| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/21/2004 | US20040206455 Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties |
| 10/21/2004 | US20040206454 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning |
| 10/21/2004 | US20040206453 CMP machine dresser and method for detecting the dislodgement of diamonds from the same |
| 10/21/2004 | US20040206452 Substrate processing apparatus |
| 10/21/2004 | US20040206444 Methods for forming an assembly for transfer of a useful layer |
| 10/21/2004 | US20040206425 Fabrication of a high-strength steel article with inclusion control during melting |
| 10/21/2004 | US20040206410 Fluid handling component with ultraphobic surfaces |
| 10/21/2004 | US20040206390 Semiconductor layer includes a copper-indium-gallium-diselenide film (CIGS); vapor deposition |
| 10/21/2004 | US20040206379 Substrate processing apparatus |
| 10/21/2004 | US20040206378 Substrate processing apparatus |
| 10/21/2004 | US20040206375 Integrated bevel clean chamber |
| 10/21/2004 | US20040206374 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning |
| 10/21/2004 | US20040206373 Spin rinse dry cell |
| 10/21/2004 | US20040206371 Wafer cleaning |
| 10/21/2004 | US20040206309 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 10/21/2004 | US20040206308 Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals |
| 10/21/2004 | US20040206307 Method and system having at least one thermal transfer station for making OLED displays |
| 10/21/2004 | US20040206304 Pressurized chuck for controlling backside wafer contamination |
| 10/21/2004 | US20040206299 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method |
| 10/21/2004 | US20040206298 Method for producing semi-insulating resistivity in high purity silicon carbide crystals |
| 10/21/2004 | US20040206297 In situ growth of oxide and silicon layers |
| 10/21/2004 | US20040206179 Nozzle clogging detection device, droplet ejecting device, electronic optical device, method for producing same, and electronic device |
| 10/21/2004 | US20040205961 Electronic component mounting apparatus and electronic component mounting method |
| 10/21/2004 | US20040205958 Methods for fabricating MRAM device structures |
| 10/21/2004 | DE202004013515U1 Device for storing and transporting breakable objects comprises a transport container with a carrier plate which is constituted as a damping element supporting at least one box with breakable objects |
| 10/21/2004 | DE19855655B4 Plasmakammer mit erosionsresistenten Halteschrauben Plasma chamber with erosion-resistant mounting screws |
| 10/21/2004 | DE19853092B4 Übernahme- und Haltesystem für ein Substrat Acquisition and retention system for a substrate |
| 10/21/2004 | DE19801488B4 Verfahren zum Zusammenbau eines Halbleiterbausteins A method of assembling a semiconductor device |
| 10/21/2004 | DE19727262B4 Halbleiterspeichervorrichtung mit über Leckdetektionsmittel gesteuerter Substratspannungserzeugungsschaltung A semiconductor memory device with more than leak detection means controlled substrate voltage generating circuit |
| 10/21/2004 | DE19613669B4 Verfahren zur Herstellung eines Halbleiterelements mit einer Platinschicht A process for producing a semiconductor element with a layer of platinum |
| 10/21/2004 | DE10358963A1 Verfahren zum Herstellen einer MTJ-Zelle eines magnetischen Direktzugriffsspeichers A method for producing an MTJ cell of a magnetic random access memory |
| 10/21/2004 | DE10354020A1 Verfahren zum Testen einer Halbleitervorrichtung A method for testing a semiconductor device |
| 10/21/2004 | DE10347458A1 Semiconductor device forming method e.g. for embedded memory, involves forming single layer spacer on side walls of conductive pattern by etching one spacer layer using another spacer as mask |
| 10/21/2004 | DE10337808B3 Manufacturing method for semiconductor element with charge compensation structure obtained by successive positive and negative doping via respective doping beams with different directions |
