Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2004
10/26/2004US6809370 High-k gate dielectric with uniform nitrogen profile and methods for making the same
10/26/2004US6809368 TTO nitride liner for improved collar protection and TTO reliability
10/26/2004US6809367 Device for interconnecting, in three dimensions, electronic components
10/26/2004US6809366 Non-volatile semiconductor memory device
10/26/2004US6809365 Nonvolatile semiconductor memory
10/26/2004US6809364 Semiconductor integrated circuit device and a method of manufacture thereof
10/26/2004US6809363 Storage electrode of a semiconductor memory device
10/26/2004US6809361 Magnetic memory unit and magnetic memory array
10/26/2004US6809360 Semiconductor device and method of manufacturing the same
10/26/2004US6809353 Method for fabricating a self-aligned bipolar transistor with planarizing layer and related structure
10/26/2004US6809352 Palladium silicide (PdSi) schottky electrode for gallium nitride semiconductor devices
10/26/2004US6809351 Group III-V compound semiconductor crystal structure and method of epitaxial growth of the same as well as semiconductor device including the same
10/26/2004US6809349 Power semiconductor device
10/26/2004US6809344 Optical semiconductor device and method of fabricating the same
10/26/2004US6809339 Semiconductor device and method for manufacturing same
10/26/2004US6809337 Liquid crystal display devices having fill holes and electrical contacts on the back side of the die
10/26/2004US6809336 Semiconductor device comprising sense amplifier and manufacturing method thereof
10/26/2004US6809335 Thin film transistor array panel for liquid crystal display
10/26/2004US6809334 Semiconductor integrated circuit device, and method of manufacturing the same
10/26/2004US6809332 Electronic device and defect repair method thereof
10/26/2004US6809319 Electron beam writing equipment and electron beam writing method
10/26/2004US6809300 Temperature adjusting system in exposure apparatus
10/26/2004US6809299 Hot plate for semiconductor manufacture and testing
10/26/2004US6809155 Unsaturated compounds containing silane, electron donor and electron acceptor functionality
10/26/2004US6809044 Method for making a thin film using pressurization
10/26/2004US6809043 Multi-stage, low deposition rate PECVD oxide
10/26/2004US6809041 Low dielectric constant films derived by sol-gel processing of a hyperbranched polycarbosilane
10/26/2004US6809039 Method for forming a silicide layer
10/26/2004US6809038 Method of manufacturing semiconductor device
10/26/2004US6809037 Manufacturing method of semiconductor integrated circuit including simultaneous formation of via-hole reaching metal wiring and concave groove in interlayer film and semiconductor integrated circuit manufactured with the manufacturing method
10/26/2004US6809036 Dry silylation plasma etch process
10/26/2004US6809035 Hot plate annealing
10/26/2004US6809034 Method of etching metallic thin film on thin film resistor
10/26/2004US6809033 Innovative method of hard mask removal
10/26/2004US6809032 Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques
10/26/2004US6809031 Method for manufacturing a reclaimable test pattern wafer for CMP applications
10/26/2004US6809030 Method and structure for controlling the interface roughness of cobalt disilicide
10/26/2004US6809029 Semiconductor production device and production method for semiconductor device
10/26/2004US6809028 Chemistry for liner removal in a dual damascene process
10/26/2004US6809027 Self-aligned borderless contacts
10/26/2004US6809026 Selective deposition of a barrier layer on a metal film
10/26/2004US6809024 Method to fabricate high-performance NPN transistors in a BiCMOS process
10/26/2004US6809023 Method of manufacturing semiconductor device having uniform crystal grains in a crystalline semiconductor film
10/26/2004US6809022 Method for forming dielectric layers
10/26/2004US6809021 Wiring line and manufacture process thereof and semiconductor device and manufacturing process thereof
10/26/2004US6809020 Method for forming bump, semiconductor device and method for making the same, circuit board, and electronic device
10/26/2004US6809019 Method for producing a semiconductor structure, and use of the method
10/26/2004US6809018 Dual salicides for integrated circuits
10/26/2004US6809017 Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication
10/26/2004US6809016 Diffusion stop implants to suppress as punch-through in SiGe
