Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2004
12/15/2004EP1487010A2 SOI substrate, semiconductor substrate, and method for production thereof
12/15/2004EP1487009A1 Cassette for storing multiple sheets of semiconductor wafers
12/15/2004EP1487008A2 Method for forming a Si film, si film and solar battery
12/15/2004EP1487007A2 Semiconductor substrate, semiconductor device, and method of manufacturing the same
12/15/2004EP1487006A1 Device and method for heat treatment
12/15/2004EP1487005A1 Stencil mask for ion implantation
12/15/2004EP1486984A1 Data storage circuit, data write method in the data storage circuit, and data storage device
12/15/2004EP1486983A1 Magnetic storage device using ferromagnetic tunnel junction element
12/15/2004EP1486967A2 Thermal-assisted magnetic memory storage device
12/15/2004EP1486952A2 Magnetic memory storage device
12/15/2004EP1486830A2 Device manufacturing method
12/15/2004EP1486829A2 Stage system, exposure apparatus, and device manufacturing method
12/15/2004EP1486827A2 Lithographic apparatus and device manufacturing method
12/15/2004EP1486824A1 A movable stage system for in a lithographic projection apparatus, lithographic projection apparatus and device manufacturing method
12/15/2004EP1486790A1 Mounting method and mounting apparatus of electronic part
12/15/2004EP1486707A1 Gas supply system, valve assembly and method of forming reactant pulses by operating a valve assembly
12/15/2004EP1486590A1 Multi-layer structure, and actuator element, capacitive element and filter element using the same
12/15/2004EP1485956A1 Process of producing multicrystalline silicon substrate and solar cell
12/15/2004EP1485954A2 Monolithic integrated soi circuit with capacitor
12/15/2004EP1485953A1 Field effect transistor
12/15/2004EP1485952A1 Complementary schottky junction transistors and methods of forming the same
12/15/2004EP1485950A2 Correlation of end-of-line data mining with process tool data mining
12/15/2004EP1485949A2 Novel planarization method for multi-layer lithography processing
12/15/2004EP1485948A1 Integrated circuit device and method therefor
12/15/2004EP1485947A1 Thermally induced reflectivity switch for laser thermal processing
12/15/2004EP1485946A1 Substrate support
12/15/2004EP1485945A2 Power semiconductor device having a voltage sustaining region that includes doped columns formed with a single ion implantation step
12/15/2004EP1485944A1 Laser assisted direct imprint lithography
12/15/2004EP1485942A2 POWER SiC DEVICES HAVING RAISED GUARD RINGS
12/15/2004EP1485941A2 High k dielectric film and method for making
12/15/2004EP1485940A2 Silicon carbide bipolar junction transistor with overgrown base region
12/15/2004EP1485937A2 Use of light emitting chemical reactions for control of semiconductor production processes
12/15/2004EP1485872A1 A morphological inspection method based on skeletonization
12/15/2004EP1485763A1 Method and apparatus for printing large data flows
12/15/2004EP1485762A2 Device for manipulation of the angular position of an object relative to a fixed structure
12/15/2004EP1485760A1 Refractive projection objective for immersion lithography
12/15/2004EP1485759A2 Grating element for filtering wavelengths = 100nm
12/15/2004EP1485757A1 METHOD OF PRODUCING AN ETCH−RESISTANT POLYMER STRUCTURE USING ELECTRON BEAM LITHOGRAPHY
12/15/2004EP1485756A2 Method of forming a pattern of sub-micron broad features
12/15/2004EP1485724A1 Scatterometry structure with embedded ring oscillator, and methods of using same
12/15/2004EP1485518A1 Device for depositing thin layers on a substrate
12/15/2004EP1485516A1 Method for formation of titanium nitride films
12/15/2004EP1485440A1 Free radical-forming activator attached to solid and used to enhance cmp formulations
12/15/2004EP1485439A1 Improved chemical-mechanical polishing slurry for polishing of copper or silver films
12/15/2004EP1421610A4 Slurry composition for use in chemical mechanical polishing of metal wiring
12/15/2004EP1396015A4 Two-mask trench schottky diode
12/15/2004EP1301928B1 Mram architectures for increased write selectivity
12/15/2004EP1218927B1 A method and system for reducing photo-assisted corrosion in wafers during cleaning processes
12/15/2004EP1134034B1 Method of forming paste
12/15/2004EP1105549A4 High throughput organometallic vapor phase epitaxy (omvpe) apparatus
12/15/2004EP1097257B1 Methods for etching an aluminum-containing layer
12/15/2004EP1092338B1 Assembly of an electronic component with spring packaging
