H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2004
12/28/2004	US6835970 Semiconductor device having self-aligned contact pads and method for manufacturing the same
12/28/2004	US6835966 Method for manufacturing gallium nitride compound semiconductor
12/28/2004	US6835957 III-nitride light emitting device with p-type active layer
12/28/2004	US6835956 Nitride semiconductor device and manufacturing method thereof
12/28/2004	US6835954 Active matrix organic electroluminescent display device
12/28/2004	US6835948 Holographic or optically variable printing material and method for customized printing
12/28/2004	US6835944 Low vapor pressure, low debris solid target for EUV production
12/28/2004	US6835942 Dividing a processing pattern in a specified way; calculating a pattern area density for the first and second patterns in a unit region; and calculating a corrected dose for the processing pattern according to the pattern area density
12/28/2004	US6835937 Correcting method for correcting exposure data used for a charged particle beam exposure system
12/28/2004	US6835919 Uniform radial distribution of radicals emanating from a plasma source is improved; for chemical vapor deposition
12/28/2004	US6835917 Molding heater for heating semiconductor wafer and fabrication method thereof
12/28/2004	US6835916 Ceramic heater
12/28/2004	US6835914 For heating semiconductor wafers in thermal processing chambers; a spectral filter is included for filtering light being emitted by lamps used to heat the wafer at the wavelength at which the radiation sensing devices operate
12/28/2004	US6835898 Electrical contact structures formed by configuring a flexible wire to have a springable shape and overcoating the wire with at least one layer of a resilient conductive material, methods of mounting the contact structures to electronic components, and applications for employing the contact structures
12/28/2004	US6835675 Laser-irradiation method and laser-irradiation device
12/28/2004	US6835674 Methods for treating pluralities of discrete semiconductor substrates
12/28/2004	US6835673 Semiconductor impedance thermal film processing process
12/28/2004	US6835672 Selective oxidation for semiconductor device fabrication
12/28/2004	US6835671 Method of making an integrated circuit using an EUV mask formed by atomic layer deposition
12/28/2004	US6835670 Method of manufacturing semiconductor device
12/28/2004	US6835669 Film forming method, semiconductor device and semiconductor device manufacturing method
12/28/2004	US6835668 Copper post-etch cleaning process
12/28/2004	US6835667 Method for etching high-k films in solutions comprising dilute fluoride species
12/28/2004	US6835666 Applying sacificial coating to semiconductor substrate; lithography; hard masking enclosing pattern; transferring to undercoating
12/28/2004	US6835665 Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method
12/28/2004	US6835664 Methods of forming trenched isolation regions
12/28/2004	US6835663 Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity
12/28/2004	US6835662 Partially de-coupled core and periphery gate module process
12/28/2004	US6835661 Method for manufacturing optical element
12/28/2004	US6835660 Method of manufacturing semiconductor device having metal alloy interconnection that has excellent EM lifetime
12/28/2004	US6835659 Electrical coupling stack and processes for making same
12/28/2004	US6835658 Method of fabricating capacitor with hafnium
12/28/2004	US6835657 Method for recrystallizing metal in features of a semiconductor chip
12/28/2004	US6835656 Method of forming ultra-shallow junctions in a semiconductor wafer with a deposited silicon layer and in-situ anneal to reduce silicon consumption during salicidation
12/28/2004	US6835655 Method of implanting copper barrier material to improve electrical performance
12/28/2004	US6835654 Methods of forming an electrically conductive line
12/28/2004	US6835653 Method of forming adjacent holes on a semiconductor substrate
12/28/2004	US6835652 Method of fabricating patterns with a dual damascene process
12/28/2004	US6835651 Wiring forming method
12/28/2004	US6835649 Tungsten plug with conductor capping layer
12/28/2004	US6835647 Semiconductor device including a plurality of interconnection layers, manufacturing method thereof and method of designing semiconductor circuit used in the manufacturing method
12/28/2004	US6835646 Forming conductive layers on insulators by physical vapor deposition
12/28/2004	US6835645 Method for fabricating semiconductor device
12/28/2004	US6835644 Method for making interconnect structures
12/28/2004	US6835643 Method of improving copper interconnects of semiconductor devices for bonding
12/28/2004	US6835641 Method of forming single sided conductor and semiconductor device having the same
12/28/2004	US6835640 Method of forming a novel composite insulator spacer
12/28/2004	US6835639 Multiple work function gates
12/28/2004	US6835638 Silicon carbide gate transistor and fabrication process
