| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/02/2005 | DE102004043474A1 Waferbearbeitungsverfahren Wafer processing method |
| 06/02/2005 | DE102004041883A1 Halbleitervorrichtung Semiconductor device |
| 06/02/2005 | DE102004033743A1 Eine Dünnfilmvorrichtung und ein Verfahren zum Bereitstellen einer thermischen Unterstützung in derselben A thin film device and a method for providing a thermal support in the same |
| 06/02/2005 | DE102004032503A1 Musterschreibvorrichtung Pattern writing apparatus |
| 06/02/2005 | DE102004031139A1 Verfahren zum Herstellen magnetischer Speicherstrukturen, die Speicherzellschichten mit unterschiedlicher Größe aufweisen Have method for producing magnetic memory structures, the memory cell layers with different size |
| 06/02/2005 | DE102004030589A1 Magnetic memory cell e.g. magnetic random access memory has spacer layer provided between data layer and superparamagnetic layer having magnetic energy less than magnetic energy of data layer |
| 06/02/2005 | DE102004030588A1 Verbindungsmaterialschablone und Verfahren zur Verwendung Connecting material mask and method of using |
| 06/02/2005 | DE102004030587A1 Thermisch gestützte magnetische Speicherstrukturen Thermally assisted magnetic memory structures |
| 06/02/2005 | DE102004030544A1 Weichreferenz-Magnetspeicher-Digitalisiervorrichtung und Betriebsverfahren Soft reference magnetic memory digitizing device and method of operation |
| 06/02/2005 | DE102004030172A1 Manufacture of flash memory device e.g. NAND type flash memory device, involves etching conductive layers and dielectric layers in single etch apparatus using hard mask layer as mask, where a control gate and a floating gate are formed |
| 06/02/2005 | DE102004025908A1 Halbleitervorrichtung Semiconductor device |
| 06/02/2005 | DE102004014971A1 Inspecting crude wafers comprises providing marking points on the surface of the wafer, inspecting the wafer using a first inspecting device, inserting the wafer into a second coordinate system, and further processing |
| 06/02/2005 | DE102004009292B3 Verfahren zum Bilden von Kontaktlöchern A method of forming contact holes |
| 06/02/2005 | DE10154820B4 Verfahren zum Herstellen einer Maske für Halbleiterstrukturen A method of manufacturing a mask for semiconductor structures |
| 06/02/2005 | DE10021907B4 Brennstoffzellensystem mit einem Brennstoffzellenstapel mit integrierter Verpolschutzdiode Fuel cell system with a fuel cell stack with integrated reverse polarity protection diode |
| 06/02/2005 | CA2546106A1 Vicinal gallium nitride substrate for high quality homoepitaxy |
| 06/02/2005 | CA2546081A1 Method for depositing silicon carbide and ceramic films |
| 06/02/2005 | CA2544878A1 Large area, uniformly low dislocation density gan substrate and process for making the same |
| 06/02/2005 | CA2486510A1 A process for creating a 3-dimensional configuration on a substrate |
| 06/01/2005 | EP1536671A1 Plasma processing device |
| 06/01/2005 | EP1536626A1 Scanner linearity tester |
| 06/01/2005 | EP1536498A1 Devices having patterned regions of polycrystalline organic semiconductors, and methods of making the same |
| 06/01/2005 | EP1536485A1 Capacitor and flat panel display having the same |
| 06/01/2005 | EP1536483A1 Nonvolatile semiconductor storage device and manufacturing method |
| 06/01/2005 | EP1536482A1 Thin film transistor with tapered edges |
| 06/01/2005 | EP1536481A2 GaN-based III-V group compound semiconductor device and p-type electrode for the same |
| 06/01/2005 | EP1536480A1 Semiconductor power device with insulated gate, trenchgate structure and corresponding manufacturing method |
| 06/01/2005 | EP1536475A1 Image sensor and image sensor module |
| 06/01/2005 | EP1536474A2 Memory device and storage apparatus |
| 06/01/2005 | EP1536465A1 TFT and flat panel display having via holes and anode with tapered edges |
| 06/01/2005 | EP1536464A2 Method of making high-voltage semiconductor devices |
| 06/01/2005 | EP1536463A1 Method for manufacturing a power device with insulated trench-gate having controlled channel length and corresponding device |
| 06/01/2005 | EP1536462A1 Oxide film forming method and oxide film forming apparatus |
| 06/01/2005 | EP1536461A1 Polishing agent composition for insulating film for semiconductor integrated circuit and method for manufacturing semiconductor integrated circuit |
| 06/01/2005 | EP1536460A1 Substrate processing device and substrate processing method |
| 06/01/2005 | EP1536459A1 Maintenance system, substrate processing device, remote operation device, and communication method |
| 06/01/2005 | EP1536457A2 Process chamber assembly with reflective hot plate |
| 06/01/2005 | EP1536456A1 Support structure |
| 06/01/2005 | EP1536455A1 Vacuum air lock arrangement |
| 06/01/2005 | EP1536454A1 Vacuum system |
| 06/01/2005 | EP1536373A1 Rfid tag |
| 06/01/2005 | EP1536291A1 Removing solution |
| 06/01/2005 | EP1536290A2 Stage apparatus and linear motor |
| 06/01/2005 | EP1536289A2 Measuring method using interference |
| 06/01/2005 | EP1536288A2 Coil support unit, motor and exposure apparatus using the same, and device manufacturing method |
| 06/01/2005 | EP1536287A2 Measuring method and apparatus using a shearing interferometer, exposure method and apparatus using the same, and device manufacturing method |
| 06/01/2005 | EP1536285A2 Photosensitive composition, compound for use in the photosensitive composition, and pattern forming method using the photosensitive composition |