| 10/21/2004 | DE10328634B3 Production of a buried strap contact for a storage capacitor of a storage cell comprises back etching the inner electrode layer in a trench, removing the exposed insulating layer from the trench wall and further processing |
| 10/21/2004 | DE10314595A1 Production of transistors of different conductivity type in the surface of a semiconductor substrate used as DRAM component comprises forming a gate electrode layer of first conductivity type doping on the substrate, and further processing |
| 10/21/2004 | DE10314151A1 Semiconductor device, has protection structure which allows determination of parasitic current, and generates compensating current for well region accordingly |
| 10/21/2004 | DE10314150A1 Detecting environmental or process parameters in process-wafer manufacturing environment for semiconductor integrated circuit manufacture, by exposing wafer comprising sensors to manufacturing environment |
| 10/21/2004 | DE102004015282A1 Halbleitervorrichtung und Verfahren zur Herstellung derselben A semiconductor device and method of manufacturing the same |
| 10/21/2004 | DE102004014940A1 Halbleitervorrichtung, Verfahren zum Aufwachsen eines Nidridhalbleiters und Verfahren zur Herstellung einer Halbleitervorrichtung A semiconductor device, method for growing a Nidridhalbleiters and method of manufacturing a semiconductor device |
| 10/21/2004 | DE102004014917A1 Halbleitervorrichtung und Verfahren eines Drahtkontaktierens für eine Halbleitervorrichtung A semiconductor device and method of a wire for contacting a semiconductor device |
| 10/21/2004 | DE102004014721A1 Nanosilizium-Leichtelement und Verfahren zu seiner Herstellung Nano-silicon light element and process for its preparation |
| 10/21/2004 | DE102004014229A1 Verfahren zum Ätzen eines Halbleitersubstrats A method of etching a semiconductor substrate |
| 10/21/2004 | DE102004013926A1 Verfahren zum Ausbilden eines selbstjustierenden Buried-Strap-Kontakts unter Verwendung von dotiertem HDP-Oxid A method for forming a self-aligned buried strap contact using doped HDP oxide |
| 10/21/2004 | DE102004013626A1 Verfahren und Vorrichtung zur Abscheidung dünner Schichten Method and device for depositing thin layers |
| 10/21/2004 | DE102004012012A1 Verfahren zum Teilen eines Halbleiterwafers A method for dividing a semiconductor wafer |
| 10/21/2004 | DE10024634B4 Elektronenstrahl-Belichtungsvorrichtung und -verfahren Electron beam exposure apparatus and method |
| 10/21/2004 | CA2517511A1 Potassium hydrogen peroxymonosulfate solutions |
| 10/20/2004 | EP1469526A2 Thin film transistor and method for fabricating the same |
| 10/20/2004 | EP1469525A2 MOSFET with Schottky source and drain contacts and method of manufacturing the same |
| 10/20/2004 | EP1469513A2 Low cost thermal management device or heat sink manufactured from conductive loaded resin-based materials |
| 10/20/2004 | EP1469512A1 Module device |
| 10/20/2004 | EP1469511A2 Method of fabricating a magneto-resistive random access memory (MRAM) device |
| 10/20/2004 | EP1469510A2 Method for fabricating a gate structure of a field effect transistor |
| 10/20/2004 | EP1469509A1 Method and device for processing substrate, and apparatus for manufacturing semiconductor device |
| 10/20/2004 | EP1469508A1 Boat for heat treatment and vertical heat treatment equipment |
| 10/20/2004 | EP1469507A2 D/A converter circuit, semiconductor device incorporating the D/A converter circuit, and manufacturing method of these |
| 10/20/2004 | EP1469480A2 Non-volatile semiconductor memory device, electronic card using the same and electronic apparatus |
| 10/20/2004 | EP1469416A2 Electrostatic capacitance detection device |
| 10/20/2004 | EP1469354A1 Coating material for pattern fineness enhancement and method of forming fine pattern with the same |
| 10/20/2004 | EP1469352A2 Illuminator controlled tone reversal printing |
