Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2009
04/01/2009CN100473755C Film forming equipment and method
04/01/2009CN100473704C Adhesive sheet and semiconductor device and process for producing the same
04/01/2009CN100473600C Method for producing high-purity hydrochloric acid
04/01/2009CN100473501C Method for prolonging service-life of grinding pad in chemical-mechanical polishing
04/01/2009CN100473500C Process for automatically processing grinding pad
04/01/2009CN100473498C Method for grinding a same membrane material by end-point detecting system
04/01/2009CN100473497C Method for monitoring termination detecting state
04/01/2009CN100473495C Method for determining grinding time of chemical and mechanical grinding technology
04/01/2009CN100473454C Method of oxidizing substance and oxidizing apparatus thereof
04/01/2009CN100473446C Exhaust gas collection device
03/2009
03/31/2009US7512872 Test apparatus and test method
03/31/2009US7512170 Method of forming mirrors by surface transformation of empty spaces in solid state materials
03/31/2009US7512006 Non-volatile memory and semiconductor device
03/31/2009US7511982 High speed OTP sensing scheme
03/31/2009US7511981 Non-volatile memory device
03/31/2009US7511940 Formation of metal-insulator-metal capacitor simultaneously with aluminum metal wiring level using a hardmask
03/31/2009US7511935 Electrostatic chuck and method of its manufacture
03/31/2009US7511888 Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same
03/31/2009US7511885 Methods for reducing polarization aberration in optical systems
03/31/2009US7511884 Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
03/31/2009US7511830 System for scatterometric measurements and applications
03/31/2009US7511828 Three-dimensional shape measuring unit, processing unit, and semiconductor device manufacturing method
03/31/2009US7511817 Reticle, reticle inspection method and reticle inspection apparatus
03/31/2009US7511814 Particle-measuring system and particle-measuring method
03/31/2009US7511806 Apparatus and method for inspecting defects
03/31/2009US7511788 Array substrate, method of manufacturing the same and liquid crystal display apparatus having the same
03/31/2009US7511782 Liquid crystal display device and fabrication method having open gate/data pads with transparent conductive layer thereon to an edge thereof
03/31/2009US7511750 Photo-electric converting device and its driving method, and its manufacturing method, solid-state image pickup device and its driving method and its manufacturing method
03/31/2009US7511709 Display device
03/31/2009US7511519 Electric signal connecting device and probe assembly and probing device using the same
03/31/2009US7511382 Semiconductor chip arrangement and method
03/31/2009US7511380 Semiconductor chip and method manufacturing the same
03/31/2009US7511377 Semiconductor integrated circuit device and process for manufacturing the same
03/31/2009US7511376 Circuitry component with metal layer over die and extending to place not over die
03/31/2009US7511366 Multi-row substrate strip and method for manufacturing the same
03/31/2009US7511363 Copper interconnect
03/31/2009US7511362 Electronic component and semiconductor device, method of making the same and method of mounting the same, circuit board, and electronic instrument
03/31/2009US7511354 Well for CMOS imager and method of formation
03/31/2009US7511353 Semiconductor diode and production method suitable therefor
03/31/2009US7511351 Semiconductor device and method for fabricating the same
03/31/2009US7511341 SOI device having increased reliability and reduced free floating body effects
03/31/2009US7511340 Semiconductor devices having gate structures and contact pads that are lower than the gate structures
03/31/2009US7511339 Field effect transistor and method of its manufacture
03/31/2009US7511334 Twin-ONO-type SONOS memory
03/31/2009US7511331 Semiconductor device having side wall spacers
03/31/2009US7511330 Semiconductor device and method of fabricating the same
03/31/2009US7511327 Capacitive electrode having semiconductor layers with an interface of separated grain boundaries
03/31/2009US7511325 Ferroelectric capacitor
03/31/2009US7511321 Method for forming a dielectric layer and related devices
03/31/2009US7511319 Methods and apparatus for a stepped-drift MOSFET
03/31/2009US7511318 Electromechanical memory array using nanotube ribbons and method for making same
03/31/2009US7511316 Semiconductor device resistive to high voltage and capable of controlling leakage current
