Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2007
06/21/2007US20070141514 Method for forming photoresist pattern and photoresist laminate
06/21/2007US20070141508 Negative resist composition and method for forming resist pattern
06/21/2007US20070141483 Near-field exposure photoresist and fine pattern forming method using the same
06/21/2007US20070141481 photoresists with varying transmissive areas; halftones
06/21/2007US20070141480 including a first pattern portion having a first minimum dimension and a second pattern portion having a second minimum dimension includes a first exposure step of performing exposure using a Levenson-type mask and a second exposure step of performing exposure using a half tone-type mask
06/21/2007US20070141479 mask pattern includes a main pattern to be transferred through exposure and an auxiliary pattern that diffracts exposing light and is not transferred through the exposure; can improve contrast in forming a pattern in an arbitrary shape
06/21/2007US20070141478 sequential lateral solidification (SLS) with two laser irradiations using a mask for patterning the laser beam so as to increase the grain length
06/21/2007US20070141360 Method for eliminating punctual defects comprised in an electrochemical device
06/21/2007US20070141274 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
06/21/2007US20070141258 Methods of growing nitride-based film using varying pulses
06/21/2007US20070141257 Method and apparatus for forming metal silicate film, and method for manufacturing semiconductor device
06/21/2007US20070141251 Method of forming thin metal films on substrates
06/21/2007US20070140828 Silicon wafer and method for production of silicon wafer
06/21/2007US20070140826 Wafer positioning systems and methods thereof
06/21/2007US20070140815 Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
06/21/2007US20070140814 Large area substrate transferring method
06/21/2007US20070140671 Cooling Device, and Apparatus and Method for Manufacturing Image Display Panel Using Cooling Device
06/21/2007US20070140036 Semiconductor memory device
06/21/2007US20070139979 Pressure-contact type rectifier
06/21/2007US20070139859 Thin film capacitor, high-density packaging substrate incorporating thin film capacitor, and method for manufacturing thin-film capacitor
06/21/2007US20070139855 Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus
06/21/2007US20070139851 Substrate holding technique
06/21/2007US20070139642 Method for determining position of semiconductor wafer, and apparatus using the same
06/21/2007US20070139636 Polarization rotator and a crystalline-quartz plate for use in an optical imaging system
06/21/2007US20070139164 Radio frequency data communications device
06/21/2007US20070139060 Method and system for compensating thermally induced motion of probe cards
06/21/2007US20070139043 Eddy current system for in-situ profile measurement
06/21/2007US20070138954 Semiconductor device and manufacturing method thereof
06/21/2007US20070138933 Display apparatus
06/21/2007US20070138908 Matching circuit for megasonic transducer device
06/21/2007US20070138696 Manufacturing method of optical electronic components and optical electronic components manufactured using the same
06/21/2007US20070138655 Pad structure of semiconductor device and formation method
06/21/2007US20070138642 Interconnections having double capping layer and method for forming the same
06/21/2007US20070138640 Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
06/21/2007US20070138636 Method of forming a semiconductor structure having metal migration semiconductor barrier layers
06/21/2007US20070138629 Component stacking for integrated circuit electronic package
06/21/2007US20070138628 Apparatus and method for increasing the quantity of discrete electronic components in an integrated circuit package
06/21/2007US20070138607 Lead assemblies with offset portions and microelectronic assemblies with leads having offset portions
06/21/2007US20070138597 Angled implant to improve high current operation of bipolar transistors
06/21/2007US20070138596 Semiconductor device module structure
06/21/2007US20070138595 Phase change memory cell and fabricating method thereof
06/21/2007US20070138588 Backlit Photodiode and Method of Manufacturing a Backlit Photodiode
06/21/2007US20070138584 Microelectromechanical system pressure sensor and method for making and using
06/21/2007US20070138578 Metal oxynitride as a pFET material
06/21/2007US20070138577 Transistor Structures
06/21/2007US20070138576 Non-volatile semiconductor memory and method for manufacturing a non-volatile semiconductor memory
06/21/2007US20070138573 Semiconductor device and manufacturing method of the same
06/21/2007US20070138571 Semiconductor device and method for fabricating the same
