10/12/2004US6802322 Method of fabricating a stringerless flash memory
10/12/2004US6802250 Stencil design for solder paste printing
10/12/2004US6802099 Cleaning member and cylindrical cleaning element
10/12/2004CA2319428C A method for generation of electrical conducting or semiconducting structures in three dimensions and methods for erasure of the same structures
10/07/2004WO2004086826A2 Esd dissipative structural components
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