| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/08/2007 | US7214555 Method for producing display device |
| 05/08/2007 | US7214554 Monitoring the deposition properties of an OLED |
| 05/08/2007 | US7214553 Process for the localized growth of nanotubes and process for fabricating a self-aligned cathode using the nanotube growth process |
| 05/08/2007 | US7214551 Multiple gate electrode linewidth measurement and photoexposure compensation method |
| 05/08/2007 | US7214550 Method to produce thin film resistor using dry etch |
| 05/08/2007 | US7214549 Correcting device, exposure apparatus, device production method, and device produced by the device production method |
| 05/08/2007 | US7214548 Apparatus and method for flattening a warped substrate |
| 05/08/2007 | US7214547 Methods of forming semiconductor constructions |
| 05/08/2007 | US7214537 Process control; monitoring concentration of hydrogen peroxide, hydroxylamine |
| 05/08/2007 | US7214453 Mask and its manufacturing method, exposure, and device fabrication method |
| 05/08/2007 | US7214413 Method and device for generating an activated gas curtain for surface treatment |
| 05/08/2007 | US7214412 Magenta toner and method for producing same |
| 05/08/2007 | US7214327 Anisotropic dry etching of Cu-containing layers |
| 05/08/2007 | US7214325 Method of fabricating ohmic contact on n-type gallium nitride (GaN) of room temperature by plasma surface treatment |
| 05/08/2007 | US7214305 forming concave zone in substrate surface; forming an electroconductive seed layer; electrolytic plating |
| 05/08/2007 | US7214289 Method and apparatus for wall film monitoring |
| 05/08/2007 | US7214274 Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
| 05/08/2007 | US7214271 Silicon single crystal wafer process apparatus, silicon single crystal wafer, and manufacturing method of silicon epitaxial wafer |
| 05/08/2007 | US7214270 Crystallization apparatus, crystallization method, device and phase modulation element |
| 05/08/2007 | US7214125 Method for controlling pH during planarization and cleaning of microelectronic substrates |
| 05/08/2007 | US7214122 Substrate polishing apparatus |
| 05/08/2007 | US7214117 Deflector of a micro-column electron beam apparatus and method for fabricating the same |
| 05/08/2007 | US7214027 Wafer handler method and system |
| 05/08/2007 | US7213963 Lithographic apparatus and device manufacturing method |
| 05/08/2007 | US7213739 Underfill fluxing curative |
| 05/08/2007 | US7213481 Apparatus for opening and closing cover |
| 05/08/2007 | US7213335 Method for manufacturing printed circuit boards |
| 05/08/2007 | US7213331 Method for forming stencil |
| 05/08/2007 | US7213330 Method of fabricating an electronic device |
| 05/08/2007 | US7213329 Method of forming a solder ball on a board and the board |
| 05/08/2007 | CA2303897C Dual face shower head electrode for a magnetron plasma generating apparatus |
| 05/08/2007 | CA2222502C Removal of material by polarized radiation and back side application of radiation |
| 05/08/2007 | CA2209699C Semiconductor device |
| 05/04/2007 | WO2007037381A1 Method of mounting electronic circuit constituting member and relevant mounting apparatus |
| 05/03/2007 | WO2007051142A2 Metal cuboid semiconductor device and method |
| 05/03/2007 | WO2007051110A2 Wire embedded bridge |
| 05/03/2007 | WO2007051070A2 Horizontal array stocker |
| 05/03/2007 | WO2007050799A2 Incorporating manufacturing variations in the analysis of integrated circuit design |
| 05/03/2007 | WO2007050754A2 Stackable wafer or die packaging with enhanced thermal and device performance |
| 05/03/2007 | WO2007050736A2 Vertical structure semiconductor devices and method of fabricating the same |
| 05/03/2007 | WO2007050419A2 Semiconductor structure with reduced gate doping and methods for forming thereof |
| 05/03/2007 | WO2007050337A1 Multiple gate printed transistor method and apparatus |
| 05/03/2007 | WO2007050317A2 A method of making an inverted-t channel transistor |
| 05/03/2007 | WO2007050313A1 Cmp of copper/ruthenium substrates |
| 05/03/2007 | WO2007050312A2 Low threshold voltage semiconductor device with dual threshold voltage control means |
| 05/03/2007 | WO2007050288A2 Multiple device types including an inverted-t channel transistor and method therefor |
| 05/03/2007 | WO2007050279A1 Triple layer anti-reflective hard mask |
| 05/03/2007 | WO2007050170A2 Transistor device and method of making the same |
| 05/03/2007 | WO2007050038A1 Method of manufacture of encapsulated package |
| 05/03/2007 | WO2007049960A1 A method for applying at least one silicon containing layer onto an electron conductive layer |
| 05/03/2007 | WO2007049921A1 Spin chuck |
| 05/03/2007 | WO2007049878A1 Probe card and method of fabricating the same |
| 05/03/2007 | WO2007049750A1 Palladium-selective etching solution and method for controlling etching selectivity |
