| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/07/2005 | US6902965 Strained silicon structure |
| 06/07/2005 | US6902964 Methods of fabricating delta doped silicon carbide metal-semiconductor field effect transistors having a gate disposed in a double recess structure |
| 06/07/2005 | US6902963 SRAM cell and method of manufacturing the same |
| 06/07/2005 | US6902962 Silicon-on-insulator chip with multiple crystal orientations |
| 06/07/2005 | US6902961 Method of forming a CMOS thin film transistor device |
| 06/07/2005 | US6902960 Oxide interface and a method for fabricating oxide thin films |
| 06/07/2005 | US6902959 Semiconductor device having junction diode and fabricating method therefor |
| 06/07/2005 | US6902958 Method for making MOSFET anti-fuse structure |
| 06/07/2005 | US6902957 Metal programmable integrated circuit capable of utilizing a plurality of clock sources and capable of eliminating clock skew |
| 06/07/2005 | US6902956 Method and structure for manufacturing improved yield semiconductor packaged devices |
| 06/07/2005 | US6902955 Method of manufacturing a semiconductor device having a flexible wiring substrate |
| 06/07/2005 | US6902954 Temperature sustaining flip chip assembly process |
| 06/07/2005 | US6902953 Methods of forming semiconductor stacked die devices |
| 06/07/2005 | US6902951 Electronic device configured as a multichip module, leadframe, panel with leadframe positions, and method for producing the electronic device |
| 06/07/2005 | US6902950 Method to protect an encapsulated die package during back grinding with a solder metallization layer and devices formed thereby |
| 06/07/2005 | US6902949 Multi-layer wiring circuit board and method for producing the same |
| 06/07/2005 | US6902948 Method of producing photovoltaic element |
| 06/07/2005 | US6902946 Simplified upper electrode contact structure for PIN diode active pixel sensor |
| 06/07/2005 | US6902944 Method of manufacturing a semiconductor device and a method for fixing the semiconductor device using substrate jig |
| 06/07/2005 | US6902942 Device and method for detecting alignment of deep trench capacitors and word lines in DRAM devices |
| 06/07/2005 | US6902940 Method for manufacture of MRAM memory elements |
| 06/07/2005 | US6902939 Integrated circuit and method |
| 06/07/2005 | US6902874 193 nm ultraviolet radiation patternwise exposure; without the use of a phase shift mask; imaging polymer and a radiation sensitive acid generator |
| 06/07/2005 | US6902872 Microelectronics having circuit on multilayers including electrconductive laminates forming connection structures; print heads |
| 06/07/2005 | US6902870 Patterning of dielectric with added layers of materials aside from photoresist for enhanced pattern transfer |
| 06/07/2005 | US6902868 Method of manufacturing integrated circuit |
| 06/07/2005 | US6902862 For producing semiconductor devices |
| 06/07/2005 | US6902859 Chemically amplified resist composition and method for forming patterned film using same |
| 06/07/2005 | US6902853 Dual wavelength method of determining a relative position of a substrate and a template |
| 06/07/2005 | US6902852 Pattern transfer method using a mask and half tone mask |
| 06/07/2005 | US6902774 Method of manufacturing a device |
| 06/07/2005 | US6902772 Silicon-containing polymer, resist composition and patterning process |
| 06/07/2005 | US6902771 Hardness, noncracking |
| 06/07/2005 | US6902763 Method for depositing nanolaminate thin films on sensitive surfaces |
| 06/07/2005 | US6902762 Method and device for processing substrate |
| 06/07/2005 | US6902683 Plasma processing apparatus and plasma processing method |
| 06/07/2005 | US6902682 Method and apparatus for electrostatically maintaining substrate flatness |
| 06/07/2005 | US6902681 Method for plasma etching of high-K dielectric materials |
| 06/07/2005 | US6902677 Applying voltage while distributing cleaning liquid in order to ionize; oxidation/reduction |
| 06/07/2005 | US6902659 Deposition and polishing of a conductive material on a semiconductor wafer |
| 06/07/2005 | US6902648 Plasma etching device |
| 06/07/2005 | US6902647 Method of processing substrates with integrated weighing steps |
| 06/07/2005 | US6902646 Sensor array for measuring plasma characteristics in plasma processing environments |
| 06/07/2005 | US6902623 Reactor having a movable shutter |
| 06/07/2005 | US6902622 Systems and methods for epitaxially depositing films on a semiconductor substrate |
| 06/07/2005 | US6902620 Atomic layer deposition systems and methods |
| 06/07/2005 | US6902618 Silicon single crystal wafer having void denuded zone on the surface and diameter of above 300 mm and its production method |
| 06/07/2005 | US6902616 Method and apparatus for producing semiconductor device |
| 06/07/2005 | US6902590 Chemical mechanical polishing compositions and methods relating thereto |
