H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2004
12/29/2004	WO2004101181A3 System and method for cleaning of workpieces using supercritical carbon dioxide
12/29/2004	WO2004097929A3 Method and apparatus for reduction of defects in wet processed layers
12/29/2004	WO2004097859A3 Bidirectional thermal trimming of electrical resistance
12/29/2004	WO2004092865A3 Selection method, exposure method, selection device, exposure device, and device manufacturing method
12/29/2004	WO2004087561A3 Novel sacrificial layers for use in fabrications of microelectromechanical devices
12/29/2004	WO2004086460A3 Method and systems for single- or multi-period edge definition lithography
12/29/2004	WO2004084301B1 Split fin heat sink
12/29/2004	WO2004082008A8 Cvd apparatus and method for cleaning cvd apparatus
12/29/2004	WO2004071938A3 Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency
12/29/2004	WO2004071153A8 Method of forming sub-micron-size structures over a substrate
12/29/2004	WO2004063815A3 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field
12/29/2004	WO2004055886A3 Manipulation of objects with fluid droplets
12/29/2004	WO2004030426A3 Improved deposition shield in a plasma processing system,and methods of manufacture of such shield
12/29/2004	WO2004025708A3 Support plate for semiconductor components
12/29/2004	WO2004017368A3 Sidewall smoothing in high aspect ratio/deep etching using a discreet gas switching method
12/29/2004	WO2003103015A3 Reconfigurable integrated circuit
12/29/2004	WO2003084043A3 Device for handling flat panels in a vacuum
12/29/2004	WO2003038871A9 Non-contacting deposition control of chalcopyrite thin films
12/29/2004	WO2002022915A3 Removable modular cell for electro-chemical plating
12/29/2004	EP1492395A2 Laser-produced plasma EUV light source with isolated plasma
12/29/2004	EP1492394A2 Laser-produced plasma EUV light source with pre-pulse enhancement
12/29/2004	EP1492388A2 Active matrix electroluminescence device and method for fabricating the same
12/29/2004	EP1492310A2 Industrial equipment network
12/29/2004	EP1492220A2 IGBT-module
12/29/2004	EP1492172A1 Microelectronic components and electronic networks comprising DNA
12/29/2004	EP1492166A1 Semiconductor device, package structure thereof, and method for manufacturing the semiconductor device
12/29/2004	EP1492165A2 Electronic component module
12/29/2004	EP1492163A2 Substrate processing method and apparatus
12/29/2004	EP1492162A2 A method of forming a nickel silicide layer
12/29/2004	EP1492161A1 Method for forming underlying insulation film
12/29/2004	EP1492160A1 Vaporizer, various devices using the same, and vaporizing method
12/29/2004	EP1492159A1 Method of depositing cvd thin film
12/29/2004	EP1492158A2 GaN substrate and method of fabricating the same, nitride semiconductor device and method of fabricating the same
12/29/2004	EP1492157A1 Manufacturing apparatus
12/29/2004	EP1492156A1 Method and pick and place system for mounting flipchips
12/29/2004	EP1492154A2 Coil for plasma generating source
12/29/2004	EP1492153A2 Method and system for monitoring an etch process
12/29/2004	EP1492124A2 Three dimensional ferroelectric memory device.
