Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2005
01/13/2005DE10157848B4 Verfahren zur Herstellung eines mikromechanischen Bauelements mit abgeschlossenem Innenraum und mikromechanisches Bauelement mit abgeschlossenem Innenraum A process for producing a micromechanical device with completed interior and micromechanical device with completed interior
01/13/2005CA2555832A1 Replicated derivatives having demand-based, adjustable returns, and trading exchange therefor
01/13/2005CA2530976A1 Method for producing nanocarbon material and method for manufacturing wiring structure
01/13/2005CA2522222A1 Fluidic nanotubes and devices
01/12/2005EP1496618A2 Semiconductor integrated unit
01/12/2005EP1496554A2 Organic thin film transistor and method of manufacturing the same
01/12/2005EP1496552A2 Electrode layer, light generating device including the same and method of forming the same
01/12/2005EP1496548A1 Method for manufacturing differential isolation structures in a semiconductor electronic device and corresponding structure
01/12/2005EP1496547A2 Multilayer sheet for backside grinding of a semiconductor wafer
01/12/2005EP1496545A1 Resist removing apparatus and method of removing resist
01/12/2005EP1496544A1 Resist film removing apparatus, method of removing resist film, organic matter removing apparatus and method of removing organic matter
01/12/2005EP1496543A1 Polishing device and substrate processing device
01/12/2005EP1496542A2 Method and apparatus for forming capping film
01/12/2005EP1496541A1 Method of fabricating a MOS transistor
01/12/2005EP1496540A2 Exposure system and exposure method
01/12/2005EP1496521A1 Mirror and lithographic apparatus with mirror
01/12/2005EP1496518A1 Storage device using resistance varying storage element and reference resistance value decision method for the device
01/12/2005EP1496399A2 Exposure apparatus
01/12/2005EP1496397A1 Method and system for feedforward overlay correction of pattern induced distortion and displacement, and lithographic projection apparatus using such a method and system
01/12/2005EP1496394A2 Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method
01/12/2005EP1496393A2 Complementary division mask, method of producing mask, and program
01/12/2005EP1496138A1 Processing system, processing method and mounting member
01/12/2005EP1496094A2 An adhesive sheet based on a siloxane-modified polyamideimide resin composition, and a CSP board and a semiconductor device produced by using the sheet
01/12/2005EP1496033A2 Aluminum nitride sintered body containing carbon fibers and method of manufacturing the same
01/12/2005EP1495837A1 Polishing method
01/12/2005EP1495815A1 Method for cleaning a metallic surface
01/12/2005EP1495501A2 Hermetic encapsulation of organic electro-optical elements
01/12/2005EP1495496A1 Non-volatile, programmable, electrically erasable memory semiconductor device having a single grid material layer and corresponding magnetic core plane
01/12/2005EP1495495A1 N-fet and p-fet fabrication on the same wafer using different crystal planes for the optimization of carrier transport
01/12/2005EP1495493A2 Method for producing a copy protection for an electronic circuit
01/12/2005EP1495492A2 Substrate and method for producing a substrate
01/12/2005EP1495491A2 Method for connecting substrates and composite element
01/12/2005EP1495490A2 Diffusion and activation control of implanted dopants with athermales annealing
01/12/2005EP1495489A2 Methods for the formation of thin film layers using short-time thermal processes
01/12/2005EP1495488A2 Device and method for positioning a plate-type substrate
01/12/2005EP1495486A1 Method and device for conditioning semiconductor wafers and/or hybrids
01/12/2005EP1495485A2 Remote monitoring system for chemical liquid delivery
01/12/2005EP1495484A2 Single axis manipulator with controlled compliance
01/12/2005EP1495470A1 Material combinations for tunnel junction cap layer, tunnel junction hard mask and tunnel junction stack seed layer in mram processing
01/12/2005EP1495426A2 Derivatives having demand-based, adjustable returns, and trading exchange therefor
01/12/2005EP1495369A2 Interferometric measuring device and projection illumination installation comprising one such measuring device
01/12/2005EP1495366A1 Method of treatment of porous dielectric films to reduce damage during cleaning
01/12/2005EP1495365A1 Antireflective sio-containing compositions for hardmask layer
01/12/2005EP1495312A1 Sample surface inspection apparatus and method
01/12/2005EP1495169A1 Dislocation reduction in non-polar gallium nitride thin films
01/12/2005EP1495168A1 Non-polar a-plane gallium nitride thin films grown by metalorganic chemical vapor deposition
01/12/2005EP1495167A1 NON-POLAR (A1,B,In,Ga) QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES
