| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/21/2007 | US20070138137 Method for patterning low dielectric layer of semiconductor device |
| 06/21/2007 | US20070138136 Method for etching photolithographic substrates |
| 06/21/2007 | US20070138134 Etching apparatus and etching method |
| 06/21/2007 | US20070138131 Method of forming a patterned layer on a substrate |
| 06/21/2007 | US20070137889 Multi-strand substrate for ball-grid array assemblies and method |
| 06/21/2007 | US20070137887 Adhesive for bonding circuit members, circuit board and process for its production |
| 06/21/2007 | US20070137794 Thermal processing system with across-flow liner |
| 06/21/2007 | US20070137792 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 06/21/2007 | US20070137782 Dicing die-bonding film, method of fixing chipped work and semiconductor device |
| 06/21/2007 | US20070137677 Substrate cleaning method and substrate cleaning apparatus |
| 06/21/2007 | US20070137676 Method for the removal of airborne molecular contaminants using extra clean dry air |
| 06/21/2007 | US20070137572 Plasma processing apparatus |
| 06/21/2007 | US20070137570 Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same |
| 06/21/2007 | US20070137567 Apparatus for manufacturing a semiconductor device |
| 06/21/2007 | US20070137556 Thermal processing appparatus |
| 06/21/2007 | US20070137031 Chip transfer method and apparatus |
| 06/21/2007 | DE112005002005T5 Clusterfreier amorpher Siliziumfilm, und Verfahren und Vorrichtung zu dessen Herstellung Cluster-free amorphous silicon film, and method and apparatus for its production |
| 06/21/2007 | DE112005001847T5 Verfahren und Vorrichtung zur Bildung eines kristallisierten Films Method and apparatus for forming a crystallized film |
| 06/21/2007 | DE112004002722T5 Halbleitergehäuse mit perforiertem Substrat Semiconductor package with perforated substrate |
| 06/21/2007 | DE10350689B4 Verfahren zur Erzeugung von Isolatorstrukturen in einem Halbleitersubstrat A process for the production of insulator structures in a semiconductor substrate, |
| 06/21/2007 | DE10338291B4 Verfahren zum Herstellen einer Halbleitervorrichtung mit Durchdringungselektroden mittels anodischer Oxidation A method of manufacturing a semiconductor device with penetrating electrodes by anodic oxidation |
| 06/21/2007 | DE10219353B4 Halbleiterbauelement mit zwei Halbleiterchips Semiconductor component having two semiconductor chips |
| 06/21/2007 | DE10213534B4 Halbleiteraufbau mit Schaltelement und Randelement Semiconductor structure with switching element and boundary element |
| 06/21/2007 | DE10208766B4 Verfahren zur Herstellung von strahlungsemittierenden Halbleiterchips Process for preparing radiation-emitting semiconductor chips |
| 06/21/2007 | DE102006057999A1 Verfahren zum Herstellen eines Halbleiter-Bauteils A method of manufacturing a semiconductor device |
| 06/21/2007 | DE102006055338A1 Laserstrahlbearbeitungsmaschine Laser beam processing machine |
| 06/21/2007 | DE102005060688A1 Device for cleaning the free spaces between wall surfaces of different heights e.g. solder sites of electronic components comprises a bell-like hood, an inlet channel for a cleaning fluid, a suction channel and an elastic barrier element |
| 06/21/2007 | DE102005060323A1 Sensor e.g. radiation sensor, arrangement for motor vehicle, has assembly part comprising boundary region that is formed as part of boundary of arrangement, and housing that is provided directly adjacent to boundary region of assembly part |
| 06/21/2007 | DE102005047111B3 Verfahren zur Herstellung eines MIM-Kondensators A method for producing a MIM capacitor |
| 06/21/2007 | DE102005045056B4 Integrierte Schaltungsanordnung mit mehreren Leitstrukturlagen und Kondensator An integrated circuit device having a plurality of conductive structure and capacitor |
| 06/21/2007 | DE102005015109B4 Verfahren zum Montieren von Halbleiterchips auf einem Substrat und entsprechende Anordnung A method of mounting semiconductor chips on a substrate and corresponding arrangement |
| 06/21/2007 | DE102004020297B4 Verfahren zur Herstellung resistiv schaltender Speicherbauelemente A process for producing resistive switching memory devices |
| 06/21/2007 | DE10158706B4 Halbleitervorrichtung und Verfahren zu deren Herstellung Semiconductor device and process for their preparation |
| 06/21/2007 | DE10054595B4 Nichtflüchtiger ferroelektrischer Speicher und Verfahren zu seiner Herstellung A non-volatile ferroelectric memory and method for its preparation |
| 06/21/2007 | DE10035590B4 Drahtsäge und Verfahren zum Abtrennen von Scheiben von einem Werkstück Wire saw and method for cutting wafers from a workpiece |
| 06/21/2007 | DE10020523B4 Vorrichtung und Verfahren zur Bearbeitung eines Gegenstandes Apparatus and method for processing an article |
| 06/21/2007 | CA2633118A1 Alxgayin1-x-yn crystal substrate, semiconductor device, and method of manufacturing the same |
| 06/21/2007 | CA2571980A1 Method of forming via hole using laser beam |
| 06/20/2007 | EP1798780A2 Method for fabricating a substrate with nano structures, light emitting device and manufacturing method thereof |
| 06/20/2007 | EP1798765A2 Semiconductor on glass insulator made using improved ion implantation process |
| 06/20/2007 | EP1798764A1 Process for manufacturing wafers usable in the semiconductor industry |
