Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/02/2005US20050116272 Semiconductor device and manufacturing method thereof
06/02/2005US20050116269 Solid-state imaging apparatus and method thereof
06/02/2005US20050116268 Semiconductor device
06/02/2005US20050116266 Method of producing insulator thin film, insulator thin film, method of manufacturing semiconductor device, and semiconductor device
06/02/2005US20050116265 Semiconductor device
06/02/2005US20050116261 In-pixel memory for display devices
06/02/2005US20050116260 Focal plane arrays in type II-superlattices
06/02/2005US20050116255 Magnetic memory device
06/02/2005US20050116254 Lateral heterojunction bipolar transistor and method of manufacture using selective epitaxial growth
06/02/2005US20050116253 Semiconductor device
06/02/2005US20050116252 Semiconductor device and method of fabricating semiconductor device
06/02/2005US20050116249 Semiconductor diode and production method suitable therefor
06/02/2005US20050116248 Nitride semiconductor device and production process thereof
06/02/2005US20050116242 Method for manufacture of an epitaxial structural element layer sequence and optoelectronic semiconductor chip
06/02/2005US20050116237 Method for forming a flexible metal foil substrate display
06/02/2005US20050116233 Flat panel display and method of fabricating the same
06/02/2005US20050116232 Flat panel display and method for fabricating the same
06/02/2005US20050116231 Thin film transistor and method of manufacturing the same
06/02/2005US20050116230 Metal carbide gate structure and method of fabrication
06/02/2005US20050116229 Semiconductor device and method of manufacturing the same
06/02/2005US20050116228 Methods of manufacturing thin film transistors using masks to protect the channel regions from impurities while doping a semiconductor layer to form source/drain regions
06/02/2005US20050116227 Semiconductor device and manufacturing method thereof
06/02/2005US20050116226 Formation of high-mobility silicon-germanium structures by low-energy plasma enhanced chemical vapor deposition
06/02/2005US20050116225 Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same
06/02/2005US20050116218 Non-planar transistor having germanium channel region and method of manufacturing the same
06/02/2005US20050116217 Trench type mosgated device with strained layer on trench sidewall
06/02/2005US20050116202 Printing of organic conductive polymers containing additives
06/02/2005US20050116185 Exposure system and exposure method
06/02/2005US20050116184 Measuring method and apparatus, exposure method and apparatus, and device manufacturing method
06/02/2005US20050116183 Radiation source, lithographic apparatus, and device manufacturing method
06/02/2005US20050116182 Method of measuring pattern dimension and method of controlling semiconductor device process
06/02/2005US20050116180 Charged-particle beam lithographic system
06/02/2005US20050116156 Electron flood apparatus and ion implantation system
06/02/2005US20050116138 Method of manufacturing a solid state image sensing device
06/02/2005US20050116051 Module for contactless chip cards or identification systems
06/02/2005US20050115947 Thermal processing apparatus and thermal processing method
06/02/2005US20050115946 Radical assisted oxidation apparatus
06/02/2005US20050115945 Heat treatment apparatus with temperature control system
06/02/2005US20050115937 Laser-based method and system for memory link processing with picosecond lasers
06/02/2005US20050115936 Laser-based method and system for memory link processing with picosecond lasers
06/02/2005US20050115930 Laser irradiation apparatus, laser irradiation method and method for manufacturing semiconductor device
06/02/2005US20050115925 Method for selective removal of high-k material
06/02/2005US20050115924 Integration function of RF signal to analyze steady state and non-steady state ( initializaion) of plasmas
06/02/2005US20050115909 Method for supply of constant-concentration ozonated water
06/02/2005US20050115908 Removal of fines using group 8 compound and silica; aluminum free; industrial waste water treatment including chemical mechanical polishing effluents; reuse
06/02/2005US20050115867 Wafer container and door with vibration dampening latching mechanism
06/02/2005US20050115866 Front opening substrate container with bottom plate
06/02/2005US20050115865 Thin-plate supporting container
06/02/2005US20050115830 Film forming apparatus
06/02/2005US20050115827 Multi-cathode ionized physical vapor deposition system
06/02/2005US20050115824 Method of fault detection for material process system
06/02/2005US20050115823 Vacuum sputtering device; precisely controlled alloy stoichiometry during multilayer thin film deposition; reproducible production of magnetic memory devices; minimal latency
06/02/2005US20050115822 Sputtering cathode and device and method for coating a substrate with several layers
06/02/2005US20050115796 Substrate processing apparatus
06/02/2005US20050115773 Lift for substrate
06/02/2005US20050115740 Multilayered power supply line for semiconductor integrated circuit and layout method thereof
06/02/2005US20050115679 Surface treatment apparatus
06/02/2005US20050115678 Magnet assembly for plasma containment
06/02/2005US20050115677 Plasma etching apparatus
06/02/2005US20050115675 Lid assembly for a processing system to facilitate sequential deposition techniques
06/02/2005US20050115674 Method for treating exhaust gas
