Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2005
04/05/2005US6875709 Application of a supercritical CO2 system for curing low k dielectric materials
04/05/2005US6875708 Method of producing diamond film and diamond film produced thereby
04/05/2005US6875707 Method of forming a capacitor dielectric layer
04/05/2005US6875706 Cleaning solution and method of cleaning a semiconductor device using the same
04/05/2005US6875705 Method of high selectivity wet etching of salicides
04/05/2005US6875704 Method for forming pattern using printing process
04/05/2005US6875703 Method for forming quadruple density sidewall image transfer (SIT) structures
04/05/2005US6875702 Plasma treatment system
04/05/2005US6875701 Nanotopography removing method
04/05/2005US6875700 Using electron-free ion-ion plasmas, wherein the substrate bias waveform is synched to a pulsed RF drive where there's a delay between the drive pulse and bias pulse to let the electron count drop to zero; microstructue circuitry
04/05/2005US6875699 Method for patterning multilevel interconnects
04/05/2005US6875698 Dry etching method
04/05/2005US6875697 Dual depth trench isolation
04/05/2005US6875696 Ultrasonic-wave washing unit, ultrasonic-wave washing apparatus, ultrasonic-wave washing method, method of manufacturing a semiconductor device, and method of manufacturing a liquid crystal display
04/05/2005US6875695 System and method for analog replication of microdevices having a desired surface contour
04/05/2005US6875694 Method of treating inlaid copper for improved capping layer adhesion without damaging porous low-k materials
04/05/2005US6875693 Via and metal line interface capable of reducing the incidence of electro-migration induced voids
04/05/2005US6875692 Copper electromigration inhibition by copper alloy formation
04/05/2005US6875691 Temperature control sequence of electroless plating baths
04/05/2005US6875690 Semiconductor device having self-aligned contact plug and method for fabricating the same
04/05/2005US6875689 Method of patterning lines in semiconductor devices
04/05/2005US6875688 Method for reactive ion etch processing of a dual damascene structure
04/05/2005US6875687 Capping layer for extreme low dielectric constant films
04/05/2005US6875686 Method for fabricating a structure of interconnections comprising an electric insulation including air or vacuum gaps
04/05/2005US6875685 Method of forming gas dielectric with support structure
04/05/2005US6875684 Method for forming a bit line of a semiconductor device
04/05/2005US6875683 Method of forming bump
04/05/2005US6875682 Mesh pad structure to eliminate IMD crack on pad
04/05/2005US6875681 Wafer passivation structure and method of fabrication
04/05/2005US6875680 Methods of manufacturing transistors using dummy gate patterns
04/05/2005US6875679 Etch stop layer in poly-metal structures
04/05/2005US6875678 Post thermal treatment methods of forming high dielectric layers in integrated circuit devices
04/05/2005US6875677 Method to control the interfacial layer for deposition of high dielectric constant films
04/05/2005US6875676 Methods for producing a highly doped electrode for a field effect transistor
04/05/2005US6875675 Method for manufacturing a semiconductor film having a planarized surface
04/05/2005US6875674 Method of manufacturing a semiconductor device with fluorine concentration
04/05/2005US6875672 Method of manufacturing a semiconductor device with penetration electrodes that protrude from a rear side of a substrate formed by thinning the substrate
04/05/2005US6875671 Method of fabricating vertical integrated circuits
04/05/2005US6875670 Trench isolation method
04/05/2005US6875669 Method of controlling the top width of a deep trench
04/05/2005US6875668 Notched gate structure fabrication
04/05/2005US6875667 Method for forming capacitor
04/05/2005US6875666 Methods of manufacturing transistors and transistors having an anti-punchthrough region
04/05/2005US6875665 Method of manufacturing a semiconductor device
04/05/2005US6875664 Formation of amorphous carbon ARC stack having graded transition between amorphous carbon and ARC material
04/05/2005US6875663 Semiconductor device having a trench isolation and method of fabricating the same
04/05/2005US6875662 Semiconductor device
04/05/2005US6875661 Solution deposition of chalcogenide films
04/05/2005US6875660 Method of manufacturing high coupling ratio flash memory having sidewall spacer floating gate electrode
04/05/2005US6875659 Methods of code programming a mask ROM
04/05/2005US6875658 High-voltage device with improved punch through voltage and process for same compatible with low-voltage device process
04/05/2005US6875657 Method of fabricating trench MIS device with graduated gate oxide layer
