| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/17/2005 | US20050056616 using aqueous solutions comprising oxidizers, complexing agents and water, to form uniform and smooth surfaces |
| 03/17/2005 | US20050056615 Selective plasma etching process for aluminum oxide patterning |
| 03/17/2005 | US20050056601 Semiconductor component handling device having an electrostatic dissipating film |
| 03/17/2005 | US20050056537 Planarization of substrates using electrochemical mechanical polishing |
| 03/17/2005 | US20050056536 Multi-step magnetron sputtering process |
| 03/17/2005 | US20050056446 Electronic component and method of manufacturing the same |
| 03/17/2005 | US20050056445 Junction structure and junction method for conductive projection |
| 03/17/2005 | US20050056441 Reduction of electric-field-induced damage in field-sensitive articles |
| 03/17/2005 | US20050056371 Substrate receiving apparatus and method thereof |
| 03/17/2005 | US20050056370 Pedestal with integral shield |
| 03/17/2005 | US20050056368 Chemical-mechanical polishing composition and method for using the same |
| 03/17/2005 | US20050056352 Porous silicon region is converted into a buried silicon oxide region, while simultaneously forming a relaxed SiGe alloy layer atop the buried oxide |
| 03/17/2005 | US20050056351 Surface treatment method, process for producing near-field exposure mask using the method, and nanoimprint lithography mask |
| 03/17/2005 | US20050056306 Gas stream ejection through nozzle; forming recesses, apertures; oxidation; controlling pressure |
| 03/17/2005 | US20050056305 Particulate removal from an electrostatic chuck |
| 03/17/2005 | US20050056223 Cold wall chemical vapor deposition apparatus and cleaning method of a chamber for the same |
| 03/17/2005 | US20050056221 Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes |
| 03/17/2005 | US20050056220 Method and apparatus for forming silicon oxide film |
| 03/17/2005 | US20050056217 Shower head, device and method for manufacturing thin films |
| 03/17/2005 | US20050056210 Heterojunction tunneling diodes and process for fabricating same |
| 03/17/2005 | DE19861248B4 Electrodeposition unit for semiconductor wafer coating - has anode with central opening to promote uniform deposited layer thickness |
| 03/17/2005 | DE19848283B4 Halbleiterspeichereinrichtung mit verbessertem Treiber für den Leseverstärker A semiconductor memory device with improved sense amplifier driver for the |
| 03/17/2005 | DE19757696B4 Simulationsverfahren in einem lithographischen Prozeß Simulation method in a lithographic process |
| 03/17/2005 | DE19715194B4 Verfahren zum Herstellen von Halbleitervorrichtungen unter Verwendung von Trockenätzen A method of manufacturing semiconductor devices using dry etching |
| 03/17/2005 | DE10361718A1 Vorrichtung und Verfahren zum Steuern von nicht flüchtigem DRAM Apparatus and method for controlling non-volatile DRAM |
| 03/17/2005 | DE10361674A1 Nicht-Flüchtiger dynamischer Schreib/Lese-Speicher Non-volatile dynamic read / write memory |
| 03/17/2005 | DE10357724A1 Ecken-Rundungsverfahren für partielle Vertikaltransistoren Corner rounding method for partial vertical transistors |
| 03/17/2005 | DE10338731B4 Verfahren zur Herstellung einer (RO)(R'O)(R''O)M=O-Verbindung, dünnschichtbildendes Material, Dünnschicht und Halbleiterelement A process for producing a (RO) (R'O) (R''O) M = O compound thin film forming material, and thin-film semiconductor element |
| 03/17/2005 | DE10337858A1 Production of a trench capacitor in a semiconductor substrate for a DRAM arrangement comprises providing a separating layer on a dielectric layer and forming an inner electrode extending over a collar region and active region |
| 03/17/2005 | DE10337570A1 Wafer-handling device for laying in and transporting fragile objects like thin wafers has a transporting container and a supporting plate |
