Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2014
07/02/2014CN103904039A 超薄凹式玻璃基板的封装结构及方法 Package structure and method of thin glass substrates concave
07/02/2014CN103904037A Nor闪存的制造方法 Nor flash memory manufacturing method
07/02/2014CN103904036A Nor闪存的制造方法 Nor flash memory manufacturing method
07/02/2014CN103904035A Tcat结构及其形成方法 Tcat structure and method of forming
07/02/2014CN103904034A P-BiCS结构及其形成方法 P-BiCS structure and method of forming
07/02/2014CN103904033A 半导体装置的制造方法 The method of manufacturing a semiconductor device
07/02/2014CN103904032A 闪存存储单元及其制备方法 Flash memory cell and its preparation method
07/02/2014CN103904031A 半导体结构制造方法及制成的结构 Structure and method of manufacturing a semiconductor structure made
07/02/2014CN103904030A 嵌入式闪存存储器中5v耗尽器件的制造方法 Embedded flash memory device manufacturing method depleted 5v
07/02/2014CN103904029A 具有双重功函数栅叠层的半导体器件及其制造方法 Semiconductor device and manufacturing method thereof having a work function of the gate stack of the dual
07/02/2014CN103904028A 一种半导体结构及其制造方法 A semiconductor structure and its manufacturing method
07/02/2014CN103904027A 成像器设备的制造和成像器设备 And an imaging device manufacturing apparatus imager
07/02/2014CN103904026A 微电子芯片用低介电常数薄膜层的制造工艺 Microelectronic chip layer with low dielectric constant film fabrication process
07/02/2014CN103904025A 提高金属连线电迁移可靠性的方法 Improve electromigration reliability of metal wiring methods
07/02/2014CN103904024A 形成半导体器件的双镶嵌结构的方法以及由其制造的半导体器件 Dual damascene method of forming a semiconductor device structures and semiconductor devices fabricated therefrom
07/02/2014CN103904023A 厚铝刻蚀工艺中光刻胶的去除方法 Thick aluminum etching process the photoresist removal method
07/02/2014CN103904022A 一种基于化学镀镍合金的通孔填充方法及其应用 Nickel-based alloy plating through hole filling method and its application
07/02/2014CN103904021A 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
07/02/2014CN103904020A 优化自对准接触孔底部金属硅化物形貌的方法 Optimization of self-aligned contact hole at the bottom of the metal silicide morphology method
07/02/2014CN103904019A 具有v形区域的半导体器件 A semiconductor device having a v-shaped region
07/02/2014CN103904018A 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
07/02/2014CN103904017A 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
07/02/2014CN103904016A 硅片承载装置 Wafer carrying device
07/02/2014CN103904015A 一种砷化镓基外延层剥离转移的方法 One kind of GaAs-based epitaxial layer peeling transfer
07/02/2014CN103904014A 静电卡盘和反应腔室 Electrostatic chuck and the reaction chamber
07/02/2014CN103904013A 一种真空吸附装置及吸附测校方法 A vacuum suction device and adsorption measurement calibration method
07/02/2014CN103904012A 一种tsv硅片的真空吸盘 One kind tsv silicon vacuum cups
07/02/2014CN103904011A 翘曲硅片吸附装置及其吸附方法 Apparatus and method for warping silicon adsorption adsorption
07/02/2014CN103904010A 一种晶圆传送装置 One kind of wafer transfer device
07/02/2014CN103904009A 一种监控离子注入机稳定性和均匀性的方法 A method of monitoring ion implanter stability and uniformity of method
07/02/2014CN103904008A 一种半导体设备的机械臂的动态传感器结构 Dynamic sensor structure of a semiconductor device manipulator
07/02/2014CN103904007A 清洗装置 Cleaning device
07/02/2014CN103904006A 用于制造薄膜封装的设备以及方法 Apparatus for and a method of manufacturing a thin film encapsulation
07/02/2014CN103904005A 测试和刻蚀衬底的多功能装置以及包括其的衬底加工装置 Multifunction device testing and etching of the substrate and a substrate processing apparatus including