04/05/2005US6875656 Method for improving silicon-on-insulator (SOI) film uniformity on a semiconductor wafer
04/05/2005US6875655 Method of forming DRAM capacitors with protected outside crown surface for more robust structures
04/05/2005US6875654 Memory device and fabrication method thereof
04/05/2005US6875653 DRAM cell structure with buried surrounding capacitor and process for manufacturing the same
04/05/2005US6875652 Method for producing ferroelectric capacitors and integrated semiconductor memory chips
04/05/2005US6875651 Dual-trench isolated crosspoint memory array and method for fabricating same
04/05/2005US6875650 Eliminating substrate noise by an electrically isolated high-voltage I/O transistor
04/05/2005US6875649 Methods for manufacturing integrated circuit devices including an isolation region defining an active region area
04/05/2005US6875648 Fabrication of an EEPROM cell with emitter-polysilicon source/drain regions
04/05/2005US6875647 Method of manufacturing semiconductor devices to protect against a punchthrough phenomenon
04/05/2005US6875646 Semiconductor processing methods of forming integrated circuitry
04/05/2005US6875645 Pixel structure and fabricating method thereof
04/05/2005US6875644 Methods of manufacturing thin film transistors using masks to protect the channel regions from impurities while doping a semiconductor layer to form source/drain regions
04/05/2005US6875643 SOI substrate and manufacturing method thereof
04/05/2005US6875639 Semiconductor device and method of manufacturing the same
04/05/2005US6875638 Manufacturing method of a semiconductor device incorporating a passive element and a redistribution board
04/05/2005US6875637 Semiconductor package insulation film and manufacturing method thereof
04/05/2005US6875633 Process for production of SOI substrate and process for production of semiconductor device
04/05/2005US6875632 Underfill and encapsulation of carrier substrate-mounted flip-chip components using stereolithography
04/05/2005US6875630 Lead frame, method of manufacturing the same, and method of manufacturing a semiconductor device using the same
04/05/2005US6875629 III group nitride based semiconductor element and method for manufacture thereof
04/05/2005US6875628 Semiconductor device and fabrication method of the same
04/05/2005US6875624 Combined E-beam and optical exposure semiconductor lithography
04/05/2005US6875623 Method for fabricating semiconductor device
04/05/2005US6875559 Method of etching materials patterned with a single layer 193nm resist
04/05/2005US6875558 Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI)
04/05/2005US6875556 Resist compositions and patterning process
04/05/2005US6875547 Mask for crystallizing amorphous
04/05/2005US6875546 Method of patterning photoresist on a wafer using an attenuated phase shift mask
04/05/2005US6875545 Performing a first exposure of the substrate utilizing a x-dipole illumination, and a second exposure of the substrate utilizing a y-dipole illumination; using optical proximity correction
04/05/2005US6875544 Method for the fabrication of three-dimensional microstructures by deep X-ray lithography
04/05/2005US6875477 Method for coating internal surface of plasma processing chamber
04/05/2005US6875468 Method and device for treating and/or coating a surface of an object
04/05/2005US6875466 Coating a resist on the substrate, and placing in a vapor atmosphere
04/05/2005US6875372 Fine particle size; monodispersion; crystal structure
04/05/2005US6875371 Using fluorohydrocarbon mixture
04/05/2005US6875365 Method for producing liquid discharge head
04/05/2005US6875359 Developer waste liquid regenerating apparatus and method
04/05/2005US6875326 Plasma processing apparatus with real-time particle filter
04/05/2005US6875321 Auxiliary magnet array in conjunction with magnetron sputtering
04/05/2005US6875306 Vacuum processing device
04/05/2005US6875289 Rinsing microelectronics by immersing in vessels containing liquids, then lifting from the bath to form an interface and blowing cleaning compounds to create surface tension gradients
04/05/2005US6875288 Cleaning agent and cleaning method
04/05/2005US6875287 Choosing rinse recipe for wet bench, activating wet bench and detecting waste water quality of waste water produced for rinse recipe to generate water quality data for a plurality of reclamation switch time levels, ascertaining best switch time
04/05/2005US6875286 Solid CO2 cleaning
04/05/2005US6875285 System and method for dampening high pressure impact on porous materials
04/05/2005US6875284 Selectively clean various surfaces of a microelectronic workpiece using vibrational, megasonics energy
04/05/2005US6875283 Film forming apparatus and film forming method