| 06/07/2005 | US6902466 Oscillating chemical mechanical planarization apparatus |
| 06/07/2005 | US6902440 Method of forming a low K dielectric in a semiconductor manufacturing process |
| 06/07/2005 | US6902395 Multilevel pedestal for furnace |
| 06/07/2005 | US6902369 Elevating mechanism, carrier conveying apparatus and heat treatment installation |
| 06/07/2005 | US6902317 Method and device for measuring thermoelectric characteristics of combinatorial specimen |
| 06/07/2005 | US6902258 LDMOS and CMOS integrated circuit and method of making |
| 06/07/2005 | US6902101 Bump bonding method apparatus |
| 06/07/2005 | US6902098 Solder pads and method of making a solder pad |
| 06/07/2005 | US6902063 Latching mechanism for locking/unlocking the door of a wafer container |
| 06/07/2005 | US6902059 Disk carrier |
| 06/07/2005 | US6901997 Thermal interface wafer and method of making and using the same |
| 06/07/2005 | US6901984 Method and system for controlling the processing of an integrated circuit chip assembly line using a central computer system and a common communication protocol |
| 06/07/2005 | US6901971 Transportable container including an internal environment monitor |
| 06/07/2005 | US6901938 Substrate cleaning apparatus |
| 06/07/2005 | US6901924 Method of cutting CSP substrates |
| 06/07/2005 | US6901685 Method for drying washed objects |
| 06/07/2005 | US6901656 Position control apparatus of feeder stage in surface mount device |
| 06/02/2005 | WO2005051059A1 Rough contacts |
| 06/02/2005 | WO2005051044A1 Electroluminescent devices and methods of making electroluminescent devices including a color conversion element |
| 06/02/2005 | WO2005050895A2 A method of backgrinding wafers while leaving backgrinding tape on a chuck |
| 06/02/2005 | WO2005050777A2 Receiver electronics proximate antenna |
| 06/02/2005 | WO2005050751A2 Encapsulation assembly for electronic devices |
| 06/02/2005 | WO2005050743A1 Semiconductor device, electronic device and electronic apparatus |
| 06/02/2005 | WO2005050742A1 Bipolar junction transistor with improved extrinsic base region and method of fabrication |
| 06/02/2005 | WO2005050740A2 Nrom flash memory devices on ultrathin silicon |
| 06/02/2005 | WO2005050739A1 Contacting without external power |
| 06/02/2005 | WO2005050734A1 Charge-trapping memory device, operating and manufacturing |
| 06/02/2005 | WO2005050733A1 Wiring structure for high-frequency wave, method for forming wiring structure for high-frequency wave, and method for shaping high-frequency signal waveform |
| 06/02/2005 | WO2005050732A1 A method to modulate etch rate in slam |
| 06/02/2005 | WO2005050731A1 Method for the production of transistor structures with ldd |
| 06/02/2005 | WO2005050730A1 Method for the production of a nanoscale semiconductor structure and vertical semiconductor components based on said semiconductor structure |
| 06/02/2005 | WO2005050729A1 Rapid thermal processing system |
| 06/02/2005 | WO2005050728A1 Zeolite - sol -gel low dielectric - constant nano-composite |
| 06/02/2005 | WO2005050727A1 Zeolite - carbon doped oxide composite low k dielectric |
| 06/02/2005 | WO2005050726A1 Plasma processing method and plasma processing apparatus |
| 06/02/2005 | WO2005050725A1 Method for manufacturing semiconductor device and substrate processing apparatus |
| 06/02/2005 | WO2005050724A1 Substrate cleaning method, substrate cleaning apparatus and computer-readable recording medium |
| 06/02/2005 | WO2005050723A1 Plasma film-forming apparatus and plasma film-forming method |
| 06/02/2005 | WO2005050722A1 DESIGN AND FABRICATION OF 6.1- Å FAMILY SEMICONDUCTOR DEVICES USING SEMI-INSULATING AlSb SUBSTRATE |
| 06/02/2005 | WO2005050721A1 Method for preparing ruthenium oxide-thin film using electrodeposition |
| 06/02/2005 | WO2005050720A1 Method and apparatus for printing patterns with improved cd uniformity |
| 06/02/2005 | WO2005050719A1 Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography |
| 06/02/2005 | WO2005050718A1 Light flux conversion element, lighting optical device, exposure system, and exposure method |
| 06/02/2005 | WO2005050715A2 Nitridation of high-k dielectric films |
| 06/02/2005 | WO2005050714A2 High temperature electronic devices |
| 06/02/2005 | WO2005050711A2 A method for fabricating semiconductor devices using strained silicon bearing material |
| 06/02/2005 | WO2005050710A2 Optical device for led-based lamp |
| 06/02/2005 | WO2005050709A2 LARGE AREA, UNIFORMLY LOW DISLOCATION DENSITY GaN SUBSTRATE AND PROCESS FOR MAKING THE SAME |
| 06/02/2005 | WO2005050705A2 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| 06/02/2005 | WO2005050701A2 Stressed semiconductor device structures having granular semiconductor material |
| 06/02/2005 | WO2005050700A2 Line edge roughness reduction for trench etch |