| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/03/2007 | US20070100488 Vacuum processing method and vacuum processing apparatus |
| 05/03/2007 | US20070100109 Nanoporous materials and methods of formation thereof |
| 05/03/2007 | US20070100086 Method of fabricating a three-dimensional nanostructure |
| 05/03/2007 | US20070099441 Carbon nanotube with ZnO asperities |
| 05/03/2007 | US20070099440 Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus |
| 05/03/2007 | US20070099439 Arrangement and method for forming one or more separated scores in a surface of a substrate |
| 05/03/2007 | US20070099438 Thin film deposition |
| 05/03/2007 | US20070099437 Power module having at least two substrates |
| 05/03/2007 | US20070099436 Method of producing silicon oxide, negative electrode active material for lithium ion secondary battery and lithium ion secondary battery using the same |
| 05/03/2007 | US20070099435 Method and system for forming a nitrided germanium-containing layer using plasma processing |
| 05/03/2007 | US20070099434 Method of forming oxide film of semiconductor device |
| 05/03/2007 | US20070099433 Gas dielectric structure formation using radiation |
| 05/03/2007 | US20070099432 Method for photolithography in semiconductor manufacturing |
| 05/03/2007 | US20070099431 Process for increasing feature density during the manufacture of a semiconductor device |
| 05/03/2007 | US20070099430 Method for manufacturing a semiconductor component |
| 05/03/2007 | US20070099429 Post exposure resist bake |
| 05/03/2007 | US20070099428 Plasma for patterning advanced gate stacks |
| 05/03/2007 | US20070099427 Method for preparing of cerium oxide powder for chemical mechanical polishing and method for preparing of chemical mechanical polishing slurry using the same |
| 05/03/2007 | US20070099426 Polishing method, polishing apparatus, and electrolytic polishing apparatus |
| 05/03/2007 | US20070099425 Method for etching non-conductive substrate surfaces |
| 05/03/2007 | US20070099424 Reduction of mechanical stress on pattern specific geometries during etch using double pattern layout and process approach |
| 05/03/2007 | US20070099423 Method of removing a metal silicide layer on a gate electrode in a semiconductor manufacturing process and etching method |
| 05/03/2007 | US20070099422 Process for electroless copper deposition |
| 05/03/2007 | US20070099421 Methods For Forming Cobalt Layers Including Introducing Vaporized Cobalt Precursors And Methods For Manufacturing Semiconductor Devices Using The Same |
| 05/03/2007 | US20070099420 Direct tailoring of the composition and density of ALD films |
| 05/03/2007 | US20070099419 Methods for forming semiconductor devices including thermal processing |
| 05/03/2007 | US20070099418 Resin plating method with added heat-treating process |
| 05/03/2007 | US20070099417 Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop |
| 05/03/2007 | US20070099416 Shrinking Contact Apertures Through LPD Oxide |
| 05/03/2007 | US20070099415 Integration process of tungsten atomic layer deposition for metallization application |
| 05/03/2007 | US20070099414 Semiconductor device comprising a contact structure based on copper and tungsten |
| 05/03/2007 | US20070099413 Method for forming multi-layer bumps on a substrate |
| 05/03/2007 | US20070099412 Soldering method for mounting semiconductor device on wiring board to ensure invariable gap therebetween, and soldering apparatus therefor |
| 05/03/2007 | US20070099411 Reflow apparatus, a reflow method, and a manufacturing method of semiconductor device |
| 05/03/2007 | US20070099410 Hard intermetallic bonding of wafers for MEMS applications |
| 05/03/2007 | US20070099409 Semiconductor device and method of manufacturing the same |
| 05/03/2007 | US20070099408 Forming of silicide areas in a semiconductor device |
| 05/03/2007 | US20070099407 Method for fabricating a transistor using a low temperature spike anneal |
| 05/03/2007 | US20070099406 Semiconductor device manufacturing method |
| 05/03/2007 | US20070099405 Methods for fabricating multi-terminal phase change devices |
| 05/03/2007 | US20070099404 Implant and anneal amorphization process |
| 05/03/2007 | US20070099403 Plasma composition for selective high-k etch |
| 05/03/2007 | US20070099402 Method for fabricating reliable semiconductor structure |
| 05/03/2007 | US20070099401 Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
| 05/03/2007 | US20070099400 Semiconductor circuit and method of fabricating the same |
| 05/03/2007 | US20070099399 Relaxation of layers |
| 05/03/2007 | US20070099398 Method and system for forming a nitrided germanium-containing layer using plasma processing |
| 05/03/2007 | US20070099397 Microfeature dies with porous regions, and associated methods and systems |
| 05/03/2007 | US20070099396 Method of forming pattern, film structure, electrooptical device and electronic equipment |