| 06/20/2007 | EP1798763A1 Semiconductor device and die bonding method therefor |
| 06/20/2007 | EP1798762A2 Semiconductor devices including implanted regions and protective layers and methods of forming the same |
| 06/20/2007 | EP1798761A2 Fabrication method of a device with at least one single-crystalline layer on a substrate |
| 06/20/2007 | EP1798760A2 Polycrystalline silcon layer, flat panel display using the same, and method of fabricating the same. |
| 06/20/2007 | EP1798759A2 Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same |
| 06/20/2007 | EP1798758A1 Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method |
| 06/20/2007 | EP1798757A2 Apparatus for cleaning and drying of wafers |
| 06/20/2007 | EP1798595A1 Fabrication mehod for photomask, fabrication method for device and monitoring method for photomask |
| 06/20/2007 | EP1797617A2 Ceramic antenna module and methods of manufacture thereof |
| 06/20/2007 | EP1797591A1 3d interconnect with protruding contacts |
| 06/20/2007 | EP1797590A1 Deep trench electrically isolated medium voltage cmos devices and method for making the same |
| 06/20/2007 | EP1797589A1 Manufacturing method of semiconductor devices |
| 06/20/2007 | EP1797588A2 Method for producing mixed stacked structures, different insulating areas and/or localised vertical electrical conducting areas |
| 06/20/2007 | EP1797587A2 Method for providing mixed stacked structures, with various insulating zones and/or electrically conducting zones vertically localized |
| 06/20/2007 | EP1797586A2 Two-step oxidation process for semiconductor wafers |
| 06/20/2007 | EP1797585A1 Plasma enhanced nitride layer |
| 06/20/2007 | EP1797584A2 Methods and devices for forming nanostructure monolayers and devices including such monolayers |
| 06/20/2007 | EP1797583A2 Method for forming a semiconductor device having a strained channel and a heterojunction source/drain |
| 06/20/2007 | EP1797582A2 Reduction of sheet resistance of phosphorus implanted poly-silicon |
| 06/20/2007 | EP1797581A1 Precursor for film formation and method for forming ruthenium-containing film |
| 06/20/2007 | EP1797393A2 Sensors for electrochemical, electrical or topographical analysis |
| 06/20/2007 | EP1797152A1 Polishing composition for noble metals |
| 06/20/2007 | EP1797151A1 Cmp composition for improved oxide removal rate |
| 06/20/2007 | EP1796855A1 Methods of cleaning optical substrates |
| 06/20/2007 | EP1719156B1 Device for singulating and bonding semiconductor chips, and singulating and bonding method |
| 06/20/2007 | EP1665076A4 Method and system of diagnosing a processing system using adaptive multivariate analysis |
| 06/20/2007 | EP1624308B1 Probe for testing electric conduction |
| 06/20/2007 | EP1546947B1 Method and system for debugging using replicated logic |
| 06/20/2007 | EP1500128B1 Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
| 06/20/2007 | EP1495837B1 Polishing method |
| 06/20/2007 | EP1459382B1 Polarity reversal tolerant electrical circuit for esd protection |
| 06/20/2007 | EP1438732A4 Methods and apparatus for defect localization |
| 06/20/2007 | EP1437035A4 Antenna structure for inductively coupled plasma generator |
| 06/20/2007 | EP1390968B1 Smooth multipart substrate support member for cvd |
| 06/20/2007 | EP1311908B1 Photoresist composition for deep uv and process thereof |
| 06/20/2007 | EP1257924A4 Process monitoring system for lithography lasers |
| 06/20/2007 | EP1237824B1 A method and apparatus for treating a substrate with an ozone-solvent solution |
| 06/20/2007 | EP1200879B1 Control of the illumination distribution in the exit pupil of an EUV illumination system |
| 06/20/2007 | EP1133793B1 Heat sink including a heat dissipating fin and method for fixing the heat dissipating fin |
| 06/20/2007 | EP1044074B1 Photoresist coating process control with solvent vapor sensor |
| 06/20/2007 | EP0993242B1 Method of producing ceramic multilayer substrate |
| 06/20/2007 | CN2914609Y Automatization device combining electronic element terminal with connection blade |
| 06/20/2007 | CN2914326Y Seat for putting electronic component on |
| 06/20/2007 | CN2914325Y Arm structure for fetching crystal grain |
| 06/20/2007 | CN2914324Y High-voltage duplex calculating machine without oil |
| 06/20/2007 | CN2914323Y Air-feeding system of cold plasma shower |
| 06/20/2007 | CN2914322Y Heat insulation wall, heating element structure holding body, heating device and substrate board processing device |
| 06/20/2007 | CN2914113Y Fiber connection system applied to ion implantation apparatus |
| 06/20/2007 | CN2913386Y 离子束传输控制系统 Ion beam transmission control system |
| 06/20/2007 | CN2912837Y Cleaning brush holding device for wafer cleaning equipment |
| 06/20/2007 | CN2912828Y Dots glue disk structure |
| 06/20/2007 | CN1985378A Nanoscale FET |
| 06/20/2007 | CN1985375A Structure and method of making strained channel CMOS transistors |
| 06/20/2007 | CN1985369A Process for the singulation of integrated devices in thin semiconductor chips |
| 06/20/2007 | CN1985368A Support for hybrid epitaxy and method of fabrication |
| 06/20/2007 | CN1985367A Wafer storage container |
| 06/20/2007 | CN1985366A Method of manufacture of electronic or functional devices |
| 06/20/2007 | CN1985365A CMOS with only a single implant |
| 06/20/2007 | CN1985364A Method of evaluating characteristics of an insulating film for a semiconductor device and method of forming the insulating film |