Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2005
03/24/2005US20050061768 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum and methods of forming trench isolation within a semiconductor substrate
03/24/2005US20050061679 Exposing noble metal layer to electrodeposition composition comprising a copper salt, a suppressor, an accelerator and an electrolyte, initiating electrodeposition of copper on a surface of the noble metal layer by application of a predetermined current density
03/24/2005US20050061675 Workpiece holder including electrode assembly having contact part which connects to distal end of electrode shaft, bears against workpiece, conducts current; for plating copper onto semiconductor materials
03/24/2005US20050061665 Substrate carrier for electroplating solar cells
03/24/2005US20050061659 Plating apparatus and plating method
03/24/2005US20050061626 Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby
03/24/2005US20050061451 Functionalized nanosubstrates and methods for three-dimensional nanoelement selection and assembly
03/24/2005US20050061447 Plasma etching apparatus
03/24/2005US20050061443 Plasma processing apparatus and system, performance validation system and inspection method therefor
03/24/2005US20050061442 Plasma treatment apparatus and control method thereof
03/24/2005US20050061441 Substrate treating apparatus
03/24/2005US20050061440 Gas reaction chamber system having gas supply apparatus
03/24/2005US20050061439 Method of processing substrate and chemical used in the same
03/24/2005US20050061431 Method of fixing a sealing object to a base object
03/24/2005US20050061425 Method and apparatus for joining adhesive tape
03/24/2005US20050061355 used to remove undesirable particles from component parts such as a workpiece, a semiconductor wafer or a disc drive component of a data storage system
03/24/2005US20050061248 Substrate processing apparatus
03/24/2005US20050061247 Substrate processing apparatus, and combined system of functional blocks for use in substrate processing apparatus
03/24/2005US20050061246 Conveyor device and film formation apparatus for a flexible substrate
03/24/2005US20050061245 Chemical vapor deposition apparatus
03/24/2005US20050061242 Substrate processing apparatus for performing photolithography
03/24/2005US20050061240 Substrate processing apparatus and substrate processing method
03/24/2005US20050061235 Method of manufacturing Er-doped silicon nano-dot array and laser ablation apparatus used therein
03/24/2005US20050061107 Coated silver-containing particles, method and apparatus of manufacture, and silver-containing devices made therefrom
03/24/2005US20050060887 Method for producing metal/ceramic bonding circuit board
03/24/2005US20050060883 Part mounting apparatus and part mounting method
03/24/2005US20050060876 Fuel cell and power chip technology
03/24/2005US20050060823 Arrangement for processing disks of different sizes
03/24/2005DE19837516B4 Verfahren und Vorrichtung zur Ausbildung einer dünnen Schicht Method and apparatus for forming a thin layer
03/24/2005DE10358843B3 Packaging container for power semiconducting modules has cover surface with support(s) that narrows as it extends into molded body and into opening in module to prevent contact between module and covering surface
03/24/2005DE10356177A1 Manufacturing semiconductor device, e.g. dynamic random access memory, by forming photoresist pattern using photoresist polymer remover composition with sulfuric and acetic acids, hydrogen peroxide or ozone, ammonium fluoride
03/24/2005DE10340974A1 Control unit for motor vehicles braking systems comprises a frame having a recess filled with a sealing gel which is viscous enough the flow around electrical strip conductors in the recess
03/24/2005DE10339529A1 Vertikaler Nano-Transistor, Verfahren zu seiner Herstellung und Speicheranordnung Vertical nano-transistors, to processes for its preparation and storage device
03/24/2005DE10338689A1 Resistance components with equalizable electric resistance for integrated circuits, with two resistance regions, with first region containing higher dopant concentration
03/24/2005DE10338422A1 Selektiver Plasmaätzprozess zur Aluminiumoxid-Strukturierung Selective plasma etching of alumina-structuring
03/24/2005DE10338019A1 Verfahren zum hochaufgelösten Bearbeiten dünner Schichten mit Elektronenstrahlen A method for high-resolution processing of thin films with electron
03/24/2005DE102004041622A1 Semiconductor component comprises lateral trench insulated gate bipolar transistor for power information technology and has control electrode in trench with isolation layers
03/24/2005DE102004041066A1 Hochintegriertes Halbleiterbauelement mit Silicidschicht und zugehöriges Herstellungsverfahren Highly integrated semiconductor device with silicide layer and manufacturing method thereof
03/24/2005DE102004039660A1 Capacitive structure for semiconductor device comprises storage electrode, dielectric layer on storage electrode, plate electrode on dielectric layer, and stabilizing member fixed to storage electrode
03/24/2005DE102004039059A1 Semiconductor substrate cleaning method in integrated circuit manufacture, involves moving separation plate formed with exhaust path between cleaning and drying rooms, for separating both rooms, after moving wafer support to drying room
03/24/2005DE102004035559A1 Verfahren zur Auswahl von Substraten für Fotomaskenrohlinge Procedures for the selection of substrates for photomask blanks
03/24/2005DE102004032703A1 Verfahren zum Ausbilden von Isolationsgebieten eines Halbleiterbauelements und Halbleiterbauelements A method of forming isolation regions of a semiconductor device and semiconductor device