06/21/2007US20070138570 Formation of raised source/drain structures in NFET with embedded SiGe in PFET
06/21/2007US20070138568 Semiconductor device, Its manufacturing method and electronic apparatus thereof
06/21/2007US20070138567 Semiconductor device including a semiconductor substrate formed with a shallow impurity region, and a fabrication method for the same
06/21/2007US20070138566 Semiconductor device and manufacturing method of the same
06/21/2007US20070138564 Double anneal with improved reliability for dual contact etch stop liner scheme
06/21/2007US20070138563 Dual metal gate self-aligned integration
06/21/2007US20070138560 Semiconductor device and method of manufacturing the same
06/21/2007US20070138557 Semiconductor device
06/21/2007US20070138556 Self-aligned planar double-gate process by self-aligned oxidation
06/21/2007US20070138554 Full depletion SOI-MOS transistor
06/21/2007US20070138553 Method of manufacturing semiconductor substrate and semiconductor device
06/21/2007US20070138551 High voltage semiconductor device and method for fabricating the same
06/21/2007US20070138549 Gate layouts for transistors
06/21/2007US20070138548 Power ldmos transistor
06/21/2007US20070138545 Semiconductor device having a trench gate and method of fabricating the same
06/21/2007US20070138541 Method of erasing data from SONOS memory device
06/21/2007US20070138539 Non-volatile memory device having a nitride-oxide dielectric layer
06/21/2007US20070138538 Method of forming self-aligned floating gate array and flash memory device including self-aligned floating gate array
06/21/2007US20070138537 Non-volatile memory device and method of fabricating a non-volatile memory device
06/21/2007US20070138536 Method of fabricating a semiconductor memory device
06/21/2007US20070138534 Deposition of metal oxide and/or low asymmetrical tunnel barrier interpoly insulators
06/21/2007US20070138532 Semiconductor device with a line and method of fabrication thereof
06/21/2007US20070138531 Metal-insulator-metal capacitors
06/21/2007US20070138529 MIS capacitor and method of formation
06/21/2007US20070138524 Semiconductor memory device and methods thereof
06/21/2007US20070138523 Transistor, memory cell, memory cell array and method of forming a memory cell array
06/21/2007US20070138520 Ferroelectric passive memory cell, device and method of manufacture thereof
06/21/2007US20070138519 Production process for a semiconductor component with a praseodymium oxide dielectric
06/21/2007US20070138518 Semiconductor device and method of manufacturing thereof
06/21/2007US20070138506 Nitride metal oxide semiconductor integrated transistor devices
06/21/2007US20070138505 Low defect group III nitride films useful for electronic and optoelectronic devices and methods for making the same
06/21/2007US20070138504 Method for manufacturing diode-connected transistor and image display device using the same
06/21/2007US20070138503 Semiconductor package structure for vertical mount and method
06/21/2007US20070138499 Group III nitride semiconductor device and light-emitting device using the same
06/21/2007US20070138498 Methods and apparatus for packaging integrated circuit devices
06/21/2007US20070138492 Nitride semiconductor light emitting device and method of fabricating nitride semiconductor laser device
06/21/2007US20070138486 Optical semiconductor element and method for manufacturing the same
06/21/2007US20070138481 Thin film transistor array panel and manufacturing method thereof
06/21/2007US20070138480 Semiconductor display device and manufacturing method thereof
06/21/2007US20070138475 Semiconductor device and manufacturing method thereof
06/21/2007US20070138474 Thin film transistor array panel and manufacturing method thereof
06/21/2007US20070138473 Semiconductor device and method of manufacture thereof
06/21/2007US20070138471 Liquid crystal display device and method for fabricating the same
06/21/2007US20070138468 Semiconductor device and method for producing it
06/21/2007US20070138438 Fine particle sizes; narrow particle size distribution; display devices and lighting elements; printed on explosives or ammunitions; currency; printed on confidential documentation
06/21/2007US20070138391 Steady-state non-equilibrium distribution of free carriers and photon energy up-conversion using same
06/21/2007US20070138390 Inspection method and inspection system using charged particle beam
06/21/2007US20070138161 Ceramic heater unit
06/21/2007US20070138151 Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device
06/21/2007US20070138141 Method of polishing a semiconductor-on-insulator structure
06/21/2007US20070138140 Method for controlling polishing process
06/21/2007US20070138139 Method of manufacturing semiconductor device, acid etching resistance material and copolymer
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