| 05/03/2007 | US20070099395 Wafer level packaging process |
| 05/03/2007 | US20070099394 Semiconductor device and manufacturing method thereof |
| 05/03/2007 | US20070099393 Method of manufacturing isolation layer pattern in a semiconductor device and isolation layer pattern using the same |
| 05/03/2007 | US20070099392 Fusion bonding process and structure for fabricating silicon-on-insulator (SOI) semiconductor devices |
| 05/03/2007 | US20070099391 Methods for forming semiconductor structures with buried isolation collars and semiconductor structures formed by these methods |
| 05/03/2007 | US20070099390 Vertical MIM capacitors and method of fabricating the same |
| 05/03/2007 | US20070099389 Capacitor layout technique for reduction of fixed pattern noise in a CMOS sensor |
| 05/03/2007 | US20070099388 Source/Drain Extensions Having Highly Activated and Extremely Abrupt Junctions |
| 05/03/2007 | US20070099387 Method for fabricating semiconductor device |
| 05/03/2007 | US20070099386 Integration scheme for high gain fet in standard cmos process |
| 05/03/2007 | US20070099385 Method of manufacturing semiconductor device |
| 05/03/2007 | US20070099384 Method for fabricating semiconductor device having recess gate |
| 05/03/2007 | US20070099383 Method for fabricating semiconductor device |
| 05/03/2007 | US20070099382 Method of forming source contact of NAND flash memory |
| 05/03/2007 | US20070099381 Dual-gate device and method |
| 05/03/2007 | US20070099380 Methods of fabricating flash memory devices including substantially uniform tunnel oxide layers |
| 05/03/2007 | US20070099379 Method of manufacturing a dielectric film in a capacitor |
| 05/03/2007 | US20070099378 Semiconductor device having align key and method of fabricating the same |
| 05/03/2007 | US20070099377 Thermal isolation of phase change memory cells |
| 05/03/2007 | US20070099376 Memory cell, pixel structure and fabrication process of memory cell |
| 05/03/2007 | US20070099375 Method for fabricating capacitor |
| 05/03/2007 | US20070099374 Bicmos device and method of manufacturing a bicmos device |
| 05/03/2007 | US20070099373 Method for manufacturing an integrated semiconductor transistor device with parasitic bipolar transistor |
| 05/03/2007 | US20070099372 Device having active regions of different depths |
| 05/03/2007 | US20070099371 CMOS image sensor and manufacturing method thereof |
| 05/03/2007 | US20070099370 Method for manufacturing semiconductor device |
| 05/03/2007 | US20070099369 Integration scheme method and structure for transistors using strained silicon |
| 05/03/2007 | US20070099368 Field effect transistor and method for manufacturing the same |
| 05/03/2007 | US20070099367 ENHANCEMENT OF ELECTRON AND HOLE MOBILITIES IN 110 Si UNDER BIAXIAL COMPRESSIVE STRAIN |
| 05/03/2007 | US20070099366 Lanthanum aluminum oxide dielectric layer |
| 05/03/2007 | US20070099365 Semiconductor device and method of fabricating the same |
| 05/03/2007 | US20070099364 Method for manufacturing a semiconductor device having a polymetal gate electrode |
| 05/03/2007 | US20070099363 Method of manufacturing semiconductor device |
| 05/03/2007 | US20070099362 Low resistance contact semiconductor device structure |
| 05/03/2007 | US20070099361 Method for forming a semiconductor structure and structure thereof |
| 05/03/2007 | US20070099360 Integrated circuits having strained channel field effect transistors and methods of making |
| 05/03/2007 | US20070099359 Carrier multiplication in quantum-confined semiconductor materials |
| 05/03/2007 | US20070099358 Method of measuring pattern shift in semiconductor device |
| 05/03/2007 | US20070099357 Devices containing annealed stabilized silver nanoparticles |
| 05/03/2007 | US20070099356 Flat panel display device and method of manufacturing the same |
| 05/03/2007 | US20070099355 Satellite and method of manufacturing a semiconductor film using the satellite |
| 05/03/2007 | US20070099354 Fabricating method of a pixel structure |
| 05/03/2007 | US20070099353 Method for forming a semiconductor structure and structure thereof |
| 05/03/2007 | US20070099352 Method for annealing silicon thin films and polycrystalline silicon thin films prepared therefrom |
| 05/03/2007 | US20070099351 Sensing system |
| 05/03/2007 | US20070099350 Structure and method of fabricating finfet with buried channel |
| 05/03/2007 | US20070099349 Manufacturing method for magnetic sensor and lead frame therefor |
| 05/03/2007 | US20070099348 Methods and apparatus for Flip-Chip-On-Lead semiconductor package |
| 05/03/2007 | US20070099347 Array of cells including a selection bipolar transistor and fabrication method thereof |
| 05/03/2007 | US20070099346 Surface treatments for underfill control |
| 05/03/2007 | US20070099345 Method for producing through-contacts and a semiconductor component with through-contacts |