Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2007
05/09/2007EP1783833A2 Heat Spreaders with Vias
05/09/2007EP1783832A1 Interposer and interposer producing method
05/09/2007EP1783831A2 Device for positioning and method for surface treatment of power semiconductor modules
05/09/2007EP1783830A1 Transfer equipment
05/09/2007EP1783829A1 Method for bonding electronic components
05/09/2007EP1783828A1 Semiconductor sealing resin sheet and semiconductor device manufacturing method using the same
05/09/2007EP1783827A1 Soldering method, solder pellet for die bonding, method for manufacturing solder pellet for die bonding and electronic component
05/09/2007EP1783826A1 Junction field-effect transistor
05/09/2007EP1783825A1 Silicon carbide single crystal and method of etching the same
05/09/2007EP1783824A1 Method for forming p-type semiconductor region, and semiconductor element
05/09/2007EP1783823A1 Exposure method and method for producing device
05/09/2007EP1783822A1 Exposure device, exposure device member cleaning method, exposure device maintenance method, maintenance device, and device manufacturing method
05/09/2007EP1783821A1 Exposure system and device production method
05/09/2007EP1783820A1 Process for producing ic chip
05/09/2007EP1783813A1 Frequency based controlling of microwave plasma process
05/09/2007EP1783554A1 Exposure equipment
05/09/2007EP1783546A1 Semitransmitting film, photomask blank, photomask, and semitransmitting film designing method
05/09/2007EP1783525A1 Projection optical system, exposure apparatus, and exposure method
05/09/2007EP1783250A2 Semiconductor material, production method thereof and semiconductor device
05/09/2007EP1783148A1 High-molecular compound, acid generator, positive resist compositions, and method for formation of resist patterns
05/09/2007EP1783103A1 Method for forming quartz glass
05/09/2007EP1782661A2 Electronic device and manufacturing method thereof
05/09/2007EP1782503A1 Apparatus and methods for constructing antennas using wire bonds as radiating elements
05/09/2007EP1782483A2 Semiconductor devices and the manufacture thereof
05/09/2007EP1782474A2 High strain glass/glass-ceramic containing semiconductor-on-insulator structures
05/09/2007EP1782467A1 Semiconductor construction with isolation regions for dram cell and production method
05/09/2007EP1782466A2 Dual gate cmos fabrication
05/09/2007EP1782465A2 Method and apparatus for cleaving brittle materials
05/09/2007EP1782464A1 Manufacturing method for semiconductor devices, and formation apparatus for semiconductor wafer dicing masks
05/09/2007EP1782463A1 Technique for forming a substrate having crystalline semiconductor regions of different characteristics
05/09/2007EP1782462A2 Method of detaching a thin semiconductor circuit from its base
05/09/2007EP1782461A2 System and method of cleaning and etching a substrate
05/09/2007EP1782460A1 Floating gate memory cell
05/09/2007EP1782459A2 Method for fabricating crystalline silicon
05/09/2007EP1782458A1 Copper doped magnetic semiconductors
05/09/2007EP1782457A2 Growth of nitride semiconductor crystals
05/09/2007EP1782456A1 Exposure apparatus, exposure method, and exposure mask
05/09/2007EP1782455A1 Ic chip and its manufacturing method
05/09/2007EP1782454A2 Low-doped semi-insulating sic crystals and method
05/09/2007EP1782139A1 Semiconductor processing method using virtual modules
05/09/2007EP1723571A4 Methods and apparatus for data analysis
05/09/2007EP1690135A4 Resist, barc and gap fill material stripping chemical and method
05/09/2007EP1668692A4 Adjustable self-aligned air gap dielectric for low capacitance wiring
05/09/2007EP1633527A4 Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk
05/09/2007EP1570512A4 Slurry composition for secondary polishing of silicon wafer
05/09/2007EP1556896A4 Anti-reflective compositions comprising triazine compounds
05/09/2007EP1412827B1 Integration of fault detection with run-to-run control
05/09/2007EP1384268A4 Three-dimensional metal devices highly suspended above semiconductor substrate, their circuit model, and method for manufacturing the same
