| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/06/2005 | US20050003562 Integrated circuit with inductor having horizontal magnetic flux lines |
| 01/06/2005 | US20050003561 Method for production of MRAM elements |
| 01/06/2005 | US20050003421 Bioarray chip reaction apparatus and its manufacture |
| 01/06/2005 | US20050003310 Etching process including plasma pretreatment for generating fluorine-free carbon-containing polymer on a photoresist pattern |
| 01/06/2005 | US20050003308 comprises semiconductor substrate with gate electrode tracks, dielectric, sacrificial layer, and removable plug; photoresists; ethching; planarization; chemical mechanical polishing; arrangement of memory cells having selection transistor; for use during production of dynamic random access memory modules |
| 01/06/2005 | US20050003307 Method for forming DRAM cell bit-line contact |
| 01/06/2005 | US20050003305 Photo mask, exposure method using the same, and method of generating data |
| 01/06/2005 | US20050003299 Interface containing organosilicon polymer with patterns for photoresists |
| 01/06/2005 | US20050003284 Exposure, development of testing photoresist using photomask; forming hole pattern; measurement; adjustment |
| 01/06/2005 | US20050003282 Pattern adjustment; high speed; stress adjustment; dispalcement; calibrating shape |
| 01/06/2005 | US20050003280 Exposure to adjustment design pattern; shaping inclined edge zones; measurement calibration; drawing pattern using electron beams |
| 01/06/2005 | US20050003278 Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same |
| 01/06/2005 | US20050003240 Wear and corrosion resistance; chemical resistance |
| 01/06/2005 | US20050003229 Defect reduction by oxidation of silicon |
| 01/06/2005 | US20050003218 Organic dielectric polymer containing polyarylene ethers |
| 01/06/2005 | US20050003213 Irradiating with ultraviolet radiation; depressurization |
| 01/06/2005 | US20050003166 Pattern and fabricating method therefor, device and fabricating method therefor, electro-optical apparatus, electronic apparatus, and method for fabricating active matrix substrate |
| 01/06/2005 | US20050003090 Sensitizers using Group 8 metal; immersion in tin bath; oxidation |
| 01/06/2005 | US20050003088 Method of depositing thin film on wafer |
| 01/06/2005 | US20050003087 On a semiconductor wafer surface dispensing a solvent of 70-90% diacetone alcohol and aliphatic ester; spinning for uniform distribution and then dispensing a photoresist solution on the wafer; quality films; efficiency |
| 01/06/2005 | US20050003085 Composition for forming a coating film, method of preparing the composition, tantalum oxide film and method of forming the tantalum oxide film |
| 01/06/2005 | US20050003075 Volatile copper(II) complexes for deposition of copper films by atomic layer deposition |
| 01/06/2005 | US20050002763 Chip receptacle, method for fabricating a chip receptacle and chip transport container |
| 01/06/2005 | US20050002743 Apparatus for transporting plate-shaped work piece |
| 01/06/2005 | US20050002674 Light receiving apparatus, mark detecting apparatus using light receiving apparatus, exposing apparatus, maintenance method of exposing apparatus, manufacturing method of semiconductor device using exposing apparatus and semiconductor manufacturing plant |
| 01/06/2005 | US20050002596 Bonding method |
| 01/06/2005 | US20050002554 Method of inspecting a mask or reticle for detecting a defect, and mask or reticle inspection system |
| 01/06/2005 | US20050002448 Method and apparatus for non-conductively interconnecting integrated circuits |
| 01/06/2005 | US20050002266 Semiconductor device and its manufacturing method |
| 01/06/2005 | US20050002263 Writing control method and writing control system of semiconductor storage device, and portable electronic apparatus |
| 01/06/2005 | US20050002258 Semiconductor storage device, method for protecting predetermined memory element and portable electronic equipment |
| 01/06/2005 | US20050002248 Semiconductor memory device including magneto resistive element and method of fabricating the same |
| 01/06/2005 | US20050002244 Semiconductor storage device, redundancy circuit thereof, and portable electronic device |
| 01/06/2005 | US20050002240 Semiconductor memory device and portable electronic apparatus |
| 01/06/2005 | US20050002236 Semiconductor storage device and mobile electronic apparatus |
| 01/06/2005 | US20050002235 Non-volatile semiconductor memory device and controlling method of the same |
| 01/06/2005 | US20050002231 Nonvolatile semiconductor memory and manufacturing method for the same |
| 01/06/2005 | US20050002230 Magnetic memory device and manufacturing method thereof |
| 01/06/2005 | US20050002229 Magnetic random access memory, and production method therefor |
| 01/06/2005 | US20050002228 Magnetic device with magnetic tunnel junction, memory array and read/write methods using same |
| 01/06/2005 | US20050002226 Non-volatile memory device |
| 01/06/2005 | US20050002224 Semiconductor integrated circuit device |
| 01/06/2005 | US20050002221 Test key and method for validating the position of a word line overlaying a trench capacitor in DRAMs |
| 01/06/2005 | US20050002126 CPP spin-valve element |
| 01/06/2005 | US20050002040 Lithographic apparatus, device manufacturing method, and computer program |
