| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/03/2007 | US7238577 Method of manufacturing self-aligned n and p type stripes for a superjunction device |
| 07/03/2007 | US7238576 Semiconductor device and method of manufacturing the same |
| 07/03/2007 | US7238575 Fabrication of conductive lines interconnecting conductive gates in nonvolatile memories, and non-volatile memory structures |
| 07/03/2007 | US7238574 Flash memory device and method of manufacturing the same |
| 07/03/2007 | US7238573 Method for fabricating a trench transistor of semiconductor device |
| 07/03/2007 | US7238572 Method of manufacturing EEPROM cell |
| 07/03/2007 | US7238570 Semiconductor memory device and method for producing the same |
| 07/03/2007 | US7238569 Formation method of an array source line in NAND flash memory |
| 07/03/2007 | US7238568 Trench semiconductor device having gate oxide layer with multiple thicknesses and processes of fabricating the same |
| 07/03/2007 | US7238567 System and method for integrating low schottky barrier metal source/drain |
| 07/03/2007 | US7238566 Method of forming one-transistor memory cell and structure formed thereby |
| 07/03/2007 | US7238565 Methodology for recovery of hot carrier induced degradation in bipolar devices |
| 07/03/2007 | US7238564 Method of forming a shallow trench isolation structure |
| 07/03/2007 | US7238563 Semiconductor device having isolation region and method of manufacturing the same |
| 07/03/2007 | US7238562 Method for fabricating CMOS image sensor |
| 07/03/2007 | US7238561 Method for forming uniaxially strained devices |
| 07/03/2007 | US7238560 Methods of fabricating nitride-based transistors with a cap layer and a recessed gate |
| 07/03/2007 | US7238559 Method of forming single crystal silicon thin film using sequential lateral solidification (SLS) |
| 07/03/2007 | US7238558 Semiconductor device and method of fabricating the same |
| 07/03/2007 | US7238557 Semiconductor device and method of fabricating the same |
| 07/03/2007 | US7238556 Thin film transistor structure and method of manufacturing the same |
| 07/03/2007 | US7238555 Single transistor memory cell with reduced programming voltages |
| 07/03/2007 | US7238554 Simultaneous planar and non-planar thin-film transistor processes |
| 07/03/2007 | US7238553 Method of forming a high-voltage silicon controlled rectifier structure with improved punch through resistance |
| 07/03/2007 | US7238552 Method and apparatus for depositing tungsten after surface treatment to improve film characteristics |
| 07/03/2007 | US7238551 Method of fabricating semiconductor package including die interposed between cup-shaped lead frame having mesas and valleys |
| 07/03/2007 | US7238550 Methods and apparatus for fabricating Chip-on-Board modules |
| 07/03/2007 | US7238549 Surface-mounting semiconductor device and method of making the same |
| 07/03/2007 | US7238548 Flip-chip type semiconductor device, production process for manufacturing such flip-chip type semiconductor device, and production process for manufacturing electronic product using such flip-chip type semiconductor device |
| 07/03/2007 | US7238547 Packaging integrated circuits for accelerated detection of transient particle induced soft error rates |
| 07/03/2007 | US7238546 Hermetically sealed micro-device package with window |
| 07/03/2007 | US7238545 Method for fabricating tandem thin film photoelectric converter |
| 07/03/2007 | US7238544 Imaging with gate controlled charge storage |
| 07/03/2007 | US7238543 Methods for marking a bare semiconductor die including applying a tape having energy-markable properties |
| 07/03/2007 | US7238542 Manufacturing method for compound semiconductor device |
| 07/03/2007 | US7238541 Method of incorporating magnetic materials in a semiconductor manufacturing process |
| 07/03/2007 | US7238540 Magnetic random access memory and method of manufacturing the same |
| 07/03/2007 | US7238462 On semiconductor substrate before formation of photoresist layer for forming pattern comprising resin with substituent group capable of forming a sulfonic acid residue after exposure to heat or light; lithography; amines and quaternary ammonium hydroxide used as stripping solution for easy removal |
| 07/03/2007 | US7238454 Thin films which forms optical variations on exposure to light; applying photoresists; baking; lithography |
| 07/03/2007 | US7238421 Pressure sensitive adhesive film for protection of semiconductor wafer surface and method of protecting semiconductor wafer with the pressure sensitive adhesive film |
| 07/03/2007 | US7238393 Overcoating substrates; using organosilicon compound and carbon mixture with inert gases; applying high and low radio frequency |
| 07/03/2007 | US7238388 Ferroelectric thin film and method for forming the same |
| 07/03/2007 | US7238295 Regeneration process of etching solution, etching process, and etching system |
| 07/03/2007 | US7238294 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
| 07/03/2007 | US7238291 Method for removing oxides from a Ge semiconductor substrate surface |
| 07/03/2007 | US7238258 System for peeling semiconductor chips from tape |
| 07/03/2007 | US7238239 Liquid coating device with barometric pressure compensation |