05/09/2007EP1376669B1 Plasma processing device
05/09/2007EP1362005B1 Method for forming electrically conductive contact structures
05/09/2007EP1354321B1 Mram arrangement
05/09/2007EP1275142A4 Method for low temperature bonding and bonded structure
05/09/2007EP1269524B1 Semiconductor wafer pod
05/09/2007EP1269523B1 Wafer preparation systems and methods for preparing wafers
05/09/2007EP1214733B1 Device for loading and unloading substrates
05/09/2007EP1198833B1 Method for producing a semiconductor memory element
05/09/2007EP1104017B1 Method of flip-chip mounting a semiconductor chip to a circuit board
05/09/2007EP1098362B1 Method and device for forming bump
05/09/2007EP1066652B1 Trench-gate semiconductor devices and their manufacture
05/09/2007EP1060646B1 Method for manufacturing a resistor
05/09/2007EP1042812B1 Method of making a semiconductor substrate with embedded isolating layer for integrated circuits
05/09/2007EP1027675A4 Method for continuous, non lot-based integrated circuit manufacturing
05/09/2007CN2899105Y Catching ring
05/09/2007CN1961619A Atomic beam to protect a reticle
05/09/2007CN1961432A Nitride semiconductor element and process for producing the same
05/09/2007CN1961430A Semiconductor substrate for solar cell, method for manufacturing the same, and solar cell
05/09/2007CN1961429A Gate stack and gate stack etch sequence for metal gate integration
05/09/2007CN1961427A Method and device with durable contact on silicon carbide
05/09/2007CN1961425A Method and apparatus for precise marking and placement of an object
05/09/2007CN1961422A 电路装置及其制造方法 Circuit device and manufacturing method thereof
05/09/2007CN1961420A Semiconductor device and method for manufacturing the same
05/09/2007CN1961419A 半导体装置和电子装置 The semiconductor device and the electronic apparatus
05/09/2007CN1961418A Method of adhesion improvement for low K dielectrics to conductive materials
05/09/2007CN1961417A Porous ceramic materials as low-k films in semiconductor devices
05/09/2007CN1961416A Methods of forming electrical connections for semiconductor constructions
05/09/2007CN1961415A Flexible leadframe structure and method for forming integrated circuit packages
05/09/2007CN1961414A Memory with recessed devices
05/09/2007CN1961413A Methods for forming semiconductor wires and resulting devices
05/09/2007CN1961412A Semiconductor device
05/09/2007CN1961411A Method for forming a semiconductor device having a silicide layer
05/09/2007CN1961410A Reactive fluid systems for removing deposition materials and methods for using same
05/09/2007CN1961409A Lactate-containing corrosion inhibitor
05/09/2007CN1961408A Method of forming sidewall spacers
05/09/2007CN1961407A Exposing equipment, exposing method, and manufacturing method for element
05/09/2007CN1961406A In-situ surface treatment for memory cell formation
05/09/2007CN1961405A Method of operating a system for chemical oxide removal
05/09/2007CN1961401A Reciprocating drive for scanning a workpiece through an ion beam
05/09/2007CN1961400A 离子注入装置 Ion implantation apparatus
05/09/2007CN1961382A Method and apparatus for administering passivator to a conductor
05/09/2007CN1961318A Back annotation equipment, mask layout correcting equipment, back annotation method, program, recording medium, process for fabricating semiconductor integrated circuit
05/09/2007CN1961262A Device for covering substrates in a rotating manner
05/09/2007CN1961261A Radiation-sensitive composition, laminate, process for producing the sane and electronic part
05/09/2007CN1961259A Fabrication and use of superlattice
05/09/2007CN1961258A Cleaning a mask substrate
05/09/2007CN1961209A 集成电子传感器 Integrated electronic sensors
05/09/2007CN1961167A 重力补偿装置 Gravity compensation device
05/09/2007CN1961097A Deposition apparatus for providing uniform low-K dielectric
05/09/2007CN1961096A Forming high-K dielectric layers on smooth substrates
05/09/2007CN1961055A Electrochemical-mechanical polishing composition and method for using the same
05/09/2007CN1960836A Substrate peripheral portion measuring device and substrate peripheral portion polishing apparatus