| 03/17/2005 | DE10337562A1 Production of a trench capacitor comprises forming a trench in a substrate using a hard mask with a corresponding opening, placing a capacitor dielectric in the trench and over the mask, and further processing |
| 03/17/2005 | DE10336876A1 Memory cell used in electronic applications comprises a storage layer formed by a material of a gate dielectric and containing nano-crystals or nano-dots |
| 03/17/2005 | DE10301244B4 Verfahren zum Dotieren von Halbleiterkörpern A method of doping semiconductor bodies |
| 03/17/2005 | DE10249569B4 Werkzeugkopf zum Befestigen eines elektrischen Leiters auf der Kontaktfläche eines Substrates und Verfahren zum Durchführen der Befestigung A tool head for securing an electrical conductor on the contact surface of a substrate and methods for performing the fastening |
| 03/17/2005 | DE10222879A1 Messung niedriger Wafer-Temperaturen Measurement of low wafer temperatures |
| 03/17/2005 | DE102004039861A1 Vorrichtung und Verfahren zum Messen jeder Dicke einer Vielfachschicht, die auf einem Substrat aufgestapelt ist Apparatus and method for measuring each thickness of a multiple layer that is stacked on a substrate |
| 03/17/2005 | DE102004038340A1 Verfahren zum Unterteilen eines plattenartigen Werkstücks A method of dividing a plate-like workpiece |
| 03/17/2005 | DE102004038339A1 Waferbearbeitungsverfahren Wafer processing method |
| 03/17/2005 | DE102004036330A1 Integriertes Fet- und Schottky-Bauelement Integrated fats and Schottky device |
| 03/17/2005 | DE102004030848A1 LDMOS-Transistor-Vorrichtung, integrierter Schaltkreis und Verfahren zur Herstellung dieser LDMOS transistor device, integrated circuit and methods for producing these |
| 03/17/2005 | DE102004026206A1 Belichtungsmaskensubstrat-Herstellungsverfahren, Belichtungsmasken-Herstellungsverfahren und Halbleitereinrichtungs-Herstellungsverfahren Exposure mask substrate manufacturing method, exposure mask manufacturing method and semiconductor device production method |
| 03/17/2005 | DE10045534B4 Elektronisches Bauteil mit Außenanschlußelementen ausgebildet als Kapillarelement, Verfahren zur Herstellung und Anordnung An electronic part having external connection elements formed as capillary element, methods of making and arrangement |
| 03/17/2005 | CA2538077A1 Fabrication of single or multiple gate field plates |
| 03/17/2005 | CA2537830A1 Thermal conductive material utilizing electrically conductive nanoparticles |
| 03/17/2005 | CA2537828A1 Solvent-modified resin system containing filler that has high tg, transparency and good reliability in wafer level underfill applications |
| 03/17/2005 | CA2537827A1 Solvent-modified resin compositions and methods of use thereof |
| 03/16/2005 | EP1515442A1 Digitally controlled impedance for I/O of an integrated device |
| 03/16/2005 | EP1515399A2 Anisotropic conductive film, production method thereof and method of use thereof |
| 03/16/2005 | EP1515378A2 Method of forming electrodes for field effect transistors |
| 03/16/2005 | EP1515371A2 Semiconductor device comprising a MOS transistor and method of making the same |
| 03/16/2005 | EP1515364A2 Device package and methods for the fabrication and testing thereof |
| 03/16/2005 | EP1515363A1 Method and device for measuring wafer potential or temperature |
| 03/16/2005 | EP1515362A1 Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method |
| 03/16/2005 | EP1515343A2 Semiconductor memory device |
| 03/16/2005 | EP1515190A2 Exposure apparatus and device fabrication method using the same |
| 03/16/2005 | EP1515186A2 Positive resist composition and pattern formation method using the same |
| 03/16/2005 | EP1514838A1 Process for producing nanoparticle and nanoparticle produced by the process |
