| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/26/2007 | US7236239 Illumination system and exposure apparatus |
| 06/26/2007 | US7236233 Assembly of a reticle holder and a reticle |
| 06/26/2007 | US7236231 Exposure apparatus and device manufacturing method |
| 06/26/2007 | US7236230 Exposure apparatus and device fabrication method |
| 06/26/2007 | US7236229 Load lock chamber, processing system |
| 06/26/2007 | US7236228 Exposure apparatus |
| 06/26/2007 | US7236220 Liquid crystal display device and manufacturing method thereof |
| 06/26/2007 | US7236093 Method for the manufacture of a smart label inlet web, and a smart label inlet web |
| 06/26/2007 | US7236006 Logic circuit, logic circuit design method, logic circuit design system, and logic circuit design program |
| 06/26/2007 | US7235984 Probe device and probe method |
| 06/26/2007 | US7235888 Method for manufacturing semiconductor device, adhesive sheet for use therein and semiconductor device |
| 06/26/2007 | US7235887 Semiconductor package with improved chip attachment and manufacturing method thereof |
| 06/26/2007 | US7235886 Chip-join process to reduce elongation mismatch between the adherents and semiconductor package made thereby |
| 06/26/2007 | US7235883 Layered wiring line of silver alloy and method for forming the same and display panel substrate using the same |
| 06/26/2007 | US7235882 Semiconductor device having a wiring layer of damascene structure and method for manufacturing the same |
| 06/26/2007 | US7235881 Electronic component, semiconductor device, methods of manufacturing the same, circuit board, and electronic instrument |
| 06/26/2007 | US7235879 Semiconductor device and method of manufacturing the same, electronic device and method of manufacturing the same, and electronic instrument |
| 06/26/2007 | US7235874 Semiconductor device, its manufacturing method, circuit board, and electronic unit |
| 06/26/2007 | US7235873 Protective device for subassemblies and method for producing a protective device |
| 06/26/2007 | US7235872 Bow control in an electronic package |
| 06/26/2007 | US7235868 Lead frame and its manufacturing method |
| 06/26/2007 | US7235866 Low dielectric constant film material, film and semiconductor device using such material |
| 06/26/2007 | US7235865 Methods for making nearly planar dielectric films in integrated circuits |
| 06/26/2007 | US7235864 Integrated circuit devices, edge seals therefor |
| 06/26/2007 | US7235863 Silicon wafer and process for producing it |
| 06/26/2007 | US7235861 NPN transistor having reduced extrinsic base resistance and improved manufacturability |
| 06/26/2007 | US7235860 Bipolar transistor including divided emitter structure |
| 06/26/2007 | US7235859 Arrangement and process for protecting fuses/anti-fuses |
| 06/26/2007 | US7235858 Edge intensive antifuse and method for making the same |
| 06/26/2007 | US7235857 Power semiconductor device |
| 06/26/2007 | US7235856 Trench isolation for semiconductor devices |
| 06/26/2007 | US7235854 Lanthanide doped TiOx dielectric films |
| 06/26/2007 | US7235850 Thin film transistor, method of fabricating the same, and flat panel display using thin film transistor |
| 06/26/2007 | US7235849 Semiconductor device and method for fabricating the same |
| 06/26/2007 | US7235848 Nonvolatile memory with spacer trapping structure |
| 06/26/2007 | US7235843 Implanting carbon to form P-type source drain extensions |
| 06/26/2007 | US7235842 Insulated gate power semiconductor devices |
| 06/26/2007 | US7235837 Technique to control tunneling currents in DRAM capacitors, cells, and devices |
| 06/26/2007 | US7235836 Semiconductor device including a TCAM having a storage element formed with a DRAM |
| 06/26/2007 | US7235835 Semiconductor device and its manufacturing method, and electronic device |
| 06/26/2007 | US7235833 Image sensor device and manufacturing method thereof |
| 06/26/2007 | US7235832 Self-aligned rear electrode for diode array element |
| 06/26/2007 | US7235830 Semiconductor device and process for manufacturing the same |
| 06/26/2007 | US7235828 Semiconductor device with residual nickel from crystallization of semiconductor film |
| 06/26/2007 | US7235827 Vertical power JFET with low on-resistance for high voltage applications |
| 06/26/2007 | US7235822 Transistor with silicon and carbon layer in the channel region |
| 06/26/2007 | US7235819 Semiconductor device having group III nitride buffer layer and growth layers |
| 06/26/2007 | US7235818 Flip chip type nitride semiconductor light emitting device and manufacturing method thereof |
