Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2004
12/23/2004US20040256353 Method and system for deep trench silicon etch
12/23/2004US20040256352 Embossed mask lithography
12/23/2004US20040256351 Integration of ALD/CVD barriers with porous low k materials
12/23/2004US20040256285 Reduced movement wafer box
12/23/2004US20040256284 Cassette for storing a plurality of semiconductor wafers
12/23/2004US20040256271 Container for the storage and transport of sensitive plate-like objects
12/23/2004US20040256245 Moveable nozzle moves from a first to apply a stream of electrolyte to a first portion of the metal layer to a second position to apply the stream of electrolyte to a second portion when the wafer is rotated by the wafer chuck; shorter polishing time and uses less quantity of slurry
12/23/2004US20040256244 Selective electrochemical etching method for two-dimensional dopant profiling
12/23/2004US20040256238 Capable of increasing the in-plane uniformity of film thickness by making a more uniform electric field distribution over the entire surface to be processed, even if the substrate has a large area, and more uniformly controlling the speed
12/23/2004US20040256237 Ion exchanger between a pair of electrodes and a section for supplying a liquid to the ion exchanger; can flatten or clean a workpiece, especially a semiconductor wafer, while eliminating or reducing a load upon a CMP treatment
12/23/2004US20040256224 First electrode wafer of an interlayer dielectric having a feature, an underlayer on the layer, a barrier layer on the underlayer and a conductive layer in the feature and a second electrode; both electrodes immersed in an electrolyte and have a potential difference between them
12/23/2004US20040256217 Coils for generating a plasma and for sputtering
12/23/2004US20040256094 Baking system having a heat pipe
12/23/2004US20040256047 Method for correcting surface shape
12/23/2004US20040255985 Versatile system for wafer edge remediation
12/23/2004US20040255984 Liquid-assisted cryogenic cleaning
12/23/2004US20040255979 Load lock system for supercritical fluid cleaning
12/23/2004US20040255978 Automated dense phase fluid cleaning system
12/23/2004US20040255973 Method for cleaning semiconductor wafers
12/23/2004US20040255868 Plasma etch resistant coating and process
12/23/2004US20040255864 ICP antenna and plasma generating apparatus using the same
12/23/2004US20040255863 Plasma process apparatus
12/23/2004US20040255862 Reactor for producing reactive intermediates for low dielectric constant polymer thin films
12/23/2004US20040255861 Chamber for uniform substrate heating
12/23/2004US20040255860 Rapid thermal processing apparatus and methods
12/23/2004US20040255858 Gas valve assembly and apparatus using the same
12/23/2004US20040255856 Method and device for depositing a plurality of layers on a substrate
12/23/2004US20040255854 Cvd apparatus and method of cleaning the cvd apparatus
12/23/2004US20040255848 Coating apparatus, thin film forming method, thin film forming apparatus, and semiconductor device manufacturing method, electro-optic device and electronic instrument
12/23/2004US20040255846 Method for fabricating a carrier substrate
12/23/2004US20040255650 Capillary rise technique for the assessment of the wettability of particulate surfaces
12/23/2004US20040255521 Polishing pad of CMP equipment for polishing a semiconductor wafer
12/23/2004US20040255485 Vacuum processing apparatus and substrate transfer method
12/23/2004US20040255458 Programmed material consolidation methods for fabricating semiconductor device components and conductive features thereof
12/23/2004US20040255456 Method for manufacturing a chip carrier
12/23/2004US20040255451 Broken die detect sensor
12/23/2004US20040255442 Methods and apparatus for processing workpieces
12/23/2004DE10359276A1 Halbleitervorrichtung mit Kondensator und Herstellungsverfahren für diese A semiconductor device having capacitor and production method for this
12/23/2004DE10324100A1 Production process for a robust semiconductor element forms p and n regions and diffuses heavy metal atoms into an edge region
12/23/2004DE10324081A1 DRAM memory storing charge at high density, has insulated nanotubes contacting electrode layer, with intervening filler in capacitor-forming configuration
12/23/2004DE10323394A1 Connecting semiconductor chip or wafer sections, provides contact pin in recess between opposite faces which are pressed together to make local contact
12/23/2004DE10323139A1 Verfahren und Vorrichtung zum Hochauflösenden Fehlerfinden und Klassifizieren Method and apparatus for high-resolution fault finding and classifying
12/23/2004DE102004024612A1 Spannungserzeugungsschaltung Voltage generating circuit
12/23/2004DE102004022376A1 Halbleitervorrichtung, Verfahren zum Herstellen einer Halbleitervorrichtung und Verfahren zum Auswerten des Herstellungsprozesses für eine Halbleitervorrichtung A semiconductor device, method for manufacturing a semiconductor device and method for evaluating the manufacturing process for a semiconductor device
12/23/2004DE102004021157A1 Thin film transistor array substrate for liquid crystal display device, comprises thin film transistor including gate insulating layer and ohmic contact layer, where gate insulating layer includes gate insulating pattern
