Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2005
05/26/2005US20050109820 Low temperature solder chip attach structure and process to produce a high temperature interconnection
05/26/2005US20050109815 Bonding apparatus
05/26/2005US20050109759 Apparatus and method for heating and cooling an article
05/26/2005US20050109743 Semiconductor thin film forming system
05/26/2005US20050109742 Processing method using laser beam
05/26/2005US20050109733 Cleaning and etching methods and their apparatuses
05/26/2005US20050109732 Method for manufacturing organic electroluminescent element and apparatus using the method
05/26/2005US20050109728 End point detector for etching equipment
05/26/2005US20050109669 Substrate container
05/26/2005US20050109667 Wafer container with door actuated wafer restraint
05/26/2005US20050109666 Wafer support attachment for a semi-conductor wafer transport container
05/26/2005US20050109664 Secondary latchkey mechanism and method for reticle SMIF pods
05/26/2005US20050109631 Tape substrate and method for fabricating the same
05/26/2005US20050109627 Uniformity; using electrolytic cells; positioning seed layer of low conductivity
05/26/2005US20050109608 Method of improving thermal stability for cobalt salicide
05/26/2005US20050109462 Apparatus for generating inductively-coupled plasma and antenna coil structure thereof for generating inductive electric fields
05/26/2005US20050109460 Adjustable gas distribution system
05/26/2005US20050109459 High density plasma apparatus and methods of operating the same
05/26/2005US20050109455 Device having a complaint element pressed between substrates
05/26/2005US20050109453 Fabrication of LTCC T/R modules with multiple cavities and an integrated ceramic ring frame
05/26/2005US20050109373 Roller that avoids substrate slippage
05/26/2005US20050109371 Post CMP scrubbing of substrates
05/26/2005US20050109369 Method to use a laser to perform the edge clean operation on a semiconductor wafer
05/26/2005US20050109279 Surface wave excitation plasma CVD system
05/26/2005US20050109274 Coating film forming apparatus
05/26/2005US20050109271 Method of forming refractory metal silicide
05/26/2005US20050109117 Apparatus for shear testing bonds on silicon substrate
05/26/2005US20050108949 A specific surfactant, a silicon oxide, a carboxylic acid or alpha-amino acid, a corrosion inhibitor, an oxidant, and water; decreased dishing
05/26/2005US20050108947 An acidic aqueous solution of a quaternary C1 to C6 (cyclo)alkylammonium hydroxide, phthalic acid and monopotassium phthalate, polyacrylic acid, and an abraisive; improved selectivity in shallow trench isolation processes
05/26/2005US20050108892 Reacting a boron compound with a dielectric substrate to give a volatile product and a boron-containing by-product, and then reacting a fluorine compound with the boron-containing by-product to form the volatile product, and then removing the volatile product from the atomic layer deposition reactor
05/26/2005US20050108873 Apparatus and method for mounting electronic parts
05/26/2005CA2545628A1 Methods of processing semiconductor wafer backsides having light emitting devices (leds) thereon and leds so formed
05/26/2005CA2545163A1 Light emitting devices with self aligned ohmic contact and methods of fabricating same
05/26/2005CA2535634A1 Nanotube-based switching elements with multiple controls and circuits made from same
05/25/2005EP1534054A2 Laminated circuit board and its manufacturing method, and manufacturing method for module using the laminated circuit board and its manufacturing apparatus
05/25/2005EP1533901A2 CMOS circuits with protection for a single event upset
05/25/2005EP1533894A1 Semiconductor integrated circuit and semiconductor integrated circuit manufacturing method
05/25/2005EP1533855A1 Thin film transistor, method for its manufacture, and circuit or electronic device/apparatus comprising it
05/25/2005EP1533849A2 Heterojunction bipolar transistor
05/25/2005EP1533847A1 Solid imaging device
05/25/2005EP1533846A1 Large-capacity magnetic memory using carbon nano-tube
05/25/2005EP1533844A1 Mim capacitor
05/25/2005EP1533842A2 Semiconductor device with protection against unauthorized analysis
05/25/2005EP1533838A2 Method for manufacturing transistor and image display device using the same
05/25/2005EP1533837A1 Selective electroplating method
05/25/2005EP1533836A1 Method for manufacturing silicon epitaxial wafer
05/25/2005EP1533835A1 Vaporizer, various apparatuses including the same and method of vaporization
05/25/2005EP1533834A1 Vapor phase epitaxial apparatus and vapor phase epitaxial method
