Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2007
09/11/2007US7268045 N-channel LDMOS with buried P-type region to prevent parasitic bipolar effects
09/11/2007US7268044 Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
09/11/2007US7268043 Semiconductor device and method of manufacturing the same
09/11/2007US7268042 Nonvolatile semiconductor memory and making method thereof
09/11/2007US7268041 Method of forming source contact of flash memory device
09/11/2007US7268040 Method of manufacturing a select transistor in a NAND flash memory
09/11/2007US7268039 Method of forming a contact using a sacrificial structure
09/11/2007US7268038 Method for fabricating a MIM capacitor having increased capacitance density and related structure
09/11/2007US7268037 Method for fabricating microchips using metal oxide masks
09/11/2007US7268036 Semiconductor device and method for fabricating the same
09/11/2007US7268035 Methods of forming semiconductor constructions comprising cerium oxide and titanium oxide
09/11/2007US7268034 Methods of forming pluralities of capacitors, and integrated circuitry
09/11/2007US7268033 Method and structure for providing tuned leakage current in CMOS integrated circuits
09/11/2007US7268032 Termination for trench MIS device having implanted drain-drift region
09/11/2007US7268031 Memory device with high dielectric constant gate dielectrics and metal floating gates
09/11/2007US7268030 Methods of forming semiconductor constructions
09/11/2007US7268029 Method of fabricating CMOS transistor that prevents gate thinning
09/11/2007US7268028 Well isolation trenches (WIT) for CMOS devices
09/11/2007US7268027 Method of manufacturing photoreceiver
09/11/2007US7268026 Method for manufacturing both a semiconductor crystalline film and semiconductor device
09/11/2007US7268025 Pixel structure and fabricating method thereof
09/11/2007US7268024 Semiconductor-on-insulator chip incorporating strained-channel partially-depleted, fully-depleted, and multiple-gate transistors
09/11/2007US7268023 Method of forming a pseudo SOI substrate and semiconductor devices
09/11/2007US7268022 Stable PD-SOI devices and methods
09/11/2007US7268021 Lead frame and method of manufacturing the same
09/11/2007US7268020 Embedded heat spreader
09/11/2007US7268019 Method and apparatus for high temperature operation of electronics
09/11/2007US7268018 Method for fabricating semiconductor component with stiffener and circuit decal
09/11/2007US7268017 Multilayered structure, multilayered structure array and method of manufacturing the same
09/11/2007US7268016 Method for manufacturing solid-state imaging devices
09/11/2007US7268015 Method for wafer stacking using copper structures of substantially uniform height
09/11/2007US7268014 Fabrication method of light emitting diode package
09/11/2007US7268013 Method of fabricating a semiconductor die package having improved inductance characteristics
09/11/2007US7268012 Methods for fabrication of thin semiconductor assemblies including redistribution layers and packages and assemblies formed thereby
09/11/2007US7268010 Method of manufacturing an LED
09/11/2007US7268009 Method for fabricating a CMOS image sensor
09/11/2007US7268008 Method for manufacturing pressure sensor
09/11/2007US7268007 Compound semiconductor, method for manufacturing the same, semiconductor device, and method for manufacturing the same
09/11/2007US7268006 Electronic device including a guest material within a layer and a process for forming the same
09/11/2007US7268005 Apparatus and method for stacking laser bars for uniform facet coating
09/11/2007US7268004 Thermoelectric control for field emission display
09/11/2007US7268003 Method of evaluating semiconductor device
09/11/2007US7268002 Packaging method, packaging structure and package substrate for electronic parts
09/11/2007US7268001 Enhancement of grain structure for contacts
09/11/2007US7268000 Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step
09/11/2007US7267998 Magnetic memory device having a plurality of magneto-resistance effect elements arranged in a matrix form and method for manufacturing the same
09/11/2007US7267997 Process for forming magnetic memory structures
09/11/2007US7267996 Iridium etching for FeRAM applications
09/11/2007US7267932 Method for high resolution patterning using soft X-ray, process for preparing nano device using the same method
09/11/2007US7267927 Method for fabricating semiconductor device and equipment for fabricating the same
