Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/11/2005US6953268 Light modulating device and exposure apparatus using the same
10/11/2005US6953145 Soldering method for mounting electric components
10/11/2005US6953073 Apparatus and method for manufacturing liquid crystal display devices, method for using the apparatus, and device produced by the method
10/11/2005US6953047 for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication
10/11/2005US6953041 Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof
10/11/2005US6953005 Plasma processing apparatus utilizing a surface wave plasma
10/11/2005US6952889 Forced convection assisted rapid thermal furnace
10/06/2005WO2005094144A1 Circuit device and method for manufacturing same
10/06/2005WO2005094140A1 Plasma generating equipment
10/06/2005WO2005094138A1 Plasma generation power supply apparatus
10/06/2005WO2005093900A1 Semiconductor device
10/06/2005WO2005093861A1 Semiconductor light emitting element
10/06/2005WO2005093845A1 Semiconductor device and method for manufacture thereof
10/06/2005WO2005093844A1 Semiconductor device
10/06/2005WO2005093842A1 Semiconductor device
10/06/2005WO2005093837A1 Flash memory device utilizing nanocrystals embeded in polymer
10/06/2005WO2005093836A2 Semiconductor constructions having a buried bit line, and methods of forming same
10/06/2005WO2005093835A1 Magnetic storage
10/06/2005WO2005093829A1 Semiconductor package having an interfacial adhesive layer
10/06/2005WO2005093827A1 Through wiring board and method for producing the same
10/06/2005WO2005093826A1 Device and method for joining substrates
10/06/2005WO2005093825A1 Method of reducing sti divot formation during semiconductor device fabrication
10/06/2005WO2005093824A1 Method of manufacturing a semiconductor device and semiconductor device obtained by means of said method
10/06/2005WO2005093823A1 Semiconductor-on-insulator substrate comprising a buried diamond-like carbon layer and method for making same
10/06/2005WO2005093822A1 Method for the epitaxial deposition of an si-based material on a layer of si-based material belonging to a semiconductor-on-insulator-type substrate
10/06/2005WO2005093821A1 Vertical heat treating apparatus and automatic teaching method for transfer mechanism
10/06/2005WO2005093820A1 Turning device for heavy object
10/06/2005WO2005093819A1 Processing unit, display method and display program
10/06/2005WO2005093818A1 Method of evaluating crystal defect of silicon wafer
10/06/2005WO2005093817A1 Semiconductor device and process for manufacturing the same
10/06/2005WO2005093816A1 Semiconductor device for radio frequency applications and method for making the same
10/06/2005WO2005093815A1 Substrate protection system, device and method
10/06/2005WO2005093813A1 Method for manufacturing thin film transistor
10/06/2005WO2005093812A1 Transistor with adapted source, drain and channel materials and integrated circuit comprising same
10/06/2005WO2005093811A1 Method for manufacturing self-aligned thin film transistor
10/06/2005WO2005093810A1 Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film and base material
10/06/2005WO2005093809A1 Unit layer posttreating catalytic chemical vapor deposition apparatus and method of film formation therewith
10/06/2005WO2005093808A1 METHOD FOR FORMING OXIDE FILM, SEMICONDUCTOR DEVICE, METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR DEVICE, METHOD FOR OXIDIZING SiC SUBSTRATE, SiC-MOS SEMICONDUCTOR DEVICE AND SiC-MOS INTEGRATED CIRCUIT USING SUCH METHOD, AND APPARATUS FOR MANUFACTURING SiC-MOS SEMICONDUCTOR DEVICE AND SiC-MOS INTEGRATED CIRCUIT
10/06/2005WO2005093807A1 Oxidation process of a sige layer and applications thereof
10/06/2005WO2005093806A1 Semiconductor manufacturing equipment and method for manufacturing semiconductor device
10/06/2005WO2005093805A1 Composition for polishing semiconductor
10/06/2005WO2005093804A1 Composition for polishing semiconductor
10/06/2005WO2005093803A1 Composition for polishing semiconductor
10/06/2005WO2005093802A1 Composition for polishing semiconductor
10/06/2005WO2005093801A1 Laser irradiation method and laser irradiation apparatus
10/06/2005WO2005093800A1 Method of impurity introduction, impurity introduction apparatus and semiconductor device produced with use of the method
10/06/2005WO2005093799A1 Process for producing semiconductor device and substrate treating apparatus
10/06/2005WO2005093798A1 Method and apparatus for forming silicon dots
10/06/2005WO2005093797A1 Method and equipment for forming crystalline silicon thin film
10/06/2005WO2005093796A1 Bipolar semiconductor device and process for producing the same
