| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/25/2006 | US7082074 Semiconductor device having a power down mode |
| 07/25/2006 | US7082057 Semiconductor memory device |
| 07/25/2006 | US7082055 Semiconductor integrated circuit device |
| 07/25/2006 | US7082026 On chip capacitor |
| 07/25/2006 | US7081963 Substrate holder, and use of the substrate holder in a highly accurate measuring instrument |
| 07/25/2006 | US7081962 Aberration measuring apparatus for an optical system utilizing soft x-rays |
| 07/25/2006 | US7081961 Method and apparatus for characterization of optical systems |
| 07/25/2006 | US7081960 Interferometer, exposure apparatus, exposure method and interference length measurement method |
| 07/25/2006 | US7081953 Apparatus and method for inspecting pattern |
| 07/25/2006 | US7081950 Stage device and control method therefor, exposure apparatus, and device manufacturing method |
| 07/25/2006 | US7081949 Illumination apparatus, projection exposure apparatus, and device fabrication method |
| 07/25/2006 | US7081948 System for automated focus measuring of a lithography tool |
| 07/25/2006 | US7081947 Lithographic apparatus and device manufacturing method |
| 07/25/2006 | US7081946 Holding apparatus, holding method, exposure apparatus and device manufacturing method |
| 07/25/2006 | US7081945 Device manufacturing method, device manufactured thereby and lithographic apparatus therefor |
| 07/25/2006 | US7081944 Lithographic projection apparatus and device manufacturing method utilizing two arrays of focusing elements |
| 07/25/2006 | US7081938 Electro-optical device and method for manufacturing the same |
| 07/25/2006 | US7081931 Liquid crystal display having aluminum wiring |
| 07/25/2006 | US7081930 Process for fabrication of a liquid crystal display with thin film transistor array free from short-circuit |
| 07/25/2006 | US7081799 Bipolar transistor, oscillation circuit, and voltage controlled oscillator |
| 07/25/2006 | US7081780 Reset circuitry for an integrated circuit |
| 07/25/2006 | US7081778 Semiconductor integrated circuit related to a circuit operating on the basis of a clock signal |
| 07/25/2006 | US7081770 Multiple testing bars for testing liquid crystal display and method thereof |
| 07/25/2006 | US7081769 Method of identifying and analyzing semiconductor chip defects |
| 07/25/2006 | US7081766 Probe card for examining semiconductor devices on semiconductor wafers |
| 07/25/2006 | US7081758 Inspection pattern, inspection method, and inspection system for detection of latent defect of multi-layer wiring structure |
| 07/25/2006 | US7081756 Substrate inspection apparatus, substrate inspection method, method of manufacturing semiconductor device and recording medium |
| 07/25/2006 | US7081681 Semiconductor integrated circuit device for preventing warping of an insulating film therein |
| 07/25/2006 | US7081680 Self-aligned corrosion stop for copper C4 and wirebond |
| 07/25/2006 | US7081679 Structure and method for reinforcing a bond pad on a chip |
| 07/25/2006 | US7081676 Structure for controlling the interface roughness of cobalt disilicide |
| 07/25/2006 | US7081674 substrates with a polyelectrolyte layer covered with a conductive metal layer; serves to prevent the migration of material from the conductive layer to the underlying substrate and further provides improved adhesion of the conductive layer; integrated circuits |
| 07/25/2006 | US7081673 Multilayered cap barrier in microelectronic interconnect structures |
| 07/25/2006 | US7081669 Device and system for heat spreader with controlled thermal expansion |
| 07/25/2006 | US7081668 Flip chip molded/exposed die process and package structure |
| 07/25/2006 | US7081667 Power LED package |
| 07/25/2006 | US7081666 Lead frame structure with aperture or groove for flip chip in a leaded molded package |
| 07/25/2006 | US7081664 Doped semiconductor powder and preparation thereof |
| 07/25/2006 | US7081659 Semiconductor apparatus having a built-in electric coil and a method of making the semiconductor apparatus |
| 07/25/2006 | US7081656 CMOS constructions |
| 07/25/2006 | US7081655 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect |
| 07/25/2006 | US7081653 Semiconductor memory device having mis-type transistors |
| 07/25/2006 | US7081652 Semiconductor device having a side wall insulating film and a manufacturing method thereof |
| 07/25/2006 | US7081651 Non-volatile memory device with protruding charge storage layer and method of fabricating the same |
| 07/25/2006 | US7081649 Semiconductor integrated circuitry and method for manufacturing the circuitry |
| 07/25/2006 | US7081647 Microelectromechanical system and method for fabricating the same |
| 07/25/2006 | US7081646 Semiconductor device and method of fabricating same |
| 07/25/2006 | US7081642 Active matrix substrate display device |
| 07/25/2006 | US7081640 Organic semiconductor element having high insulation strength and fabrication method thereof |
| 07/25/2006 | US7081639 Semiconductor photodetection device and fabrication process thereof |
| 07/25/2006 | US7081634 Variably shaped beam EB writing system |