01/12/2005EP1495161A2 Electropolishing and electroplating methods
01/12/2005EP1495156A2 Deposition methods utilizing phased array microwave excitation, and deposition apparatuses
01/12/2005EP1495155A1 Low contamination components for semiconductor processing apparatus and methods for making components
01/12/2005EP1495154A1 Method for forming housings for electronic components and electronic components that are hermetically encapsulated thereby
01/12/2005EP1495153A1 Method for coating metal surfaces and substrate having a coated metal surface
01/12/2005EP1495066A1 Organic silicate polymer and insulation film comprising the same
01/12/2005EP1494965A2 Method for producing a product having a structured surface
01/12/2005EP1494821A1 Fluid assisted cryogenic cleaning
01/12/2005EP1469971A4 Grooved rollers for a linear chemical mechanical planarization system
01/12/2005EP1455988A4 Air platen for leading edge and trailing edge control
01/12/2005EP1221073A4 A photolithography mask having a subresolution alignment mark window
01/12/2005EP1181112B1 Temperature controlled gassification of deionized water for megasonic cleaning of semiconductor wafers
01/12/2005EP1097251A4 System and method for reducing particles in epitaxial reactors
01/12/2005EP1030126B1 Dehumidification/humidification air supply apparatus
01/12/2005EP0995214B1 Method and apparatus for neutralising space charge in an ion beam
01/12/2005EP0970511B1 Method and apparatus for removing a liquid from a surface
01/12/2005CN1565060A Semiconductor device and method for manufacturing the same
01/12/2005CN1565059A Solid state image device and its manufacturing method
01/12/2005CN1565058A Semiconductor device and its mfg.method
01/12/2005CN1565057A Plural semiconductor devices in monolithic flip chip
01/12/2005CN1565054A Prober and probe testing method for temperature-controlling object to be tested
01/12/2005CN1565053A Process to allow electrical and mechanical connection of an electrical device with a face equipped with contact pads
01/12/2005CN1565052A Apparatus for molding a semiconductor wafer and process therefor
01/12/2005CN1565051A Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands
01/12/2005CN1565050A Method and device for heat treatment
01/12/2005CN1565049A 抛光装置及基片处理装置 A polishing apparatus and a substrate processing apparatus
01/12/2005CN1565048A Polishing pad for CMP, method for polishing substrate using it and method for producing polishing pad for CMP
01/12/2005CN1565047A Method of manufacturing semiconductor device
01/12/2005CN1565046A CVD device with cleaning mechanism using fluorine gas and method of cleaning CVD device with fluorine gas
01/12/2005CN1565045A Hydrophilic components for a spin-rinse-dryer
01/12/2005CN1565044A End effector assembly
01/12/2005CN1565043A Extraction and deceleration of low energy beam with low beam divergence
01/12/2005CN1565035A Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
01/12/2005CN1564970A Integration of fault detection with run-to-run control
01/12/2005CN1564969A Process for manufacturing a microelectronic device
01/12/2005CN1564968A Composition for forming antireflection film for lithography
01/12/2005CN1564966A Positive photoresist composition for liquid crystal device
01/12/2005CN1564958A Method and system for correction of intrinsic birefringence in UV microlithography
01/12/2005CN1564876A Thin metal oxide film and process for producing the same
01/12/2005CN1564784A Aluminum oxide produced by flame hydrolysis and doped with divalent metal oxides and aqueous dispersions thereof
01/12/2005CN1564754A Method of manufacturing an electronic component and electronic component obtained by means of said method
01/12/2005CN1564730A Apparatus and method for splitting substrates
01/12/2005CN1564726A Joining material and joining method
01/12/2005CN1564721A Highly filled composites of powdered fillers and polymer matrix
01/12/2005CN1564324A ZnO based transparent thin film transistor and its prepn. method
01/12/2005CN1564323A Silicon material on insulator with double-buried structure, its prepn. and usage
01/12/2005CN1564321A High speed high precision transient simulation method able to process tree net hybrid power supply structure in VLSI
01/12/2005CN1564320A Time delayed testing generation method for wire-to-wire crosstalk decereration effect
01/12/2005CN1564319A Fast analysis of superlarge integrated circit P/G distributing net
01/12/2005CN1564318A Design method of 0.35 um LDMOS high vltage power displaying driving element
01/12/2005CN1564317A Air floation XY coordinates plane movoment platform
01/12/2005CN1564316A Carriage and transfer gear used same
01/12/2005CN1564315A Device and method for measuring movability of semiconductor excess carrier and diffusion length