| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/24/2005 | US6897508 Integrated capacitor with enhanced capacitance density and method of fabricating same |
| 05/24/2005 | US6897507 Capacitor for high performance system-on-chip using post passivation device |
| 05/24/2005 | US6897506 Systems and methods using non-volatile memory cells |
| 05/24/2005 | US6897505 On-chip capacitor |
| 05/24/2005 | US6897504 Salicided MOS device and one-sided salicided MOS device, and simultaneous fabrication method thereof |
| 05/24/2005 | US6897503 Semiconductor memory device and manufacturing process for the same |
| 05/24/2005 | US6897502 Semiconductor memory device and its manufacturing method |
| 05/24/2005 | US6897501 Avoiding shorting in capacitors |
| 05/24/2005 | US6897499 Semiconductor integrated circuit device including MISFETs each with a gate electrode extended over a boundary region between an active region and an element isolation trench |
| 05/24/2005 | US6897498 Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform |
| 05/24/2005 | US6897496 Semiconductor device, a method of manufacturing the same and storage media |
| 05/24/2005 | US6897495 Field effect transistor and manufacturing method therefor |
| 05/24/2005 | US6897493 Semiconductor device |
| 05/24/2005 | US6897483 Second gallium nitride layers that extend into trenches in first gallium nitride layers |
| 05/24/2005 | US6897481 Semiconductor devices and manufacturing methods thereof |
| 05/24/2005 | US6897479 ITO film contact structure, TFT substrate and manufacture thereof |
| 05/24/2005 | US6897477 Semiconductor device, manufacturing method thereof, and display device |
| 05/24/2005 | US6897476 Test structure for determining electromigration and interlayer dielectric failure |
| 05/24/2005 | US6897472 Semiconductor device including MOSFET having band-engineered superlattice |
| 05/24/2005 | US6897463 Wafer carrier mapping sensor assembly |
| 05/24/2005 | US6897462 Surface position detection device and exposure apparatus and exposure method achieved by utilizing detection device |
| 05/24/2005 | US6897457 Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus |
| 05/24/2005 | US6897456 Differential pumping system and exposure apparatus |
| 05/24/2005 | US6897454 Energy beam exposure method and exposure apparatus |
| 05/24/2005 | US6897430 Semiconductor device, optoelectronic board, and production methods therefor |
| 05/24/2005 | US6897422 Measuring configuration and method for measuring a critical dimension of at least one feature on a semiconductor wafer |
| 05/24/2005 | US6897415 Workpiece stage of a resist curing device |
| 05/24/2005 | US6897414 Ceramic heater for semiconductor manufacturing/testing apparatus |
| 05/24/2005 | US6897411 Heated substrate support |
| 05/24/2005 | US6897403 Plasma processing method and plasma processing apparatus |
| 05/24/2005 | US6897385 Semiconductor test board for fine ball pitch ball grid array package |
| 05/24/2005 | US6897383 Electrical cable moisture barrier |
| 05/24/2005 | US6897267 Multilayer ink jet print heads; crosslinked polymer |
| 05/24/2005 | US6897174 Composite metal oxide compound; ferroelectricity, piezoelectricity, thermoelectricity |
| 05/24/2005 | US6897166 Method of fabricating semiconductor device and system of fabricating semiconductor device |
| 05/24/2005 | US6897164 Aperture masks for circuit fabrication |
| 05/24/2005 | US6897163 Method for depositing a low dielectric constant film |
| 05/24/2005 | US6897162 Integrated ashing and implant annealing method |
| 05/24/2005 | US6897161 Removing deposits from silicon electrode plates includes radiating ultrasonic waves toward a surface of the plate having openings of the plurality of gas nozzles from a horn connected to an ultrasonic vibrator |
| 05/24/2005 | US6897160 Methods for forming rough ruthenium-containing layers and structures/methods using same |
| 05/24/2005 | US6897159 Method for fabricating semiconductor device |
| 05/24/2005 | US6897158 Process for making angled features for nanolithography and nanoimprinting |
| 05/24/2005 | US6897157 Method of repairing an opaque defect on a mask with electron beam-induced chemical etching |
| 05/24/2005 | US6897156 Vacuum plasma processor method |
| 05/24/2005 | US6897155 Method for etching high-aspect-ratio features |
| 05/24/2005 | US6897154 Selective etching of low-k dielectrics |
| 05/24/2005 | US6897153 Etching gas composition for silicon oxide and method of etching silicon oxide using the same |
| 05/24/2005 | US6897152 Copper bath composition for electroless and/or electrolytic filling of vias and trenches for integrated circuit fabrication |
| 05/24/2005 | US6897151 Methods of filling a feature on a substrate with copper nanocrystals |
| 05/24/2005 | US6897150 Semiconductor wafer surface and method of treating a semiconductor wafer surface |
| 05/24/2005 | US6897149 Method of producing electronic device material |
| 05/24/2005 | US6897148 Electroplating and electroless plating of conductive materials into openings, and structures obtained thereby |