06/02/2005US20050115673 On-wafer monitoring system
06/02/2005US20050115672 Chemical etching process and system
06/02/2005US20050115671 Substrate treating apparatus and substrate treating method
06/02/2005US20050115666 Method and apparatus for cutting adhesive tape
06/02/2005US20050115642 Having specific silicon to germanium ratio layer topped by silicon layer; higher heat radiation
06/02/2005US20050115596 Substrate cleaning apparatus and substrate cleaning method
06/02/2005US20050115594 Cleaning method, cleaning apparatus and electro optical device
06/02/2005US20050115504 Method and apparatus for forming thin films, method for manufacturing solar cell, and solar cell
06/02/2005US20050115501 Processing device and method of maintaining the device
06/02/2005US20050115490 Preparation of 157NM transmitting barium fluoride crystals with permeable graphite
06/02/2005US20050115351 Seal structure for transfer robot
06/02/2005US20050115078 Diamond scriber
06/02/2005US20050115065 Die-first multi-chip modules and methods of manufacture
06/02/2005US20050115062 Chip assembling structure and socket
06/02/2005DE202005001249U1 Trench metal isolator semiconductor component, especially for high frequency use, is formed in semiconductor substrate with active and inactive regions; active region contains trench with conductive gate material, source region, body region
06/02/2005DE202004020336U1 Mobile electrostatic substrate holder used in making thin electronic chips, includes ring seal and nearby drainage channels to remove any fluid ingress to drain
06/02/2005DE19802369B4 Phasenschiebe-Photomasken-Herstellungsverfahren Phase shift photomask manufacturing process
06/02/2005DE19639035B4 Halbleitervorrichtung Semiconductor device
06/02/2005DE19620021B4 Halbleitervorrichtung des Grabentyps The semiconductor device of grave type
06/02/2005DE19525388B4 Elektronikbauteil mit anodisch gebondetem Leiterrahmen Electronic component having an anodically Bonded lead frame
06/02/2005DE10392752T5 Verfahren zur Herstellung eines multikristallinen Siliziumsubstrats für Solarzellen A process for producing a multicrystalline silicon substrate for solar cells
06/02/2005DE10392539T5 Speicherchiparchitektur mit nichtrechteckigen Speicherbänken und Verfahren zum Anordnen von Speicherbänken Memory chip architecture with non-rectangular memory banks and method for disposing of memory banks
06/02/2005DE10353926A1 Wire fitting method for connection wires in semiconductor elements uses a standard cell library to create a physical layout according to a wiring plan
06/02/2005DE10353772A1 Verfahren zur Herstellung von Transistorstrukturen mit LDD A process for producing structures with transistor LDD
06/02/2005DE10353139A1 Packagesystem für modulare Systemaufbauten Package System for modular system structures
06/02/2005DE10353076A1 Monitor for drying installation for semiconductor wafers, working according to Marangoni principle, with installation containing dipping bath with lifting chamber, to which is coupled supply of mixture of drying substance and carrier gas
06/02/2005DE10351196A1 Anodisch mit Silizium bondbare Glaskeramik (LTCC) Anodically bondable with silicon glass-ceramic (LTCC)
06/02/2005DE10350427A1 Manufacturing method for thin crystalline layers produced for copper pyrite solar cells uses material with a very high melting point and phase transformation
06/02/2005DE10349963A1 Verfahren zur Herstellung einer Folie A process for preparing a film
06/02/2005DE10349764A1 Verfahren zur Generierung einer Hartmaske für die Strukturierung einer Schicht und Hartmaske zur Strukturierung einer Schicht Method for generating a hard mask for patterning a layer and hard mask for patterning a layer
06/02/2005DE10349582A1 Halbleiterdiode sowie dafür geeignetes Herstellungsverfahren Semiconductor diode as well as for suitable manufacturing process
06/02/2005DE10345520A1 Charge-Trapping-Speicherzelle und Verfahren zum Betrieb einer Charge-Trapping-Speicherzelle Charge-trapping memory cell and method for operating a charge-trapping memory cell
06/02/2005DE10312202B4 Verfahren zum Herstellen einer Ätzmaske auf einer Mikrostruktur, insbesondere einer Halbleiterstruktur mit Grabenkondensatoren, und entsprechende Verwendung der Ätzmaske A method of manufacturing an etching mask on a microstructure, in particular a semiconductor structure with grave capacitors and corresponding use of the etching mask
06/02/2005DE102004052653A1 Halbleitervorrichtung mit Metallplatten und Halbleiterchip A semiconductor device having metal plates and the semiconductor chip
06/02/2005DE102004052461A1 Ätzverfahren Etching
06/02/2005DE102004051624A1 Thin film transistor substrate for display device comprises pad electrodes, protective film covering pad electrodes, and slit in protective film
06/02/2005DE102004050179A1 Speicherkondensatorentwurf für einen Halbleiter-Bildaufnehmer Storage capacitor design for a semiconductor image sensor
06/02/2005DE102004050027A1 Wafer level package for chip, i.e. dynamic random access memory, comprises chip bonded to fiber reinforced synthetic resin sheet and polymer coating on edges of chip and resin sheet
06/02/2005DE102004045767A1 Verfahren zur Herstellung einer Leuchtdiode unter Verwendung von Metall-Substrat und Metall-Klebe-Technologie und Struktur dieser A process for producing a light emitting diode using metal substrate and metal bonding technology and structure of this
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