| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/06/2005 | US20050000433 Gas supplying apparatus and method of testing the same for clogs |
| 01/06/2005 | US20050000432 Suspended gas distribution manifold for plasma chamber |
| 01/06/2005 | US20050000431 Method of modifying source chemicals in an ALD process |
| 01/06/2005 | US20050000430 Showerhead assembly and apparatus for manufacturing semiconductor device having the same |
| 01/06/2005 | US20050000427 Gas supplying apparatus for atomic layer deposition |
| 01/06/2005 | US20050000426 Methods and apparatus for depositing a thin film on a substrate |
| 01/06/2005 | US20050000423 Film forming device |
| 01/06/2005 | US20050000422 Over-clocking in a microdeposition control system to improve resolution |
| 01/06/2005 | US20050000416 Dispensing system and method |
| 01/06/2005 | US20050000414 Method and apparatus for applying conductive ink onto semiconductor substrates |
| 01/06/2005 | US20050000407 Semiconductor laser, semiconductor device and nitride series III-V group compound substrate, as well as manufacturing method thereof |
| 01/06/2005 | US20050000243 Contamination control system and air-conditioning system of a substrate processing apparatus using the same |
| 01/06/2005 | US20050000201 Apparatus for and method of trapping products in exhaust gas |
| 01/06/2005 | US20050000110 Docking-type system and method for transferring and treating substrate |
| 01/06/2005 | US20050000082 Sensor design and process |
| 01/06/2005 | CA2528804A1 Non-volatile electromechanical field effect devices and circuits using same and methods of forming same |
| 01/06/2005 | CA2528194A1 Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads |
| 01/05/2005 | EP1494512A1 Ecr plasma source and ecr plasma device |
| 01/05/2005 | EP1494356A1 Impedance adjustment circuit, impedance adjustment method, and semiconductor device |
| 01/05/2005 | EP1494326A1 Providing an organic vertical cavity laser array device with etched region in dielectric stack |
| 01/05/2005 | EP1494298A2 Organic thin film transistor comprising multi-layered gate insulator |
| 01/05/2005 | EP1494295A1 Magnetoresistance effect element and magnetic memory device |
| 01/05/2005 | EP1494294A2 Method for removing short-circuited sections of a solar cell |
| 01/05/2005 | EP1494289A2 Image sensor having micro-lens array separated with trench structures and method of making |
| 01/05/2005 | EP1494288A2 Semiconductor storage device and semiconductor integrated circuit |
| 01/05/2005 | EP1494285A1 Circuit module and method for manufacturing the same |
| 01/05/2005 | EP1494280A1 System and method for increasing the strength of a bond made by a small diameter wire in a ball bonding |
| 01/05/2005 | EP1494276A2 Semiconductor device including nonvolatile memory and method for fabricating the same |
| 01/05/2005 | EP1494275A1 Method to inspect directionally solidified castings |
| 01/05/2005 | EP1494274A2 Method for manufacturing heterostructure bipolar InP-transistors based on III-V semiconductors |
| 01/05/2005 | EP1494273A1 Method of oxydation of silicon |
| 01/05/2005 | EP1494272A1 Method for manufacturing semiconductor chip |
| 01/05/2005 | EP1494271A1 Method for dicing substrate |
| 01/05/2005 | EP1494270A1 Process of protecting an element of an integrated circuit against silicide formation |
| 01/05/2005 | EP1494269A1 VAPOR PHASE GROWTH METHOD FOR Al-CONTAINING III-V GROUP COMPOUND SEMICONDUCTOR, AND METHOD AND DEVICE FOR PRODUCING Al-CONTAINING III-V GROUP COMPOUND SEMICONDUCTOR |
| 01/05/2005 | EP1494268A2 SiC Semiconductor device and method for fabricating the same |
| 01/05/2005 | EP1494266A1 Thin-plate supporting container |
| 01/05/2005 | EP1494230A2 Phase change recording film having high electrical resistance and sputtering target for forming phase change recording film |
| 01/05/2005 | EP1494167A1 Flexible semiconductor device and identification label |
