| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 10/11/2005 | US6953995 Hermetic chip in wafer form |
| 10/11/2005 | US6953992 Electronic component with at least one semiconductor chip and method for its manufacture |
| 10/11/2005 | US6953991 Semiconductor device |
| 10/11/2005 | US6953990 Wafer-level packaging of optoelectronic devices |
| 10/11/2005 | US6953989 Film carrier tape for mounting electronic devices thereon and final defect marking method using the same |
| 10/11/2005 | US6953988 Semiconductor package |
| 10/11/2005 | US6953986 Leadframes for high adhesion semiconductor devices and method of fabrication |
| 10/11/2005 | US6953985 Wafer level MEMS packaging |
| 10/11/2005 | US6953984 Hydrogenated oxidized silicon carbon material |
| 10/11/2005 | US6953983 Low dielectric constant STI with SOI devices |
| 10/11/2005 | US6953982 Flexible skin incorporating MEMS technology |
| 10/11/2005 | US6953981 Semiconductor device with deep substrates contacts |
| 10/11/2005 | US6953979 Semiconductor device, method of manufacturing same and method of designing same |
| 10/11/2005 | US6953976 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern |
| 10/11/2005 | US6953975 Semiconductor integrated circuit device |
| 10/11/2005 | US6953973 Self-aligned trench isolation method and semiconductor device fabricated using the same |
| 10/11/2005 | US6953972 Complementary metal oxide semiconductor transistor technology using selective epitaxy of a strained silicon germanium layer |
| 10/11/2005 | US6953970 Scalable self-aligned dual floating gate memory cell array and methods of forming the array |
| 10/11/2005 | US6953969 MOSFET for an open-drain circuit and semiconductor integrated circuit device employing it |
| 10/11/2005 | US6953967 Semiconductor device and method of manufacturing the same |
| 10/11/2005 | US6953966 Method of producing semiconductor element and nonvolatile semiconductor memory produced by this method |
| 10/11/2005 | US6953965 Semiconductor device with source line and fabrication method thereof |
| 10/11/2005 | US6953964 Non-volatile memory cell array having discontinuous source and drain diffusions contacted by continuous bit line conductors and methods of forming |
| 10/11/2005 | US6953963 Flash memory cell |
| 10/11/2005 | US6953962 Nonvolatile memory device having a gate electrode |
| 10/11/2005 | US6953961 DRAM structure and fabricating method thereof |
| 10/11/2005 | US6953960 Semiconductor memory device |
| 10/11/2005 | US6953959 Integrated circuit devices including self-aligned contacts with increased alignment margin |
| 10/11/2005 | US6953956 Semiconductor device having borderless logic array and flexible I/O |
| 10/11/2005 | US6953955 InGaAs/GaAs high electron mobility transistor |
| 10/11/2005 | US6953954 Plasma oscillation switching device |
| 10/11/2005 | US6953951 Semiconductor device, and manufacturing method thereof |
| 10/11/2005 | US6953950 Semiconductor device and method of manufacturing the same |
| 10/11/2005 | US6953949 Electro-optical device and electronic apparatus |
| 10/11/2005 | US6953948 Semiconductor substrate and process for its production |
| 10/11/2005 | US6953946 Emitter for electron-beam projection lithography system and manufacturing method thereof |
| 10/11/2005 | US6953918 Heating apparatus which has electrostatic adsorption function, and method for producing it |
| 10/11/2005 | US6953908 Plasma processing apparatus |
| 10/11/2005 | US6953891 Moisture-resistant electronic device package and methods of assembly |
| 10/11/2005 | US6953754 Functional device and method of manufacturing the same |
| 10/11/2005 | US6953752 Reduced silicon gouging and common source line resistance in semiconductor devices |
| 10/11/2005 | US6953749 Methods of forming refractory metal silicide components and methods of restricting silicon surface migration of a silicon structure |
| 10/11/2005 | US6953748 Method of manufacturing semiconductor device |
| 10/11/2005 | US6953747 Method for forming gate oxide in semiconductor device |
| 10/11/2005 | US6953746 Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width |
| 10/11/2005 | US6953745 Void-free metal interconnection structure and method of forming the same |
| 10/11/2005 | US6953744 Methods of fabricating integrated circuit devices providing improved short prevention |
| 10/11/2005 | US6953743 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer |
| 10/11/2005 | US6953742 Tantalum barrier layer for copper metallization |
| 10/11/2005 | US6953741 Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process |
| 10/11/2005 | US6953740 Highly doped III-nitride semiconductors |
| 10/11/2005 | US6953739 Method for manufacturing a semiconductor device having hemispherical grains at very low atmospheric pressure using first, second, and third vacuum pumps |