| 10/20/2004 | EP1469351A1 Lithographic apparatus and device manufacturing method |
| 10/20/2004 | EP1469350A2 Exposure apparatus and aberration correction method |
| 10/20/2004 | EP1469347A1 Lithographic apparatus and device manufacturing method |
| 10/20/2004 | EP1469345A2 Complementary division condition determining method and program and complementary division method |
| 10/20/2004 | EP1469319A1 Flip-chip mounting method and mounting apparatus of electronic part |
| 10/20/2004 | EP1469015A1 Amorphous perfluorinated polymers |
| 10/20/2004 | EP1468776A2 Microelectronics spring contact elements |
| 10/20/2004 | EP1468774A1 Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device |
| 10/20/2004 | EP1468752A2 Cleaning sheet and method of cleaning a substrate |
| 10/20/2004 | EP1468454A1 Semiconductor arrangement comprising a pn-transition and method for producing a semiconductor arrangement |
| 10/20/2004 | EP1468453A2 High voltage power mosfet having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source |
| 10/20/2004 | EP1468452A1 High voltage power mosfet includes doped columns |
| 10/20/2004 | EP1468451A1 Body-tied silicon on insulator semiconductor device and method therefor |
| 10/20/2004 | EP1468450A1 Wide bandgap bipolar transistors |
| 10/20/2004 | EP1468447A2 Adaptive threshold voltage control with positive body bias for n and p-channel transistors |
| 10/20/2004 | EP1468446A1 Method for production of dielectric layers using polyfunctional carbosilanes |
| 10/20/2004 | EP1468445A2 Optimized method of transfer of a thin layer of silicon carbide to a receiving substrate |
| 10/20/2004 | EP1468444A2 Process for preparation of separable semiconductor assemblies, particularly to form substrates for electronics, optoelectronics and optics |
| 10/20/2004 | EP1468443A1 Apparatus incorporating small-feature-size and large-feature-size components and method for making same |
| 10/20/2004 | EP1468442A2 Method for the production of a capacitor in a dielectric layer |
| 10/20/2004 | EP1468441A1 Simultaneous formation of deep trench capacitor and resistor |
| 10/20/2004 | EP1468440A2 FIELD EFFECT TRANSISTOR HAVING SOURCE AND/OR DRAIN FORMING SCHOTTKY OR SCHOTTKY−LIKE CONTACT WITH STRAINED SEMICONDUCTOR SUBSTRATE |
| 10/20/2004 | EP1468439A2 Method for fabricating a high voltage power mosfet having a voltage sustaining region that includes doped columns formed by rapid diffusion |
| 10/20/2004 | EP1468433A1 Coil on a semiconductor substrate and method for production thereof |
| 10/20/2004 | EP1468335A1 A cleaning agent composition for a positive or a negative photoresist |
| 10/20/2004 | EP1468333A2 Method for constructing an optical beam guide system in a contamination-free atmosphere and universal optical module for said construction |
| 10/20/2004 | EP1468233A1 Resistance furnace |
| 10/20/2004 | EP1468128A2 Method for manufacturing a free-standing substrate made of monocrystalline semi-conductor material |
| 10/20/2004 | EP1468057A1 Tungsten polishing solution |
| 10/20/2004 | EP1468048A1 Apparatus and method for cleaning test probes |
| 10/20/2004 | EP1467915A2 Apparatus and method for monitoring environment within a container |
| 10/20/2004 | EP1467840A1 Process control in electro-chemical mechanical polishing |
| 10/20/2004 | EP1467839A2 Method and apparatus for applying downward force on wafer during cmp |
| 10/20/2004 | EP1446698A4 An interferometer system for a semiconductor exposure system |
| 10/20/2004 | EP1344222B1 Method for reading out or in a status from or to a ferroelectrical transistor of a memory cell and memory matrix |
| 10/20/2004 | EP1274875A4 Method and apparatus for providing uniform gas delivery to substrates in cvd and pecvd processes |
| 10/20/2004 | EP1268734B1 Fluorinated solvent compositions containing ozone |
| 10/20/2004 | EP1262002B1 Quantum well intermixing |
| 10/20/2004 | EP1135236B1 Reverse linear polisher with loadable housing |