| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/12/2005 | US6878632 Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof |
| 04/12/2005 | US6878631 Abrasive used for planarization of semiconductor device and method of manufacturing semiconductor device using the abrasive |
| 04/12/2005 | US6878630 Method of manufacturing a wafer |
| 04/12/2005 | US6878629 Method for detecting CMP endpoint in acidic slurries |
| 04/12/2005 | US6878628 In situ reduction of copper oxide prior to silicon carbide deposition |
| 04/12/2005 | US6878627 Semiconductor device with cobalt silicide contacts and method of making the same |
| 04/12/2005 | US6878625 Method for manufacturing semiconductor device |
| 04/12/2005 | US6878624 Pre-anneal of CoSi, to prevent formation of amorphous layer between Ti-O-N and CoSi |
| 04/12/2005 | US6878623 Technique to achieve thick silicide film for ultra-shallow junctions |
| 04/12/2005 | US6878622 Method for forming SAC using a dielectric as a BARC and FICD enlarger |
| 04/12/2005 | US6878621 Method of fabricating barrierless and embedded copper damascene interconnects |
| 04/12/2005 | US6878620 Side wall passivation films for damascene cu/low k electronic devices |
| 04/12/2005 | US6878619 Method for fabricating semiconductor device |
| 04/12/2005 | US6878617 Method of forming copper wire on semiconductor device |
| 04/12/2005 | US6878616 Low-k dielectric material system for IC application |
| 04/12/2005 | US6878615 Method to solve via poisoning for porous low-k dielectric |
| 04/12/2005 | US6878614 Methods of forming integrated circuit devices including fuse wires having reduced cross-sectional areas and related structures |
| 04/12/2005 | US6878613 Field-effect transistor having a contact to one of its doping regions, and method for fabricating the transistor |
| 04/12/2005 | US6878612 Self-aligned contact process for semiconductor device |
| 04/12/2005 | US6878611 Patterned strained silicon for high performance circuits |
| 04/12/2005 | US6878610 Relaxed silicon germanium substrate with low defect density |
| 04/12/2005 | US6878609 Silicon wafer break pattern, silicon substrate, and method of generating silicon wafer break pattern |
| 04/12/2005 | US6878608 Method of manufacture of silicon based package |
| 04/12/2005 | US6878607 Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus |
| 04/12/2005 | US6878606 Fabrication method and device structure of shallow trench insulation for silicon wafer containing silicon-germanium |
| 04/12/2005 | US6878605 Methods for manufacturing SOI substrate using wafer bonding and complementary high voltage bipolar transistor using the SOI substrate |
| 04/12/2005 | US6878604 Semiconductor element comprising a sequence of layers for converting acoustic or thermal signal and electrical voltage changes into each other and method for producing the same |
| 04/12/2005 | US6878603 Process for manufacturing a DMOS transistor |
| 04/12/2005 | US6878602 Dielectric cure for reducing oxygen vacancies |
| 04/12/2005 | US6878601 Method for fabricating a capacitor containing metastable polysilicon |
| 04/12/2005 | US6878600 Method for fabricating trench capacitors and semiconductor device with trench capacitors |
| 04/12/2005 | US6878599 Semiconductor device and method of manufacturing the same |
| 04/12/2005 | US6878598 Method of forming thick metal silicide layer on gate electrode |
| 04/12/2005 | US6878597 Methods of forming source/drain regions using multilayer side wall spacers and structures so formed |
| 04/12/2005 | US6878596 Method of forming high voltage junction in semiconductor device |
| 04/12/2005 | US6878595 Technique for suppression of latchup in integrated circuits (ICS) |
| 04/12/2005 | US6878594 Semiconductor device having an insulation film with reduced water content |
| 04/12/2005 | US6878592 Selective epitaxy to improve silicidation |
| 04/12/2005 | US6878591 Self aligned method of forming non-volatile memory cells with flat word line |
| 04/12/2005 | US6878589 Method and system for improving short channel effect on a floating gate device |
| 04/12/2005 | US6878588 Method for fabricating a flash memory cell |
| 04/12/2005 | US6878587 Method and structure for reducing contact aspect ratios |
| 04/12/2005 | US6878585 Methods of forming capacitors |
| 04/12/2005 | US6878584 Flat panel display with high capacitance and method of manufacturing the same |
| 04/12/2005 | US6878583 Integration method to enhance p+ gate activation |
| 04/12/2005 | US6878582 Low-GIDL MOSFET structure and method for fabrication |
| 04/12/2005 | US6878581 Electrostatic discharge protection structure and a method for forming the same |
| 04/12/2005 | US6878580 Semiconductor device having gate with negative slope and method for manufacturing the same |
| 04/12/2005 | US6878579 Semiconductor device and method of manufacturing the same |