| 05/24/2005 | US6897147 Solution for copper hillock induced by thermal strain with buffer zone for strain relaxation |
| 05/24/2005 | US6897146 System architecture of semiconductor manufacturing equipment |
| 05/24/2005 | US6897145 Method for fabricating semiconductor device by forming damascene interconnections |
| 05/24/2005 | US6897144 Cu capping layer deposition with improved integrated circuit reliability |
| 05/24/2005 | US6897143 Method of manufacturing semiconductor device including two-step polishing operation for cap metal |
| 05/24/2005 | US6897142 Formation of solder balls having resin member as reinforcement |
| 05/24/2005 | US6897141 Solder terminal and fabricating method thereof |
| 05/24/2005 | US6897140 Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography |
| 05/24/2005 | US6897139 Group III nitride compound semiconductor device |
| 05/24/2005 | US6897138 Method and apparatus for producing group III nitride compound semiconductor |
| 05/24/2005 | US6897137 Process for fabricating ultra-low contact resistances in GaN-based devices |
| 05/24/2005 | US6897136 Method for forming fuse in semiconductor device |
| 05/24/2005 | US6897135 Method for fabricating metal interconnections |
| 05/24/2005 | US6897134 Method for making a semiconductor device having a high-k gate dielectric |
| 05/24/2005 | US6897133 Method for producing a schottky diode in silicon carbide |
| 05/24/2005 | US6897132 Method of reducing the conductivity of a semiconductor and devices made thereby |
| 05/24/2005 | US6897131 Advances in spike anneal processes for ultra shallow junctions |
| 05/24/2005 | US6897130 Method for thermal processing semiconductor wafer with a flash discharge lamp after preheating to a predetermined temperature |
| 05/24/2005 | US6897129 Fabrication method of semiconductor device and semiconductor device |
| 05/24/2005 | US6897128 Method of manufacturing semiconductor device, plasma processing apparatus and plasma processing method |
| 05/24/2005 | US6897127 Semiconductor device, method of manufacturing the same, circuit board, and electronic instrument |
| 05/24/2005 | US6897126 Semiconductor device manufacturing method using mask slanting from orientation flat |
| 05/24/2005 | US6897125 Methods of forming backside connections on a wafer stack |
| 05/24/2005 | US6897124 Method of manufacturing a bonded wafers using a Bernoulli chuck |
| 05/24/2005 | US6897123 Bonding of parts with dissimilar thermal expansion coefficients |
| 05/24/2005 | US6897122 Wide neck shallow trench isolation region to prevent strain relaxation at shallow trench isolation region edges |
| 05/24/2005 | US6897121 Method of removing HDP oxide deposition |
| 05/24/2005 | US6897120 Method of forming integrated circuitry and method of forming shallow trench isolation in a semiconductor substrate |
| 05/24/2005 | US6897118 Method of multiple pulse laser annealing to activate ultra-shallow junctions |
| 05/24/2005 | US6897117 Method of manufacturing semiconductor device |
| 05/24/2005 | US6897116 Method and structure to improve the gate coupling ratio (GCR) for manufacturing a flash memory device |
| 05/24/2005 | US6897115 Method of fabricating non-volatile memory device |
| 05/24/2005 | US6897114 Methods of forming a transistor having a recessed gate electrode structure |
| 05/24/2005 | US6897113 Single poly EEPROM with improved coupling ratio |
| 05/24/2005 | US6897112 Method for fabricating an integrated semiconductor configuration with the aid of thermal oxidation, related semiconductor configuration, and related memory unit |
| 05/24/2005 | US6897111 Method using quasi-planar double gated fin field effect transistor process for the fabrication of a thyristor-based static read/write random-access memory |
| 05/24/2005 | US6897110 Method of protecting a memory array from charge damage during fabrication |
| 05/24/2005 | US6897109 Methods of manufacturing integrated circuit devices having contact holes using multiple insulating layers |
| 05/24/2005 | US6897108 Process for planarizing array top oxide in vertical MOSFET DRAM arrays |
| 05/24/2005 | US6897107 Method for forming TTO nitride liner for improved collar protection and TTO reliability |
| 05/24/2005 | US6897106 Capacitor of semiconductor memory device that has composite Al2O3/HfO2 dielectric layer and method of manufacturing the same |
| 05/24/2005 | US6897105 Method of forming metal oxide gate structures and capacitor electrodes |
| 05/24/2005 | US6897104 Semiconductor device and method for manufacturing thereof |
| 05/24/2005 | US6897102 Process to minimize polysilicon gate depletion and dopant penetration and to increase conductivity |
| 05/24/2005 | US6897101 Method for writing to the magnetoresistive memory cells of an integrated magnetoresistive semiconductor memory |
| 05/24/2005 | US6897100 Method for processing semiconductor device apparatus for processing a semiconductor and apparatus for processing semiconductor device |
| 05/24/2005 | US6897098 Method of fabricating an ultra-narrow channel semiconductor device |
| 05/24/2005 | US6897097 Semiconductor device and a method of manufacturing the same |