| 03/16/2005 | EP1514627A2 Method for removal of surface oxides by electron attachment |
| 03/16/2005 | EP1514615A1 Cleaning sheet; cleaning-functional carrier member and method for cleaning substrate processors comprising them |
| 03/16/2005 | EP1514349A1 Output stage resistant against high voltage swings |
| 03/16/2005 | EP1514318A2 Material for a functional layer of an organic electronic component, method for the production thereof, and use thereof |
| 03/16/2005 | EP1514310A1 Doped regions in an soi substrate |
| 03/16/2005 | EP1514309A1 Deep wordline trench to shield cross coupling between adjacent cells for scaled nand |
| 03/16/2005 | EP1514308A1 Dense array structure for non-volatile semiconductor memories |
| 03/16/2005 | EP1514307A1 Electronics circuit manufacture |
| 03/16/2005 | EP1514306A2 Quad flat non-leaded package comprising a semiconductor device |
| 03/16/2005 | EP1514305A2 Semiconductor device and method of manufacturing same |
| 03/16/2005 | EP1514304A1 Method for the production of an nrom memory cell arrangement |
| 03/16/2005 | EP1514303A2 Layer assembly and method for producing a layer assembly |
| 03/16/2005 | EP1514302A2 Method and device for producing an electronic component having external contact surfaces |
| 03/16/2005 | EP1514300A1 Trench-gate semiconductor device and method of manufacturing |
| 03/16/2005 | EP1514299A1 Feed-through process and amplifier with feed-through |
| 03/16/2005 | EP1514298A1 Method for producing a spacer structure |
| 03/16/2005 | EP1514297A2 Method for epitaxial growth of a gallium nitride film separated from its substrate |
| 03/16/2005 | EP1514275A1 Ferroelectric memory with series connected memory cells |
| 03/16/2005 | EP1514274A1 Memory storage device with heating element |
| 03/16/2005 | EP1514234A1 Tape manufacturing |
| 03/16/2005 | EP1514198A2 Reconfigurable integrated circuit |
| 03/16/2005 | EP1514158A1 Device for positioning an optical element in a structure |
| 03/16/2005 | EP1514094A2 Vision system |
| 03/16/2005 | EP1514074A2 Interferometry systems involving a dynamic beam-steering assembly |
| 03/16/2005 | EP1513962A2 Device for handling flat panels in a vacuum |
| 03/16/2005 | EP1513688A1 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool |
| 03/16/2005 | EP1513652A1 Polishing pad with optical sensor |
| 03/16/2005 | EP1513603A1 Integrated photochemical treatment of gases |
| 03/16/2005 | EP1470207A4 Aqueous stripping and cleaning composition |
| 03/16/2005 | EP1454349A4 Trilayered beam mems device and related methods |
| 03/16/2005 | EP1446806B1 A ferroelectric or electret memory circuit |
| 03/16/2005 | EP1442481A4 Integrated circuit bus grid having wires with pre-selected variable widths |
| 03/16/2005 | EP1442161B1 Method of eliminating voids in w plugs |
| 03/16/2005 | EP1419506B1 Control device for reversing the direction of magnetisation without an external magnetic field |
| 03/16/2005 | EP1415340B1 Method for the parallel production of an mos transistor and a bipolar transistor |
| 03/16/2005 | EP1353693B1 Pharmaceutical combination containing a 4-quinazolineamine and paclitaxel, carboplatin or vinorelbine for the treatment of cancer |
| 03/16/2005 | EP1212726B1 Method for producing a chip card module |
| 03/16/2005 | EP1210736A4 Double recessed transistor |
| 03/16/2005 | EP1149385B1 Ic test software system for mapping logical functional test data of logic integrated circuits to physical representation |
| 03/16/2005 | EP1118002A4 Thermal isolation plate for probe card |
| 03/16/2005 | EP1088331B1 Cleaning process end point determination using throttle valve position |
| 03/16/2005 | EP1017876B1 Gas injection system for plasma processing apparatus |
| 03/16/2005 | EP0932328B1 Substrate for mounting electronic part and process for manufacturing the same |