Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/11/2005US6953995 Hermetic chip in wafer form
10/11/2005US6953992 Electronic component with at least one semiconductor chip and method for its manufacture
10/11/2005US6953991 Semiconductor device
10/11/2005US6953990 Wafer-level packaging of optoelectronic devices
10/11/2005US6953989 Film carrier tape for mounting electronic devices thereon and final defect marking method using the same
10/11/2005US6953988 Semiconductor package
10/11/2005US6953986 Leadframes for high adhesion semiconductor devices and method of fabrication
10/11/2005US6953985 Wafer level MEMS packaging
10/11/2005US6953984 Hydrogenated oxidized silicon carbon material
10/11/2005US6953983 Low dielectric constant STI with SOI devices
10/11/2005US6953982 Flexible skin incorporating MEMS technology
10/11/2005US6953981 Semiconductor device with deep substrates contacts
10/11/2005US6953979 Semiconductor device, method of manufacturing same and method of designing same
10/11/2005US6953976 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern
10/11/2005US6953975 Semiconductor integrated circuit device
10/11/2005US6953973 Self-aligned trench isolation method and semiconductor device fabricated using the same
10/11/2005US6953972 Complementary metal oxide semiconductor transistor technology using selective epitaxy of a strained silicon germanium layer
10/11/2005US6953970 Scalable self-aligned dual floating gate memory cell array and methods of forming the array
10/11/2005US6953969 MOSFET for an open-drain circuit and semiconductor integrated circuit device employing it
10/11/2005US6953967 Semiconductor device and method of manufacturing the same
10/11/2005US6953966 Method of producing semiconductor element and nonvolatile semiconductor memory produced by this method
10/11/2005US6953965 Semiconductor device with source line and fabrication method thereof
10/11/2005US6953964 Non-volatile memory cell array having discontinuous source and drain diffusions contacted by continuous bit line conductors and methods of forming
10/11/2005US6953963 Flash memory cell
10/11/2005US6953962 Nonvolatile memory device having a gate electrode
10/11/2005US6953961 DRAM structure and fabricating method thereof
10/11/2005US6953960 Semiconductor memory device
10/11/2005US6953959 Integrated circuit devices including self-aligned contacts with increased alignment margin
10/11/2005US6953956 Semiconductor device having borderless logic array and flexible I/O
10/11/2005US6953955 InGaAs/GaAs high electron mobility transistor
10/11/2005US6953954 Plasma oscillation switching device
10/11/2005US6953951 Semiconductor device, and manufacturing method thereof
10/11/2005US6953950 Semiconductor device and method of manufacturing the same
10/11/2005US6953949 Electro-optical device and electronic apparatus
10/11/2005US6953948 Semiconductor substrate and process for its production
10/11/2005US6953946 Emitter for electron-beam projection lithography system and manufacturing method thereof
10/11/2005US6953918 Heating apparatus which has electrostatic adsorption function, and method for producing it
10/11/2005US6953908 Plasma processing apparatus
10/11/2005US6953891 Moisture-resistant electronic device package and methods of assembly
10/11/2005US6953754 Functional device and method of manufacturing the same
10/11/2005US6953752 Reduced silicon gouging and common source line resistance in semiconductor devices
10/11/2005US6953749 Methods of forming refractory metal silicide components and methods of restricting silicon surface migration of a silicon structure
10/11/2005US6953748 Method of manufacturing semiconductor device
10/11/2005US6953747 Method for forming gate oxide in semiconductor device
10/11/2005US6953746 Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width
10/11/2005US6953745 Void-free metal interconnection structure and method of forming the same
10/11/2005US6953744 Methods of fabricating integrated circuit devices providing improved short prevention
10/11/2005US6953743 Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer
10/11/2005US6953742 Tantalum barrier layer for copper metallization
10/11/2005US6953741 Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process
10/11/2005US6953740 Highly doped III-nitride semiconductors
10/11/2005US6953739 Method for manufacturing a semiconductor device having hemispherical grains at very low atmospheric pressure using first, second, and third vacuum pumps