09/11/2007US7267923 Base resin is a polyvinylphenol derivative having an alkoxyisobutoxy as a reactive group which is decomposable under the action of an acid to increase solubility in alkali; enhanced contrast of alkali dissolution rate before and after exposure; high sensitivity and resolution in fine feature size regions
09/11/2007US7267912 Exposure mask and pattern exposure method
09/11/2007US7267911 Stencil mask and its manufacturing method
09/11/2007US7267848 Method of fabricating a protective film by use of vacuum ultraviolet rays
09/11/2007US7267784 Safe for nickel phosphide, glass and/or ceramic materials; polishing efficiency, uniformity, removal rate; minimizing defects; includes purified sodium containing clays
09/11/2007US7267781 Method of fabricating optical filters
09/11/2007US7267742 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device
09/11/2007US7267741 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon
09/11/2007US7267727 Using separate pressurized vessels; sealing; heating
09/11/2007US7267726 Method and apparatus for removing polymer residue from semiconductor wafer edge and back side
09/11/2007US7267725 Thin-film deposition apparatus
09/11/2007US7267724 Thin-film disposition apparatus
09/11/2007US7267723 Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle
09/11/2007US7267607 Transparent microporous materials for CMP
09/11/2007US7267604 Grinding abrasive grains, abrasive, abrasive solution, abrasive solution preparation method, grinding method, and semiconductor device fabrication method
09/11/2007US7267603 Back grinding methods for fabricating an image sensor
09/11/2007US7267601 Method of producing polishing cloth
09/11/2007US7267520 Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights
09/11/2007US7267382 Low maintenance vacuum generation
09/11/2007US7267132 Methods for removing silicon and silicon-nitride contamination layers from deposition tubes
09/11/2007US7267130 Substrate processing apparatus
09/11/2007US7267129 Device and process for liquid treatment of wafer-shaped articles
09/11/2007US7267128 Substrate treating apparatus
09/11/2007US7267127 Method for manufacturing electronic device
09/11/2007US7266887 Substrate transportation apparatus, component mounting apparatus and substrate transportation method in component mounting operation
09/11/2007CA2362387C Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows
09/11/2007CA2206679C Plasma processor for large workpieces
09/07/2007WO2007101207A2 Process chambers for substrate vacuum processing tool
09/07/2007WO2007101120A1 Method for making semiconductor insulated-gate field-effect transistor having multilayer deposited metal source (s) and/or drain (s)
09/07/2007WO2007100873A2 Hybrid wafer -holding pin
09/07/2007WO2007100803A1 Process for forming a short channel trench mosfet and device
09/07/2007WO2007100787A2 Nanoparticles having sub-nanometer features
09/07/2007WO2007100608A1 Laser beam micro-smoothing
09/07/2007WO2007100589A1 Transistor device having an increased threshold stability without drive current degradation
09/07/2007WO2007100571A2 Johnsen-rahbek electrostatic chuck driven with ac voltage
09/07/2007WO2007100544A2 Highly selective doped oxide etchant
09/07/2007WO2007100233A1 Method for crystallization of amorphous silicon by joule heating
09/07/2007WO2007100155A1 Quantitative evaluation device and method of atom vacancy existing in silicon wafer
09/07/2007WO2007100146A1 PROCESS FOR PRODUCING ZnO SINGLE CRYSTAL ACCORDING TO METHOD OF LIQUID PHASE GROWTH
09/07/2007WO2007100144A1 Measurement apparatus, exposure apparatus having the same, and device manufacturing method
09/07/2007WO2007100142A1 Component bonding method and component bonding device
09/07/2007WO2007100125A1 Semiconductor device, its manufacturing method, and sputtering target material for use in the method
09/07/2007WO2007100099A1 Substrate processing apparatus and substrate processing method
09/07/2007WO2007100093A1 Metal oxide particle, polishing material containing same, substrate polishing method using such polishing material, and method for manufacturing semiconductor device
09/07/2007WO2007100087A1 Exposure apparatus and device manufacturing method
09/07/2007WO2007100081A1 Exposure method and apparatus, and device manufacturing method
09/07/2007WO2007099986A1 Wafer processing method
09/07/2007WO2007099976A1 Substrate treating device, substrate convey device, substrate grasping device, and chemical solution treating device
09/07/2007WO2007099965A1 Circuit connecting material, connection structure for circuit member using the same, and method for producing such connection structure
09/07/2007WO2007099957A1 Plasma treatment apparatus, and substrate heating mechanism to be used in the apparatus