| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/06/2007 | DE102006009353A1 Wafer treatment, involves coating front side of wafer with layer with separation properties and carrier layer, where carrier layer exhibits electrostatic properties and includes elastomer layer or hard layer of polyimide |
| 09/06/2007 | DE102006009280A1 Verfahren zur Herstellung von CMOS-Schaltkreisen A process for the fabrication of CMOS circuits |
| 09/06/2007 | DE102006005420A1 Stapelbares Halbleiterbauteil und Verfahren zur Herstellung desselben A stackable semiconductor device and method of manufacturing the same |
| 09/06/2007 | DE102006003608A1 Process to recover high-purity silicon material from laser etching in polycrystalline form |
| 09/06/2007 | DE102006003605A1 Process to recover high-purity silicon material from laser etching in polycrystalline form |
| 09/06/2007 | DE102006002481B3 Kombinierter Widerstandstemperatursensor Combined resistance temperature sensor |
| 09/06/2007 | DE102005047856B4 Halbleiterbauteil mit in Kunststoffgehäusemasse eingebetteten Halbleiterbauteilkomponenten, Systemträger zur Aufnahme der Halbleiterbauteilkomponenten und Verfahren zur Herstellung des Systemträgers und von Halbleiterbauteilen Semiconductor device having embedded in plastic housing compound semiconductor device components, system unit for receiving the semiconductor device components and methods of making the system carrier and semiconductor devices |
| 09/06/2007 | DE102005046736B4 Vorrichtung und Verfahren zum Beladen einer Sockel- bzw. Adapter-Einrichtung mit einem entsprechenden Halbleiter-Bauelement Apparatus and method for loading a socket or adapter device with a corresponding semiconductor device |
| 09/06/2007 | DE102004024885B4 Halbleiterbauelement und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation |
| 09/06/2007 | DE10137184B4 Verfahren zur Herstellung eines elektronischen Bauteils mit einem Kuststoffgehäuse und elektronisches Bauteil A method of manufacturing an electronic component and electronic component with a Kuststoffgehäuse |
| 09/06/2007 | DE10126309B4 Rückwärtssperrendes Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung Reverse-locking power semiconductor device and process for its preparation |
| 09/05/2007 | EP1830456A1 Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method |
| 09/05/2007 | EP1830416A2 Methods of forming semiconductor devices including mesa structures and multiple passivation layers and related devices |
| 09/05/2007 | EP1830402A2 A spiral inductor formed in a semiconductor substrate and a method for forming the inductor |
| 09/05/2007 | EP1830401A1 Microstructure for forming a silicone and germanium substrate on an insulator of the Si1-XGeX type |
| 09/05/2007 | EP1830400A1 Method of manufacturing a substrate by germanium condensation |
| 09/05/2007 | EP1830399A1 Resin composition for flip-chip packaging and resin composition for forming bump |
| 09/05/2007 | EP1830397A2 Surface treatment method of compound semiconductor substrate, fabrication method of compound semiconductor, compound semiconductor substrate, and semiconductor wafer |
| 09/05/2007 | EP1830396A1 Magnetic fluid sealing unit for semiconductor wafer vertical heat treating apparatus |
| 09/05/2007 | EP1830395A1 Method for measuring position of mask surface in height direction, exposure apparatus and exposure method |
| 09/05/2007 | EP1830394A1 Exposure apparatus, exposure method and device manufacturing method |
| 09/05/2007 | EP1830393A1 Photoresist coating liquid supplying apparatus, and photoresist coating liquid supplying method and photoresist coating apparatus using such photoresist coating liquid supplying apparatus |
| 09/05/2007 | EP1830392A2 Thermal processing system with accross-flow liner |
| 09/05/2007 | EP1830391A2 Surface protective film peeling method and surface protective film peeling apparatus |
| 09/05/2007 | EP1830309A1 Electronic device manufacturing method |
| 09/05/2007 | EP1830229A2 Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same |
| 09/05/2007 | EP1830228A1 Compound for resist and radiation-sensitive composition |
| 09/05/2007 | EP1830227A1 Resist composition for liquid immersion exposure and method for resist pattern formation |
| 09/05/2007 | EP1830196A1 Test mode activation by phase comparison |
| 09/05/2007 | EP1829945A1 Film, silica film and method of forming the same, composition for forming silica film, and electronic part |
| 09/05/2007 | EP1829836A1 Large glass substrate for photomask and method for producing same, computer readable recording medium, and method for exposing mother glass |
| 09/05/2007 | EP1829114A2 Reduced channel pitch in semiconductor device |
| 09/05/2007 | EP1829108A1 Multi-thickness dielectric for semiconductor memory |
| 09/05/2007 | EP1829104A1 Thermally controlled fluidic self-assembly |
| 09/05/2007 | EP1829103A1 Eeprom array with self-aligned shallow-trench isolation |
| 09/05/2007 | EP1829102A1 Semiconductor device |
| 09/05/2007 | EP1829101A2 Flexible electronic circuit articles and method of making thereof |
| 09/05/2007 | EP1829100A1 Method for transferring a circuit to a grounding plane |
| 09/05/2007 | EP1829099A1 Method for treating the surface of a wafer |
| 09/05/2007 | EP1829098A1 Soi substrate materials and method to form si-containing soi and underlying substrate with different orientations |
| 09/05/2007 | EP1829097A1 Component for detecting especially infrared electromagnetic radiation |
