| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/11/2005 | US6841454 Chip-like electronic components, a method of manufacturing the same, a pseudo wafer therefor and a method of manufacturing thereof |
| 01/11/2005 | US6841453 Process for manufacturing integrated devices having connections on a separate wafer, and integrated device thus obtained |
| 01/11/2005 | US6841452 Method of forming device isolation trench |
| 01/11/2005 | US6841451 Method of fabricating semiconductor device having alignment mark |
| 01/11/2005 | US6841450 Annealed wafer manufacturing method and annealed wafer |
| 01/11/2005 | US6841449 Two-step process for nickel deposition |
| 01/11/2005 | US6841448 Method for fabricating embedded nonvolatile semiconductor memory cells |
| 01/11/2005 | US6841447 EEPROM device having an isolation-bounded tunnel capacitor and fabrication process |
| 01/11/2005 | US6841446 Fabrication method for a flash memory device |
| 01/11/2005 | US6841445 Method of making floating gate non-volatile memory cell with low erasing voltage having double layer gate dielectric |
| 01/11/2005 | US6841444 Nonvolatile semiconductor memory device and manufacturing method thereof |
| 01/11/2005 | US6841443 Method for fabricating a deep trench capacitor for dynamic memory cells |
| 01/11/2005 | US6841442 Method for forming metal contact of semiconductor device |
| 01/11/2005 | US6841441 Method to produce dual gates (one metal and one poly or metal silicide) for CMOS devices using sputtered metal deposition, metallic ion implantation, or silicon implantation, and laser annealing |
| 01/11/2005 | US6841440 Semiconductor device including impurity layer having continuous portions formed at different depths and method of manufacturing the same |
| 01/11/2005 | US6841439 High permittivity silicate gate dielectric |
| 01/11/2005 | US6841438 Annular gate and technique for fabricating an annular gate |
| 01/11/2005 | US6841437 Method of forming a vertical power semiconductor device and structure therefor |
| 01/11/2005 | US6841436 Method of fabricating SiC semiconductor device |
| 01/11/2005 | US6841435 Method for fabricating a GaInP epitaxial stacking structure |
| 01/11/2005 | US6841434 Method of fabricating semiconductor device |
| 01/11/2005 | US6841433 Method of fabricating polysilicon thin film transistor |
| 01/11/2005 | US6841432 Semiconductor device and process for fabricating the same |
| 01/11/2005 | US6841431 Method for reducing the contact resistance |
| 01/11/2005 | US6841430 Semiconductor and fabrication method thereof |
| 01/11/2005 | US6841429 Method of manufacturing a semiconductor device having a silicide film |
| 01/11/2005 | US6841428 Method for fabricating thin film transistor liquid crystal display |
| 01/11/2005 | US6841425 Wafer treatment method for protecting fuse box of semiconductor chip |
| 01/11/2005 | US6841424 Semiconductor assembly encapsulation mold and method for forming same |
| 01/11/2005 | US6841423 Methods for formation of recessed encapsulated microelectronic devices |
| 01/11/2005 | US6841422 Plastic lead frames for semiconductor devices, packages including same, and methods of fabrication |
| 01/11/2005 | US6841420 Semiconductor device and method of manufacturing the same |
| 01/11/2005 | US6841418 Multi-substrate microelectronic packages and methods for manufacture |
| 01/11/2005 | US6841417 Semiconductor device and semiconductor assembly apparatus for semiconductor device |
| 01/11/2005 | US6841416 Chip scale package and method of fabricating the same |
| 01/11/2005 | US6841415 Flip chip mounting method which avoids void formation between a semiconductor chip and a substrate |
| 01/11/2005 | US6841414 Saw and etch singulation method for a chip package |
| 01/11/2005 | US6841412 Encapsulation for particle entrapment |
| 01/11/2005 | US6841411 Method of utilizing a top conductive layer in isolating pixels of an image sensor array |
| 01/11/2005 | US6841410 Method for forming group-III nitride semiconductor layer and group-III nitride semiconductor device |
| 01/11/2005 | US6841409 Group III-V compound semiconductor and group III-V compound semiconductor device using the same |
| 01/11/2005 | US6841408 Method of alignment for buried structures formed by surface transformation of empty spaces in solid state materials |
| 01/11/2005 | US6841404 Method for determining optical constant of antireflective layer, and method for forming resist pattern |
| 01/11/2005 | US6841403 Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data |
| 01/11/2005 | US6841402 Alignment-mark detection methods and devices for charged-particle-beam microlithography, and microelectronic-device manufacturing methods comprising same |
| 01/11/2005 | US6841401 Integrated circuit device and correction method for integrated circuit device |
| 01/11/2005 | US6841400 Method of manufacturing semiconductor device having trench isolation |
| 01/11/2005 | US6841399 Method of manufacturing mask and method of manufacturing semiconductor integrated circuit device |
| 01/11/2005 | US6841396 VIA0 etch process for FRAM integration |