07/02/2014CN103904004A 一种具有柔性关节的容器 A container having a flexible joint
07/02/2014CN103904003A 一种混合反馈式先进过程控制系统 A hybrid of advanced process control system feedback
07/02/2014CN103904002A 一种验证缺陷检测程序灵敏度的方法 An authentication method for defect detection sensitivity program
07/02/2014CN103904001A 一种用于氮掺杂碳化硅薄膜的离线监控方法 A nitrogen-doped silicon carbide films offline method for monitoring
07/02/2014CN103904000A 采用电容衬度测试结构检测多晶硅底部桥连缺陷的方法 The method of capacitance contrast detection test structure polysilicon bottom bridging defects
07/02/2014CN103903999A 半导体封装的检查设备 Semiconductor package inspection equipment
07/02/2014CN103903998A 一种半导体工艺的检测方法和检测系统 A semiconductor process of detection methods and detection systems
07/02/2014CN103903997A 离子注入剂量的检测方法 Detection method using an ion implantation dose
07/02/2014CN103903996A 一种适应多种不同封装要求的芯片焊盘版图设计方法 An adaptation of a variety of different methods of chip packaging pad layout design requirements
07/02/2014CN103903995A 半导体装置的制造方法及半导体装置 The method of manufacturing a semiconductor device and semiconductor device
07/02/2014CN103903994A 包括气隙的半导体器件及其制造方法 Includes a semiconductor device and manufacturing method of the air gap
07/02/2014CN103903993A 一种二极管引线焊接装配方法及装置 Welding wire to a diode assembly method and apparatus
07/02/2014CN103903992A 一种压固二极管在整流器基板上的方法及装置 A method and apparatus for the rectifier diode voltage solid substrate
07/02/2014CN103903991A 一种光电传感器芯片的封装方法 A photoelectric sensor chip packaging method of
07/02/2014CN103903990A 电子组件封装的制法 Electronic component packaging system of law
07/02/2014CN103903989A 半导体封装结构的形成方法 The method of forming a semiconductor package structure
07/02/2014CN103903988A 氧化物半导体制造方法及薄膜晶体管制造方法 The method of manufacturing an oxide semiconductor thin film transistor and method of manufacturing
07/02/2014CN103903987A 基于自对准的悬浮石墨烯晶体管制造方法 Suspension graphene self-aligned transistor fabrication method based on
07/02/2014CN103903986A 栅介质层的制作方法 The method of making the gate dielectric layer
07/02/2014CN103903985A 用于形成具有自对准源极/漏极的FinFET的方法 Method has self-aligned source / drain for forming the FinFET
07/02/2014CN103903984A 一种半导体器件的制造方法 A method of manufacturing a semiconductor device
07/02/2014CN103903983A 形成埋入式沟槽的工艺方法 Process for forming a buried trench
07/02/2014CN103903982A 降低hemt器件欧姆接触电阻的方法 Methods to reduce ohmic contact resistance hemt devices
07/02/2014CN103903981A 一种深阱退火方法 A dark trap annealing method
07/02/2014CN103903980A 芯片用树脂膜形成用片材及半导体芯片的制造方法 Sheet and method of manufacturing the semiconductor chip chip forming resin film
07/02/2014CN103903979A 一种化学机械抛光方法 A chemical mechanical polishing method
07/02/2014CN103903978A 蚀刻方法 Etching method
07/02/2014CN103903977A 一种刻蚀方法 One kind of etching method
07/02/2014CN103903976A 用于制备薄膜晶体管沟道的蚀刻剂组合物和沟道制造方法 Preparation of the thin film transistor channel etchant composition and method for producing the channel
07/02/2014CN103903975A 板状物的加工方法 The plate processing method
07/02/2014CN103903974A 晶片的加工方法 Wafer processing method
07/02/2014CN103903973A 利用旋涂液态金属种子层在石墨烯上生长高k介质的方法 Using the method of spin-coating liquid metal seed layer on the graphene growth of high-k dielectric
07/02/2014CN103903972A 一种小尺寸图形的制作方法 A method of making small-sized pattern
07/02/2014CN103903971A 一种提高栅氧化层质量的方法 A way to improve the quality of the gate oxide layer method