| 05/03/2007 | WO2007049704A1 Device manufacturing apparatus connecting apparatus and connecting method, program, device manufacturing system, exposing apparatus, exposing method, determining/testing apparatus and determining/testing method |
| 05/03/2007 | WO2007049668A1 Method of forming scribe line on substrate of brittle material and scribe line forming apparatus |
| 05/03/2007 | WO2007049637A1 Composition for forming upper film and method for forming photoresist pattern |
| 05/03/2007 | WO2007049612A1 Film-forming method and film-forming apparatus |
| 05/03/2007 | WO2007049604A1 Power transmission device, stage device, exposure apparatus, and method for manufacturing device |
| 05/03/2007 | WO2007049603A1 Stage apparatus, coordinate correction method for the stage apparatus, exposure apparatus, and device production method |
| 05/03/2007 | WO2007049555A1 Cmos model making apparatus, its method, program of that method and recording medium |
| 05/03/2007 | WO2007049530A1 Die holding assembly, fabrication object holding assembly, microfabrication apparatus and method of mounting die |
| 05/03/2007 | WO2007049525A1 Laser irradiation apparatus and manufacturing method of semiconductor device |
| 05/03/2007 | WO2007049524A1 Positive photosensitive resin composition |
| 05/03/2007 | WO2007049510A1 Processing method and recording medium |
| 05/03/2007 | WO2007049494A1 Process for producing patterned substance |
| 05/03/2007 | WO2007049462A1 Cleaning sheet, transfer member provided with cleaning function, and method for cleaning substrate processing apparatus |
| 05/03/2007 | WO2007049441A1 Table for cutting sheet |
| 05/03/2007 | WO2007049435A1 Semiconductor wafer manufacturing method and semiconductor wafer cleaning method |
| 05/03/2007 | WO2007049417A1 Circuit module manufacturing method and circuit module |
| 05/03/2007 | WO2007049415A1 Method of forming metal silicate film and process for producing semiconductor device |
| 05/03/2007 | WO2007049413A1 Semiconductor production apparatus and semiconductor device |
| 05/03/2007 | WO2007049402A1 Process for producing film using atmospheric pressure hydrogen plasma, and method and apparatus for producing purification film |
| 05/03/2007 | WO2007049356A1 Semiconductor device and method for manufacturing same |
| 05/03/2007 | WO2007049225A1 A method of manufacturing a structure |
| 05/03/2007 | WO2007049170A1 Finfet transistors |
| 05/03/2007 | WO2007049087A1 Semiconductor chip with amorphous crack-stop layer |
| 05/03/2007 | WO2007048928A1 Method for making a thin-film structure and resulting thin-film structure |
| 05/03/2007 | WO2007048894A1 Method for modifying insulating or semi-conductive surfaces, and resulting products |
| 05/03/2007 | WO2007048445A1 Method and device for the placement of electronic components, in particular semiconductor chips, on a substrate |
| 05/03/2007 | WO2007048441A1 Method for testing a slurry used to form a semiconductor device |
| 05/03/2007 | WO2007048393A2 Semiconductor component with charge compensation structure and method for producing the same |
| 05/03/2007 | WO2007048387A2 Semiconductor component comprising a p-n junction, and method for the production thereof |
| 05/03/2007 | WO2007030522A3 Selectivity etch of films with high dielectric constant with h2 addition |
| 05/03/2007 | WO2007027798A3 Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation |
| 05/03/2007 | WO2007027686A3 Mask patterns with spacers for pitch multiplication and methods of forming the same |
| 05/03/2007 | WO2007024433A3 Method for the manufacture of a strained silicon-on-insulator structure |
| 05/03/2007 | WO2007010072A3 Method for the monolithic integration of materials of high mechanical quality with integrated circuits for mems/nems applications |
| 05/03/2007 | WO2007005813A3 Inorganic semiconductive films and methods therefor |
| 05/03/2007 | WO2007004133A3 Microchip assembly produced by transfer molding |
| 05/03/2007 | WO2007003852A3 Flat display active plate |
| 05/03/2007 | WO2006132379A3 Structure for functional film pattern formation and method of manufacturing functional film |
| 05/03/2007 | WO2006128898A9 Method for producing vertical electrical contact connections in semiconductor wafers |
| 05/03/2007 | WO2006121564A3 High voltage field effect device and method |
| 05/03/2007 | WO2006109039A3 Gas bearing spindle |
| 05/03/2007 | WO2005089330A3 Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricaton |
| 05/03/2007 | WO2005029556A3 Method of filling structures for forming via-first dual damascene interconnects |
| 05/03/2007 | US20070101307 Design supporting system of semiconductor integrated circuit, method of designing semiconductor integrated circuit, and computer readable medium for supporting design of semiconductor integrated circuit |
| 05/03/2007 | US20070101305 Methods and systems for implementing dummy fill for integrated circuits |
| 05/03/2007 | US20070101301 Simulation appartus, simulation method, and semiconductor device |
| 05/03/2007 | US20070100553 Shape simulation method, program and apparatus |