12/28/2004	US6835637 Multi-layered gate for a CMOS imager
12/28/2004	US6835636 Method for fabricating source/drain devices
12/28/2004	US6835635 Electrode forming method and field effect transistor
12/28/2004	US6835634 Streamlined field isolation process
12/28/2004	US6835633 SOI wafers with 30-100 Å buried oxide (BOX) created by wafer bonding using 30-100 Å thin oxide as bonding layer
12/28/2004	US6835632 Semiconductor device and process of producing the same
12/28/2004	US6835631 Method to enhance inductor Q factor by forming air gaps below inductors
12/28/2004	US6835630 Capacitor dielectric structure of a DRAM cell and method for forming thereof
12/28/2004	US6835629 Power integrated circuit with vertical current flow and related manufacturing process
12/28/2004	US6835628 Integrated circuit with a MOS capacitor
12/28/2004	US6835627 Method for forming a DMOS device and a DMOS device
12/28/2004	US6835626 Method to overcome instability of ultra-shallow semiconductor junctions
12/28/2004	US6835625 Method for fabricating semiconductor device
12/28/2004	US6835624 Semiconductor device for protecting electrostatic discharge and method of fabricating the same
12/28/2004	US6835623 NMOS ESD protection device with thin silicide and methods for making same
12/28/2004	US6835622 Gate electrode doping method for forming semiconductor integrated circuit microelectronic fabrication with varying effective gate dielectric layer thicknesses
12/28/2004	US6835621 Method of fabricating non-volatile memory device having a structure of silicon-oxide-nitride-oxide-silicon
12/28/2004	US6835620 Method of manufacturing flash memory devices
12/28/2004	US6835619 Method of forming a memory transistor comprising a Schottky contact
12/28/2004	US6835618 Epitaxially grown fin for FinFET
12/28/2004	US6835617 Methods of forming hemispherical grained silicon on a template on a semiconductor work object
12/28/2004	US6835616 Method of forming a floating metal structure in an integrated circuit
12/28/2004	US6835615 Method of manufacturing buried gate MOS semiconductor device having PIP capacitor
12/28/2004	US6835614 Damascene double-gate MOSFET with vertical channel regions
12/28/2004	US6835612 Method for fabricating a MOSFET having a very small channel length
12/28/2004	US6835611 Structure of metal oxide semiconductor field effect transistor
12/28/2004	US6835610 Method of manufacturing semiconductor device having gate electrode with expanded upper portion
12/28/2004	US6835609 Method of forming double-gate semiconductor-on-insulator (SOI) transistors
12/28/2004	US6835608 Method for crystallizing amorphous film and method for fabricating LCD by using the same
12/28/2004	US6835607 Semiconductor device and a method for manufacturing the same
12/28/2004	US6835606 Low temperature polysilicon thin film transistor and method of forming polysilicon layer of same
12/28/2004	US6835605 Method for providing and utilizing rerouting resources
12/28/2004	US6835603 Method for producing semiconductor laser components
12/28/2004	US6835601 Mother substrate, substrate element, and method for manufacturing the same
12/28/2004	US6835600 Lead frame and method for fabricating resin-encapsulated semiconductor device using the same
12/28/2004	US6835596 Connecting electrodes pads with photopolymerization
12/28/2004	US6835595 Semiconductor package, semiconductor device, electronic device, and method of manufacturing semiconductor package
12/28/2004	US6835594 Metal wiring method for an undercut
12/28/2004	US6835593 Method for manufacturing semiconductor device
12/28/2004	US6835592 Methods for molding a semiconductor die package with enhanced thermal conductivity
12/28/2004	US6835591 Methods of nanotube films and articles
12/28/2004	US6835590 Method of manufacturing image sensor for reducing dark current
12/28/2004	US6835589 Three-dimensional integrated CMOS-MEMS device and process for making the same
12/28/2004	US6835586 Semiconductor device and manufacturing method thereof
12/28/2004	US6835575 Passivation layer for molecular electronic device fabrication
12/28/2004	US6835532 Organic anti-reflective coating composition and method for forming photoresist patterns using the same
12/28/2004	US6835530 Base material for lithography
12/28/2004	US6835511 Defining multiple position-measurement marks on the reticle; using a reticle-inspection device detecting respective positional coordinates of marks on the reticle; mounting reticle in the microlithography apparatus and detecting
12/28/2004	US6835510 Used for Forming a non-critical feature on the mask utilizing one of low transmission phase-shift mask and a non-phase shifting mask, and for forming a critical feature on the mask utilizing a high transmission phase shift mask
12/28/2004	US6835509 Mask for estimating aberration in projection lens system of exposure apparatus
12/28/2004	US6835508 Large-area membrane mask and method for fabricating the mask

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