| 06/26/2007 | US7235814 Active matrix display device and method of manufacturing the same |
| 06/26/2007 | US7235811 Thin film structure from LILAC annealing |
| 06/26/2007 | US7235810 Semiconductor device and method of fabricating the same |
| 06/26/2007 | US7235809 Semiconductor channel on insulator structure |
| 06/26/2007 | US7235806 Wafer edge with light sensor |
| 06/26/2007 | US7235801 Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby |
| 06/26/2007 | US7235797 Method of implanting a substrate and an ion implanter for performing the method |
| 06/26/2007 | US7235795 Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process |
| 06/26/2007 | US7235782 Semiconductor inspection system |
| 06/26/2007 | US7235516 Semiconductor cleaning composition comprising an ethoxylated surfactant |
| 06/26/2007 | US7235502 Transitional dielectric layer to improve reliability and performance of high dielectric constant transistors |
| 06/26/2007 | US7235501 Lanthanum hafnium oxide dielectrics |
| 06/26/2007 | US7235500 Material for forming silica based film |
| 06/26/2007 | US7235499 Semiconductor processing methods |
| 06/26/2007 | US7235498 Process for growing a dielectric layer on a silicon-containing surface using a mixture of N2O and O3 |
| 06/26/2007 | US7235497 Selective oxidation methods and transistor fabrication methods |
| 06/26/2007 | US7235496 HDPCVD process and method for improving uniformity of film thickness |
| 06/26/2007 | US7235495 Controlled growth of highly uniform, oxide layers, especially ultrathin layers |
| 06/26/2007 | US7235494 CMP cleaning composition with microbial inhibitor |
| 06/26/2007 | US7235493 Low-k dielectric process for multilevel interconnection using mircocavity engineering during electric circuit manufacture |
| 06/26/2007 | US7235492 Low temperature etchant for treatment of silicon-containing surfaces |
| 06/26/2007 | US7235491 Method of manufacturing spacer |
| 06/26/2007 | US7235490 Method of manufacturing semiconductor device |
| 06/26/2007 | US7235489 Device and method to eliminate shorting induced by via to metal misalignment |
| 06/26/2007 | US7235488 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging |
| 06/26/2007 | US7235487 Metal seed layer deposition |
| 06/26/2007 | US7235486 Method for forming tungsten materials during vapor deposition processes |
| 06/26/2007 | US7235485 Method of manufacturing semiconductor device |
| 06/26/2007 | US7235484 Nanolayer thick film processing system and method |
| 06/26/2007 | US7235483 Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth |
| 06/26/2007 | US7235482 Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology |
| 06/26/2007 | US7235481 Method of manufacturing a semiconductor device having a silicidation blocking layer |
| 06/26/2007 | US7235480 Semiconductor processing methods of forming integrated circuitry and semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry |
| 06/26/2007 | US7235479 Organic solvents having ozone dissolved therein for semiconductor processing utilizing sacrificial materials |
| 06/26/2007 | US7235478 Polymer spacer formation |
| 06/26/2007 | US7235477 Multi-layer interconnection circuit module and manufacturing method thereof |
| 06/26/2007 | US7235476 Semiconductor device and manufacturing method of the same |
| 06/26/2007 | US7235475 Semiconductor nanowire fluid sensor and method for fabricating the same |
| 06/26/2007 | US7235474 System and method for imprint lithography to facilitate dual damascene integration with two imprint acts |
| 06/26/2007 | US7235473 Dual silicide semiconductor fabrication process |
| 06/26/2007 | US7235472 Method of making fully silicided gate electrode |
| 06/26/2007 | US7235471 Method for forming a semiconductor device having a silicide layer |
| 06/26/2007 | US7235470 Semiconductor device and manufacturing method thereof |
| 06/26/2007 | US7235469 Semiconductor device and method for manufacturing the same |
| 06/26/2007 | US7235468 FinFET device with reduced DIBL |
| 06/26/2007 | US7235467 Method for forming a semiconductor device having a structure of a single crystal scandium oxide film formed on a silicon substrate |
| 06/26/2007 | US7235466 Method of fabricating a polysilicon layer |
| 06/26/2007 | US7235465 Process for producing semiconductor chips having a protective film on the back surface |
| 06/26/2007 | US7235464 Patterning method |
| 06/26/2007 | US7235463 Method for fabricating an electrical insulator |
| 06/26/2007 | US7235462 Methods for fabricating a substrate |
| 06/26/2007 | US7235461 Method for bonding semiconductor structures together |