Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2007
06/20/2007CN1322565C Semiconductor device comprising a thin oxide liner and method of manufacturing the same
06/20/2007CN1322564C Silicon germanium bipolar transistor
06/20/2007CN1322563C Laser annealing device for preparing polycrystal system membrance layer and method for forming polycrystal system membrance layer
06/20/2007CN1322562C Monitoring low-temp quick thermal annealing process by ion implanted chip
06/20/2007CN1322561C Laser device, laser annealing method and method for manufacturing semiconductor device
06/20/2007CN1322560C Process for selectively etching dielectric layers
06/20/2007CN1322559C Plasma processor
06/20/2007CN1322558C Cleaning method of substrate treating apparatus, and substrate treating apparatus
06/20/2007CN1322557C Processing apparatus and gas discharge suppressing member
06/20/2007CN1322556C Work treating method and treating device
06/20/2007CN1322555C Method of fabricating semiconductor device
06/20/2007CN1322554C Method for producing IC chip
06/20/2007CN1322553C Improved method for forming contacting holes
06/20/2007CN1322552C Analog method for fluctuation of ionic injection
06/20/2007CN1322551C Vapor phase epitaxial apparatus and vapor phase epitaxial method
06/20/2007CN1322550C Liquid supplying device and substrate processing device
06/20/2007CN1322549C Simultaneous formation of deep trench capacitor and resistor
06/20/2007CN1322548C Preparation method of silicon and silicon germanium quantum point array
06/20/2007CN1322547C Process for preparing silicon-germanium material on insulator based on silicon-germanium / silicon structure separation-by-implantation-of-oxygen
06/20/2007CN1322546C Design of pivture, optical mask and photoetching colloid figure, and method for making smiconductor device
06/20/2007CN1322545C Light carving projection device and method for producing device with it and produced device
06/20/2007CN1322544C Device and method for heat treatment
06/20/2007CN1322543C Semiconductor device and making method
06/20/2007CN1322539C Wafer area pressure control for plasma confinement and method, device
06/20/2007CN1322538C Adjustable conductance limiting aperture for ion implanters
06/20/2007CN1322512C Memory device and method for operation of the same
06/20/2007CN1322398C Semiconductor integrated circuit and microprocessor unit switching method
06/20/2007CN1322374C Exposure device and aberration correcting method
06/20/2007CN1322373C Projection optical system, exposure device and its assembly mfg. method
06/20/2007CN1322351C Crystallizer and crystallizing method
06/20/2007CN1322105C Cleaning solution and manufacturing method for semiconductor device
06/20/2007CN1322087C Composition for grinding agent and making-up method thereof
06/20/2007CN1322030C Novel organic semiconductor polymer and organic thin film transistor using said polymer
06/20/2007CN1321866C Method and apparatus for shaping protecting band of belt convayer
06/20/2007CN1321755C Method for rinsing surface of silicon and technique for manufacturing thin film transistory by using the rinsing method
06/20/2007CN1321748C Substrate processing device
06/20/2007CN1321737C Process for producing film forming resins for photoresist compositions
06/19/2007USRE39697 Method of making floating-gate memory-cell array with digital logic transistors
06/19/2007US7233874 Method and apparatus for monitoring integrated circuit fabrication
06/19/2007US7233842 Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it
06/19/2007US7233841 Vision system
06/19/2007US7233836 Exposure apparatus and device manufacturing method
06/19/2007US7233796 Optimizing data transfer in radio system
06/19/2007US7233730 3D photonic bandgap device in SOI method
06/19/2007US7233610 Nitride based semiconductor laser diode device with a bar mask
06/19/2007US7233537 Thin film magnetic memory device provided with a dummy cell for data read reference
06/19/2007US7233522 NAND memory array incorporating capacitance boosting of channel regions in unselected memory cells and method for operation of same
06/19/2007US7233519 Thin film magnetic memory device for conducting data write operation by application of a magnetic field
06/19/2007US7233516 Semiconductor device and method for fabricating the same
