| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/21/2009 | US7521711 Display device, method of production of the same, and projection type display device |
| 04/21/2009 | US7521698 Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
| 04/21/2009 | US7521697 Method for fabricating semiconductor device and equipment for fabricating the same |
| 04/21/2009 | US7521692 TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus |
| 04/21/2009 | US7521679 Inspection method and inspection system using charged particle beam |
| 04/21/2009 | US7521408 contains two complexing agents for stabilizing hydrogen peroxide oxidizing compound in solution, prevent decompose; one step process; tiron can remove metal oxide selected from aluminum, iron, and copper by forming complexes, dissolving in water; storage stability |
| 04/21/2009 | US7521406 Microelectronic cleaning composition containing halogen oxygen acids, salts and derivatives thereof |
| 04/21/2009 | US7521405 exposing the substrate comprising photoresist coatings to radiation source, to form patterns, then applying developer solutions, rinsing with water and contacting with a mixture of aqueous, nonaqueous solvents and surfactants, to stabilize the patterns and reduce surface roughness ; surface tension |
| 04/21/2009 | US7521384 Method and apparatus for peeling surface protective film |
| 04/21/2009 | US7521383 Manufacturing method of semiconductor device |
| 04/21/2009 | US7521382 High resistivity silicon structure and a process for the preparation thereof |
| 04/21/2009 | US7521381 Method for producing silicon wafer and silicon wafer |
| 04/21/2009 | US7521380 Methods for fabricating a stress enhanced semiconductor device having narrow pitch and wide pitch transistors |
| 04/21/2009 | US7521379 Deposition and densification process for titanium nitride barrier layers |
| 04/21/2009 | US7521378 Low temperature process for polysilazane oxidation/densification |
| 04/21/2009 | US7521377 SiCOH film preparation using precursors with built-in porogen functionality |
| 04/21/2009 | US7521376 Method of forming a semiconductor structure using a non-oxygen chalcogen passivation treatment |
| 04/21/2009 | US7521375 Method of forming an oxinitride layer |
| 04/21/2009 | US7521374 Method and apparatus for cleaning semiconductor substrates |
| 04/21/2009 | US7521373 Compositions for dissolution of low-k dielectric films, and methods of use |
| 04/21/2009 | US7521371 Methods of forming semiconductor constructions having lines |
| 04/21/2009 | US7521370 Method of operating a plasma reactor chamber with respect to two plasma parameters selected from a group comprising ion density, wafer voltage, etch rate and wafer current, by controlling chamber parameters of source power and bias power |
| 04/21/2009 | US7521369 Selective removal of rare earth based high-k materials in a semiconductor device |
| 04/21/2009 | US7521368 Method for manufacturing semiconductor device |
| 04/21/2009 | US7521367 FIB/RIE method for in-line circuit modification of microelectronic chips containing organic dielectric |
| 04/21/2009 | US7521366 Manufacturing method of electro line for liquid crystal display device |
| 04/21/2009 | US7521365 Selective epitaxy process with alternating gas supply |
| 04/21/2009 | US7521364 Surface topology improvement method for plug surface areas |
| 04/21/2009 | US7521362 Methods for the optimization of ion energy control in a plasma processing system |
| 04/21/2009 | US7521361 Method for manufacturing wiring substrate |
| 04/21/2009 | US7521360 Electroplating and electroless plating of conductive materials into openings, and structures obtained thereby |
| 04/21/2009 | US7521359 Interconnect structure encased with high and low k interlevel dielectrics |
| 04/21/2009 | US7521358 Process integration scheme to lower overall dielectric constant in BEoL interconnect structures |
| 04/21/2009 | US7521357 Methods of forming metal wiring in semiconductor devices using etch stop layers |
| 04/21/2009 | US7521356 Atomic layer deposition systems and methods including silicon-containing tantalum precursor compounds |
| 04/21/2009 | US7521355 Integrated circuit insulators and related methods |
| 04/21/2009 | US7521354 Low k interlevel dielectric layer fabrication methods |
| 04/21/2009 | US7521353 Method for reducing dielectric overetch when making contact to conductive features |
| 04/21/2009 | US7521352 Method for manufacturing a semiconductor device |
| 04/21/2009 | US7521351 Method for forming a semiconductor product and semiconductor product |
| 04/21/2009 | US7521350 Manufacturing method of a semiconductor device |
| 04/21/2009 | US7521349 Fundamental cell, semiconductor integrated circuit device, wiring method and wiring apparatus |
| 04/21/2009 | US7521348 Method of fabricating semiconductor device having fine contact holes |
| 04/21/2009 | US7521347 Method for forming contact hole in semiconductor device |
| 04/21/2009 | US7521346 Method of forming HfSiN metal for n-FET applications |
| 04/21/2009 | US7521345 High-temperature stable gate structure with metallic electrode |
| 04/21/2009 | US7521344 Method of forming semiconductor compound film for fabrication of electronic device and film produced by same using a solid solution |