12/15/2004EP0988407B9 Method for producing coated workpieces, which are coated with an epitactic layer
12/15/2004EP0980305B1 Apparatus for molding plastic packages
12/15/2004EP0891634B1 A semiconductor processing method for forming a contact pedestal for a storage node of a capacitor in integrated circuitry
12/15/2004CN2664028Y Shading device of working plate in exposure procedure
12/15/2004CN2663439Y Furnace tube apparatus capable of improving homogeneity of thin oxide layer
12/15/2004CN1555596A Method of manufacturing optical devices and related improvements
12/15/2004CN1555580A Semiconductor device and production method therefor
12/15/2004CN1555579A Transistor having high dielectric constant gate insulating layer and source and drain forming schottky contact with substrate
12/15/2004CN1555575A Layered dielectric nanoporous materials and methods of producing same
12/15/2004CN1555574A Method for packaging a microelectronic device using on-die bond pad expansion
12/15/2004CN1555573A Microelectronic package having an integrated heat sink and build-up layers
12/15/2004CN1555571A Method for producing organic semiconductor transistor having organic polymeric gate insulation layer
12/15/2004CN1555569A Substrate support and method of fabricating the same
12/15/2004CN1555568A Method and apparatus for producing uniform process rates
12/15/2004CN1555563A Conductive materials with electrical stability for use in electronics devices
12/15/2004CN1555559A Selective operation of a multi-state non-volatile memory system in a binary mode
12/15/2004CN1555510A Etching method and composition for forming etching protective layer
12/15/2004CN1555506A Thin film transistor array panel for liquid crystal display
12/15/2004CN1555502A Retardation element made from cubic crystal and an optical system therewith
12/15/2004CN1555490A Method and system for designing a probe card
12/15/2004CN1555486A Method of examining a wafer of semiconductor material by means of x-rays
12/15/2004CN1555424A Process for controlling thin film uniformity and products produced thereby
12/15/2004CN1555409A Improved post plasma ashing wafer cleaning formulation
12/15/2004CN1555405A Cationic polymerizable adhesive composition and anisotropically electroconductive adhesive composition
12/15/2004CN1555342A Electronic device comprising a mesoporous silica layer and composition for preparing the mesoporous silica layer
12/15/2004CN1555331A Protective shipper
12/15/2004CN1555330A Tray for semiconductors
12/15/2004CN1555098A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
12/15/2004CN1555097A Quick algorithm in planar charge coupling device array super resolution imaging technology
12/15/2004CN1555096A 半导体器件 Semiconductor devices
12/15/2004CN1555094A Process for using different thickness of silicide at different area in chip circuit
12/15/2004CN1555093A Double Damascus structure realizing method for avoiding use of intermediate etched barrier
12/15/2004CN1555092A Method for increasing electromigration resisting property of copper wiring in subseguent step
12/15/2004CN1555091A Tree interlinking circuit analogue method based on transmission line model
12/15/2004CN1555090A Method for producing integrated circuit sample section using laser
12/15/2004CN1555089A Quick heat processing device for semiconductor wafer and using method
12/15/2004CN1555088A Nano double phase composite structure Zr-Si-N diffusion barrier material and its preparing process
12/15/2004CN1555087A Method for eliminating grid etching lateral notch
12/15/2004CN1555086A Method for preparing high power semiconductor device by phosphorus containing silicon dioxide latex source expansion
12/15/2004CN1555085A Substrate processing system for performing exposure process in gas atmosphere
12/15/2004CN1555084A Substrate processing system for performing exposure process in gas atmosphere
12/15/2004CN1555083A Substrate processing system for performing exposure process in gas atmosphere
12/15/2004CN1555082A Laser apparatus, laser irradiation method and semiconductor device and its producing method
12/15/2004CN1555064A Nonvolatile semiconductor memory device and nonvolatile semiconductor memory system
12/15/2004CN1554989A Substrate processing system for performing exposure process in gas atmosphere
12/15/2004CN1554988A Exposure method for once scanning two common exposure areas
12/15/2004CN1554987A Printing and carving process for preparing pattern of minimum size in nano level
12/15/2004CN1554975A Active matrix substrate ,display device and manufacturing method thereof