06/19/2007US7233511 Semiconductor integrated circuit with voltage generation circuit, liquid crystal display controller and mobile electric equipment
06/19/2007US7233466 Input protection circuit
06/19/2007US7233387 Image forming apparatus
06/19/2007US7233386 Method of optimizing imaging performance
06/19/2007US7233383 Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration
06/19/2007US7233197 Methods and systems for reducing leakage current in semiconductor circuits
06/19/2007US7233160 Wafer probe
06/19/2007US7233157 Test board for high-frequency system level test
06/19/2007US7233155 Electrooptic device, electronic apparatus, and method for making the electrooptic device
06/19/2007US7233152 Short detection circuit and short detection method
06/19/2007US7233105 Organic electroluminescent display device having plural carrier transportation layers
06/19/2007US7233077 Semiconductor device
06/19/2007US7233076 Semiconductor device with read out prevention and method of producing same
06/19/2007US7233073 Semiconductor device and method for fabricating the same
06/19/2007US7233070 Semiconductor device having no cracks in one or more layers underlying a metal line layer and method of manufacturing the same
06/19/2007US7233069 Interconnection substrate and fabrication method thereof
06/19/2007US7233068 Filling small dimension vias using supercritical carbon dioxide
06/19/2007US7233067 Manufacturing a bump electrode with roughened face
06/19/2007US7233066 Multilayer wiring substrate, and method of producing same
06/19/2007US7233062 Integrated circuit package with improved electro-static discharge protection
06/19/2007US7233056 Chip scale package with heat spreader
06/19/2007US7233053 Integrated semiconductor product with metal-insulator-metal capacitor
06/19/2007US7233052 Semiconductor device including fine dummy patterns
06/19/2007US7233048 MEMS device trench plating process and apparatus for through hole vias
06/19/2007US7233047 Transistor with nitrogen-hardened gate oxide
06/19/2007US7233046 Semiconductor device and fabrication method thereof
06/19/2007US7233045 Semiconductor device and system
06/19/2007US7233044 MOS transistor and method for producing a MOS transistor structure
06/19/2007US7233043 Triple-diffused trench MOSFET
06/19/2007US7233042 Method of forming inside rough and outside smooth HSG electrodes and capacitor structure
06/19/2007US7233041 Large-area nanoenabled macroelectronic substrates and uses therefor
06/19/2007US7233040 Semiconductor device contains a PbxSr(1−x)[Zr, Ti]xRu(1−x)O3 film in a capacitor
06/19/2007US7233035 Dual work function gate electrodes using doped polysilicon and a metal silicon germanium compound
06/19/2007US7233033 Semiconductor device having pixels
06/19/2007US7233032 SRAM device having high aspect ratio cell boundary
06/19/2007US7233030 Device transfer method and panel
06/19/2007US7233028 Gallium nitride material devices and methods of forming the same
06/19/2007US7233022 Thin film transistor including a polysilicon film
06/19/2007US7233009 Lithographic projection apparatus and reflector assembly for use therein
06/19/2007US7233000 Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology
06/19/2007US7232996 Method and an apparatus of an inspection system using an electron beam
06/19/2007US7232995 Method of removing particle of photomask using atomic force microscope
06/19/2007US7232994 Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer
06/19/2007US7232982 Crystallization apparatus, crystallization method, method of manufacturing thin film transistor, thin film transistor, and display apparatus
06/19/2007US7232957 Hybrid integrated circuit device and method of manufacturing the same
06/19/2007US7232917 Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation
06/19/2007US7232874 Interlayer insulating film, method for forming the same and polymer composition
06/19/2007US7232774 Polycrystalline silicon layer with nano-grain structure and method of manufacture
06/19/2007US7232773 Liquid drop jetting apparatus using charged beam and method for manufacturing a pattern using the apparatus
06/19/2007US7232772 Substrate processing method
06/19/2007US7232771 Method and apparatus for depositing charge and/or nanoparticles