| 04/12/2005 | US6878578 Method for forming a high quality chemical oxide on a freshly cleaned silicon surface as a native oxide replacement |
| 04/12/2005 | US6878577 Method of forming LDD of semiconductor devices |
| 04/12/2005 | US6878576 Method for making semiconductor device including band-engineered superlattice |
| 04/12/2005 | US6878575 Method of forming gate oxide layer in semiconductor devices |
| 04/12/2005 | US6878574 Alloying method for a image display device using laser irradiation |
| 04/12/2005 | US6878573 Method of manufacturing a semiconductor device and semiconductor device |
| 04/12/2005 | US6878572 High capacitance package substrate |
| 04/12/2005 | US6878570 Thin stacked package and manufacturing method thereof |
| 04/12/2005 | US6878568 CMOS imager and method of formation |
| 04/12/2005 | US6878565 Process for improving yield of DFB lasers |
| 04/12/2005 | US6878564 Method of manufacturing a light emitting semiconductor package |
| 04/12/2005 | US6878562 Method for shifting the bandgap energy of a quantum well layer |
| 04/12/2005 | US6878560 Fab correlation system |
| 04/12/2005 | US6878506 Method for manufacturing semiconductor device |
| 04/12/2005 | US6878465 Under bump metallurgy for Lead-Tin bump over copper pad |
| 04/12/2005 | US6878435 Adapted for enhancing the adhesion strength of a typical single layer anisotropic conductive film in flip chip bonding; comprising epoxy resin-based film containing conductive particles |
| 04/12/2005 | US6878417 Molecules adsorb at surfaces in patterns and then the surface is imprinted with the pattern by inducing localized chemical reaction between adsorbate molecules and the surface of the solid |
| 04/12/2005 | US6878415 Reacting a doped surface layer to form a dielectric film, a metal film or a silicide film having a thickness of 50 angstroms or less. |
| 04/12/2005 | US6878406 Heating, cooling; reacting with gases during cooling; uniform thickness |
| 04/12/2005 | US6878402 Method and apparatus for improved temperature control in atomic layer deposition |
| 04/12/2005 | US6878401 Substrate processing method |
| 04/12/2005 | US6878396 Micro C-4 semiconductor die and method for depositing connection sites thereon |
| 04/12/2005 | US6878395 Average surface temperature measured optically and level of the gas cushions regulated by varying the individually controlled gas flow producing the cushions; variations lie within a predetermined temperature window. |
| 04/12/2005 | US6878303 Substrate processing apparatus and substrate processing method |
| 04/12/2005 | US6878302 Method of polishing wafers |
| 04/12/2005 | US6878301 Methods and apparatuses for trench depth detection and control |
| 04/12/2005 | US6878300 Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers |
| 04/12/2005 | US6878259 Immersion in electrolytic cell |
| 04/12/2005 | US6878249 High frequency sputtering device |
| 04/12/2005 | US6878241 Method of forming deposited film |
| 04/12/2005 | US6878234 Plasma processing device and exhaust ring |
| 04/12/2005 | US6878233 Workpiece holding mechanism |
| 04/12/2005 | US6878232 Method and apparatus for improving a temperature controlled solution delivery process |
| 04/12/2005 | US6878216 Substrate processing method and substrate processing system |
| 04/12/2005 | US6878214 Process endpoint detection in processing chambers |
| 04/12/2005 | US6878213 Cleaning partially processed metallized wafers with an aqueous anticorrosion agent; carboxylic acids; acetic acid; removal of N-methylpyrrolidinone etch residue removal chemistry |
| 04/12/2005 | US6878211 Supporting structure for a ceramic susceptor |
| 04/12/2005 | US6878207 Gas gate for isolating regions of differing gaseous pressure |
| 04/12/2005 | US6878206 Lid assembly for a processing system to facilitate sequential deposition techniques |
| 04/12/2005 | US6878202 Method for growing single crystal of compound semiconductor and substrate cut out therefrom |
| 04/12/2005 | US6878172 Systems employing elevated temperatures to enhance quality control in microelectronic component manufacture |
| 04/12/2005 | US6878044 Polishing apparatus |
| 04/12/2005 | US6878036 Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal |
| 04/12/2005 | US6877946 Wafer transport apparatus |
| 04/12/2005 | US6877944 Configuration for transporting a semiconductor wafer carrier |
| 04/12/2005 | US6877853 Pattern formation method and substrate manufacturing apparatus |
| 04/12/2005 | US6877668 Marking method for semiconductor wafer |
| 04/12/2005 | US6877667 Integrated circuit and associated design method with antenna error control using spare gates |
| 04/12/2005 | US6877650 Compliant wirebond pedestal |
| 04/12/2005 | US6877648 Ultrasonic horn, and ultrasonic bonding apparatus using the ultrasonic horn |
| 04/12/2005 | US6877518 Chemical solution treatment apparatus for semiconductor substrate |