05/25/2005EP1533833A1 Vapor phase epitaxy device
05/25/2005EP1533815A2 3d rram
05/25/2005EP1533743A1 Fingerprint sensor and fabrication method thereof
05/25/2005EP1533402A1 Epitaxial wafer and its manufacturing method
05/25/2005EP1533352A1 Compositions and methods for polishing copper
05/25/2005EP1533077A1 Polishing apparatus and method of polishing work piece
05/25/2005EP1533076A1 Polishing pad having a groove arrangement for reducing slurry consumption
05/25/2005EP1533075A1 Polishing pad having slurry utilization enhancing grooves
05/25/2005EP1532728A1 Improved platen for electrostatic wafer clamping apparatus
05/25/2005EP1532694A2 Method for producing an electromagnetic radiation-emitting semiconductor chip and a corresponding electromagnetic radiation-emitting semiconductor chip
05/25/2005EP1532689A1 Non-volatile semiconductor memory element and corresponding production and operation method
05/25/2005EP1532688A1 Organic semiconductor element, production method therefor and organic semiconductor device
05/25/2005EP1532687A1 Field effect transistor
05/25/2005EP1532685A1 Configurable molecular switch array
05/25/2005EP1532684A1 Ferroelectric device and method of manufacturing such a device
05/25/2005EP1532681A1 Multi-layer circuit carrier and production thereof
05/25/2005EP1532680A1 Method for the production of individual monolithically integrated semiconductor circuits
05/25/2005EP1532679A2 Self-aligned contacts to gates
05/25/2005EP1532678A2 Semiconductor constructions with gated isolation regions having indium-doped sub-regions
05/25/2005EP1532677A2 Recycling a wafer comprising a buffer layer, after having taken off a thin layer therefrom
05/25/2005EP1532676A2 Mechanical recycling of a wafer comprising a buffer layer, after having taken a layer therefrom
05/25/2005EP1532675A1 Method and apparatus for predicting device electrical parameters during fabrication
05/25/2005EP1532674A2 Dynamic targeting for a process control system
05/25/2005EP1532673A1 Method and apparatus for completely or partly covering at least one electronic component with a compound
05/25/2005EP1532672A2 Nitrogen passivation of interface states in sio 2/sic structures
05/25/2005EP1532671A2 Method for selectively removing material from the surface of a substrate, masking material for a wafer and wafer provided with a masking material
05/25/2005EP1532670A2 Characterization adn reduction of variation for integrated circuits
05/25/2005EP1532669A1 Atomic layer deposition of cmos gates
05/25/2005EP1532668A1 Substrate processing apparatus and substrate processing method
05/25/2005EP1532667A1 Substrate processing system
05/25/2005EP1532666A2 Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of rtp tool
05/25/2005EP1532664A2 Wafer batch processing system and method
05/25/2005EP1532661A1 Device for liquid treatment of disk-shaped objects
05/25/2005EP1532660A2 Method of loading a wafer onto a wafer holder to reduce thermal shock
05/25/2005EP1532659A2 Fin fet devices from bulk semiconductor and method for forming
05/25/2005EP1532658A1 Conductive etch stop for etching a sacrificial layer
05/25/2005EP1532657A2 System and method for hydrogen-rich selective oxidation
05/25/2005EP1532650A1 Controlling the characteristics of ribbon-shaped implanter ion-beams
05/25/2005EP1532639A2 Optical device for high energy radiation
05/25/2005EP1532490A1 Optical reproduction system, in particular catadioptric reduction lens
05/25/2005EP1532489A2 Projection optical system and method for photolithography and exposure apparatus and method using same
05/25/2005EP1532488A1 Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions
05/25/2005EP1532486A1 Photosensitive compositions based on polycyclic polymers
05/25/2005EP1532479A1 Device and method for inspecting an object
05/25/2005EP1532292A1 Atomic deposition layer methods
05/25/2005EP1532291A2 Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides
05/25/2005EP1532290A2 Systems and methods for forming zirconium and/or hafnium-containing layers
05/25/2005EP1532288A2 A hybrid beam deposition system and methods for fabricating zno films, p-type zno films, and zno-based ii-vi compound semiconductor devices
05/25/2005EP1532286A1 Component protected against corrosion and method for the production thereof and device for carrying out said method
05/25/2005EP1532225A1 Etching pastes for titanium oxide surfaces
05/25/2005EP1532222A1 Method and apparatus for chemically, mechanically, and/or electrolytically removing material from microelectronic substrates
05/25/2005EP1532193A2 Organosiloxanes
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