Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2007
06/26/2007US7235460 Method of forming active and isolation areas with split active patterning
06/26/2007US7235459 Methods of forming trench isolation in the fabrication of integrated circuitry, methods of fabricating memory circuitry, integrated circuitry and memory integrated circuitry
06/26/2007US7235458 Method of forming an element isolation film of a semiconductor device
06/26/2007US7235457 High permeability layered films to reduce noise in high speed interconnects
06/26/2007US7235456 Method of making empty space in silicon
06/26/2007US7235455 Method of aligning an electron beam apparatus and semiconductor substrate utilizing an alignment mark
06/26/2007US7235454 MIM capacitor structure and method of fabrication
06/26/2007US7235453 Method of fabricating MIM capacitor
06/26/2007US7235452 Method for fabricating capacitor in semiconductor device
06/26/2007US7235451 Drain extended MOS devices with self-aligned floating region and fabrication methods therefor
06/26/2007US7235450 Methods for fabricating semiconductor devices
06/26/2007US7235449 Method of forming a gate oxide film for a high voltage region of a flash memory device
06/26/2007US7235448 Dielectric layer forming method and devices formed therewith
06/26/2007US7235447 Fabrication method for a semiconductor structure and corresponding semiconductor structure
06/26/2007US7235446 Methods of forming silicon-doped aluminum oxide, and methods of forming transistors and memory devices
06/26/2007US7235445 Methods of forming device with recessed gate electrodes
06/26/2007US7235444 Method of fabricating non-volatile memory structure
06/26/2007US7235443 Non-volatile memory and method of manufacturing floating gate
06/26/2007US7235442 Method for fabricating conductive line
06/26/2007US7235441 Nonvolatile semiconductor memory device with tapered sidewall gate and method of manufacturing the same
06/26/2007US7235440 Formation of ultra-thin oxide layers by self-limiting interfacial oxidation
06/26/2007US7235439 Method of forming a MOS-controllable power semiconductor device for use in an integrated circuit
06/26/2007US7235438 Inclusion of nitrogen at the silicon dioxide-silicon carbide interface for passivation of interface defects
06/26/2007US7235437 Multi-planar layout vertical thin-film transistor inverter
06/26/2007US7235436 Method for doping structures in FinFET devices
06/26/2007US7235435 Method for fabricating thin film transistor with multiple gates using metal induced lateral crystallization
06/26/2007US7235434 Thin film transistor with multiple gates using metal induced lateral crystallization and method of fabricating the same
06/26/2007US7235433 Silicon-on-insulator semiconductor device with silicon layers having different crystal orientations and method of forming the silicon-on-insulator semiconductor device
06/26/2007US7235432 Method for producing an electrical conductor element
06/26/2007US7235431 Methods for packaging a plurality of semiconductor dice using a flowable dielectric material
06/26/2007US7235430 Substrates having increased thermal conductivity for semiconductor structures
06/26/2007US7235429 Conductive block mounting process for electrical connection
06/26/2007US7235428 Semiconductor device production method
06/26/2007US7235427 Method for treating substrates for microelectronics and substrates obtained by said method
06/26/2007US7235426 Method of backside grinding a bumped wafer
06/26/2007US7235425 Semiconductor device and fabrication method for the same
06/26/2007US7235424 Method and apparatus for enhanced CMP planarization using surrounded dummy design
06/26/2007US7235423 Molded memory card production using carrier strip
06/26/2007US7235422 Device packages
06/26/2007US7235421 System and method for developing production nano-material
06/26/2007US7235419 Method of making a memory cell
06/26/2007US7235418 since the anti-reflection film is exposed from the insulating layer, fluctuation of incident light can be suppressed and the sensitivity to light can be improved; miniaturization
06/26/2007US7235416 Method for fabricating polysilicon liquid crystal display device
06/26/2007US7235415 Film pattern formation method, device and method for manufacturing the same, electro-optical device, electronic device, and method for manufacturing active matrix substrate
06/26/2007US7235414 Using scatterometry to verify contact hole opening during tapered bilayer etch
06/26/2007US7235413 Fabrication method of semiconductor integrated circuit device