| 07/25/2006 | US7081633 Apparatus, method and program for ion implantation simulation, and computer readable storage medium having stored therein the program |
| 07/25/2006 | US7081630 Compact microcolumn for automated assembly |
| 07/25/2006 | US7081610 System for compensating for dark current in sensors |
| 07/25/2006 | US7081422 Manufacturing process for annealed wafer and annealed wafer |
| 07/25/2006 | US7081421 Atomic layer deposition by pulsing with an lanthanum precursor and hydrogen; depositing conductive ruthenium oxide films; capacitors, transistors, memory devices, and microelectronic systems; replacing silicon dioxide in integrated circuit |
| 07/25/2006 | US7081420 Method for preparing SiC crystal and SiC crystal |
| 07/25/2006 | US7081419 Gate dielectric structure for reducing boron penetration and current leakage |
| 07/25/2006 | US7081418 Method of fabricating a multi-layered thin film by using photolysis chemical vapor deposition |
| 07/25/2006 | US7081417 Manufacturing method for electronic device and multiple layer circuits thereof |
| 07/25/2006 | US7081416 Methods of forming field effect transistor gates |
| 07/25/2006 | US7081415 Method of dry plasma etching semiconductor materials |
| 07/25/2006 | US7081414 Deposition-selective etch-deposition process for dielectric film gapfill |
| 07/25/2006 | US7081413 Method and structure for ultra narrow gate |
| 07/25/2006 | US7081412 Double-sided etching technique for semiconductor structure with through-holes |
| 07/25/2006 | US7081411 Wafer etching techniques |
| 07/25/2006 | US7081410 Controlling threading dislocation densities in Ge on Si using graded GeSi layers and planarization |
| 07/25/2006 | US7081409 Methods of producing integrated circuit devices utilizing tantalum amine derivatives |
| 07/25/2006 | US7081408 Method of creating a tapered via using a receding mask and resulting structure |
| 07/25/2006 | US7081407 Method of preventing damage to porous low-k materials during resist stripping |
| 07/25/2006 | US7081406 Interconnect dielectric tuning |
| 07/25/2006 | US7081405 Package module for an IC device and method of forming the same |
| 07/25/2006 | US7081404 Methods of selectively bumping integrated circuit substrates and related structures |
| 07/25/2006 | US7081403 Thin leadless plastic chip carrier |
| 07/25/2006 | US7081402 Semiconductor package substrate having contact pad protective layer formed thereon and method for fabricating the same |
| 07/25/2006 | US7081401 Method of fabricating a p-type ohmic electrode in gallium nitride based optical device |
| 07/25/2006 | US7081400 Method for manufacturing polysilicon layer and method for manufacturing thin film transistor thereby |
| 07/25/2006 | US7081399 Method for producing a high quality useful layer on a substrate utilizing helium and hydrogen implantations |
| 07/25/2006 | US7081398 Methods of forming a conductive line |
| 07/25/2006 | US7081397 Forming a lateral implant mask over a top surface of the semiconductor substrate, implanting a heavy dopant concentration into the substrate to form a lateral implant regionin the substrate, stripping, forming an epitaxial silicon layer, forming trench mask, etching |
| 07/25/2006 | US7081396 Method for manufacturing device isolation film of semiconductor device |
| 07/25/2006 | US7081395 Silicon strain engineering accomplished via use of specific shallow trench isolation fill materials |
| 07/25/2006 | US7081394 Device for electrostatic discharge protection and method of manufacturing the same |
| 07/25/2006 | US7081393 Reduced dielectric constant spacer materials integration for high speed logic gates |
| 07/25/2006 | US7081392 Method for fabricating a gate structure of a FET and gate structure of a FET |
| 07/25/2006 | US7081391 Integrated circuit devices having buried insulation layers and methods of forming the same |
| 07/25/2006 | US7081390 Semiconductor device and a method of manufacturing the same |
| 07/25/2006 | US7081389 Semiconductor devices having dual capping layer patterns and methods of manufacturing the same |
| 07/25/2006 | US7081388 Self aligned contact structure for trench device |
| 07/25/2006 | US7081387 Damascene gate multi-mesa MOSFET |
| 07/25/2006 | US7081386 Semiconductor device and method of manufactuing the same |
| 07/25/2006 | US7081385 Nanotube semiconductor devices and methods for making the same |
| 07/25/2006 | US7081384 Method of forming a silicon dioxide layer |
| 07/25/2006 | US7081383 Method for fabricating memory cells and memory cell array |
| 07/25/2006 | US7081382 Trench device structure with single-side buried strap and method for fabricating the same |
| 07/25/2006 | US7081381 Flash memory cell and the method of making separate sidewall oxidation |
| 07/25/2006 | US7081380 Method of forming a conductive pattern of a semiconductor device and method of manufacturing a non-volatile semiconductor memory device using the same |
| 07/25/2006 | US7081379 Local interconnect for integrated circuit |
| 07/25/2006 | US7081378 Horizontal TRAM and method for the fabrication thereof |
| 07/25/2006 | US7081377 Three-dimensional memory |