| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/24/2005 | US20050061768 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum and methods of forming trench isolation within a semiconductor substrate |
| 03/24/2005 | US20050061679 Exposing noble metal layer to electrodeposition composition comprising a copper salt, a suppressor, an accelerator and an electrolyte, initiating electrodeposition of copper on a surface of the noble metal layer by application of a predetermined current density |
| 03/24/2005 | US20050061675 Workpiece holder including electrode assembly having contact part which connects to distal end of electrode shaft, bears against workpiece, conducts current; for plating copper onto semiconductor materials |
| 03/24/2005 | US20050061665 Substrate carrier for electroplating solar cells |
| 03/24/2005 | US20050061659 Plating apparatus and plating method |
| 03/24/2005 | US20050061626 Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/24/2005 | US20050061451 Functionalized nanosubstrates and methods for three-dimensional nanoelement selection and assembly |
| 03/24/2005 | US20050061447 Plasma etching apparatus |
| 03/24/2005 | US20050061443 Plasma processing apparatus and system, performance validation system and inspection method therefor |
| 03/24/2005 | US20050061442 Plasma treatment apparatus and control method thereof |
| 03/24/2005 | US20050061441 Substrate treating apparatus |
| 03/24/2005 | US20050061440 Gas reaction chamber system having gas supply apparatus |
| 03/24/2005 | US20050061439 Method of processing substrate and chemical used in the same |
| 03/24/2005 | US20050061431 Method of fixing a sealing object to a base object |
| 03/24/2005 | US20050061425 Method and apparatus for joining adhesive tape |
| 03/24/2005 | US20050061355 used to remove undesirable particles from component parts such as a workpiece, a semiconductor wafer or a disc drive component of a data storage system |
| 03/24/2005 | US20050061248 Substrate processing apparatus |
| 03/24/2005 | US20050061247 Substrate processing apparatus, and combined system of functional blocks for use in substrate processing apparatus |
| 03/24/2005 | US20050061246 Conveyor device and film formation apparatus for a flexible substrate |
| 03/24/2005 | US20050061245 Chemical vapor deposition apparatus |
| 03/24/2005 | US20050061242 Substrate processing apparatus for performing photolithography |
| 03/24/2005 | US20050061240 Substrate processing apparatus and substrate processing method |
| 03/24/2005 | US20050061235 Method of manufacturing Er-doped silicon nano-dot array and laser ablation apparatus used therein |
| 03/24/2005 | US20050061107 Coated silver-containing particles, method and apparatus of manufacture, and silver-containing devices made therefrom |
| 03/24/2005 | US20050060887 Method for producing metal/ceramic bonding circuit board |
| 03/24/2005 | US20050060883 Part mounting apparatus and part mounting method |
| 03/24/2005 | US20050060876 Fuel cell and power chip technology |
| 03/24/2005 | US20050060823 Arrangement for processing disks of different sizes |
| 03/24/2005 | DE19837516B4 Verfahren und Vorrichtung zur Ausbildung einer dünnen Schicht Method and apparatus for forming a thin layer |
| 03/24/2005 | DE10358843B3 Packaging container for power semiconducting modules has cover surface with support(s) that narrows as it extends into molded body and into opening in module to prevent contact between module and covering surface |
| 03/24/2005 | DE10356177A1 Manufacturing semiconductor device, e.g. dynamic random access memory, by forming photoresist pattern using photoresist polymer remover composition with sulfuric and acetic acids, hydrogen peroxide or ozone, ammonium fluoride |
| 03/24/2005 | DE10340974A1 Control unit for motor vehicles braking systems comprises a frame having a recess filled with a sealing gel which is viscous enough the flow around electrical strip conductors in the recess |