06/26/2007US7235412 Semiconductor component having test pads and method and apparatus for testing same
06/26/2007US7235411 Method for aligning a wafer and apparatus for performing the same
06/26/2007US7235410 Method for patching up thin-film transistor circuits on a display panel by local thin-film deposition
06/26/2007US7235409 Methods of forming semiconductor constructions
06/26/2007US7235408 Synthetic antiferromagnetic structure for magnetoelectronic devices
06/26/2007US7235407 System and method for forming a bipolar switching PCMO film
06/26/2007US7235350 Alumina insulation for coating implantable components and other microminiature devices
06/26/2007US7235349 Process for forming an ultra fine pattern using a bottom anti-reflective coating film containing an acid generator
06/26/2007US7235348 Water soluble negative tone photoresist
06/26/2007US7235345 Covering substrate containing photoresist pattern; heating; shrinkage; reducing spacing between photoresist; using water soluble polymer and surfactant mixtures
06/26/2007US7235342 Negative photoresist composition including non-crosslinking chemistry
06/26/2007US7235341 Positive resist composition
06/26/2007US7235310 Hillock-free aluminum layer and method of forming the same
06/26/2007US7235281 forming collar which narrows opening and applying heat/pressure, then reflowing sealing layer; chemical/physical vapor deposition; for use in microelectronics, microelectromechanical systems
06/26/2007US7235188 Aqueous phosphoric acid compositions for cleaning semiconductor devices
06/26/2007US7235185 Method of protecting wafer front pattern and method of performing double-sided process
06/26/2007US7235155 Method and apparatus for monitoring plasma conditions using a monitoring ring
06/26/2007US7235153 System for removal of a spacer
06/26/2007US7235141 Lift-off method and chemical liquid tank
06/26/2007US7235138 Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
06/26/2007US7235137 Conductor treating single-wafer type treating device and method for semi-conductor treating
06/26/2007US7235135 Substrate processing apparatus and substrate processing method
06/26/2007US7235131 Method for forming a single crystalline film
06/26/2007US7235001 Polishing apparatus
06/26/2007US7234998 Chemical mechanical polishing method, chemical mechanical polishing system, and manufacturing method of semiconductor device
06/26/2007US7234913 Fast swapping station for wafer transport
06/26/2007US7234908 Apparatus for storing and moving a cassette
06/26/2007US7234675 Vertical guide unit and stage system with the same unit
06/26/2007US7234584 System for transporting substrate carriers
06/26/2007US7234477 Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
06/26/2007US7234476 Method of cleaning CVD equipment processing chamber
06/26/2007US7234413 Plasma processing apparatus
06/26/2007US7234232 Methods for designing and tuning one or more packaged integrated circuits
06/26/2007US7234231 Method of manufacturing a lead frame
06/26/2007US7234217 Device for coupling PCB sheet having position deciding jig part
06/26/2007US7234185 Apparatus for removing particles
06/26/2007CA2286326C Article, method, and apparatus for electrochemical fabrication
06/26/2007CA2254275C Selective electrochemical process for creating semiconductor nano- and micro-patterns
06/22/2007CA2571993A1 Chemical vapor deposition apparatus and methods of using the apparatus
06/21/2007WO2007070424A1 Enhanced multi-bit non-volatile memory device with resonant tunnel barrier
06/21/2007WO2007070356A2 Package using array capacitor core
06/21/2007WO2007070353A2 Methods and apparatus for processing a substrate
06/21/2007WO2007070321A2 System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
06/21/2007WO2007070311A1 Isolation structures for semiconductor integrated circuit substrates and methods of forming the same
06/21/2007WO2007070050A1 Power mosfet and method of making the same
06/21/2007WO2007069794A1 Semiconductor device
06/21/2007WO2007069774A1 Gallium nitride compound semiconductor light-emitting device
06/21/2007WO2007069728A1 Coating apparatus and coating method
06/21/2007WO2007069703A1 Fluorine-containing polymer, negative photosensitive composition and partition wall
06/21/2007WO2007069701A1 Vertical conveyance device
06/21/2007WO2007069640A1 Novel compound, polymer, and resin composition
06/21/2007WO2007069632A1 Silicon carbide bipolar semiconductor device
06/21/2007WO2007069629A1 Method of processing chamfered portion of semiconductor wafer and method of correcting groove shape of grindstone
06/21/2007WO2007069601A1 Field effect transistor