| 10/11/2005 | US6953738 Method and apparatus for forming an SOI body-contacted transistor |
| 10/11/2005 | US6953736 Process for transferring a layer of strained semiconductor material |
| 10/11/2005 | US6953735 Method for fabricating a semiconductor device by transferring a layer to a support with curvature |
| 10/11/2005 | US6953734 Method for manufacturing shallow trench isolation in semiconductor device |
| 10/11/2005 | US6953733 Method of manufacturing alignment mark and aligning method using the same |
| 10/11/2005 | US6953732 Method of manufacturing a semiconductor device including a mosfet with nitride sidewalls |
| 10/11/2005 | US6953731 Fabrication process of a semiconductor device |
| 10/11/2005 | US6953730 Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics |
| 10/11/2005 | US6953729 Heterojunction field effect transistor and manufacturing method thereof |
| 10/11/2005 | US6953728 Semiconductor device and method of manufacturing thereof |
| 10/11/2005 | US6953727 Manufacture method of semiconductor device with gate insulating films of different thickness |
| 10/11/2005 | US6953726 High-density split-gate FinFET |
| 10/11/2005 | US6953725 Method for fabricating memory device having a deep trench capacitor |
| 10/11/2005 | US6953724 Self-limited metal recess for deep trench metal fill |
| 10/11/2005 | US6953723 Method for forming bottle shaped trench |
| 10/11/2005 | US6953722 Method for patterning ceramic layers |
| 10/11/2005 | US6953721 Methods of forming a capacitor with an amorphous and a crystalline high K capacitor dielectric region |
| 10/11/2005 | US6953720 Methods for forming chalcogenide glass-based memory elements |
| 10/11/2005 | US6953719 Integrating n-type and p-type metal gate transistors |
| 10/11/2005 | US6953718 Method for manufacturing semiconductor device |
| 10/11/2005 | US6953717 Method of manufacturing semiconductor device |
| 10/11/2005 | US6953716 Polysilicon material and semiconductor devices formed therefrom |
| 10/11/2005 | US6953715 Method of controlling a capacitance of a thin film transistor liquid crystal display (TFT-LCD) storage capacitor |
| 10/11/2005 | US6953714 Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it |
| 10/11/2005 | US6953713 Electric device, matrix device, electro-optical display device and semiconductor memory having thin-film transistors |
| 10/11/2005 | US6953712 Circuit device manufacturing method |
| 10/11/2005 | US6953711 Flip chip on lead frame |
| 10/11/2005 | US6953709 Semiconductor device and its manufacturing method |
| 10/11/2005 | US6953707 Method and system for chip-to-package interconnection |
| 10/11/2005 | US6953706 Method of providing a semiconductor package having an internal heat-activated hydrogen source |
| 10/11/2005 | US6953704 Systems with high density packing of micromachines |
| 10/11/2005 | US6953703 Method of making a semiconductor device with exposure of sapphire substrate to activated nitrogen |
| 10/11/2005 | US6953697 Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same |
| 10/11/2005 | US6953696 Method for fabricating semiconductor integrated circuit device |
| 10/11/2005 | US6953654 Using supercritical fluids; separation |
| 10/11/2005 | US6953649 Block polymers such as polymethyl methacrylate/poly(t-butyl methacrylate), having end groups and acid generators, used to form films on silicon substrates; microelectronics having high resolution and contrast |
| 10/11/2005 | US6953609 High-density plasma process for depositing a layer of silicon nitride |
| 10/11/2005 | US6953608 Solution for FSG induced metal corrosion & metal peeling defects with extra bias liner and smooth RF bias ramp up |
| 10/11/2005 | US6953600 Complex of an amine compound and aluminum hydride and an organic solvent used to form wiring or an electrode which can be suitably used in a variety of electronic devices |
| 10/11/2005 | US6953539 Silicon carbide impregnated with copper alloy |
| 10/11/2005 | US6953531 Methods of etching silicon-oxide-containing materials |
| 10/11/2005 | US6953519 making a cantilever using lithographic techniques and forming microscopic electrodes at a distal end of the cantilever by sputtering and gas-assisted etching processing using a focused charge particle beam |
| 10/11/2005 | US6953506 Wafer cassette, and liquid phase growth system and liquid-phase growth process which make use of the same |
| 10/11/2005 | US6953489 Capsulated abrasive composition and polishing pad using the same |
| 10/11/2005 | US6953392 Integrated system for processing semiconductor wafers |
| 10/11/2005 | US6953390 Polishing apparatus |
| 10/11/2005 | US6953389 for planarizing metal layers on integrated circuit substrates using chemical-mechanical polishing techniques |
| 10/11/2005 | US6953338 Device for thermal treatment of substrates |