10/06/2005WO2005093795A1 Lithographic methods to reduce stacking fault nucleation sites and structures having reduced stacking fault nucleation sites
10/06/2005WO2005093794A1 Method for making a field-effect transistor with diamond-like carbon channel and resulting transistor
10/06/2005WO2005093793A1 Process for forming permanent pattern
10/06/2005WO2005093792A1 Exposure equipment, exposure method and device manufacturing method
10/06/2005WO2005093791A1 Exposure apparatus and method for manufacturing device
10/06/2005WO2005093790A2 Method of, and apparatus for manufacturing semiconductor elements
10/06/2005WO2005093789A1 Method of producing an element comprising an electrical conductor encircled by magnetic material
10/06/2005WO2005093788A1 Method for the treatment of substrate surfaces
10/06/2005WO2005093775A1 Method for forming carbonaceous material protrusion and carbonaceous material protrusion
10/06/2005WO2005093516A1 Resist composition
10/06/2005WO2005093515A1 Photosensitive composition, photosensitive film, and permanent pattern and process for forming the same
10/06/2005WO2005093506A1 Pixel structure and manufacturing method of the same
10/06/2005WO2005093505A1 Bonding structure of thin film circuit
10/06/2005WO2005093354A1 Vertical heat treatment equipment and method for transferring object to be treated
10/06/2005WO2005093353A1 Backside rapid thermal processing of patterned wafers
10/06/2005WO2005093137A1 Reduction of carrot defects in silicon carbide epitaxy
10/06/2005WO2005093135A1 Electrolytic processing apparatus
10/06/2005WO2005093131A1 Method for manufacturing fine pattern reproducing die
10/06/2005WO2005093126A1 Method for forming dielectric or metallic films
10/06/2005WO2005093119A1 Silicon film forming equipment
10/06/2005WO2005092946A1 Naphthylene polymer, method of synthesizing the same, and use thereof
10/06/2005WO2005092564A1 Vacuum chuck and suction board
10/06/2005WO2005092487A1 Method of supercritical treatment and apparatus for use therein
10/06/2005WO2005092070A2 Vertically stacked semiconductor device
10/06/2005WO2005091988A2 Method and device with durable contact on silicon carbide
10/06/2005WO2005091974A2 Methods for the optimization of substrate etching in a plasma processing system
10/06/2005WO2005091862A2 Phosphor and blends thereof for use in leds
10/06/2005WO2005091796A2 Method and system for treating a hard mask to improve etch characteristics
10/06/2005WO2005091795A2 Method of making a semiconductor device, and semiconductor device made thereby
10/06/2005WO2005091758A2 Integrated circuit with multiple spacer insulating region widths
10/06/2005WO2005076362A3 Semiconductor device containing dielectrically isolated doped field shield region
10/06/2005WO2005068395A3 High purity silicon carbide articles and methods
10/06/2005WO2005062079A8 Generating multiple bandgaps using multiple epitaxial layers
10/06/2005WO2005052989A3 Dielectric films for narrow gap-fill applications
10/06/2005WO2005050740A3 Nrom flash memory devices on ultrathin silicon
10/06/2005WO2005045903B1 Method for making a flat-top pad
10/06/2005WO2005022259A3 Attaching a pellicle frame to a reticle
10/06/2005WO2005010964A3 Silicon crystallization using self-assembled monolayers
10/06/2005WO2005003404A3 Composite refractory metal carbide coating on a substrate and method for making thereof
10/06/2005WO2004105092A3 Esd protection for semiconductor products
10/06/2005WO2004079764B1 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions
10/06/2005WO2004051372A3 Method of forming resist pattern, positive resist composition, and layered product
10/06/2005WO2004034438A3 Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
10/06/2005WO2003085166A3 Electroless deposition methods
10/06/2005US20050223344 Power-consumption calculation method and apparatus
10/06/2005US20050222699 Exposure apparatus and device manufacturing method
10/06/2005US20050222325 A star-graft copolymer for coating the particle with units derrived from tetra-, tri-, di- and/or monofunctional monomers, especially organosilicon monomers; obtainable by a heterogeneous polymerization reaction in the particle surface proximity, encapsulating at least a portion of said particles
10/06/2005US20050222288 Charging prepolymer, a foaming agent and an active hydrogen-containing compound in specified amounts into a tank and foaming/mixing them for a specified time by a mixer, then pouring the mixture liquid into a metal mold; producing a fine-bubble polyurethane foam, evenly formed, without hollow balloons
10/06/2005US20050221787 Integrated radio frequency circuits
10/06/2005US20050221741 Polymeric polishing pad having continuously regenerated work surface
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