| 04/21/2009 | US7521342 Semiconductor structure with high-voltage sustaining capability and fabrication method of the same |
| 04/21/2009 | US7521341 Method of direct deposition of polycrystalline silicon |
| 04/21/2009 | US7521340 Methods for creating a densified group IV semiconductor nanoparticle thin film |
| 04/21/2009 | US7521339 GaN single crystal substrate and method of making the same |
| 04/21/2009 | US7521338 Method for sawing semiconductor wafer |
| 04/21/2009 | US7521337 Wafer laser processing method |
| 04/21/2009 | US7521336 Crack stop for low K dielectrics |
| 04/21/2009 | US7521335 Method and apparatus for producing ultra-thin semiconductor chip and method and apparatus for producing ultra-thin back-illuminated solid-state image pickup device |
| 04/21/2009 | US7521334 Method for producing direct bonded wafer and direct bonded wafer |
| 04/21/2009 | US7521333 Methods of fabricating trench isolation structures having varying depth |
| 04/21/2009 | US7521332 Resistance-based etch depth determination for SGT technology |
| 04/21/2009 | US7521331 High dielectric film and related method of manufacture |
| 04/21/2009 | US7521330 Methods for forming capacitor structures |
| 04/21/2009 | US7521329 Semiconductor light emitting diode having textured structure and method of manufacturing the same |
| 04/21/2009 | US7521328 Methods of fabricating bipolar transistor with emitter and collector in separate device isolation trenches |
| 04/21/2009 | US7521327 High fT and fmax bipolar transistor and method of making same |
| 04/21/2009 | US7521326 Semiconductor device and manufacturing method thereof |
| 04/21/2009 | US7521324 Semiconductor device and method for manufacturing the same |
| 04/21/2009 | US7521323 Method of fabricating a double gate field effect transistor device, and such a double gate field effect transistor device |
| 04/21/2009 | US7521321 Method of fabricating a non-volatile semiconductor memory device |
| 04/21/2009 | US7521320 Flash memory device and method of manufacturing the same |
| 04/21/2009 | US7521319 Method of forming gate of flash memory device |
| 04/21/2009 | US7521318 Semiconductor device and method of manufacturing the same |
| 04/21/2009 | US7521317 Method of forming a semiconductor device and structure thereof |
| 04/21/2009 | US7521316 Methods of forming gate structures for semiconductor devices |
| 04/21/2009 | US7521315 Method for fabricating image sensor capable of increasing photosensitivity |
| 04/21/2009 | US7521314 Method for selective removal of a layer |
| 04/21/2009 | US7521313 Thin film device active matrix by pattern reversal process |
| 04/21/2009 | US7521312 Method and system for creating self-aligned twin wells with co-planar surfaces in a semiconductor device |
| 04/21/2009 | US7521311 Semiconductor device and method for fabricating the same |
| 04/21/2009 | US7521310 Vertical thyristor in complementary SiGe bipolar process |
| 04/21/2009 | US7521309 Method of manufacturing semiconductor device |
| 04/21/2009 | US7521308 Dual layer stress liner for MOSFETS |
| 04/21/2009 | US7521307 CMOS structures and methods using self-aligned dual stressed layers |
| 04/21/2009 | US7521306 Semiconductor device and a method of fabricating the same |
| 04/21/2009 | US7521305 Method for fabricating semiconductor device |
| 04/21/2009 | US7521304 Method for forming integrated circuit |
| 04/21/2009 | US7521303 Method of crystallizing amorphous semiconductor thin film and method of fabricating poly crystalline thin film transistor using the same |
| 04/21/2009 | US7521302 Semiconductor device and method of manufacturing the same |
| 04/21/2009 | US7521301 Methods for fabricating integrated circuit field effect transistors including channel-containing fin having regions of high and low doping concentrations |
| 04/21/2009 | US7521300 Semiconductor device substrate including a single-crystalline layer and method of manufacturing semiconductor device substrate |
| 04/21/2009 | US7521299 Method of manufacturing transistor, method of manufacturing electro-optical device, and method of manufacturing electronic device |
| 04/21/2009 | US7521298 Thin film transistor array panel of active liquid crystal display and fabrication method thereof |
| 04/21/2009 | US7521297 Multichip package system |
| 04/21/2009 | US7521296 Methods of fabricating a microlens including selectively curing flowable, uncured optically trasmissive material |
| 04/21/2009 | US7521295 Leadframe and method of manufacturing the same |
| 04/21/2009 | US7521294 Lead frame for semiconductor package |
| 04/21/2009 | US7521293 Method of manufacturing semiconductor device, semiconductor device, circuit board, and electronic instrument |
| 04/21/2009 | US7521291 Method for manufacturing a semiconductor device |
| 04/21/2009 | US7521290 Method of manufacturing circuit device |
| 04/21/2009 | US7521289 Package having dummy package substrate and method of fabricating the same |
| 04/21/2009 | US7521288 Stacked chip semiconductor device and method for manufacturing the same |
| 04/21/2009 | US7521287 Wire and solder bond forming methods |