| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/20/2006 | US20060160370 Solid material gasification method, thin film formation process and apparatuses |
| 07/20/2006 | US20060160369 Method of fabricating semiconductor electric heating film |
| 07/20/2006 | US20060160368 Substrate processing apparatus and substrate processing method |
| 07/20/2006 | US20060160367 Methods of treating semiconductor substrates |
| 07/20/2006 | US20060160366 Method for preparing a structure with high aspect ratio |
| 07/20/2006 | US20060160365 Water-cooling apparatus for semiconductor thermal processing |
| 07/20/2006 | US20060160364 Refreshing wafers having low-k dielectric materials |
| 07/20/2006 | US20060160363 Shallow trench isolation formation |
| 07/20/2006 | US20060160362 Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereof |
| 07/20/2006 | US20060160361 Nickel salicide process and method of fabricating a semiconductor device using the same |
| 07/20/2006 | US20060160360 Evaporation method and evaporator |
| 07/20/2006 | US20060160359 Vacuum processing apparatus |
| 07/20/2006 | US20060160358 Method of fabricating semiconductor device including removing impurities from silicon nitride layer |
| 07/20/2006 | US20060160357 Semiconductor device and method for manufacturing the same |
| 07/20/2006 | US20060160356 Method for fabricating self-aligned contact hole |
| 07/20/2006 | US20060160355 Semiconductor device with a metal line and method of forming the same |
| 07/20/2006 | US20060160354 Via electromigration improvement by changing the via bottom geometric profile |
| 07/20/2006 | US20060160353 Methods for selective integration of airgaps and devices made by such methods |
| 07/20/2006 | US20060160352 Method of forming interconnection in semiconductor device |
| 07/20/2006 | US20060160351 Metal interconnect layer of semiconductor device and method for forming a metal interconnect layer |
| 07/20/2006 | US20060160350 On-chip Cu interconnection using 1 to 5 nm thick metal cap |
| 07/20/2006 | US20060160349 Interconnect structures with encasing cap and methods of making thereof |
| 07/20/2006 | US20060160348 Semiconductor element with under bump metallurgy structure and fabrication method thereof |
| 07/20/2006 | US20060160347 Method of manufacturing semiconductor device and method of treating electrical connection section |
| 07/20/2006 | US20060160346 Substrate bump formation |
| 07/20/2006 | US20060160345 Innovative growth method to achieve high quality III-nitride layers for wide band gap optoelectronic and electronic devices |
| 07/20/2006 | US20060160344 Rhodium film and method of formation |
| 07/20/2006 | US20060160343 Laser activation of implanted contact plug for memory bitline fabrication |
| 07/20/2006 | US20060160342 Forming dual metal complementary metal oxide semiconductor integrated circuits |
| 07/20/2006 | US20060160341 Method for fabricating semiconductor device |
| 07/20/2006 | US20060160340 Method and apparatus for processing a conductive thin film |
| 07/20/2006 | US20060160339 Soi contact structure(s) and corresponding production method |
| 07/20/2006 | US20060160338 Method of ion implantation to reduce transient enhanced diffusion |
| 07/20/2006 | US20060160337 Method of manufacturing a hemisperical grain silicon layer and method of manufacturing a semiconductor device using the same |
| 07/20/2006 | US20060160336 Silicon layer production method and solar cell production method |
| 07/20/2006 | US20060160335 Rare earth element-doped silicon/silicon dioxide lattice structure |
| 07/20/2006 | US20060160334 Epitaxial growth method |
| 07/20/2006 | US20060160333 Thermal treatment equipment and method for heat-treating |
| 07/20/2006 | US20060160332 Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby |
| 07/20/2006 | US20060160331 Laser processing method and laser processing apparatus |
| 07/20/2006 | US20060160330 Semiconductor device and manufacturing method thereof |
| 07/20/2006 | US20060160329 Method and system for fabricating strained layers for the manufacture of integrated circuits |
| 07/20/2006 | US20060160328 Treatment of a removed layer of silicon-germanium |
| 07/20/2006 | US20060160327 SOI wafer with cooling channels and a method of manufacture thereof |
| 07/20/2006 | US20060160326 Method for rounding top corners of isolation trench in semiconductor device |
| 07/20/2006 | US20060160325 Method of manufacturing semiconductor device |
| 07/20/2006 | US20060160324 Deglaze route to compensate for film non-uniformities after STI oxide processing |
| 07/20/2006 | US20060160323 Memory array buried digit line |
| 07/20/2006 | US20060160322 Nitridation of sti fill oxide to prevent the loss of sti fill oxide during manufacturing process |
| 07/20/2006 | US20060160321 Method of forming trench isolation structure |