| 09/05/2007 | EP1829096A2 Ceramic aggregate substrate, ceramic substrate and ceramic aggregate substrate fabrication method |
| 09/05/2007 | EP1829095A2 Process sequence for doped silicon fill of deep trenches |
| 09/05/2007 | EP1829094A2 Wet etching of the edge and bevel of a silicon wafer |
| 09/05/2007 | EP1829093A2 Cmp composition comprising surfactant |
| 09/05/2007 | EP1829092A2 A method for forming a semiconductor device with gate sidewall spacers of specific dimensions |
| 09/05/2007 | EP1829091A2 Optimization of beam utilization |
| 09/05/2007 | EP1829090A1 METHOD OF MANUFACTURING DOPED Inx AlyGa1-x-yN EPITAXIAL LAYERS, DOPED InxAlyGa1-x-yN EPITAXIAL LAYER AND SEMICONDUCTOR MULTI-LAYER STRUCTURE COMPRISING AT LEAST ONE DOPED InxALyGa1-x-yN EPITAXIAL LAYER, WHERE |
| 09/05/2007 | EP1829089A2 Use of cl2 and/or hcl during silicon epitaxial film formation |
| 09/05/2007 | EP1829088A1 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers |
| 09/05/2007 | EP1829087A2 Method and system for providing a highly textured magnetoresistance element and magnetic memory |
| 09/05/2007 | EP1829086A2 Selective epitaxy process with alternating gas supply |
| 09/05/2007 | EP1829085A1 Apparatus and method for drying disk-shaped substrates |
| 09/05/2007 | EP1829084A1 Rotatable device for holding a substrate |
| 09/05/2007 | EP1828820A1 Single axis light pipe for homogenizing one axis of illumination systems based on laser diodes |
| 09/05/2007 | EP1828444A2 Topotactic anion exchange oxide films and method of producing the same |
| 09/05/2007 | EP1828333A1 Polishing composition and polishing method |
| 09/05/2007 | EP1828070A2 Selective high dielectric constant material etchant |
| 09/05/2007 | EP1827712A2 Device for coating the outer edge of a substrate during microelectronics manufacturing |
| 09/05/2007 | EP1502296A4 Semiconductor probe with resistive tip and method of fabricating the same, and information recording apparatus, information reproducing apparatus, and information measuring apparatus having the semiconductor probe |
| 09/05/2007 | EP1464455B1 Scalar type robot for carrying flat plate-like object; and flat plate-like object processing system |
| 09/05/2007 | EP1464080B1 Method for production of a bonding device |
| 09/05/2007 | EP1407179A4 Single-handed cord/cable management device |
| 09/05/2007 | EP1373278A4 Metalloamide and aminosilane precursors for cvd formation of dielectric thin films |
| 09/05/2007 | EP1230678B1 Self-aligned metal caps for interlevel metal connections |
| 09/05/2007 | EP1200981B1 Gas distribution apparatus for semiconductor processing |
| 09/05/2007 | EP1194949B1 Surface finishing of soi substrates using an epi process |
| 09/05/2007 | EP1038996B1 Combinatorial molecular layer epitaxy device |
| 09/05/2007 | EP1030788B1 Plasma processing methods and apparatus |
| 09/05/2007 | CN200944400Y Chip glue silver rubber plate with improved structure |
| 09/05/2007 | CN101032068A Linear motor, stage apparatus and exposure apparatus |
| 09/05/2007 | CN101032032A Nonplanar device with thinned lower body portion and method of fabrication |
| 09/05/2007 | CN101032030A 半导体装置 Semiconductor device |
| 09/05/2007 | CN101032029A Semiconductor assembly comprising a tunnel contact and method for producing said assembly |
| 09/05/2007 | CN101032027A Thin film transistor and its manufacturing method |
| 09/05/2007 | CN101032024A Gate stacks |
| 09/05/2007 | CN101032021A Low profile, chip-scale package and method of fabrication |
| 09/05/2007 | CN101032020A Semiconductor storage device and method for manufacturing the same |
| 09/05/2007 | CN101032019A Deep trench electrically isolated medium voltage cmos devices and method for making the same |
| 09/05/2007 | CN101032018A Strained channel fet using sacrificial spacer |
| 09/05/2007 | CN101032017A Dual gate cmos fabrication |
| 09/05/2007 | CN101032016A Semiconductor device and semiconductor device testing method |
| 09/05/2007 | CN101032015A Capping of metal interconnects in integrated circuit electronic devices |
| 09/05/2007 | CN101032014A New structure for microelectronics and microsystem and manufacturing process |
| 09/05/2007 | CN101032013A Method and system for dynamically adjusting metrology sampling based upon available metrology capacity |
| 09/05/2007 | CN101032012A Wire bump materials |
| 09/05/2007 | CN101032011A 等离子体增强氮化物层 Plasma-enhanced nitride layer |
| 09/05/2007 | CN101032010A Methods of optimization of implant conditions to minimize channeling and structures formed thereby |
| 09/05/2007 | CN101032009A Methods for forming a transistor |
| 09/05/2007 | CN101032008A Semiconductor manufacturing apparatus, flow rate correction method for same, and program |
| 09/05/2007 | CN101032007A Method for forming copper wiring |
| 09/05/2007 | CN101032006A Production method for semiconductor device and substrate processing device |
| 09/05/2007 | CN101032005A Plasma film forming method and apparatus therefor |
| 09/05/2007 | CN101032004A Method for forming a thin complete high-permittivity dielectric layer |
| 09/05/2007 | CN101032003A Method for stripping photoresist from etched wafer |
| 09/05/2007 | CN101032002A Plasma processing system for treating a substrate |
| 09/05/2007 | CN101032001A CMP polishing compound and method for polishing substrate |
| 09/05/2007 | CN101032000A Method and system for forming a passivated metal layer |
| 09/05/2007 | CN101031999A Reduction of source and drain parasitic capacitance in cmos devices |
| 09/05/2007 | CN101031998A Shower head of chemical vapor deposition apparatus |