10/26/2004US6809015 Method for heat treatment of silicon wafers and silicon wafer
10/26/2004US6809014 Method to fabricate surface p-channel CMOS
10/26/2004US6809012 Method of making a thin film transistor using laser annealing
10/26/2004US6809011 Adjusting of defect profiles in crystal or crystalline-like structures
10/26/2004US6809009 Method of producing a thin layer of semiconductor material
10/26/2004US6809008 Integrated photosensor for CMOS imagers
10/26/2004US6809006 Method of semiconductor device isolation
10/26/2004US6809005 Method to fill deep trench structures with void-free polysilicon or silicon
10/26/2004US6809004 Method of forming a shallow trench isolation
10/26/2004US6809003 Bi-directional epitaxial doping technique
10/26/2004US6809002 Method of manufacturing an alignment mark
10/26/2004US6809001 Semiconductor device and method for producing a semiconductor device
10/26/2004US6809000 Semiconductor device and method for fabricating the same
10/26/2004US6808999 Method of making a bipolar transistor having a reduced base transit time
10/26/2004US6808998 Method for elimination of parasitic bipolar action in silicon on insulator (SOI) dynamic logic circuits
10/26/2004US6808997 Complementary junction-narrowing implants for ultra-shallow junctions
10/26/2004US6808996 Method for protecting gate edges from charge gain/loss in semiconductor device
10/26/2004US6808995 Semiconductor device with minimal short-channel effects and low bit-line resistance
10/26/2004US6808994 Transistor structures and processes for forming same
10/26/2004US6808993 Ultra-thin gate dielectrics
10/26/2004US6808992 Method and system for tailoring core and periphery cells in a nonvolatile memory
10/26/2004US6808991 Method for forming twin bit cell flash memory
10/26/2004US6808990 Random access memory cell and method for fabricating same
10/26/2004US6808989 Self-aligned floating gate flash cell system and method
10/26/2004US6808988 Method for forming isolation in flash memory wafer
10/26/2004US6808987 Vertical nitride read-only memory cell and method for forming the same
10/26/2004US6808986 Method of forming nanocrystals in a memory device
10/26/2004US6808985 Products derived from embedded flash/EEPROM products
10/26/2004US6808984 Method for forming a contact opening
10/26/2004US6808983 Silicon nanocrystal capacitor and process for forming same
10/26/2004US6808982 Method of reducing electrical shorts from the bit line to the cell plate
10/26/2004US6808981 Method for fabricating 6F2 trench DRAM cell with double-gated vertical MOSFET and self-aligned STI
10/26/2004US6808980 Method of process simplification and eliminating topography concerns for the creation of advanced 1T-RAM devices
10/26/2004US6808979 Method for forming vertical transistor and trench capacitor
10/26/2004US6808978 Method for fabricating metal electrode with atomic layer deposition (ALD) in semiconductor device
10/26/2004US6808977 Method of manufacturing semiconductor device
10/26/2004US6808976 Device and method for protecting against oxidation of a conductive layer in said device
10/26/2004US6808975 Method for forming a self-aligned contact hole in a semiconductor device
10/26/2004US6808974 CMOS structure with maximized polysilicon gate activation and a method for selectively maximizing doping activation in gate, extension, and source/drain regions
10/26/2004US6808973 Manufacturing method of semiconductor device
10/26/2004US6808972 Method of processing solution on a substrate
10/26/2004US6808971 High performance three-dimensional TFT-based CMOS inverters, and computer systems utilizing such novel CMOS inverters
10/26/2004US6808970 Semiconductor device having an improved strained surface layer and method of forming a strained surface layer in a semiconductor device
10/26/2004US6808969 Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device
10/26/2004US6808968 Method of manufacturing a semiconductor device
10/26/2004US6808967 Method for producing a buried layer of material in another material
10/26/2004US6808965 Methodology for fabricating a thin film transistor, including an LDD region, from amorphous semiconductor film deposited at 530° C. or less using low pressure chemical vapor deposition
10/26/2004US6808964 Method of manufacturing a semiconductor device and liquid crystal display
10/26/2004US6808963 Process for fabricating a thin-film device having inclined sides
10/26/2004US6808960 Method for making and packaging image sensor die using protective coating