| 01/05/2005 | EP1494076A2 Large field of view projection optical system with aberration correctability for flat panel displays |
| 01/05/2005 | EP1494074A1 Lithographic apparatus and device manufacturing method |
| 01/05/2005 | EP1494071A2 Improved scattering bar OPC application method for sub-half wavelength lithography patterning |
| 01/05/2005 | EP1494070A2 A method, program product and apparatus for generating assist features utilizing an image field map |
| 01/05/2005 | EP1494038A1 Method and device for the determination of the ratio of a RC time constant in an integrated circuit to a set value |
| 01/05/2005 | EP1494034A2 Power-supply voltage detection circuit and integrated circuit device |
| 01/05/2005 | EP1494017A1 Device and method for wafer inspection |
| 01/05/2005 | EP1494015A1 Wafer inspection device |
| 01/05/2005 | EP1493838A1 Replacement unit and replacement method for substrate in thin-film forming device |
| 01/05/2005 | EP1493835A2 Method for producing patterned thin films |
| 01/05/2005 | EP1493789A1 Aqueous dispersion for chemical/mechanical polishing |
| 01/05/2005 | EP1493773A1 Siloxane-based resin and semiconductor interlayer insulating film made thereof |
| 01/05/2005 | EP1493771A1 Method of synthesizing polymeric material, method of forming thin polymer film, and method of forming interlayer dielectric |
| 01/05/2005 | EP1493746A2 Multi-functional cyclic siloxane compound, siloxane-based polymer prepared from the compound and process for preparing dielectric film by using the polymer |
| 01/05/2005 | EP1493712A2 Method of fabricating silicon-based MEMS devices |
| 01/05/2005 | EP1493188A2 Electronic component having at least one semiconductor chip and flip-chip contacts, and method for the production thereof |
| 01/05/2005 | EP1493185A1 Memory manufacturing process with bitline isolation |
| 01/05/2005 | EP1493184A2 Method for the production of an integrated circuit and integrated circuit with a bipolar transistor and a hetero bipolar transistor |
| 01/05/2005 | EP1493183A2 Process for making air gap containing semiconducting devices and resulting semiconducting device |
| 01/05/2005 | EP1493182A1 Tri-layer masking architecture for patterning dual damascene interconnects |
| 01/05/2005 | EP1493181A2 Method for transferring elements between substrates |
| 01/05/2005 | EP1493180A2 Variable temperature processes for tunable electrostatic chuck |
| 01/05/2005 | EP1493179A1 Process for controlling denuded zone depth in an ideal oxygen precipitating silicon wafer |
| 01/05/2005 | EP1493178A2 Method of manufacturing nanowires and electronic device |
| 01/05/2005 | EP1493177A2 Improved method for etching vias |
| 01/05/2005 | EP1493176A2 Device for accommodating substrates |
| 01/05/2005 | EP1493175A1 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers |
| 01/05/2005 | EP1493170A2 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
| 01/05/2005 | EP1493159A1 Refresh scheme for dynamic page programming |
| 01/05/2005 | EP1493111A2 System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
| 01/05/2005 | EP1493061A2 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 01/05/2005 | EP1493039A2 Extreme ultraviolet light source |
| 01/05/2005 | EP1492994A2 Method and apparatus for stage mirror mapping |
| 01/05/2005 | EP1492907A1 Electropolishing and/or electroplating apparatus and methods |
| 01/05/2005 | EP1492901A1 Source gas delivery |
| 01/05/2005 | EP1436845B1 Semiconductor structure having compensated resistance in the ldd region, and method for producing the same |
| 01/05/2005 | EP1330835B1 Arrangement for transporting a semiconductor wafer carrier |
| 01/05/2005 | EP1314204A4 Indium gallium nitride channel high electron mobility transistors, and method of making the same |
| 01/05/2005 | EP1222056A4 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
| 01/05/2005 | EP1214175B1 Unsupported polishing belt for chemical mechanical polishing |
| 01/05/2005 | EP1105925B1 Method for double-sided patterning of high temperature superconducting circuits |