12/29/2004	EP1491967A1 Method and apparatus for positioning a substrate on a substrate table
12/29/2004	EP1491961A1 Lithographic apparatus and device manufacturing method
12/29/2004	EP1491958A2 Projection optical system for maskless lithography
12/29/2004	EP1491957A2 Immersion photolithography apparatus with projection system positioned below the substrate
12/29/2004	EP1491955A1 Lithographic projection apparatus and device manufacturing method
12/29/2004	EP1491954A1 Sealing assembly, lithographic projection apparatus, and device manufacturing method
12/29/2004	EP1491953A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
12/29/2004	EP1491949A2 Photomask, pattern formation method using photomask and mask data creation method for photomask
12/29/2004	EP1491880A1 Method and apparatus for inspecting semiconductor device
12/29/2004	EP1491655A2 Stabilizers to inhibit the polymerization of substituted cyclotetrasiloxane
12/29/2004	EP1491654A1 Proximity CVD deposition
12/29/2004	EP1491266A1 Cleaning member and cleaning method
12/29/2004	EP1491078A1 Multi-layer integrated circuit package
12/29/2004	EP1490915A1 Method of preparation of organic optoelectronic and electronic devices and devices thereby obtained
12/29/2004	EP1490909A1 Active matrix electroluminescent display devices, and their manufacture
12/29/2004	EP1490906A1 Beol process for cu metallizations free from al-wirebond pads
12/29/2004	EP1490905A1 Interconnection structure and methods
12/29/2004	EP1490903A2 Semiconductor device with components embedded in backside diamond layer
12/29/2004	EP1490902A1 Semiconductor device with a protective security coating and method of manufacturing the same
12/29/2004	EP1490901A1 Method for forming an improved metal silicide contact to a silicon-containing conductive region
12/29/2004	EP1490900A1 Semiconductor device formed over a multiple thickness buried oxide layer, and methods of making same
12/29/2004	EP1490899A1 Composition for removing sidewall residues
12/29/2004	EP1490898A2 System and method of broad band optical end point detection for film change indication
12/29/2004	EP1490897A1 Tantalum barrier removal solution
12/29/2004	EP1490896A1 Method of forming nanocrystals
12/29/2004	EP1490895A1 Evaporation source for deposition process and insulation fixing plate, and heating wire winding plate and method for fixing heating wire
12/29/2004	EP1490894A1 Method for processing electrical components, especially semiconductor chips, and device for carrying out the method
12/29/2004	EP1490893A1 Transition flow treatment process and apparatus
12/29/2004	EP1490889A2 Technique for writing with a raster scanned beam
12/29/2004	EP1490878A1 In-pixel memory for display devices
12/29/2004	EP1490877A2 Synthetic-ferrimagnet sense-layer for high density mram applications
12/29/2004	EP1490761A2 Graphical user interface (gui) for a semiconductor processing system
12/29/2004	EP1490733A1 Collector unit comprising a reflective element for lighting systems having a wavelength of less than 193 nm
12/29/2004	EP1490670A1 Dark field detection apparatus with traveling lens multi-beam scanner and a method thereof
12/29/2004	EP1490669A1 Wafer defect detection system with traveling lens multi-beam scanner
12/29/2004	EP1490529A1 Vapor deposition of silicon dioxide nanolaminates
12/29/2004	EP1490454A2 Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications
12/29/2004	EP1490293A2 Micro-electromechanical systems
12/29/2004	EP1433182A4 Selective operation of a multi-state non-volatile memory system in a binary mode
12/29/2004	EP1334408A4 Photoresist stripper/cleaner compositions containing aromatic acid inhibitors
12/29/2004	EP1305214B1 Device and method for the placement of components on transport belts
12/29/2004	EP1226000B1 An apparatus and method for laser welding of ribbons for electrical connections
12/29/2004	EP1133376B1 Laser system
12/29/2004	EP1074042A4 Synchronous multiplexed near zero overhead architecture for vacuum processes
12/29/2004	EP1073876B1 Measuring a diffracting structure, broadband, polarized, ellipsometric, and an underlying structure
12/29/2004	EP1010031A4 Illumination design for scanning microlithography systems
12/29/2004	CN1559088A Semiconductor device and method of manufacturing semiconductor device
12/29/2004	CN1559086A Method of manufacturing an integrated circuit, integrated circuit obtained in accordance with said method, wafer provided with an integrated circuit obtained in accordance with the method, and system
12/29/2004	CN1559085A Semiconductor device and method of manufacturing the device
12/29/2004	CN1559083A Production method for semiconductor device
12/29/2004	CN1559082A Chemical mechanical polishing pad with micro-holes
12/29/2004	CN1559081A Plating method and apparatus that creates a differential between additive disposed on a top surface and a cavity surface of a workpiece using an external influence
12/29/2004	CN1559079A Heating system and method of reactor for heating atmosphere
12/29/2004	CN1559077A Procedure and device for the production of a plasma
12/29/2004	CN1559023A Negative-acting aqueous photoresist composition
12/29/2004	CN1558932A Organic semiconductor material and organic semiconductor element employing the same
12/29/2004	CN1558449A Programmable digital-analog mixer member arrangement
12/29/2004	CN1558447A Method of making thin film transistor
12/29/2004	CN1558446A Method and apparatus for improving the electrical resistance of conductive paths
12/29/2004	CN1558422A Magnetoresistive random access memory with high selectivity
12/29/2004	CN1558293A Substrate processing system for performing exposure process in gas atmosphere
12/29/2004	CN1558292A Method for fabricating thin film transistors

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