| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/05/2013 | WO2013180057A1 Semiconductor layered structure and semiconductor element |
| 12/05/2013 | WO2013180010A1 Substrate treatment device, temperature measurement system, method for measuring temperature of treatment device, transportation device, and memory medium |
| 12/05/2013 | WO2013179956A1 Pattern inspection device and pattern inspection method |
| 12/05/2013 | WO2013179943A1 Adhesive sheet for production of semiconductor device having bump electrodes and production method for semiconductor device |
| 12/05/2013 | WO2013179936A1 Flow path member, and adsorption device and refrigeration device employing same |
| 12/05/2013 | WO2013179926A1 Polishing material slurry |
| 12/05/2013 | WO2013179922A1 Semiconductor device and method for manufacturing the same |
| 12/05/2013 | WO2013179904A1 Transportation mechanism, transportation method, and processing system |
| 12/05/2013 | WO2013179901A1 Light receiving element, semiconductor epitaxial wafer, detecting apparatus, and light receiving element manufacturing method |
| 12/05/2013 | WO2013179863A1 Photosensitive composition and printed circuit board having hardened layer thereof |
| 12/05/2013 | WO2013179837A1 Semiconductor device and method for manufacturing same |
| 12/05/2013 | WO2013179826A1 Laser annealing device having pulse waveform measuring function |
| 12/05/2013 | WO2013179825A1 Pattern evaluation device and pattern evaluation method |
| 12/05/2013 | WO2013179804A1 Semiconductor manufacturing method and annealing method |
| 12/05/2013 | WO2013179767A1 Method of manufacturing image pickup device and method of manufacturing semiconductor device |
| 12/05/2013 | WO2013179762A1 Substrate holding device and substrate treatment device |
| 12/05/2013 | WO2013179761A1 Semiconductor device |
| 12/05/2013 | WO2013179729A1 Silicon-carbide semiconductor device, and method for producing silicon-carbide semiconductor device |
| 12/05/2013 | WO2013179721A1 Polishing composition, and polishing method and device manufacturing method using same |
| 12/05/2013 | WO2013179720A1 Polishing composition |
| 12/05/2013 | WO2013179719A1 Polishing composition |
| 12/05/2013 | WO2013179718A1 Polishing composition |
| 12/05/2013 | WO2013179717A1 Polishing composition |
| 12/05/2013 | WO2013179716A1 Polishing composition |
| 12/05/2013 | WO2013179650A1 Semiconductor device and method for manufacturing same |
| 12/05/2013 | WO2013179638A1 Semiconductor module and production method for same |
| 12/05/2013 | WO2013179593A1 Semiconductor storage device and semiconductor device containing semiconductor storage device |
| 12/05/2013 | WO2013179589A1 Semiconductor device |
| 12/05/2013 | WO2013179575A1 Vacuum-processing apparatus, vacuum-processing method, and storage medium |
| 12/05/2013 | WO2013179574A1 Method for manufacturing layered film and vacuum-processing apparatus |
| 12/05/2013 | WO2013179569A1 Method for cleaning semiconductor wafer |
| 12/05/2013 | WO2013179568A1 Method for drying silicon wafer |
| 12/05/2013 | WO2013179533A1 Acf bonding apparatus and acf bonding method |
| 12/05/2013 | WO2013179489A1 Substrate placing apparatus and substrate placing method |
| 12/05/2013 | WO2013179481A1 Substrate-mounting boat |
| 12/05/2013 | WO2013179471A1 Semiconductor probe for testing quantum cell, test device, and test method |
| 12/05/2013 | WO2013179355A1 Light-emitting element, transistor, and partition wall |
| 12/05/2013 | WO2013179333A1 Isolator and isolator manufacturing method |
| 12/05/2013 | WO2013178824A1 Susceptor |
| 12/05/2013 | WO2013178786A2 Apparatus for and method of aligning and transporting workpieces |
| 12/05/2013 | WO2013178764A1 Method and system for obtaining a semiconductor wafer |
| 12/05/2013 | WO2013178761A1 Method and system for obtaining a semiconductor wafer |
| 12/05/2013 | WO2013178380A1 Electronic module and method for producing such an electronic module and electronic control unit having such an electronic module |
| 12/05/2013 | WO2013178379A1 Electronic module and method for producing such an electronic module and electronic control unit having such an electronic module |
| 12/05/2013 | WO2013178260A1 Device and method for bonding substrates |
| 12/05/2013 | WO2013178078A1 Image sensor and transistor manufacturing method |
| 12/05/2013 | WO2013178027A1 Isolated gate field effect transistor and manufacture method thereof |
| 12/05/2013 | WO2013178011A1 A method of etching silicon recess of contact holes |
| 12/05/2013 | WO2013177856A1 Semiconductor structure and method for forming the same |
| 12/05/2013 | WO2013177855A1 Semiconductor structure and method for forming the same |
| 12/05/2013 | WO2013177814A1 Roller for conveying glass substrate |
