Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2007
09/12/2007EP1831930A1 Semiconductor device with a superparaelectric gate insulator
09/12/2007EP1831929A1 Gate structure and method for making same
09/12/2007EP1831926A2 An electronic device, a chip containing method and a contacting device
09/12/2007EP1831925A2 Method for forming self-aligned dual fully silicided gates in cmos devices
09/12/2007EP1831924A1 Manufacturing method for semiconductor chips
09/12/2007EP1831923A1 Method for trimming a structure obtained by the assembly of two plates
09/12/2007EP1831922A1 Method for obtaining a thin layer having a low density of holes
09/12/2007EP1831921A1 Patterning techniques
09/12/2007EP1831920A1 Wafer bonded mos decoupling capacitor
09/12/2007EP1831919A2 Gallium nitride/silicon based monolithic microwave integrated circuit
09/12/2007EP1831918A2 Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step
09/12/2007EP1831914A2 Target design for high-power laser accelerated ions
09/12/2007EP1831430A2 An in-situ chamber clean process to remove by-product deposits from chemical vapor etch chamber
09/12/2007EP1831321A2 Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios
09/12/2007EP1830985A2 Polishing apparatus and polishing method
09/12/2007EP1740948B1 Partially oxidised macroporous silicon comprising discontinuous silicon walls
09/12/2007EP1685751B1 Method of soldering electronic component having solder bumps to substrate
09/12/2007EP1665352A4 Monitoring system comprising infrared thermopile detector
09/12/2007EP1660702B1 A method of fabricating an epitaxially grown layer
09/12/2007EP1633911B1 Method of forming a layer of silicon carbide on a silicon wafer
09/12/2007EP1579499A4 Method of self-assembling electronic circuitry and circuits formed thereby
09/12/2007EP1532670A4 Characterization adn reduction of variation for integrated circuits
09/12/2007EP1518281B8 Buffer layers for organic electroluminescent devices and methods of manufacture and use
09/12/2007EP1488236A4 Arrays of microparticles and methods of preparation thereof
09/12/2007EP1459382B8 Polarity reversal tolerant electrical circuit for esd protection
09/12/2007EP1454333B1 Mems device having a trilayered beam and related methods
09/12/2007EP1415341B1 Method of fabricating an alloy film on a face of a heat exchanger for an integrated circuit
09/12/2007EP1390955B1 Laser plasma from metals and nano-size particles
09/12/2007EP1390692A4 Periodic patterns and technique to control misalignment
09/12/2007EP1374276B1 Plasma surface treatment method and device for carrying out said method
09/12/2007EP1329526B1 Method for producing high-purity zirconium and hafnium for sputtering targets
09/12/2007EP1301947B1 Group iii nitride compound semiconductor device
09/12/2007EP1245049B1 Methods of making a field effect transistor structure with partially isolated source/drain junctions
09/12/2007EP1240661B1 Hollow core spindle and spin, rinse, and dry module including the same
09/12/2007EP1208586B1 Device for treating substrates
09/12/2007EP1165993B1 Dual-sided slot valve and method for implementing the same
09/12/2007EP1149412B9 Dielectric films from organohydridosiloxane resins
09/12/2007EP1115918B1 Enhanced n-type silicon material for epitaxial wafer substrate and method of making same
09/12/2007EP0996765B1 Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer
09/12/2007EP0946979B1 Method for chemical-mechanical planarization of a substrate on a fixed-abrasive polishing pad
09/12/2007EP0795049B2 Epitaxial growth of silicon carbide and resulting silicon carbide structures
09/12/2007CN200947432Y Multi-shaft type carrier
09/12/2007CN101036420A Microwave plasma processing apparatus
09/12/2007CN101036233A Semiconductor component
09/12/2007CN101036230A Treatment of silicon prior to nickel silicide formation
09/12/2007CN101036225A A semiconductor device with a high-k gate dielectric and a metal gate electrode
09/12/2007CN101036224A Method for dividing semiconductor wafer and manufacturing method for semiconductor devices
09/12/2007CN101036223A Method for laser dicing of a substrate
09/12/2007CN101036222A Method for obtaining a thin layer by implementing co-implantation and subsequent implantation
09/12/2007CN101036221A Non-contact type suction holding device
09/12/2007CN101036220A Substrate heat treatment apparatus and substrate transfer tray used in substrate heat treatment