12/23/2004DE102004017412A1 Elektrische Quantifizierung einer Verkürzung eines Leitbahnendes Electrical quantification of shortening a Leitbahnendes
12/23/2004DE102004002901A1 Verfahren zur Fehleranalyse einer Halbleiterbaugruppe Method for fault analysis of a semiconductor package
12/23/2004CA2513516A1 Field effect transistor
12/23/2004CA2509257A1 Sacrificial template method of fabricating a nanotube
12/22/2004EP1489839A2 Semiconductor integrated circuit apparatus
12/22/2004EP1489666A1 Compound thin-film solar cell and process for producing the same
12/22/2004EP1489663A2 Semiconductor device allowing modulation of a gain coefficient and a logic circuit provided with the same
12/22/2004EP1489662A2 Bipolar junction transistor and method of manufacturing the same
12/22/2004EP1489661A2 Bipolar junction transistor and methods of manufacturing the same
12/22/2004EP1489660A1 Magnetic memory device and manufacturing method thereof
12/22/2004EP1489658A2 Method for manufacturing semiconductor package
12/22/2004EP1489657A1 Semiconductor chip mounting board, its manufacturing method, and semiconductor module
12/22/2004EP1489656A2 Method of fabrication of an unbreakable disc-shaped object and corresponding semiconductor circuit
12/22/2004EP1489655A1 Pick and place assembly for transporting a film
12/22/2004EP1489654A1 LnCuO(S, Se, Te) MONOCRYSTALLINE THIN FILM, ITS MANUFACTURING METHOD, AND OPTICAL DEVICE OR ELECTRONIC DEVICE USING THE MONOCRYSTALLINE THIN FILM
12/22/2004EP1489653A2 Method for fabricating a metallic oxide of high dielectric constant, metallic oxide of high dielectric constant, gate insulating film and semiconductor element
12/22/2004EP1489652A2 Method of modifying a surface of a semiconductor wafer
12/22/2004EP1489650A1 Polishing composition and method for forming wiring structure
12/22/2004EP1489649A1 Double side polishing device for wafer and double side polishing method
12/22/2004EP1489648A1 Process for selective formation of silicide on a semiconductor wafer
12/22/2004EP1489647A2 Method of manufacturing a silicide
12/22/2004EP1489646A1 Cvd apparatus and method of cleaning the cvd apparatus
12/22/2004EP1489645A1 Cvd apparatus and method of cleaning the cvd apparatus
12/22/2004EP1489643A2 Method and apparatus for ionized physical vapor deposition
12/22/2004EP1489632A2 Adjustable resistor
12/22/2004EP1489464A2 Method for reducing pattern dimension in a photoresist layer
12/22/2004EP1489463A2 Method for reducing pattern dimension in a photoresist layer
12/22/2004EP1489462A2 Immersion photolithography system comprising microchannel nozzles
12/22/2004EP1489459A1 Positive resist composition and method of forming pattern using the same
12/22/2004EP1489449A1 Spatial light modulator
12/22/2004EP1489428A2 Flexible membrane probe and method of use thereof
12/22/2004EP1489204A1 Electrochemical machine and electrochemical machining method
12/22/2004EP1489203A1 ELECTROLYTIC COPPER PLATING METHOD, PHOSPHORUS−CONTAINING ANODE FOR ELECTROLYTIC COPPER PLATING, AND SEMICONDUCTOR WAFER PLATED USING THEM AND HAVING FEW PARTICLES ADHERING TO IT
12/22/2004EP1489197A1 Method of manufacturing semiconductor device
12/22/2004EP1488670A1 Method and apparatus for encapsulating semiconductor device
12/22/2004EP1488524A2 Floating-gate analog circuit
12/22/2004EP1488483A1 Tunable cavity resonator and method of fabricating same
12/22/2004EP1488465A1 Semi-conductor structure comprising a switch element and an edge element
12/22/2004EP1488464A1 Method for producing an soi field effect transistor and corresponding field effect transistor
12/22/2004EP1488463A1 Biased, triple-well fully depleted soi structure, and various methods of making and operating same
12/22/2004EP1488462A2 Strained fin fets structure and method
12/22/2004EP1488461A1 Semiconductor device having a retrograde dopant profile in a channel region and method for fabricating the same
12/22/2004EP1488460A1 Doped group iii-v nitride materials, and microelectronic devices and device precursor structures comprising same
12/22/2004EP1488456A1 Active matrix display devices, and their manufacture
12/22/2004EP1488454A2 Pixel current driver for organic light emitting diode displays
12/22/2004EP1488453A1 Ion implantation of silicon oxide liner to prevent dopant out-diffusion from source/drain extensions
12/22/2004EP1488452A2 A method for making nanoscale wires and gaps for switches and transistors
12/22/2004EP1488451A1 Methods for manufacturing compound semiconductor and compound insulator using chemical reaction and diffusion by heating, compound semiconductor and compound insulator manufactured using the method, and photocell, electronic circuit, transistor, and memory using the same
12/22/2004EP1488450A2 Methods of treating a silicon carbide substrate for improved epitaxial deposition and resulting structures and devices
12/22/2004EP1488449A2 Component mounting method, component mounting apparatus, and ultrasonic bonding head
12/22/2004EP1488448A2 Field-assisted fusion bonding
12/22/2004EP1488443A1 Device for confinement of a plasma within a volume
12/22/2004EP1488427A1 A volumetric data storage apparatus comprising a plurality of stacked matrix-addressable memory devices
12/22/2004EP1488426A1 Method for producing a reference layer and an mram memory cell provided with said type of reference layer
12/22/2004EP1488286A1 Ph buffered compositions for cleaning semiconductor substrates