03/24/2005DE102004031877A1 Verfahren zum Untersuchen einer Maske oder eines Retikels zum Erkennen eines Defekts und Masken- oder Retikeluntersuchungssystem A method of inspecting a mask or a reticle for detecting a defect and mask or Retikeluntersuchungssystem
03/24/2005DE102004028185A1 Prüfkarte Probe card
03/24/2005DE102004027663A1 Maskenlose Array-Schutz-Prozessabfolge zur Bildung von Durchgangsverbindungen in magnetischen Zufallszugriffsspeichern Maskless Array protection process sequence for forming vias in magnetic random access memories
03/24/2005DE102004026746A1 Production of a thin film or powder array by liquid source misted chemical deposition comprises producing two or more types of metal precursor liquids; producing droplets; depositing the droplets on a substrate; and thermo-processing
03/24/2005DE102004018634A1 System und Verfahren zum Steuern einer VLSI-Umgebung System and method for controlling a VLSI environment
03/24/2005DE10141301B4 Semiconductor device e.g., dynamic random access memory device, includes silicon oxide spacers on sides of conductor structures, and silicon nitride spacers on partially exposed upper side portions of conductor structures
03/24/2005CA2539463A1 Method and device for contacting vo semiconductor chips on a metallic substrate
03/23/2005EP1517599A1 A method of interconnecting opposite sides of an electronic component interconnection device
03/23/2005EP1517598A1 Method for mounting an electronic component on a support
03/23/2005EP1517448A1 D/A conversion circuit and semiconductor device
03/23/2005EP1517383A1 Magnetoresistive device and magnetic memory device
03/23/2005EP1517380A2 Gallium nitride compound semiconductor device and method of manufacturing the same
03/23/2005EP1517377A1 Bipolar transistor
03/23/2005EP1517372A2 Electronic component, method for making the same, and lead frame and mold assembly for use therein
03/23/2005EP1517371A2 Electronic component, method for making the same, and lead frame and mold assembly for use therein
03/23/2005EP1517370A2 Method for producing metal/ceramic bonding circuit board
03/23/2005EP1517369A2 Method of manufacturing wafer level chip size package
03/23/2005EP1517368A2 Protection of a SiC surface via a GaN-layer
03/23/2005EP1517367A2 Resin composition for encapsulating semiconductor device
03/23/2005EP1517366A2 Dual depth trench termination method for improving cu-based interconnect integrity
03/23/2005EP1517365A2 Method of producing a semiconductor building element with active areas that are separated by isolation structures.
03/23/2005EP1517364A1 Semiconductor device and its producing method
03/23/2005EP1517363A2 Thin film semiconductor device and fabrication method therefor
03/23/2005EP1517362A2 Method of making semiconductor devices in a semiconductor substrate
03/23/2005EP1517361A2 Method of making a MOS transistor having a drift region with a trench
03/23/2005EP1517360A2 Analog capacitor and method of fabricating the same
03/23/2005EP1517357A2 Monitoring dimensions of features at different locations in the processing of substrates
03/23/2005EP1517356A2 Electron-beam lithography method and device
03/23/2005EP1517339A2 Illumination optical system and exposure apparatus
03/23/2005EP1517338A2 Illumination optical system and exposure apparatus
03/23/2005EP1517189A2 Critical dimension optimisation in lithography
03/23/2005EP1517185A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
03/23/2005EP1517184A1 Lithographic apparatus and device manufacturing method
03/23/2005EP1517183A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
03/23/2005EP1517182A1 Positive resist composition and process for forming pattern using the same
03/23/2005EP1517178A1 A process for preparing peptide nucleic acid probe using monomeric photoacid generator
03/23/2005EP1517166A2 Device package and methods for the fabrication and testing thereof
03/23/2005EP1516863A1 Ultra low thermal expansion transparent glass-ceramics
03/23/2005EP1516700A2 Method of dressing polishing pad and polishing apparatus
03/23/2005EP1516370A1 Ge photodetectors
03/23/2005EP1516366A2 Semiconductor memory device having a ferroelectric capacitor and a manufacturing method thereof
03/23/2005EP1516365A1 Method for the production of a semiconductor structure comprising a plurality of gate stacks on a semiconductor substrate, and corresponding semiconductor structure
03/23/2005EP1516364A2 Resistor network such as a resistor ladder network and a method for manufacturing such a resistor network
03/23/2005EP1516363A2 Data carrier comprising an integrated circuit with an esd protection circuit
03/23/2005EP1516362A2 A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide
03/23/2005EP1516361A1 Method for producing semi-insulating resistivity in high purity silicon carbide crystals
03/23/2005EP1516360A1 Fluoropolymer interlayer dielectric by chemical vapor deposition
03/23/2005EP1516359A2 Electrically resistant diamond-based component
03/23/2005EP1516358A1 Device for picking ic's from a wafer
03/23/2005EP1516357A2 Substrate holder and plating apparatus
03/23/2005EP1516356A2 Acid etching mixture having reduced water content
03/23/2005EP1516355A2 Ferroelectric capacitor and method of manufacturing the same
03/23/2005EP1516354A2 Method for improving the adhesion of a coating
03/23/2005EP1516350A2 Plasma processor with electrode simultaneously responsive to plural frequencies
03/23/2005EP1516230A2 Photosensitive compositions
03/23/2005EP1516229A2 Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
03/23/2005EP1516226A1 Developer-soluble metal alkoxide coatings for microelectronic applications
03/23/2005EP1516195A1 Electromigration test device and electromigration test method