03/31/2009US7511315 Semiconductor device and manufacturing method therefor
03/31/2009US7511314 Light emitting device and method of fabricating the same
03/31/2009US7511311 Semiconductor light-emitting device, method for manufacturing the same, and light-emitting apparatus including the same
03/31/2009US7511304 Substrate for display device having a protective layer provided between the pixel electrodes and wirings of the active matrix substrate and display device
03/31/2009US7511303 Semiconductor device and method of manufacturing same
03/31/2009US7511302 TFT array panel
03/31/2009US7511301 Liquid crystal display unit
03/31/2009US7511300 Array substrate, display device having the same and method of manufacturing the same
03/31/2009US7511297 Phase change memory device and method of fabricating the same
03/31/2009US7511289 Working method utilizing irradiation of charged particle beam onto sample through passage in gas blowing nozzle
03/31/2009US7511272 Method for controlling charged particle beam, and charged particle beam apparatus
03/31/2009US7510986 Production method for semiconductor device
03/31/2009US7510985 Method to manufacture high-precision RFID straps and RFID antennas using a laser
03/31/2009US7510984 Method of forming silicon nitride film and method of manufacturing semiconductor device
03/31/2009US7510983 Iridium/zirconium oxide structure
03/31/2009US7510982 Creation of porosity in low-k films by photo-disassociation of imbedded nanoparticles
03/31/2009US7510981 Method for manufacturing semiconductor device
03/31/2009US7510980 Method for manufacturing semiconductor device
03/31/2009US7510979 Method for forming a pattern on a semiconductor device and semiconductor device resulting from the same
03/31/2009US7510978 Method for forming mask for using dry-etching and method for forming fine structure pattern
03/31/2009US7510977 Method for manufacturing silicon carbide semiconductor device
03/31/2009US7510976 Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity
03/31/2009US7510975 Method for manufacturing a semiconductor device having trenches defined in the substrate surface
03/31/2009US7510974 CMP process
03/31/2009US7510973 Method for forming fine pattern in semiconductor device
03/31/2009US7510972 Method of processing substrate, post-chemical mechanical polishing cleaning method, and method of and program for manufacturing electronic device
03/31/2009US7510970 Process for manufacturing semiconductor integrated circuit device
03/31/2009US7510969 Electrode line structure having fine line width and method of forming the same
03/31/2009US7510968 Cap for semiconductor device package, and manufacturing method thereof
03/31/2009US7510967 Method for manufacturing semiconductor device
03/31/2009US7510966 Electrically conductive line, method of forming an electrically conductive line, and method of reducing titanium silicide agglomeration in fabrication of titanium silicide over polysilicon transistor gate lines
03/31/2009US7510965 Method for fabricating a dual damascene structure
03/31/2009US7510964 Method for manufacturing semiconductor device that includes baking a dielectric layer after exposure to plasma
03/31/2009US7510963 Semiconductor device having multilayer interconnection structure and manufacturing method thereof
03/31/2009US7510962 Method for producing an anisotropic conductive film on a substrate
03/31/2009US7510961 Utilization of energy absorbing layer to improve metal flow and fill in a novel interconnect structure
03/31/2009US7510960 Bridge for semiconductor internal node
03/31/2009US7510959 Method of manufacturing a semiconductor device having damascene structures with air gaps
03/31/2009US7510958 Method of manufacturing a semiconductor device including a bump forming process
03/31/2009US7510957 Complimentary lateral III-nitride transistors
03/31/2009US7510956 MOS device with multi-layer gate stack
03/31/2009US7510955 Method of fabricating multi-fin field effect transistor
03/31/2009US7510954 Memory array with surrounding gate access transistors and capacitors with global and staggered local bit lines
03/31/2009US7510953 Integrated fet and schottky device
03/31/2009US7510951 Method for forming high-resolution pattern with direct writing means
03/31/2009US7510950 Method for manufacturing semiconductor device
03/31/2009US7510949 Methods for producing a multilayer semiconductor structure
03/31/2009US7510948 Method for producing SOI wafer
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