| 12/05/2013 | WO2013177806A1 Improved laser annealing equipment |
| 12/05/2013 | WO2013177725A1 Semi-conductor device and producing method thereof |
| 12/05/2013 | WO2013158038A8 HEMISPHERICAL MICROSTRUCTURE ARRAYS FOR GaN-BASED LIGHT EMITTING DIODES AND METHOD FOR FORMING THE ARRAYS |
| 12/05/2013 | WO2013154963A3 Vertical nand device with partially silicided word lines and manufacturing method thereof |
| 12/05/2013 | WO2013138016A3 Method of quantitatively characterizing adulterants of silanes and coated susceptor |
| 12/05/2013 | WO2013119394A3 Test system with test trays and automated test tray handling |
| 12/05/2013 | WO2013117765A3 Semiconductor components with steep phosphorus profile in a germanium layer |
| 12/05/2013 | WO2013110384A3 Method for producing a structured multi-layer system using a processing beam capable of natural interference |
| 12/05/2013 | US20130324390 Scalable lead zirconium titanate (pzt) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
| 12/05/2013 | US20130323937 Combined Laser Processing System and Focused Ion Beam System |
| 12/05/2013 | US20130323936 Apparatus and methods for rapid thermal processing |
| 12/05/2013 | US20130323935 Film forming method and apparatus |
| 12/05/2013 | US20130323933 Methods for Forming Microlenses |
| 12/05/2013 | US20130323932 Layer-layer etch of non volatile materials using plasma |
| 12/05/2013 | US20130323931 Device manufacturing and cleaning method |
| 12/05/2013 | US20130323930 Selective Capping of Metal Interconnect Lines during Air Gap Formation |
| 12/05/2013 | US20130323929 Method for selectively modifying spacing between pitch multiplied structures |
| 12/05/2013 | US20130323928 Method of manufacturing semiconductor device, and mask |
| 12/05/2013 | US20130323927 Manufacturing method of circuit structure |
| 12/05/2013 | US20130323926 Composite material, method of producing the same, and apparatus for producing the same |
| 12/05/2013 | US20130323925 Pattern forming method, mold and data processing method |
| 12/05/2013 | US20130323924 Methods of forming a pattern in a material and methods of forming openings in a material to be patterned |
| 12/05/2013 | US20130323923 Methods for fabricating integrated circuits having improved spacers |
| 12/05/2013 | US20130323921 Method of making an insulated gate semiconductor device and structure |
| 12/05/2013 | US20130323918 Methods for electron beam patterning |
| 12/05/2013 | US20130323917 Self-aligned patterning for deep implantation in a semiconductor structure |
| 12/05/2013 | US20130323916 Plasma doping method and apparatus |
| 12/05/2013 | US20130323915 Method and apparatus for forming silicon film |
| 12/05/2013 | US20130323914 Methods for Depositing Amorphous Silicon |
| 12/05/2013 | US20130323912 Method for manufacturing semiconductor device |
| 12/05/2013 | US20130323911 Method for forming semiconductor device |
| 12/05/2013 | US20130323910 Method for manufacturing semiconductor device and semiconductor manufacturing system |
| 12/05/2013 | US20130323909 Method for fabricating semiconductor components having lasered features containing dopants |
| 12/05/2013 | US20130323908 Method for fabricating semiconductor device |
| 12/05/2013 | US20130323907 Active carrier for carrying a wafer and method for release |
| 12/05/2013 | US20130323906 Method Of Manufacturing Thin-Film Bonded Substrate Used For Semiconductor Device |
| 12/05/2013 | US20130323905 Semiconductor component and method for producing a semiconductor component |
| 12/05/2013 | US20130323904 Method for forming insulating film |
| 12/05/2013 | US20130323903 Process for fabricating an integrated circuit having trench isolations with different depths |
| 12/05/2013 | US20130323901 Capacitive element, manufacturing method of the same, solid-state imaging device, and imaging apparatus |
| 12/05/2013 | US20130323899 High Performance CMOS Device Design |
| 12/05/2013 | US20130323898 Method of lithography process with an under isolation material layer |
| 12/05/2013 | US20130323894 Transistor and Method for Forming the Same |
| 12/05/2013 | US20130323893 Methods for Forming MOS Devices with Raised Source/Drain Regions |
| 12/05/2013 | US20130323892 Methods of performing highly tilted halo implantation processes on semiconductor devices |
| 12/05/2013 | US20130323891 Integrated Circuit Device with Well Controlled Surface Proximity and Method of Manufacturing Same |
| 12/05/2013 | US20130323890 Aqua Regia and Hydrogen Peroxide HCl Combination to Remove Ni and NiPt Residues |
| 12/05/2013 | US20130323886 Semiconductor Molding Chamber |
| 12/05/2013 | US20130323885 Method of manufacturing high-capacity semiconductor package |