07/02/2014CN103903970A 一种具有纳米间隙的异质电极对的制作方法 A method of making nano-gap electrode pairs having heterogeneous
07/02/2014CN103903969A 浮栅的制备方法 Floating gate preparation
07/02/2014CN103903968A 一种半导体器件及其制造方法 A semiconductor device and manufacturing method thereof
07/02/2014CN103903967A 一种激光退火装置及方法 A laser annealing apparatus and method
07/02/2014CN103903966A 基于斜切硅衬底的超高密度锗硅量子点的制备方法 The production process for a silicon substrate chamfered ultrahigh density SiGe quantum dots
07/02/2014CN103903965A 用于半导体元件的超接面结构及其制程 Super junction structure and process for semiconductor device
07/02/2014CN103903964A 一种用氟基气体钝化刻蚀胶掩蔽的薄膜的方法 One kind of a fluorine-based gas etching adhesive masking film passivation method
07/02/2014CN103903963A 一种稳定mim电容光刻线宽的方法 A method of stabilizing mim capacitor lithographic linewidth
07/02/2014CN103903962A 硬掩模组合物和形成图案的方法以及包括该图案的半导体集成电路器件 Hardmask composition and method of forming a pattern and a semiconductor integrated circuit device comprising the pattern
07/02/2014CN103903961A 在石墨烯材料上淀积高k栅介质的方法及应用 Graphene material is deposited on the high-k gate dielectrics and its application
07/02/2014CN103903960A 一种hit电池前清洗的方法 The former hit cell washing method
07/02/2014CN103903959A 减压干燥装置以及减压干燥方法 Vacuum drying equipment and vacuum drying method
07/02/2014CN103903952A 等离子蚀刻装置用硅部件及其制造方法 Plasma etching apparatus and method for manufacturing a silicon member
07/02/2014CN103903947A 一种等离子处理器及其运行方法 A plasma processor and method of operation
07/02/2014CN103903946A 一种用于等离子反应器的气体喷淋头 Gas showerhead for a plasma reactor
07/02/2014CN103903943A 离子注入系统 Ion implantation system
07/02/2014CN103901732A 硅片交接装置 Wafer transfer device
07/02/2014CN103901729A 改善套刻精度面内均匀性的方法 Improve overlay accuracy within surface uniformity of approach
07/02/2014CN103901691A 液晶显示面板及制造方法 A liquid crystal display panel and manufacturing method
07/02/2014CN103901690A 一种阵列基板及其制作方法、显示装置 One kind of array substrate and method of manufacturing the display device
07/02/2014CN103901687A 一种阵列基板及其制备方法、显示装置 One kind of array substrate and its preparation method, the display device
07/02/2014CN103901686A 边缘场开关模式液晶显示装置的阵列基板及其制造方法 The array substrate and manufacturing method of a fringe field switching device LCD
07/02/2014CN103900951A 一种半导体器件中粘附力检测结构及其制备方法 A semiconductor device in adhesion detection structure and preparation method
07/02/2014CN103898613A 等离子体刻蚀方法 Plasma etching method
07/02/2014CN103898601A 晶种层的形成方法、硅膜的成膜方法以及成膜装置 The method for forming the seed layer, and a film forming method of the silicon film deposition apparatus
07/02/2014CN103898509A 刻蚀剂组合物、金属图案的形成方法和阵列基板的制法 Method etchant composition, method of forming a metal pattern and an array substrate
07/02/2014CN103898506A 基于m面GaN上的极性AlN纳米线材料及其制作方法 Based polar m-plane GaN on AlN nano wire material and manufacturing method thereof
07/02/2014CN103898449A 用于调节托盘温度的腔室及半导体加工设备 For adjusting the temperature of a tray of the chamber and semiconductor processing equipment
07/02/2014CN103897601A 一种化学机械抛光液及抛光方法 A chemical mechanical polishing solution and polishing method
07/02/2014CN103897600A 一种化学机械抛光液及其应用 A chemical mechanical polishing liquid and its application
07/02/2014CN103895114A 一种蓝宝石屏加工工艺 One kind of sapphire screen process
07/02/2014CN103894734A 一种激光退火装置及其操作方法 A laser annealing apparatus and operating method thereof
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