| 03/24/2005 | DE10339529A1 Vertikaler Nano-Transistor, Verfahren zu seiner Herstellung und Speicheranordnung Vertical nano-transistors, to processes for its preparation and storage device |
| 03/24/2005 | DE10338689A1 Resistance components with equalizable electric resistance for integrated circuits, with two resistance regions, with first region containing higher dopant concentration |
| 03/24/2005 | DE10338422A1 Selektiver Plasmaätzprozess zur Aluminiumoxid-Strukturierung Selective plasma etching of alumina-structuring |
| 03/24/2005 | DE10338019A1 Verfahren zum hochaufgelösten Bearbeiten dünner Schichten mit Elektronenstrahlen A method for high-resolution processing of thin films with electron |
| 03/24/2005 | DE102004041622A1 Semiconductor component comprises lateral trench insulated gate bipolar transistor for power information technology and has control electrode in trench with isolation layers |
| 03/24/2005 | DE102004041066A1 Hochintegriertes Halbleiterbauelement mit Silicidschicht und zugehöriges Herstellungsverfahren Highly integrated semiconductor device with silicide layer and manufacturing method thereof |
| 03/24/2005 | DE102004039660A1 Capacitive structure for semiconductor device comprises storage electrode, dielectric layer on storage electrode, plate electrode on dielectric layer, and stabilizing member fixed to storage electrode |
| 03/24/2005 | DE102004039059A1 Semiconductor substrate cleaning method in integrated circuit manufacture, involves moving separation plate formed with exhaust path between cleaning and drying rooms, for separating both rooms, after moving wafer support to drying room |
| 03/24/2005 | DE102004035559A1 Verfahren zur Auswahl von Substraten für Fotomaskenrohlinge Procedures for the selection of substrates for photomask blanks |
| 03/24/2005 | DE102004032703A1 Verfahren zum Ausbilden von Isolationsgebieten eines Halbleiterbauelements und Halbleiterbauelements A method of forming isolation regions of a semiconductor device and semiconductor device |
| 03/24/2005 | DE102004031877A1 Verfahren zum Untersuchen einer Maske oder eines Retikels zum Erkennen eines Defekts und Masken- oder Retikeluntersuchungssystem A method of inspecting a mask or a reticle for detecting a defect and mask or Retikeluntersuchungssystem |
| 03/24/2005 | DE102004028185A1 Prüfkarte Probe card |
| 03/24/2005 | DE102004027663A1 Maskenlose Array-Schutz-Prozessabfolge zur Bildung von Durchgangsverbindungen in magnetischen Zufallszugriffsspeichern Maskless Array protection process sequence for forming vias in magnetic random access memories |
| 03/24/2005 | DE102004026746A1 Production of a thin film or powder array by liquid source misted chemical deposition comprises producing two or more types of metal precursor liquids; producing droplets; depositing the droplets on a substrate; and thermo-processing |
| 03/24/2005 | DE102004018634A1 System und Verfahren zum Steuern einer VLSI-Umgebung System and method for controlling a VLSI environment |
| 03/24/2005 | DE10141301B4 Semiconductor device e.g., dynamic random access memory device, includes silicon oxide spacers on sides of conductor structures, and silicon nitride spacers on partially exposed upper side portions of conductor structures |
| 03/24/2005 | CA2539463A1 Method and device for contacting vo semiconductor chips on a metallic substrate |
| 03/23/2005 | EP1517599A1 A method of interconnecting opposite sides of an electronic component interconnection device |
| 03/23/2005 | EP1517598A1 Method for mounting an electronic component on a support |
| 03/23/2005 | EP1517448A1 D/A conversion circuit and semiconductor device |
| 03/23/2005 | EP1517383A1 Magnetoresistive device and magnetic memory device |
| 03/23/2005 | EP1517380A2 Gallium nitride compound semiconductor device and method of manufacturing the same |
| 03/23/2005 | EP1517377A1 Bipolar transistor |
| 03/23/2005 | EP1517372A2 Electronic component, method for making the same, and lead frame and mold assembly for use therein |
| 03/23/2005 | EP1517371A2 Electronic component, method for making the same, and lead frame and mold assembly for use therein |
