Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2007
08/21/2007US7259090 Copper damascene integration scheme for improved barrier layers
08/21/2007US7259089 Semiconductor device manufacturing method that includes forming a wiring pattern with a mask layer that has a tapered shape
08/21/2007US7259088 Apparatus for singulating and bonding semiconductor chips, and method for the same
08/21/2007US7259087 Semiconductor devices having a via hole and methods for forming a via hole in a semiconductor device
08/21/2007US7259085 Method for forming thin film, substrate having thin film formed by the method, and photoelectric conversion device using the substrate
08/21/2007US7259084 Growth of GaAs epitaxial layers on Si substrate by using a novel GeSi buffer layer
08/21/2007US7259083 Local interconnect manufacturing process
08/21/2007US7259082 Method of manufacturing semiconductor device
08/21/2007US7259081 Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions
08/21/2007US7259080 Glass-type planar substrate, use thereof, and method for the production thereof
08/21/2007US7259079 Methods for filling high aspect ratio trenches in semiconductor layers
08/21/2007US7259078 Method for forming isolation layer in semiconductor memory device
08/21/2007US7259077 Integrated passive devices
08/21/2007US7259076 High-density SOI cross-point memory fabricating method
08/21/2007US7259075 Method for manufacturing field effect transistor
08/21/2007US7259074 Trench isolation method in flash memory device
08/21/2007US7259073 Semiconductor device and method of manufacturing the same
08/21/2007US7259072 Shallow low energy ion implantation into pad oxide for improving threshold voltage stability
08/21/2007US7259071 Semiconductor device with dual gate oxides
08/21/2007US7259070 Semiconductor devices and methods for fabricating the same
08/21/2007US7259069 Semiconductor device and method of manufacturing the same
08/21/2007US7259068 Memory device with quantum dot and method for manufacturing the same
08/21/2007US7259067 Method for manufacturing flash memory device
08/21/2007US7259066 One-transistor composite-gate memory
08/21/2007US7259065 Method of forming trench in semiconductor device
08/21/2007US7259064 Forming integrated circuit devices
08/21/2007US7259063 Method for forming a gate electrode in a non volatile memory device
08/21/2007US7259062 Method of making a magnetic tunnel junction device
08/21/2007US7259061 Method for forming a capacitor for an integrated circuit and integrated circuit
08/21/2007US7259060 Method for fabricating a semiconductor structure
08/21/2007US7259059 Method for forming capacitor of semiconductor device
08/21/2007US7259058 Fabricating method of semiconductor integrated circuits
08/21/2007US7259057 Method for forming capacitor of semiconductor device
08/21/2007US7259056 Method for manufacturing semiconductor device
08/21/2007US7259055 Method of forming high-luminescence silicon electroluminescence device
08/21/2007US7259054 Method of manufacturing a semiconductor device that includes a process for forming a high breakdown voltage field effect transistor
08/21/2007US7259053 Methods for forming a device isolation structure in a semiconductor device
08/21/2007US7259052 Manufacture of a semiconductor integrated circuit device including a pluarality of a columnar laminates having different spacing in different directions
08/21/2007US7259051 Method of forming SI tip by single etching process and its application for forming floating gate
08/21/2007US7259050 Semiconductor device and method of making the same
08/21/2007US7259049 Self-aligned isolation double-gate FET
08/21/2007US7259048 Vertical replacement-gate silicon-on-insulator transistor
08/21/2007US7259047 Method for manufacturing organic thin-film transistor with plastic substrate
08/21/2007US7259046 Semiconductor device and manufacturing method thereof
08/21/2007US7259045 Method for fabricating a thin film transistor using a half-tone mask
08/21/2007US7259044 Lead frame, method of manufacturing the same, and method of manufacturing a semiconductor device using the same
08/21/2007US7259043 Circular test pads on scribe street area
08/21/2007US7259042 Ultra thin dual chip image sensor package structure and method for fabrication
08/21/2007US7259041 Method for the hermetic encapsulation of a component
08/21/2007US7259040 Process for manufacturing a phase change memory array in Cu-damascene technology and phase change memory array manufactured thereby
08/21/2007US7259038 Forming nonvolatile phase change memory cell having a reduced thermal contact area
08/21/2007US7259037 Method of fabricating an X-ray detector array element
08/21/2007US7259036 Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products
08/21/2007US7259035 Methods of forming thin-film transistor display devices
