| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/04/2007 | US7265040 Cleaning solution and method for selectively removing layer in a silicidation process |
| 09/04/2007 | US7265039 Method for fabricating semiconductor device with improved refresh time |
| 09/04/2007 | US7265038 Method for forming a multi-layer seed layer for improved Cu ECP |
| 09/04/2007 | US7265037 Nanowire array and nanowire solar cells and methods for forming the same |
| 09/04/2007 | US7265036 Deposition of nano-crystal silicon using a single wafer chamber |
| 09/04/2007 | US7265035 Semiconductor device and its manufacturing method |
| 09/04/2007 | US7265034 Method of cutting integrated circuit chips from wafer by ablating with laser and cutting with saw blade |
| 09/04/2007 | US7265033 Laser beam processing method for a semiconductor wafer |
| 09/04/2007 | US7265032 Protective layer during scribing |
| 09/04/2007 | US7265031 Methods of fabricating semiconductor-on-insulator (SOI) substrates and semiconductor devices using sacrificial layers and void spaces |
| 09/04/2007 | US7265030 Method of fabricating silicon on glass via layer transfer |
| 09/04/2007 | US7265029 Fabrication of substrates with a useful layer of monocrystalline semiconductor material |
| 09/04/2007 | US7265028 Method for producing dislocation-free strained crystalline films |
| 09/04/2007 | US7265027 Bond method and structure using selective application of spin on glass |
| 09/04/2007 | US7265026 Method of forming a shallow trench isolation structure in a semiconductor device |
| 09/04/2007 | US7265025 Method for filling trench and relief geometries in semiconductor structures |
| 09/04/2007 | US7265024 DMOS device having a trenched bus structure |
| 09/04/2007 | US7265023 Fabrication method for a semiconductor structure |
| 09/04/2007 | US7265022 Method of fabricating semiconductor device with STI structure |
| 09/04/2007 | US7265021 Alignment method, method for manufacturing a semiconductor device, substrate for a semiconductor device, electronic equipment |
| 09/04/2007 | US7265020 Semiconductor device with DRAM cell and method of manufacturing the same |
| 09/04/2007 | US7265019 Elastomeric CMOS based micro electromechanical varactor |
| 09/04/2007 | US7265018 Method to build self-aligned NPN in advanced BiCMOS technology |
| 09/04/2007 | US7265017 Method for manufacturing partial SOI substrates |
| 09/04/2007 | US7265016 Stepped gate configuration for non-volatile memory |
| 09/04/2007 | US7265015 Use of chlorine to fabricate trench dielectric in integrated circuits |
| 09/04/2007 | US7265014 Avoiding field oxide gouging in shallow trench isolation (STI) regions |
| 09/04/2007 | US7265013 Sidewall image transfer (SIT) technologies |
| 09/04/2007 | US7265012 Formation of standard voltage threshold and low voltage threshold MOSFET devices |
| 09/04/2007 | US7265011 Method of manufacturing a transistor |
| 09/04/2007 | US7265010 High performance vertical PNP transistor method |
| 09/04/2007 | US7265009 HDP-CVD methodology for forming PMD layer |
| 09/04/2007 | US7265008 Method of IC production using corrugated substrate |
| 09/04/2007 | US7265007 Method for fabricating field-effect transistor structures with gate electrodes with a metal layer |
| 09/04/2007 | US7265006 Method of fabricating heterojunction devices integrated with CMOS |
| 09/04/2007 | US7265005 Structure and method for dual-gate FET with SOI substrate |
| 09/04/2007 | US7265004 Electronic devices including a semiconductor layer and a process for forming the same |
| 09/04/2007 | US7265003 Method of forming a transistor having a dual layer dielectric |
| 09/04/2007 | US7265002 Method for making a semiconductor device including a MOSFET having a band-engineered superlattice with a semiconductor cap layer providing a channel |
| 09/04/2007 | US7265001 Methods of fabricating semiconductor devices |
| 09/04/2007 | US7265000 Vertically stacked field programmable nonvolatile memory and method of fabrication |
| 09/04/2007 | US7264999 Semiconductor device with interlocking clip |
| 09/04/2007 | US7264998 Method of removing unnecessary matter from semiconductor wafer, and apparatus using the same |
| 09/04/2007 | US7264997 Semiconductor device including inclined cut surface and manufacturing method thereof |
| 09/04/2007 | US7264996 Method for separating wafers bonded together to form a stacked structure |
| 09/04/2007 | US7264995 Method for manufacturing wafer level chip scale package using redistribution substrate |
| 09/04/2007 | US7264994 Method of fabricating a semiconductor device |
| 09/04/2007 | US7264993 Method for producing information carriers |