| 01/06/2005 | US20050002035 Exposure apparatus |
| 01/06/2005 | US20050002034 Overlay key with a plurality of crossings and method of measuring overlay accuracy using the same |
| 01/06/2005 | US20050002023 Apparatus for inspection of a wafer |
| 01/06/2005 | US20050002021 Apparatus, method, and computer program for wafer inspection |
| 01/06/2005 | US20050002020 Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask |
| 01/06/2005 | US20050002016 Inspection method and apparatus of laser crystallized silicons |
| 01/06/2005 | US20050002012 Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device |
| 01/06/2005 | US20050002011 Support mechanism, exposure apparatus having the same, and aberration reducing method |
| 01/06/2005 | US20050002010 Lithographic apparatus and method of a manufacturing device |
| 01/06/2005 | US20050002009 Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
| 01/06/2005 | US20050002008 Lithographic apparatus, device manufacturing method and device manufactured thereby |
| 01/06/2005 | US20050002005 Image forming apparatus |
| 01/06/2005 | US20050002003 Lithographic apparatus and device manufacturing method |
| 01/06/2005 | US20050002002 Pattern writing apparatus and pattern writing method |
| 01/06/2005 | US20050001967 Liquid crystal display panel and fabricating method thereof |
| 01/06/2005 | US20050001965 Electro-optical device |
| 01/06/2005 | US20050001963 Laminated structure, and manufacturing method, display device, and display unit employing same |
| 01/06/2005 | US20050001946 Thin film transistor substrate for liquid crystal display (LCD) and method of manufacturing the same |
| 01/06/2005 | US20050001670 Temperature sensing circuit and method |
| 01/06/2005 | US20050001658 Power-supply voltage detection circuit and integrated circuit device |
| 01/06/2005 | US20050001632 Intergrated semiconductor component for high-frequency measurement and use thereof |
| 01/06/2005 | US20050001527 Plasma processing apparatus |
| 01/06/2005 | US20050001510 Uniform energy megasonic transducer using vessel as resonator |
| 01/06/2005 | US20050001486 Power and/or energy monitor, method of using, and display device |
| 01/06/2005 | US20050001438 Robotic arm for preventing electrostatic damage |
| 01/06/2005 | US20050001330 System and method for controlling integrated circuit die height and planarity |
| 01/06/2005 | US20050001329 Semiconductor device and method for manufacturing the same |
| 01/06/2005 | US20050001327 Semiconductor device, method for manufacturing the same, circuit substrate and electronic device |
| 01/06/2005 | US20050001326 Semiconductor device, stacked semiconductor device, methods of manufacturing the same, circuit board, and electronic instrument |
| 01/06/2005 | US20050001325 Selective capping of copper wiring |
| 01/06/2005 | US20050001324 Corrosion-resistant copper bond pad and integrated device |
| 01/06/2005 | US20050001323 Semiconductor device with dual damascene wiring |
| 01/06/2005 | US20050001322 Fill pattern generation for spin-on glass and related self-planarization deposition |
| 01/06/2005 | US20050001321 Interconnection structure and fabrication method thereof |
| 01/06/2005 | US20050001320 Semiconductor device, stacked semiconductor device, methods of manufacturing them, circuit board, and electronic instrument |
| 01/06/2005 | US20050001319 Multi-configurable independently multi-gated MOSFET |
| 01/06/2005 | US20050001318 Electrical interconnection, method of forming the electrical interconnection, image sensor having the electrical interconnection and method of manufacturing the image sensor |
| 01/06/2005 | US20050001317 Polyelectrolyte nanolayers as diffusion barriers in semiconductor devices |
| 01/06/2005 | US20050001315 Method for assembling integral type electronic device, and integral type electronic device |
| 01/06/2005 | US20050001314 Semiconductor device |
| 01/06/2005 | US20050001313 Semiconductor device with under bump metallurgy and method for fabricating the same |
| 01/06/2005 | US20050001312 Chip package with grease heat sink |
| 01/06/2005 | US20050001308 Integrated circuit carrier |
| 01/06/2005 | US20050001307 [wafer level passive component] |
| 01/06/2005 | US20050001304 Chip scale package and method of fabricating the same |
| 01/06/2005 | US20050001303 Method of manufacturing multi-chip stacking package |
| 01/06/2005 | US20050001301 Semiconductor device, electronic device, electronic equipment, and method of manufacturing semiconductor device |
| 01/06/2005 | US20050001299 Substrate for semiconductor package wire bonding method using thereof |
| 01/06/2005 | US20050001298 Multiple chip semiconductor arrangement having electrical components in separating regions |
| 01/06/2005 | US20050001297 Semiconductor device and method for fabricating the same |
| 01/06/2005 | US20050001291 Semiconductor integrated circuit, D-A converter device, and A-D converter device |
| 01/06/2005 | US20050001290 Substrate engineering for optimum cmos device performance |
| 01/06/2005 | US20050001289 Semiconductor device and method of manufacturing the same |
| 01/06/2005 | US20050001288 Semiconductor device and method of manufacturing such device |
| 01/06/2005 | US20050001286 Memory device with vertical transistors and deep trench capacitors and manufacturing method thereof |