Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2005
11/03/2005US20050242421 Mold assembly for a package stack via bottom-leaded plastic (BLP) packaging
11/03/2005US20050242417 Semiconductor chip package and method for manufacturing the same
11/03/2005US20050242415 Integrated circuit package with improved electro-static discharge protection
11/03/2005US20050242409 Imagine sensor with a protection layer
11/03/2005US20050242408 Structure of image sensor module and a method for manufacturing of wafer level package
11/03/2005US20050242406 Nonplanar device with stress incorporation layer and method of fabrication
11/03/2005US20050242405 Method of manufacturing semiconductor integrated circuit device having capacitor element
11/03/2005US20050242403 Isolation trench
11/03/2005US20050242402 Semiconductor device and its manufacture method
11/03/2005US20050242401 Wire structure, a thin film transistor substrate of using the wire structure and a method of manufacturing the same
11/03/2005US20050242399 MOSFET with electrostatic discharge protection structure and method of fabrication
11/03/2005US20050242398 Fully depleted SOI multiple threshold voltage application
11/03/2005US20050242397 Semiconductor device and method for manufacturing partial SOI substrates
11/03/2005US20050242396 SOI structure having a sige layer interposed between the silicon and the insulator
11/03/2005US20050242395 FinFET transistor device on SOI and method of fabrication
11/03/2005US20050242394 Pattern formation substrate and method of pattern formation
11/03/2005US20050242393 Semiconductor device
11/03/2005US20050242392 Super trench MOSFET including buried source electrode and method of fabricating the same
11/03/2005US20050242391 Two bit/four bit SONOS flash memory cell
11/03/2005US20050242390 Self-aligned silicide for word lines and contacts
11/03/2005US20050242388 Flash memory cell, flash memory device and manufacturing method thereof
11/03/2005US20050242387 Flash memory device having a graded composition, high dielectric constant gate insulator
11/03/2005US20050242384 MRAM and method of manufacturing the same
11/03/2005US20050242383 Ferroelectric memory and method for manufacturing the same
11/03/2005US20050242382 Magnetoresistive memory SOI cell
11/03/2005US20050242381 Ferroelectric capacitor, process for production thereof and semiconductor device using the same
11/03/2005US20050242378 Methods for fabricating a metal-oxide-semiconductor device structure and metal-oxide-semiconductor device structures formed thereby
11/03/2005US20050242377 Semiconductor device, a method of manufacturing the semiconductor device and a method of deleting information from the semiconductor device
11/03/2005US20050242376 Semiconductor device and method of making the same
11/03/2005US20050242375 Very fine-grain voltage island integrated circuit
11/03/2005US20050242373 Bipolar transistor having self-aligned silicide and a self-aligned emitter contact border
11/03/2005US20050242372 Compound semiconductor wafer and process for producing the same
11/03/2005US20050242370 Method for producing a junction region between a trench and a semiconductor zone surrounding the trench
11/03/2005US20050242369 Semiconductor device and method of forming a semiconductor device
11/03/2005US20050242368 Semiconductor device and method of forming a semiconductor device
11/03/2005US20050242367 Thin-film electronic device, in particular power device, and method for making same
11/03/2005US20050242365 Vertical structure semiconductor devices
11/03/2005US20050242361 Semiconductor laser apparatus and method of manufacturing the same
11/03/2005US20050242358 Light emitting diode and method of the same
11/03/2005US20050242356 Test circuit under pad
11/03/2005US20050242354 Display device and method of manufacturing the same
11/03/2005US20050242353 Method of manufacturing thin film transistor having polycrystalline silicon layer, thin film transistor manufactured using the method and flat panel display comprising the thin film transistor
11/03/2005US20050242352 Fabrication method of polycrystalline silicon liquid crystal display device
11/03/2005US20050242351 Thin film transistor array panel for liquid crystal display
11/03/2005US20050242348 Thin film transistor and organic electroluminescence display using the same
11/03/2005US20050242347 [thin film transistor array and fabricating method thereof]
11/03/2005US20050242345 OFETs with active channels formed of densified layers
11/03/2005US20050242343 Organic electronic circuit with functional interlayer, and method for making the same