| 09/04/2007 | US7264992 Removable flash integrated memory module card and method of manufacture |
| 09/04/2007 | US7264991 Method of connecting a conductive trace to a semiconductor chip using conductive adhesive |
| 09/04/2007 | US7264990 Methods of nanotubes films and articles |
| 09/04/2007 | US7264989 Organic thin-film transistor and method for manufacturing the same |
| 09/04/2007 | US7264988 Electro-and electroless plating of metal in the manufacture of PCRAM devices |
| 09/04/2007 | US7264987 Method of fabricating optoelectronic integrated circuit chip |
| 09/04/2007 | US7264985 Passive elements in MRAM embedded integrated circuits |
| 09/04/2007 | US7264984 Process for forming MEMS |
| 09/04/2007 | US7264983 Method of enhancing connection strength for suspended membrane leads and substrate contacts |
| 09/04/2007 | US7264982 Trench photodetector |
| 09/04/2007 | US7264981 Flat panel display device and method of manufacturing the same |
| 09/04/2007 | US7264980 Method of mounting light emitting element |
| 09/04/2007 | US7264979 Method of manufacturing light emitting device |
| 09/04/2007 | US7264977 Method of RFIC die-package configuration |
| 09/04/2007 | US7264976 Advance ridge structure for microlens gapless approach |
| 09/04/2007 | US7264974 Method for fabricating a low resistance TMR read head |
| 09/04/2007 | US7264918 Resist composition for liquid immersion exposure process and method of forming resist pattern therewith |
| 09/04/2007 | US7264914 Especially interpolymers from substituted cyclobutanorbornenes and fluoroolefins or fluorinated vinyl ethers; photoresists have high UV transparency (particularly at short wavelengths, e.g., 157 nm) |
| 09/04/2007 | US7264909 Exposure parameters for all of the selected exposure patterns to be corrected include position, focal point, astigmatism, rotation, and magnification |
| 09/04/2007 | US7264907 Photomask having central and peripheral line patterns |
| 09/04/2007 | US7264905 Shading area at center of a clear defect in a wiring pattern of a half tone mask; accuracy, lithography |
| 09/04/2007 | US7264853 Attaching a pellicle frame to a reticle |
| 09/04/2007 | US7264846 Ruthenium layer formation for copper film deposition |
| 09/04/2007 | US7264778 Carbon monoxide sensor and method of use thereof |
| 09/04/2007 | US7264742 Method of planarizing a surface |
| 09/04/2007 | US7264699 Workpiece holder for processing apparatus, and processing apparatus using the same |
| 09/04/2007 | US7264698 Apparatus and methods for electrochemical processing of microelectronic workpieces |
| 09/04/2007 | US7264681 Cleaning apparatus and cleaning method |
| 09/04/2007 | US7264680 Process and apparatus for treating a workpiece using ozone |
| 09/04/2007 | US7264677 Process for treating solid surface and substrate surface |
| 09/04/2007 | US7264676 Plasma apparatus and method capable of adaptive impedance matching |
| 09/04/2007 | US7264674 Method for pulling a single crystal |
| 09/04/2007 | US7264641 Polishing pad comprising biodegradable polymer |
| 09/04/2007 | US7264535 Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model |
| 09/04/2007 | US7264527 Quantum dot white and colored light-emitting devices |
| 09/04/2007 | US7264482 Anisotropic conductive sheet |
| 09/04/2007 | US7264456 Leadframe and method for reducing mold compound adhesion problems |
| 09/04/2007 | US7264436 Robot-guidance assembly for providing a precision motion of an object |
| 09/04/2007 | US7264407 Optical device, method for fabricating optical device, cap component, and method for forming cap component |
| 09/04/2007 | US7264235 Active damping apparatus, exposure apparatus and device manufacturing method |
| 09/04/2007 | US7264146 Ultrasonic tool and ultrasonic bonder |
| 09/04/2007 | US7264008 Apparatus for cleaning a wafer |
| 09/04/2007 | US7264007 Method and apparatus for cleaning a substrate using megasonic power |
| 09/04/2007 | US7264006 Ozonated water flow and concentration control apparatus and method |
| 09/04/2007 | US7263890 Vacuum clamping detection method and vacuum clamping detector |
| 09/04/2007 | CA2425609C Method for locating defects and measuring resistance in a test structure |
| 09/04/2007 | CA2306044C Use of glass laminate as a substrate in semiconductor devices |
| 08/30/2007 | WO2007098459A2 Semiconductor device with nitrogen containing oxide layer |
| 08/30/2007 | WO2007098306A2 Cap layer for an aluminum copper bond pad |
| 08/30/2007 | WO2007098302A2 Poly pre-doping anneals for improved gate profiles |
| 08/30/2007 | WO2007098233A1 High aspect ratio contacts |
| 08/30/2007 | WO2007098230A2 Shallow trench isolation structure |