| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/18/2006 | US7078733 Aluminum alloyed layered structure for an optical device |
| 07/18/2006 | US7078727 Semiconductor device and its manufacturing method |
| 07/18/2006 | US7078723 Microelectronic device with depth adjustable sill |
| 07/18/2006 | US7078715 Lithographic apparatus and apparatus adjustment method |
| 07/18/2006 | US7078714 Ion implanting apparatus |
| 07/18/2006 | US7078712 In-situ monitoring on an ion implanter |
| 07/18/2006 | US7078708 Lithographic apparatus and method of manufacturing a device and method of performing maintenance |
| 07/18/2006 | US7078706 Chamber, exposure apparatus, and device manufacturing method |
| 07/18/2006 | US7078690 Monitoring of contact hole production |
| 07/18/2006 | US7078689 Integrated electron beam and contaminant removal system |
| 07/18/2006 | US7078668 Photoelectric conversion apparatus |
| 07/18/2006 | US7078655 Ceramic substrate, ceramic heater, electrostatic chuck and wafer prober for use in semiconductor producing and inspecting devices |
| 07/18/2006 | US7078651 Thermal flux deposition by scanning |
| 07/18/2006 | US7078649 Method of forming semiconductor thin-film and laser apparatus used therefore |
| 07/18/2006 | US7078629 Multilayer wiring board |
| 07/18/2006 | US7078371 For cleaning a substrate of semiconductor integrated circuits or liquid crystal display devices |
| 07/18/2006 | US7078357 Method for manufacturing silicon wafer and silicon wafer |
| 07/18/2006 | US7078356 Low K interlevel dielectric layer fabrication methods |
| 07/18/2006 | US7078355 Semiconductor wafer; dispensing using pump; connecting to buffer tank; releasing, detection bubbles; rotating substrate |
| 07/18/2006 | US7078354 Method of manufacturing semiconductor device having oxide films with different thickness |
| 07/18/2006 | US7078353 Indirect bonding with disappearance of bonding layer |
| 07/18/2006 | US7078352 Methods for selective integration of airgaps and devices made by such methods |
| 07/18/2006 | US7078351 Photoresist intensive patterning and processing |
| 07/18/2006 | US7078350 Methods for the optimization of substrate etching in a plasma processing system |
| 07/18/2006 | US7078349 Method to form self-aligned floating gate to diffusion structures in flash |
| 07/18/2006 | US7078348 Multilayer damascene structure; dielectric layer; one step process; depositing photoresist; patterning; etching |
| 07/18/2006 | US7078347 Method for forming MOS transistors with improved sidewall structures |
| 07/18/2006 | US7078346 High density plasma chemical vapor deposition process |
| 07/18/2006 | US7078345 Method for manufacturing a semiconductor device |
| 07/18/2006 | US7078344 Stress free etch processing in combination with a dynamic liquid meniscus |
| 07/18/2006 | US7078343 Method of manufacturing compound semiconductor wafer |
| 07/18/2006 | US7078342 Method of forming a gate stack |
| 07/18/2006 | US7078341 Vapor deposition; overcoating semiconductor substrate |
| 07/18/2006 | US7078340 Metal deposit process |
| 07/18/2006 | US7078339 Method of forming metal line layer in semiconductor device |
| 07/18/2006 | US7078337 Selective isotropic etch for titanium-based materials |
| 07/18/2006 | US7078336 Method and system for fabricating a copper barrier layer with low dielectric constant and leakage current |
| 07/18/2006 | US7078335 Formation of self-organized stacked islands for self-aligned contacts of low dimensional structures |
| 07/18/2006 | US7078334 In situ hard mask approach for self-aligned contact etch |
| 07/18/2006 | US7078333 Method to improve adhesion of dielectric films in damascene interconnects |
| 07/18/2006 | US7078332 Method for manufacturing semiconductor device |
| 07/18/2006 | US7078331 Method of forming redistribution bump and semiconductor chip and mount structure fabricated using the same |
| 07/18/2006 | US7078330 Metal electrode and bonding method using the metal electrode |
| 07/18/2006 | US7078329 Method of manufacturing silicon carbide semiconductor device |
| 07/18/2006 | US7078328 Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride |
| 07/18/2006 | US7078327 Self-aligned poly-metal structures |
| 07/18/2006 | US7078326 Nucleation method for atomic layer deposition of cobalt on bare silicon during the formation of a semiconductor device |
| 07/18/2006 | US7078325 Process for producing a doped semiconductor substrate |
| 07/18/2006 | US7078324 Method of fabricating a semiconductor component with active regions separated by isolation trenches |
| 07/18/2006 | US7078322 Method of manufacturing a thin film transistor |
| 07/18/2006 | US7078321 Semiconductor device and method of manufacturing the same |
