Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2005
05/26/2005WO2005048348A1 Electronic packaging materials for use with low-k dielectric-containing semiconductor devices
05/26/2005WO2005048345A1 Package system for modular superstructures and method for producing package systems
05/26/2005WO2005048343A1 A method for manufacturing high density flash memory and high performance logic on a single die
05/26/2005WO2005048342A1 Method for preventing an increase in contact hole width during contact formation
05/26/2005WO2005048341A1 Electrostatic chuck including a heater mechanism
05/26/2005WO2005048340A1 Vacuum chuck
05/26/2005WO2005048339A1 Self aligned damascene gate
05/26/2005WO2005048338A1 A method and a semiconductor substrate for transferring a pattern from a phase mask to a substrate
05/26/2005WO2005048337A1 Plasma igniting method and substrate processing method
05/26/2005WO2005048336A1 Liquid removing device
05/26/2005WO2005048335A1 Minimizing the loss of barrier materials during photoresist stripping
05/26/2005WO2005048334A1 A method for making a semiconductor device having a metal gate electrode
05/26/2005WO2005048333A1 Method for integrating a high-k gate dielectric in a transistor fabrication process
05/26/2005WO2005048332A1 Method for manufacturing compound semiconductor epitaxial substrate
05/26/2005WO2005048331A1 Process for producing silicon epitaxial wafer
05/26/2005WO2005048330A1 Formation of lattice-tuning semiconductor substrates
05/26/2005WO2005048329A1 Method for depositing materials on a substrate
05/26/2005WO2005048328A1 Exposure apparatus and device manufacturing method
05/26/2005WO2005048327A1 Exposure method and exposure device
05/26/2005WO2005048326A1 Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device producing method
05/26/2005WO2005048324A1 A DEVICE AND METHOD FOR FORMING FERROELECTRIC CAPACITOR DEVICES AND FeRAM DEVICES
05/26/2005WO2005048322A2 Method and apparatus for improved baffle plate
05/26/2005WO2005048321A1 A container for containing semiconductor wafers
05/26/2005WO2005048320A2 Method for integrating metals having different work functions to form cmos gates having a high-k gate dielectric and related structure
05/26/2005WO2005048318A2 Nitride metal oxide semiconductor integrated transistor devices
05/26/2005WO2005048316A2 Teardrop shaped lead frames
05/26/2005WO2005048313A2 Methods and systems for handling workpieces in a vacuum-based semiconductor handling system
05/26/2005WO2005048311A2 Bump-on-lead flip chip interconnection
05/26/2005WO2005048307A2 Flip chip interconnection pad layout
05/26/2005WO2005048305A2 Substrate container
05/26/2005WO2005048302A2 Method for integrating pre-fabricated chip structures into functional electronic systems
05/26/2005WO2005048301A2 Methods and apparatus for optimizing a substrate in a plasma processing system
05/26/2005WO2005048299A2 Transistor having three electronically isolated electrodes and method of formation
05/26/2005WO2005048296A2 Nanotube-based switching elements with multiple controls and circuits made from same
05/26/2005WO2005048275A2 COMPOSITIONS AND METHODS FOR THE ELECTROLESS DEPOSITION OF NiFe ON A WORK PIECE
05/26/2005WO2005048268A2 Nrom flash memory with self-aligned structural charge separation
05/26/2005WO2005048266A1 Nonvolatile semiconductor memory device
05/26/2005WO2005048223A1 Light-emitting device and method for manufacturing the same
05/26/2005WO2005048222A1 Light emitting display device, method for manufacturing the same, and tv set
05/26/2005WO2005048221A1 Display device and method for fabricating the same
05/26/2005WO2005047968A1 Display device and method for manufacturing the same
05/26/2005WO2005047967A1 Liquid crystal display device and method for manufacturing the same
05/26/2005WO2005047966A1 Liquid crystal display device and manufacturing method thereof
05/26/2005WO2005047845A1 Wind tunnel and collector configuration therefor
05/26/2005WO2005047726A2 Wafer container and door with vibration dampening latching mechanism
05/26/2005WO2005047564A2 Method of improving post-develop photoresist profile on a deposited dielectric film
05/26/2005WO2005047561A1 Cvd tantalum compounds for fet gate electrodes
05/26/2005WO2005047410A1 Polishing composition and polishing method
05/26/2005WO2005047409A1 Polishing composition and polishing method
05/26/2005WO2005047407A1 Uv curable composition for forming dielectric coatings and related method