11/03/2005US20050242341 Apparatus and method for supporting a flexible substrate during processing
11/03/2005US20050242340 Strained silicon NMOS devices with embedded source/drain
11/03/2005US20050242339 Apparatus and method for transverse characterization of materials
11/03/2005US20050242338 Non-planarized, self-aligned, non-volatile phase-change memory array and method of formation
11/03/2005US20050242330 Dielectric material
11/03/2005US20050242305 Semiconductor processing-purpose substrate detecting method and device, and substrate transfer system
11/03/2005US20050242303 Advanced pattern definition for particle-beam exposure
11/03/2005US20050242302 Advanced pattern definition for particle-beam processing
11/03/2005US20050242295 Apertured plate support mechanism and charged-particle beam instrument equipped therewith
11/03/2005US20050242294 Controlling the characteristics of implanter ion-beams
11/03/2005US20050242285 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
11/03/2005US20050242155 Flip chip bonding tool and ball placement capillary
11/03/2005US20050242079 Heater Module for Semiconductor Manufacturing Equipment
11/03/2005US20050242078 Ceramic Susceptor
11/03/2005US20050242064 Substrate processing apparatus
11/03/2005US20050242063 Method and device for the chemical mechanical polishing of workpieces
11/03/2005US20050242062 Substrate processing method, substrate processing apparatus, and semiconductor device manufacturing method
11/03/2005US20050242061 Self-cleaning method for plasma CVD apparatus
11/03/2005US20050242060 Plasma processing method
11/03/2005US20050241955 Substrate processing apparatus and substrate processing method
11/03/2005US20050241952 Method for manufacturing semiconductor device
11/03/2005US20050241947 System and method for an increased bath lifetime in a single-use plating regime
11/03/2005US20050241946 electrodeposition of copper or silver; for filling fine interconnect recesses such as trenches and via holes in semiconductor substrate with uniform coatings; control the movement of the conductive layer and the porous member relatively to each other without passing electric current
11/03/2005US20050241932 Manufacturing apparatus and manufacturing method of semiconductor device
11/03/2005US20050241931 Methods of manufacturing polycrystalline silicon thin film
11/03/2005US20050241844 Sealing device and apparatus
11/03/2005US20050241771 Substrate carrier for processing substrates
11/03/2005US20050241770 Substrate cleaning apparatus and method
11/03/2005US20050241769 Plasma processing apparatus and plasma processing method
11/03/2005US20050241768 High frequency plasma generator and high frequency plasma generating method
11/03/2005US20050241764 Baffle to reduce azimuthal etch asymmetry
11/03/2005US20050241763 Gas distribution system having fast gas switching capabilities
11/03/2005US20050241762 Alternating asymmetrical plasma generation in a process chamber
11/03/2005US20050241761 Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing
11/03/2005US20050241760 Wet etching system
11/03/2005US20050241754 Method for dicing wafer and process for manufacturing liquid-discharging head using the dicing method
11/03/2005US20050241684 Single wafer dryer and drying methods
11/03/2005US20050241678 Pattern forming method and apparatus, and device fabrication method and device
11/03/2005US20050241673 Resist removing apparatus and method of removing resist
11/03/2005US20050241672 Extraction of impurities in a semiconductor process with a supercritical fluid
11/03/2005US20050241671 Method for removing a substance from a substrate using electron attachment
11/03/2005US20050241669 Method and system of dry cleaning a processing chamber
11/03/2005US20050241584 Ceramics heater for semiconductor production system
11/03/2005US20050241580 Method for depositing thin film and thin film deposition system having separate jet orifices for spraying purge gas
11/03/2005US20050241578 Oxidizing method and oxidizing unit for object to be processed
11/03/2005US20050241572 Apparatus for coating photoresist
11/03/2005US20050241571 Method of growing nitride single crystal on silicon substrate, nitride semiconductor light emitting device using the same, method of manufacturing the same
11/03/2005US20050241401 Overstress indication
11/03/2005US20050241338 Reduced striae extreme ultraviolet elements
11/03/2005US20050241176 Reaction system for growing a thin film
11/03/2005US20050241175 Method and apparatus for removing and/or preventing surface contamination of a probe
11/03/2005US20050241143 Mounting machine and controller for the mounting machine