| 07/18/2006 | US7078320 Partial wafer bonding and dicing |
| 07/18/2006 | US7078319 Laser separated die with tapered sidewalls for improved light extraction |
| 07/18/2006 | US7078318 Method for depositing III-V semiconductor layers on a non-III-V substrate |
| 07/18/2006 | US7078317 Method and system for source switching and in-situ plasma bonding |
| 07/18/2006 | US7078316 Substrate joining apparatus |
| 07/18/2006 | US7078315 Method for eliminating inverse narrow width effects in the fabrication of DRAM device |
| 07/18/2006 | US7078314 Memory device having improved periphery and core isolation |
| 07/18/2006 | US7078313 Method for fabricating an integrated semiconductor circuit to prevent formation of voids |
| 07/18/2006 | US7078312 Method for controlling etch process repeatability |
| 07/18/2006 | US7078311 Substrate-embedded capacitor, production method thereof, and circuit board |
| 07/18/2006 | US7078310 Method for fabricating a high density composite MIM capacitor with flexible routing in semiconductor dies |
| 07/18/2006 | US7078309 Methods for producing a structured metal layer |
| 07/18/2006 | US7078308 Method and apparatus for removing adjacent conductive and nonconductive materials of a microelectronic substrate |
| 07/18/2006 | US7078307 Method for manufacturing single-sided buried strap in semiconductor devices |
| 07/18/2006 | US7078306 Method for forming a thin film resistor structure |
| 07/18/2006 | US7078305 High value split poly P-resistor with low standard deviation |
| 07/18/2006 | US7078304 Method for producing an electrical circuit |
| 07/18/2006 | US7078303 Method for manufacturing semiconductor device having thick insulating layer under gate side walls |
| 07/18/2006 | US7078302 Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal |
| 07/18/2006 | US7078301 Rare earth metal oxide memory element based on charge storage and method for manufacturing same |
| 07/18/2006 | US7078300 Thin germanium oxynitride gate dielectric for germanium-based devices |
| 07/18/2006 | US7078299 Formation of finFET using a sidewall epitaxial layer |
| 07/18/2006 | US7078298 Silicon-on-nothing fabrication process |
| 07/18/2006 | US7078297 Memory with recessed devices |
| 07/18/2006 | US7078296 Self-aligned trench MOSFETs and methods for making the same |
| 07/18/2006 | US7078295 Self-aligned split-gate nonvolatile memory structure and a method of making the same |
| 07/18/2006 | US7078294 Sealing method for electronic devices formed on a common semiconductor substrate and corresponding circuit structure |
| 07/18/2006 | US7078293 Method for fabricating optical interference display cell |
| 07/18/2006 | US7078292 Storage node contact forming method and structure for use in semiconductor memory |
| 07/18/2006 | US7078291 Method for fabricating a deep trench capacitor |
| 07/18/2006 | US7078290 Method for forming a top oxide with nitride liner |
| 07/18/2006 | US7078289 Method for fabricating a deep trench capacitor of DRAM device |
| 07/18/2006 | US7078288 Method of producing ferroelectric capacitor |
| 07/18/2006 | US7078287 Method of manufacturing semiconductor device |
| 07/18/2006 | US7078286 Process for fabricating a semiconductor device having electrically isolated low voltage and high voltage regions |
| 07/18/2006 | US7078285 SiGe nickel barrier structure employed in a CMOS device to prevent excess diffusion of nickel used in the silicide material |
| 07/18/2006 | US7078284 Method for forming a notched gate |
| 07/18/2006 | US7078283 Process for providing ESD protection by using contact etch module |
| 07/18/2006 | US7078282 Replacement gate flow facilitating high yield and incorporation of etch stop layers and/or stressed films |
| 07/18/2006 | US7078281 Method of manufacturing a semiconductor device by providing a mirror in the attenuation region |
| 07/18/2006 | US7078280 Vertical replacement-gate silicon-on-insulator transistor |
| 07/18/2006 | US7078279 Manufacturing method of a thin film transistor array substrate |
| 07/18/2006 | US7078278 Dual-metal CMOS transistors with tunable gate electrode work function and method of making the same |
| 07/18/2006 | US7078277 Semiconductor device and method for manufacturing the same |
| 07/18/2006 | US7078276 Nanoparticles and method for making the same |
| 07/18/2006 | US7078275 Semiconductor device and manufacturing method for same |
| 07/18/2006 | US7078274 Method of forming active matrix type display including a metal layer having a light shield function |
| 07/18/2006 | US7078273 Semiconductor memory cell and method of forming same |
| 07/18/2006 | US7078272 Wafer scale integration packaging and method of making and using the same |