05/26/2005WO2005047117A2 Front opening substrate container with bottom plate
05/26/2005WO2005046986A1 Release film for forming ceramic green sheet
05/26/2005WO2005046920A2 Radiation shield
05/26/2005WO2005046872A1 Integrated circuit interconnect fabrication systems and methods
05/26/2005WO2005046443A2 Combination catheter devices, methods, and systems
05/26/2005WO2005036567A9 Stand-alone organic-based passive devices
05/26/2005WO2005035090A3 An etching method in fabrications of microstructures
05/26/2005WO2005031828A3 Low resistance t-shaped ridge structure
05/26/2005WO2005031827A3 Semiconductor channel on insulator structure
05/26/2005WO2005031045A3 Method of producing self-supporting substrates comprising iii-nitrides by means of heteroepitaxy on a sacrificial layer
05/26/2005WO2005027212A8 Semiconductor substrate cutting method
05/26/2005WO2005027203A3 Clamping and de-clamping semiconductor wafers on a j-r electrostatic chuck
05/26/2005WO2005022623B1 High aspect ratio etch using modulation of rf powers of various frequencies
05/26/2005WO2005010965A3 METHOD AND STRUCTURE OF STRAIN CONTROL OF SiGe BASED PHOTODETECTORS AND MODULATORS
05/26/2005WO2005008745A3 Selective etching of silicon carbide films
05/26/2005WO2005001573A3 Adhesion method using gray-scale photolithography
05/26/2005WO2004099879A3 Method of detecting relative position of exposure mask and object to be exposed, alignment method, and exposure method using the same
05/26/2005WO2004081992A3 Semiconductor wafer with non-rectangular shaped dice
05/26/2005WO2004081261A3 Plating apparatus
05/26/2005WO2004075278A9 Method and apparatus for liquid etching
05/26/2005WO2004068551A3 Patterning layers comprised of spin-on ceramic films
05/26/2005WO2004012230A9 Dynamic targeting for a process control system
05/26/2005WO2003093845A3 Semiconductor test system having multitasking algorithmic pattern generator
05/26/2005WO2003067631A3 Improved semiconductor stress buffer coating edge bead removal compositions and method for their use
05/26/2005US20050114820 Resonant tree driven clock distribution grid
05/26/2005US20050114819 Interconnect-aware integrated circuit design
05/26/2005US20050114816 Parallel design processes for integrated circuits
05/26/2005US20050114745 Substrate inspection apparatus, substrate inspection method, method of manufacturing semiconductor device and recording medium
05/26/2005US20050114722 Semiconductor integrated circuit and microprocessor unit switching method
05/26/2005US20050114091 Extended defect sizing
05/26/2005US20050114065 Test system, test method and test program for an integrated circuit by IDDQ testing
05/26/2005US20050114058 Method for analyzing inspected data, apparatus and its program
05/26/2005US20050114054 Method for analyzing power supply noise of semiconductor integrated circuit
05/26/2005US20050113976 Software controller for handling system
05/26/2005US20050113964 Sensor methods and systems for semiconductor handling
05/26/2005US20050113951 Method for designing a manufacturing process, method for providing manufacturing process design and technology computer-aided design system
05/26/2005US20050113895 Medical device and method of manufacturing
05/26/2005US20050113472 thermosetting dielectric containing porogen (comprises vinylanisole units) and N-vinylpyrrolidone units for electronics/integrated circuits; planarization
05/26/2005US20050113017 Air cleaning system for semiconductor manufacturing equipment
05/26/2005US20050113011 Chemical mechanical polishing pad
05/26/2005US20050113010 Chemical mechanical polishing apparatus
05/26/2005US20050113008 Polishing pad with high optical transmission window
05/26/2005US20050113007 Polishing apparatus and method of polishing work piece
05/26/2005US20050113001 Semiconductor device fabrication method and apparatus
05/26/2005US20050113000 High selectivity colloidal silica slurry
05/26/2005US20050112998 Polishing apparatus
05/26/2005US20050112997 Advanced process control approach for Cu interconnect wiring sheet resistance control
05/26/2005US20050112957 Partial inter-locking metal contact structure for semiconductor devices and method of manufacture
05/26/2005US20050112907 Gas-assisted rapid thermal processing
05/26/2005US20050112906 Methods for forming wiring and manufacturing thin film transistor and droplet discharging method
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