| 07/20/2006 | US20060160320 Method of fabricating a semiconductor device |
| 07/20/2006 | US20060160319 Method of fabricating a capacitor by using a metallic deposit in an interconnection dielectric layer of an integrated circuit |
| 07/20/2006 | US20060160318 Transistor antifuse device |
| 07/20/2006 | US20060160317 Structure and method to enhance stress in a channel of cmos devices using a thin gate |
| 07/20/2006 | US20060160316 Silicon Carbide and related wide-bandgap transistors on semi-insulating epitaxy for high-speed, high-power applications |
| 07/20/2006 | US20060160315 Semiconductor device manufacturing method, wiring and semiconductor device |
| 07/20/2006 | US20060160314 Substrate having silicon germanium material and stressed silicon nitride layer |
| 07/20/2006 | US20060160313 Semiconductor device and method of manufacturing the same |
| 07/20/2006 | US20060160312 Gate electrode for finfet device |
| 07/20/2006 | US20060160311 Method of forming an integrated circuit having nanocluster devices and non-nanocluster devices |
| 07/20/2006 | US20060160310 Semiconductor device and method for fabricating the same |
| 07/20/2006 | US20060160309 Method of manufacturing a superjunction device with conventional terminations |
| 07/20/2006 | US20060160308 Method of forming a gate of a flash memory device |
| 07/20/2006 | US20060160307 Method of driving memory device to implement multiple states |
| 07/20/2006 | US20060160306 Method for forming trench gate dielectric layer |
| 07/20/2006 | US20060160305 Pillar Cell Flash Memory Technology |
| 07/20/2006 | US20060160304 Non-volatile memory resistor cell with nanotip electrode |
| 07/20/2006 | US20060160303 Method for forming high-K charge storage device |
| 07/20/2006 | US20060160302 Method of fabricating a fin field effect transistor having a plurality of protruding channels |
| 07/20/2006 | US20060160301 Method for fabricating a metal-insulator-metal capacitor |
| 07/20/2006 | US20060160300 Storage capacitor and method of manufacturing a storage capacitor |
| 07/20/2006 | US20060160299 Single mask MIM capacitor and resistor with in trench copper drift barrier |
| 07/20/2006 | US20060160298 Self-aligned, silicided, trench-based, dram/edram processes with improved retention |
| 07/20/2006 | US20060160297 Semiconductor integrated circuit device and process for manufacturing the same |
| 07/20/2006 | US20060160296 Methods of forming CMOS constructions |
| 07/20/2006 | US20060160295 Semiconductor device and method for fabricating the same |
| 07/20/2006 | US20060160294 Soi device with body contact self-aligned to gate |
| 07/20/2006 | US20060160293 Cell structure of EPROM device and method for fabricating the same |
| 07/20/2006 | US20060160292 NFET and PFET devices and methods of fabricating same |
| 07/20/2006 | US20060160291 Integration of biaxial tensile strained NMOS and uniaxial compressive strained PMOS on the same wafer |
| 07/20/2006 | US20060160290 Method to fabricate variable work function gates for FUSI devices |
| 07/20/2006 | US20060160289 Semiconductor device and method of manufacturing the same |
| 07/20/2006 | US20060160288 Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor |
| 07/20/2006 | US20060160287 Method of fabricating semiconductor device |
| 07/20/2006 | US20060160286 Memory device and method for fabricating the same |
| 07/20/2006 | US20060160285 Semiconductor device having MOSFET with offset-spacer, and manufacturing method thereof |
| 07/20/2006 | US20060160284 Switching device for a pixel electrode and methods for fabricating the same |
| 07/20/2006 | US20060160283 Method of fabricating a liquid crystal display device |
| 07/20/2006 | US20060160282 Thin film transistor array panel and manufacturing method thereof |
| 07/20/2006 | US20060160281 Method of fabricating a thin film transistor |
| 07/20/2006 | US20060160280 Thin film transistor, a method for preparing the same and a flat panel display employing the same |
| 07/20/2006 | US20060160279 Optical mask and manufacturing method of thin film transistor array panel using the optical mask |
| 07/20/2006 | US20060160278 Thin film device active matrix by pattern reversal process |
| 07/20/2006 | US20060160277 Active layer island |
| 07/20/2006 | US20060160276 Electronic devices |
| 07/20/2006 | US20060160275 Device and method for encapsulating with encapsulating material and electronic component fixed on a carrier |
| 07/20/2006 | US20060160274 Methods relating to forming interconnects |
| 07/20/2006 | US20060160273 Method for wafer level packaging |
| 07/20/2006 | US20060160272 Synthesis method for a compound used to form a self-assembled monolayer, compound for forming a self-assembled monolayer, and layer structure for a semiconductor component |
| 07/20/2006 | US20060160271 Stacked semiconductor module |