| 01/11/2005 | US6841394 Nonvolatile ferroelectric memory device and method for fabricating the same |
| 01/11/2005 | US6841341 Thermally decomposing a gas mixture of a hydrocarbon compound and an inert gas; integrated circuits |
| 01/11/2005 | US6841338 Exposing a microelectronic structure that has a photoresist layer of a (co)polymer of p-hydroxystyrene and p-oxystyrene with a remnant ratio of 40-85% to light and developing |
| 01/11/2005 | US6841334 Onium salts and positive resist materials using the same |
| 01/11/2005 | US6841331 Admixing the polymer with a photoactive component |
| 01/11/2005 | US6841321 Method and system for processing a semi-conductor device |
| 01/11/2005 | US6841318 Levenson phase shift mask and method for forming fine pattern by using the same |
| 01/11/2005 | US6841315 An adjacent opaque part area with a transmission part area, by reducing the amount of exposing radiation transmitted through the area, improve the geometrical shape and dimensional accuracy of a photoresist pattern |
| 01/11/2005 | US6841314 Forming halftone; overcoating quartz substrate; phase shifting; inserting impurities |
| 01/11/2005 | US6841311 Cleaning the surface of halftone shift masks that use MoSiON as shifter material |
| 01/11/2005 | US6841307 Photomask making method and alignment method |
| 01/11/2005 | US6841274 GaN single-crystal substrate, nitride type semiconductor epitaxial substrate, nitride type semiconductor device, and methods of making the same |
| 01/11/2005 | US6841256 Thermally stable, adhesive; for use as semiconductor insulators and adhesion promoters; electronics |
| 01/11/2005 | US6841250 Thermal management system |
| 01/11/2005 | US6841249 Method of a diamond surface and corresponding diamond surface |
| 01/11/2005 | US6841224 Method of patterning magnetic products using chemical reactions |
| 01/11/2005 | US6841203 Method of forming titanium film by CVD |
| 01/11/2005 | US6841200 Transferring a processed substrate from environment to a substrate holder disposed in the chamber, moving a cooling plate to contact the processed substrate, venting the chamber, and removing the processed substrate |
| 01/11/2005 | US6841192 Method for manufacturing piezoelectric element, piezoelectric element, and droplet-ejecting recording head |
| 01/11/2005 | US6841189 Forming a plating base on the surfaces and introducing a modifying agent to the recess and which absorbs into the surface regions not covered by the plating base |
| 01/11/2005 | US6841084 Etching solution for forming an embedded resistor |
| 01/11/2005 | US6841082 Method of manufacturing Er-doped silicon nano-dot array and laser ablation appparatus used therein |
| 01/11/2005 | US6841056 Reduce concentration of oxygen, sulfur dioxide; forming integrated circuits |
| 01/11/2005 | US6841048 Coating apparatus for disk-shaped workpieces |
| 01/11/2005 | US6841033 Material handling system and method for a multi-workpiece plasma treatment system |
| 01/11/2005 | US6841031 Substrate processing apparatus equipping with high-pressure processing unit |
| 01/11/2005 | US6841027 Method for applying a substrate |
| 01/11/2005 | US6841022 Adhesive-coated electronic parts on a connection sheet |
| 01/11/2005 | US6841006 Mutlistage pressurized vapor deposition; for semiconductors |
| 01/11/2005 | US6841001 Strain compensated semiconductor structures and methods of fabricating strain compensated semiconductor structures |
| 01/11/2005 | US6840999 In situ regrowth and purification of crystalline thin films |
| 01/11/2005 | US6840997 Vacancy, dominsated, defect-free silicon |
| 01/11/2005 | US6840988 Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide |
| 01/11/2005 | US6840971 Chemical mechanical polishing systems and methods for their use |
| 01/11/2005 | US6840846 Polishing station of a chemical mechanical polishing apparatus |
| 01/11/2005 | US6840845 Wafer polishing apparatus |
| 01/11/2005 | US6840841 Wafer edge polishing system |
| 01/11/2005 | US6840840 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
| 01/11/2005 | US6840767 Susceptor pocket profile to improve process performance |
| 01/11/2005 | US6840763 Wafer processing apparatus |
| 01/11/2005 | US6840751 Vertical mold die press machine |
| 01/11/2005 | US6840732 Transport apparatus and vacuum processing system using the same |
| 01/11/2005 | US6840670 Apparatus and method for non-contact temperature measurement |
| 01/11/2005 | US6840640 Multi mirror system for an illumination system |
| 01/11/2005 | US6840638 Deformable mirror with passive and active actuators |
| 01/11/2005 | US6840594 Work working method and apparatus, cassette, and unit for printing apparatus |
| 01/11/2005 | US6840374 A cleaning apparatus comprising a tacky gel layer polysiloxane, an endcapped homo- or copolymer; tip used to test semiconductors dies |
| 01/11/2005 | US6840250 Nextgen wet process tank |
| 01/11/2005 | US6840249 Using radio frequency; supplying gaseous aqueous hydrochloric acid solution |
| 01/11/2005 | US6839962 Method of producing micromechanical structures |
| 01/11/2005 | US6839961 Methods of bonding solder balls to bond pads on a substrate, and bonding frames |