| 03/23/2005 | EP1517370A2 Method for producing metal/ceramic bonding circuit board |
| 03/23/2005 | EP1517369A2 Method of manufacturing wafer level chip size package |
| 03/23/2005 | EP1517368A2 Protection of a SiC surface via a GaN-layer |
| 03/23/2005 | EP1517367A2 Resin composition for encapsulating semiconductor device |
| 03/23/2005 | EP1517366A2 Dual depth trench termination method for improving cu-based interconnect integrity |
| 03/23/2005 | EP1517365A2 Method of producing a semiconductor building element with active areas that are separated by isolation structures. |
| 03/23/2005 | EP1517364A1 Semiconductor device and its producing method |
| 03/23/2005 | EP1517363A2 Thin film semiconductor device and fabrication method therefor |
| 03/23/2005 | EP1517362A2 Method of making semiconductor devices in a semiconductor substrate |
| 03/23/2005 | EP1517361A2 Method of making a MOS transistor having a drift region with a trench |
| 03/23/2005 | EP1517360A2 Analog capacitor and method of fabricating the same |
| 03/23/2005 | EP1517357A2 Monitoring dimensions of features at different locations in the processing of substrates |
| 03/23/2005 | EP1517356A2 Electron-beam lithography method and device |
| 03/23/2005 | EP1517339A2 Illumination optical system and exposure apparatus |
| 03/23/2005 | EP1517338A2 Illumination optical system and exposure apparatus |
| 03/23/2005 | EP1517189A2 Critical dimension optimisation in lithography |
| 03/23/2005 | EP1517185A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/23/2005 | EP1517184A1 Lithographic apparatus and device manufacturing method |
| 03/23/2005 | EP1517183A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/23/2005 | EP1517182A1 Positive resist composition and process for forming pattern using the same |
| 03/23/2005 | EP1517178A1 A process for preparing peptide nucleic acid probe using monomeric photoacid generator |
| 03/23/2005 | EP1517166A2 Device package and methods for the fabrication and testing thereof |
| 03/23/2005 | EP1516863A1 Ultra low thermal expansion transparent glass-ceramics |
| 03/23/2005 | EP1516700A2 Method of dressing polishing pad and polishing apparatus |
| 03/23/2005 | EP1516370A1 Ge photodetectors |
| 03/23/2005 | EP1516366A2 Semiconductor memory device having a ferroelectric capacitor and a manufacturing method thereof |
| 03/23/2005 | EP1516365A1 Method for the production of a semiconductor structure comprising a plurality of gate stacks on a semiconductor substrate, and corresponding semiconductor structure |
| 03/23/2005 | EP1516364A2 Resistor network such as a resistor ladder network and a method for manufacturing such a resistor network |
| 03/23/2005 | EP1516363A2 Data carrier comprising an integrated circuit with an esd protection circuit |
| 03/23/2005 | EP1516362A2 A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide |
| 03/23/2005 | EP1516361A1 Method for producing semi-insulating resistivity in high purity silicon carbide crystals |
| 03/23/2005 | EP1516360A1 Fluoropolymer interlayer dielectric by chemical vapor deposition |
| 03/23/2005 | EP1516359A2 Electrically resistant diamond-based component |
| 03/23/2005 | EP1516358A1 Device for picking ic's from a wafer |
| 03/23/2005 | EP1516357A2 Substrate holder and plating apparatus |
| 03/23/2005 | EP1516356A2 Acid etching mixture having reduced water content |
| 03/23/2005 | EP1516355A2 Ferroelectric capacitor and method of manufacturing the same |
| 03/23/2005 | EP1516354A2 Method for improving the adhesion of a coating |
| 03/23/2005 | EP1516350A2 Plasma processor with electrode simultaneously responsive to plural frequencies |
| 03/23/2005 | EP1516230A2 Photosensitive compositions |
| 03/23/2005 | EP1516229A2 Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds |
| 03/23/2005 | EP1516226A1 Developer-soluble metal alkoxide coatings for microelectronic applications |
| 03/23/2005 | EP1516195A1 Electromigration test device and electromigration test method |