10/11/2005US6953738 Method and apparatus for forming an SOI body-contacted transistor
10/11/2005US6953736 Process for transferring a layer of strained semiconductor material
10/11/2005US6953735 Method for fabricating a semiconductor device by transferring a layer to a support with curvature
10/11/2005US6953734 Method for manufacturing shallow trench isolation in semiconductor device
10/11/2005US6953733 Method of manufacturing alignment mark and aligning method using the same
10/11/2005US6953732 Method of manufacturing a semiconductor device including a mosfet with nitride sidewalls
10/11/2005US6953731 Fabrication process of a semiconductor device
10/11/2005US6953730 Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics
10/11/2005US6953729 Heterojunction field effect transistor and manufacturing method thereof
10/11/2005US6953728 Semiconductor device and method of manufacturing thereof
10/11/2005US6953727 Manufacture method of semiconductor device with gate insulating films of different thickness
10/11/2005US6953726 High-density split-gate FinFET
10/11/2005US6953725 Method for fabricating memory device having a deep trench capacitor
10/11/2005US6953724 Self-limited metal recess for deep trench metal fill
10/11/2005US6953723 Method for forming bottle shaped trench
10/11/2005US6953722 Method for patterning ceramic layers
10/11/2005US6953721 Methods of forming a capacitor with an amorphous and a crystalline high K capacitor dielectric region
10/11/2005US6953720 Methods for forming chalcogenide glass-based memory elements
10/11/2005US6953719 Integrating n-type and p-type metal gate transistors
10/11/2005US6953718 Method for manufacturing semiconductor device
10/11/2005US6953717 Method of manufacturing semiconductor device
10/11/2005US6953716 Polysilicon material and semiconductor devices formed therefrom
10/11/2005US6953715 Method of controlling a capacitance of a thin film transistor liquid crystal display (TFT-LCD) storage capacitor
10/11/2005US6953714 Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it
10/11/2005US6953713 Electric device, matrix device, electro-optical display device and semiconductor memory having thin-film transistors
10/11/2005US6953712 Circuit device manufacturing method
10/11/2005US6953711 Flip chip on lead frame
10/11/2005US6953709 Semiconductor device and its manufacturing method
10/11/2005US6953707 Method and system for chip-to-package interconnection
10/11/2005US6953706 Method of providing a semiconductor package having an internal heat-activated hydrogen source
10/11/2005US6953704 Systems with high density packing of micromachines
10/11/2005US6953703 Method of making a semiconductor device with exposure of sapphire substrate to activated nitrogen
10/11/2005US6953697 Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same
10/11/2005US6953696 Method for fabricating semiconductor integrated circuit device
10/11/2005US6953654 Using supercritical fluids; separation
10/11/2005US6953649 Block polymers such as polymethyl methacrylate/poly(t-butyl methacrylate), having end groups and acid generators, used to form films on silicon substrates; microelectronics having high resolution and contrast
10/11/2005US6953609 High-density plasma process for depositing a layer of silicon nitride
10/11/2005US6953608 Solution for FSG induced metal corrosion & metal peeling defects with extra bias liner and smooth RF bias ramp up
10/11/2005US6953600 Complex of an amine compound and aluminum hydride and an organic solvent used to form wiring or an electrode which can be suitably used in a variety of electronic devices
10/11/2005US6953539 Silicon carbide impregnated with copper alloy
10/11/2005US6953531 Methods of etching silicon-oxide-containing materials
10/11/2005US6953519 making a cantilever using lithographic techniques and forming microscopic electrodes at a distal end of the cantilever by sputtering and gas-assisted etching processing using a focused charge particle beam
10/11/2005US6953506 Wafer cassette, and liquid phase growth system and liquid-phase growth process which make use of the same
10/11/2005US6953489 Capsulated abrasive composition and polishing pad using the same
10/11/2005US6953392 Integrated system for processing semiconductor wafers
10/11/2005US6953390 Polishing apparatus
10/11/2005US6953389 for planarizing metal layers on integrated circuit substrates using chemical-mechanical polishing techniques
10/11/2005US6953338 Device for thermal treatment of substrates