08/21/2007US7259034 Self-alignment manufacturing method of the microlens and the aperture using in optical devices
08/21/2007US7259033 Flip-chip bonding of light emitting devices
08/21/2007US7259032 Hermetically sealing a package to include a barrier metal
08/21/2007US7259031 Integrated photonic-electronic circuits and systems
08/21/2007US7259030 Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices
08/21/2007US7259029 Method of forming protective structure for active matrix triode field emission device
08/21/2007US7259028 Test pads on flash memory cards
08/21/2007US7259027 Low energy dose monitoring of implanter using implanted wafers
08/21/2007US7259026 Loading a target substrate with a coating film formed thereon into a reaction chamber, the coating film comprising a polysiloxane base solution having an organic functional group; andheating substrate within the reaction chamber to bake the coating film
08/21/2007US7259025 Ferromagnetic liner for conductive lines of magnetic memory cells
08/21/2007US7259024 Method of treating a substrate in manufacturing a magnetoresistive memory cell
08/21/2007US7259023 Forming phase change memory arrays
08/21/2007US7258962 Positive-tone radiation-sensitive resin composition
08/21/2007US7258957 Using hologram masks on which alignment marks are formed; reduces needed area on a object to be exposed for alignment marks while keeping minimum permissible intervals among alignment marks on a same exposure mask
08/21/2007US7258953 Evaluating layer properties by simultaneously measuring critical dimension and registration of semiconductors with a single scatterometry tool
08/21/2007US7258931 Configured to reduce the volume of thin film residues on a top surface adjacent an edge, and to inhibit redeposition of residue particulates on the top surfaces during processing
08/21/2007US7258895 First species monolayer is chemisorbed onto a substrate within a chamber from a gaseous first precursor, exposing the substrate having the discontinuous first species monolayer to a gaseous second precursor, exposing the substrate having the second species monolayer and the reaction product to gas
08/21/2007US7258811 When the lifting means is in contact with the rear side of the wafer, the means is grounded; then, an electrostatic chuck is neutralized by supplying power to electrostatic electrodes, and the wafer is neutralized by supplying plasma to the wafer.
08/21/2007US7258808 High-power ball grid array package, heat spreader used in the BGA package and method for manufacturing the same
08/21/2007US7258807 Controlled growth of gallium nitride nanostructures
08/21/2007US7258806 Method of fabricating a diaphragm of a capacitive microphone device
08/21/2007US7258768 Method of fabricating an EL display device, and apparatus for forming a thin film
08/21/2007US7258743 Composite structure with a uniform crystal orientation and the method of controlling the crystal orientation of one such structure
08/21/2007US7258739 Process for producing epitaxial silicon wafer and silicon wafer produced by process thereof
08/21/2007US7258703 Apparatus and method for aligning devices on carriers
08/21/2007US7258600 Vacuum-assisted pad conditioning system
08/21/2007US7258598 Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device
08/21/2007US7258595 Polishing apparatus
08/21/2007US7258537 Fast firing flattening apparatus for sintered multilayer ceramic electronic substrates
08/21/2007US7258520 Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
08/21/2007US7258124 Apparatus and method for treating surfaces of semiconductor wafers using ozone
08/21/2007US7257902 Stage device
08/21/2007US7257887 Die holding apparatus for bonding systems
08/21/2007CA2453601C Integrated testing of serializer/deserializer in fpga
08/16/2007WO2007092782A1 Temperature control apparatus and method
08/16/2007WO2007092442A1 System and method for producing and delivering vapor
08/16/2007WO2007092293A2 Method of forming copper indium gallium containing precursors and semiconductor compound layers
08/16/2007WO2007092146A2 Method and apparatus for inspection of multi-junction solar cells
08/16/2007WO2007092130A2 Dry etch and epitaxial deposition process and apparatus
08/16/2007WO2007092114A1 Reducing line edge roughness
08/16/2007WO2007091871A1 Test handler
08/16/2007WO2007091846A1 Apparatus and method for detecting defects in wafer using line sensor camera
08/16/2007WO2007091784A1 Methods and apparatuses for high pressure gas annealing
08/16/2007WO2007091726A1 Method for removing surface layer of silicon wafer
08/16/2007WO2007091704A1 Light-emitting diode and fabrication method thereof
08/16/2007WO2007091682A1 Film forming method, plasma film forming apparatus and storage medium
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