09/12/2007CN101036219A 等离子体成膜方法和等离子体成膜装置 The plasma film forming method and a plasma film forming apparatus
09/12/2007CN101036218A Method of removing polymer coating from an etched trench
09/12/2007CN101036217A PE-ALD of TaN diffusion barrier region on low-K materials
09/12/2007CN101036216A Planar avalanche photodiode
09/12/2007CN101036215A Chemical vapor deposition reactor
09/12/2007CN101035729A Adhesion film adhibition device and adhesion film tape feeding mechanism
09/12/2007CN101035725A Board conveying device
09/12/2007CN101035724A Container for conveying substrate, inner wall structure of the container, and bottom raising member used for the container
09/12/2007CN101035416A Method of manufacturing wiring substrate
09/12/2007CN101035415A Encapsulation method of dual base board electronic module for the radio communication
09/12/2007CN101035405A Plasma treatment device
09/12/2007CN101034805A Ic power supply protection circuit
09/12/2007CN101034724A Making method for silicon slice surface metal pole and notch digger
09/12/2007CN101034722A Semiconductor apparatus and method of manufacturing the same
09/12/2007CN101034721A Flash memory cell with split gate structure and method for forming the same
09/12/2007CN101034720A A non-volatile memory having l-shape floating gate electrode and method for forming the same
09/12/2007CN101034719A Semiconductor device and manufacturing method thereof
09/12/2007CN101034718A Thin film transistor device and method of manufacturing the same
09/12/2007CN101034717A Semiconductor device and method for manufacturing the same
09/12/2007CN101034716A Method of forming an mos transistor and structure therefor
09/12/2007CN101034715A Organic light emitting diode display device and method for fabricating the same
09/12/2007CN101034714A Light-detecting device and manufacturing method thereof
09/12/2007CN101034711A Photo-sensor and method of forming the photo-sensor
09/12/2007CN101034710A Method capable of adjusting sensing part lens deviation and its encapsulation structure
09/12/2007CN101034709A High breakdown voltage semiconductor integrated circuit device and dielectric separation type semiconductor device
09/12/2007CN101034708A Nanowire memory device and method of manufacturing the same
09/12/2007CN101034705A Bi-directional transistor with by-pass path and method therefor
09/12/2007CN101034704A Semiconductor integrated circuit device and power source wiring method therefor
09/12/2007CN101034702A Capacitance dielectric layer and its forming method and capacitor
09/12/2007CN101034701A IC stack structure and its making method
09/12/2007CN101034700A Electronic component integrated module and method for fabricating the same
09/12/2007CN101034698A Overlay accuracy measurement vernier and method of forming the same
09/12/2007CN101034697A Electrically programmable fuse structures with narrowed width regions configured to enhance current crowding and methods of fabrication thereof
09/12/2007CN101034696A Electrically programmable fuse structures with terminal portions residing at different heights, and methods of fabrication thereof
09/12/2007CN101034695A Semiconductor structure and method for manufacturing semiconductor structure
09/12/2007CN101034693A Semiconductor device and method for manufacturing semiconductor device
09/12/2007CN101034691A Semiconductor component and its making method
09/12/2007CN101034690A Semiconductor package with the heat radiation device and its making method
09/12/2007CN101034689A Double encapsulated semiconductor package and manufacturing method thereof
09/12/2007CN101034688A Optical device and method for manufacturing the same
09/12/2007CN101034687A Base board for flexible optoelectronic part and its making method
09/12/2007CN101034686A A P type GaP semiconductor material and its making method
09/12/2007CN101034685A Method for manufacturing thin film transistor display array with dual-layer metal line
09/12/2007CN101034684A Method for manufacturing semiconductor device
09/12/2007CN101034683A Method for forming integrated circuit and structure
09/12/2007CN101034682A Semiconductor device and method of manufacturing the same
09/12/2007CN101034681A Method of manufacturing semiconductor device
09/12/2007CN101034680A Device for preventing chip ejector
09/12/2007CN101034679A Substrate processing apparatus, substrate attracting method, and storage medium
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