| 01/05/2005 | EP1038307A4 Surface modification of semiconductors using electromagnetic radiation |
| 01/05/2005 | DE4434891B4 Verfahren zum Freilegen einer oberen Stegfläche eines auf der Oberfläche eines Substrats ausgebildeten und mit einem Material umformten schmalen Steges im Mikrometerbereich und Anwendung eines solchen Verfahrens zur Kontaktierung schmaler Stege Methods for exposing an upper surface of a ridge formed on the surface of a substrate and umformten with a material narrow ridge in the micrometer range and application of such a method for contacting narrower webs |
| 01/05/2005 | DE10392216T5 Verfahren zum Bearbeiten eines Werkstücks, um wenigstens eine seiner Eigenschaften zu modifizieren A method for machining a workpiece in order to modify at least one of its properties |
| 01/05/2005 | DE10359277A1 Verbindungsstruktur einer Halbleitervorrichtung Interconnect structure of a semiconductor device |
| 01/05/2005 | DE10354814A1 Formation of gate electrode in semiconductor comprises forming polysilicon and metal silicide film on semiconductor substrate, annealing to crystallize metal silicide film, and single etching |
| 01/05/2005 | DE10343509A1 Halbleiteranordnung Semiconductor device |
| 01/05/2005 | DE10342980B3 Semiconductor chip stack formation method for manufacture of 3D-packages with function testing of chips for removal or unacceptable chips and replacement by acceptable chips |
| 01/05/2005 | DE10327360A1 Verfahren zum Herstellen eines Keramik-Metall-Substrates A method of manufacturing a ceramic-metal substrate |
| 01/05/2005 | DE10327050A1 Separating layer system with individual layer(s) of defined material by pulse-magnetron sputtering involves applying individual layer(s) as sub-regions lying one on the other in growth direction |
| 01/05/2005 | DE10326716A1 Automatic development of modified standard cell for semiconducting component involves automatically optimizing parameter in respect of stored discrete parameters according to defined target function |
| 01/05/2005 | DE10326578A1 SOI-Scheibe und Verfahren zu deren Herstellung SOI wafer and processes for their preparation |
| 01/05/2005 | DE10326330A1 Manufacturing semiconducting memory device involves providing protective structure in doped region to inhibit existence of leakage current path between gate conductor and doped region |
| 01/05/2005 | DE10326273A1 Verfahren zur Reduzierung der Scheibenkontaminierung durch Entfernen von Metallisierungsunterlagenschichten am Scheibenrand Method for reducing the Scheibenkontaminierung by removing Metallisierungsunterlagenschichten at the wafer edge |
| 01/05/2005 | DE10326087A1 Component used as an electronic integrated component comprises an active structure arranged on a substrate and having side edges, and an auxiliary structure arranged next to the active structure on the substrate and having side edges |
| 01/05/2005 | DE10325863A1 Verfahren zum Herstellen eines integrierten Fingerabdrucksensors sowie Sensorschaltungsanordnung und Einspritzanordnung A method of manufacturing an integrated fingerprint sensor and sensor circuitry and injection assembly |
| 01/05/2005 | DE10325603A1 Production of an electrically conducting bond pad for contacting a substrate, especially a gallium nitride substrate, comprises applying a layer sequence consisting three layers formed on a substrate and tempering |
| 01/05/2005 | DE10325225A1 Systembedieneinheit System control unit |
| 01/05/2005 | DE10325011A1 Manufacturing different depth doping regions in substrate involves implanting doping material through mask openings with doses controlled by shaping openings/stops, driving deeper into substrate |
| 01/05/2005 | DE10324657A1 Verfahren zur Herstellung eines Metallsilizids A process for producing a metal silicide |
| 01/05/2005 | DE10324612A1 Halbleiterspeicher mit Virtual-Ground-Architektur Semiconductor memory with virtual ground architecture |