| 06/01/2005 | EP1536283A1 Mask and inspection method therefor and production method for semiconductor device |
| 06/01/2005 | EP1536253A1 Method of manufacturing a branch optical waveguide |
| 06/01/2005 | EP1536241A2 Probe for measuring electrical characteristics and method of manufacturing the same |
| 06/01/2005 | EP1536044A1 Silicon wafer for epitaxial growth, epitaxial wafer, and its manufacturing method |
| 06/01/2005 | EP1536043A1 N-type semiconductor diamond producing method and semiconductor diamond |
| 06/01/2005 | EP1536035A2 Method for cleaning deposition chambers for high dielectric constant materials |
| 06/01/2005 | EP1535979A2 Compositions and methods for chemical mechanical polishing silica and silicon nitride |
| 06/01/2005 | EP1535978A1 Polishing cloth and method of manufacturing semiconductor device |
| 06/01/2005 | EP1535977A1 Waveguide compositions and waveguides formed therefrom. |
| 06/01/2005 | EP1535976A1 Composition for film formation, method for preparing the composition, and method for forming insulating film |
| 06/01/2005 | EP1535879A1 Mems array, manufacturing method thereof, and mems device manufacturing method based on the same |
| 06/01/2005 | EP1535699A1 Polishing pad with high optical transmission window |
| 06/01/2005 | EP1535665A1 Integrated chemical microreactor with separated channels for confining liquids inside the channels and manufacturing process thereof |
| 06/01/2005 | EP1535348A2 Method for producing an integrated pin diode and corresponding circuit |
| 06/01/2005 | EP1535345A1 Semiconductor memory with vertical memory transistors and method for production thereof |
| 06/01/2005 | EP1535344A1 Vertical gate semiconductor device with a self-aligned structure |
| 06/01/2005 | EP1535343A1 Insulated gate field effect transistor having passivated schottky barriers to the channel |
| 06/01/2005 | EP1535342A1 Method of making a vertical gate semiconductor device |
| 06/01/2005 | EP1535341A1 Enhanced structure and method for buried local interconnects |
| 06/01/2005 | EP1535338A2 Method for the production of sonos memory cells, sonos memory cell, and memory cell field |
| 06/01/2005 | EP1535337A2 Flash memory cell and the method of making separate sidewall oxidation |
| 06/01/2005 | EP1535336A2 High-density nrom-finfet |
| 06/01/2005 | EP1535335A2 Semiconductor memory with vertical memory transistors in a cell field arrangement with 1-2f sp 2 /sp cells |
| 06/01/2005 | EP1535334A1 Word and bit line arrangement for a finfet semiconductor memory |
| 06/01/2005 | EP1535333A1 Method for modifying the impedance of semiconductor devices using a focused heating source |
| 06/01/2005 | EP1535332A1 Semiconductor device including a field effect transistor and a passive capacitor having reduced leakage current and an improved capacitance per unit area |
| 06/01/2005 | EP1535331A2 Chip stack with intermediate cavity |
| 06/01/2005 | EP1535329A1 Buried digit line stack and process for making same |
| 06/01/2005 | EP1535328A2 Integrated circuit comprising intermediate materials and corresponding components |
| 06/01/2005 | EP1535327A1 Method and apparatus for electronically aligning capacitively coupled chip pads |
| 06/01/2005 | EP1535326A2 Transfer of a thin layer from a wafer comprising a buffer layer |
| 06/01/2005 | EP1535325A1 Method of preventing shift of alignment marks during rapid thermal processing |
| 06/01/2005 | EP1535324A1 Method of manufacturing cmos devices by the implantation of n- and p-type cluster ions and negative ions |
| 06/01/2005 | EP1535323A2 Method for treating a photovoltaic active layer and organic photovoltaic element |
| 06/01/2005 | EP1535322A1 Method for fabricating a self-aligned bipolar transistor and related structure |
| 06/01/2005 | EP1535321A2 Low termperature deposition of silicon oxides and oxynitrides |
| 06/01/2005 | EP1535320A2 Atomic layer deposition of high k metal silicates |
| 06/01/2005 | EP1535319A2 Atomic layer deposition of high k metal oxides |
| 06/01/2005 | EP1535318A1 Etching pastes for silicon surfaces and layers |
| 06/01/2005 | EP1535317A1 High temperature anisotropic etching of multi-layer structures |
| 06/01/2005 | EP1535316A1 Transistor element having an anisotropic high-k gate dielectric |
| 06/01/2005 | EP1535315A1 Glass-type planar substrate, use thereof, and method for the production thereof |
| 06/01/2005 | EP1535314A2 High rate deposition at low pressures in a small batch reactor |
| 06/01/2005 | EP1535313A2 Substrate processing apparatus |
| 06/01/2005 | EP1535312A1 Method and apparatus for picking up semiconductor chip and suction and exfoliation tool up therefor |
| 06/01/2005 | EP1535310A2 Electrical connector having a cored contact assembly |
| 06/01/2005 | EP1535309A1 Radiation detector |
| 06/01/2005 | EP1535308A2 Protected dual-voltage microcircuit power arrangement |
| 06/01/2005 | EP1535307A2 Discharge radiation source, in particular uv radiation |
| 06/01/2005 | EP1535303A1 Gas tube end cap for a microwave plasma generator |
| 06/01/2005 | EP1535296A1 Micro-electromechanical switch having a deformable elastomeric conductive element |
| 06/01/2005 | EP1535290A1 Nanoporous materials and methods of formation thereof |
| 06/01/2005 | EP1535286A1 Contactless uniform-tunneling separate p-well (cusp) non-volatile memory array architecture, fabrication and operation |