| 07/03/2007 | US7238238 Gasification monitor, method for detecting mist, film forming method and film forming apparatus |
| 07/03/2007 | US7238097 Polishing pad and method of producing same |
| 07/03/2007 | US7238093 Polishing cloth for chemical mechanical polishing, and chemical mechanical polishing apparatus using said cloth |
| 07/03/2007 | US7238092 Low-force electrochemical mechanical processing method and apparatus |
| 07/03/2007 | US7238090 Polishing apparatus having a trough |
| 07/03/2007 | US7238087 Planarizing device and a planarization method for semiconductor substrates |
| 07/03/2007 | US7238076 Method of assembling light-emitting apparatus |
| 07/03/2007 | US7238014 Manufacturing method of an electronic device package |
| 07/03/2007 | US7237967 Developing apparatus and method |
| 07/03/2007 | US7237915 Catadioptric projection system for 157 nm lithography |
| 07/03/2007 | US7237666 Multi-position stop mechanism |
| 07/03/2007 | US7237606 Wafer supporter |
| 07/03/2007 | US7237581 Apparatus and method of dispensing photosensitive solution in semiconductor device fabrication equipment |
| 07/03/2007 | US7237565 Fluid feeding apparatus |
| 07/03/2007 | US7237562 Substrate processing apparatus and control method of inert gas concentration |
| 07/03/2007 | US7237561 Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same |
| 07/03/2007 | CA2393962C Silicon nanoparticle field effect transistor and transistor memory device |
| 06/28/2007 | WO2007073356A2 Improved singulation system and method |
| 06/28/2007 | WO2007073354A1 Localized annealing during semiconductor device fabrication |
| 06/28/2007 | WO2007073091A1 Temperature control system for semiconductor manufacturing process |
| 06/28/2007 | WO2007073072A1 Mask apparatus for divided deposition of substrate and patterning method using the same |
| 06/28/2007 | WO2007072984A1 Semiconductor substrate manufacturing method and element structure manufacturing method |
| 06/28/2007 | WO2007072950A1 Method for patterning zinc oxide transparent conductive film |
| 06/28/2007 | WO2007072943A1 Contact conductor for wafer polishing, polishing pad for semiconductor device wafer, and method for producing semiconductor |
| 06/28/2007 | WO2007072918A1 Polishing composition, polishing method, and method for forming copper wiring for semiconductor integrated circuit |
| 06/28/2007 | WO2007072875A1 Method for manufacturing printed wiring board |
| 06/28/2007 | WO2007072855A1 Apparatus for manufacturing semiconductor thin film |
| 06/28/2007 | WO2007072852A1 Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus |
| 06/28/2007 | WO2007072844A1 Semiconductor device |
| 06/28/2007 | WO2007072837A1 Laser irradiation apparatus and method for manufacturing semiconductor device |
| 06/28/2007 | WO2007072818A1 Liquid producing apparatus, liquid immersion exposure apparatus, and method for manufacturing device |
| 06/28/2007 | WO2007072817A1 Substrate conveying method, substrate conveying apparatus, and exposure apparatus |
| 06/28/2007 | WO2007072812A1 Structure for mounting electronic parts on circuit board, and mounting method |
| 06/28/2007 | WO2007072778A1 Mask blank and mask |
| 06/28/2007 | WO2007072750A1 Coating liquid for forming low dielectric constant amorphous silica coating film and low dielectric constant amorphous silica coating film obtained from such coating liquid |
| 06/28/2007 | WO2007072744A1 Laser irradiation apparatus and laser irradiation method and method for manufacturing semiconductor device |
| 06/28/2007 | WO2007072727A1 Composition for removing residue from wiring board and cleaning method |
| 06/28/2007 | WO2007072714A1 Apparatus and method for mounting electronic component |
| 06/28/2007 | WO2007072709A1 Laser material processing system |
| 06/28/2007 | WO2007072708A1 Substrate processing apparatus |
| 06/28/2007 | WO2007072702A1 Resist composition and process for producing the same |
| 06/28/2007 | WO2007072655A2 Lateral soi semiconductor devices and manufacturing method thereof |
| 06/28/2007 | WO2007072649A1 Method for modifying highly dielectric thin film and semiconductor device |
| 06/28/2007 | WO2007072641A1 Pattern-forming material, pattern-forming apparatus and pattern-forming method |
| 06/28/2007 | WO2007072639A1 Optical integrator, illumination optical device, aligner, and method for fabricating device |
| 06/28/2007 | WO2007072632A1 Soi substrate and method for manufacturing soi substrate |
| 06/28/2007 | WO2007072628A1 Electric element, memory device and semiconductor integrated circuit |
| 06/28/2007 | WO2007072624A1 Method for manufacturing soi substrate, and soi substrate |
| 06/28/2007 | WO2007072571A1 Substrate drier, substrate cleaner, substrate drying method, and substrate cleaning method |
| 06/28/2007 | WO2007072562A1 Noise checking method and apparatus, and computer readable recording medium with noise checking program recorded therein |
| 06/28/2007 | WO2007072557A1 Semiconductor tester and method of testing semiconductor |
| 06/28/2007 | WO2007072537A1 Semiconductor device and method for manufacturing semiconductor device |
| 06/28/2007 | WO2007072406A1 Method of manufacturing a semiconductor device |