Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/01/2009US7625420 Small particle size, narrow size distribution, high crystallinity (large crystals) and spherical morphology; protective coatings; composites; alloys; green strength; thick film pastes; microelectronics; multilayer ceramic capacitors; multichip module;industrial scale
12/01/2009US7625262 A fibrous substrate and a phosphoric acid-modified polymer having a hydroxyl value or 40mg KOH/g toadsorb a colloidal metal; inoexchanging for forming a metal chelate; cleaning/demetallization without changing the pH value; circulation'reuse of slurry; industrial scale
12/01/2009US7625259 Organic light emitting display with circuit measuring pad and method of fabricating the same
12/01/2009US7624904 Calibration apparatus for bondhead of wire bonding machine
12/01/2009US7624661 Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit
12/01/2009US7624498 Apparatus for detaching a semiconductor chip from a tape
12/01/2009US7624492 Method for manufacturing electronic parts
11/2009
11/28/2009CA2666034A1 Method of manufacturing iii nitride crystal, iii nitride crystal substrate, and semiconductor device
11/26/2009WO2009143462A2 Method for attaching optical components onto silicon-based integrated circuits
11/26/2009WO2009143456A1 HIGH-K DIELECTRIC FILMS AND METHODS OF PRODUCING USING CERIUM-BASED β-DIKETONATE PRECURSORS
11/26/2009WO2009143452A1 High-k dielectric films and methods of producing using cerium-based precursors
11/26/2009WO2009143350A2 Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
11/26/2009WO2009143229A1 Semiconductor device having rough sidewall
11/26/2009WO2009143226A1 Zinc-oxide based epitaxial layers and devices
11/26/2009WO2009143222A2 Halide ion control of seed mediated growth of anisotropic gold nanoparticles
11/26/2009WO2009143200A2 Substrate matrix to decouple tool and process effects
11/26/2009WO2009143136A2 System and method for high yield deposition of conductive materials onto solar cells
11/26/2009WO2009143026A2 Method of forming an electronic device using a separation technique
11/26/2009WO2009142982A2 Metal gate structure and method of manufacturing same
11/26/2009WO2009142947A2 Helium descumming
11/26/2009WO2009142911A2 Robust outlet plumbing for high power flow remote plasma source
11/26/2009WO2009142881A1 Memory cells, memory cell constructions and memory cell programming methods
11/26/2009WO2009142869A2 Methods of forming structures supported by semiconductor substrates
11/26/2009WO2009142710A1 Electrostatic chuck
11/26/2009WO2009142704A1 Method of etching
11/26/2009WO2009142655A1 Structure and process for conductive contact integration
11/26/2009WO2009142446A2 Vacuum processing system, buffer module used therein and tray transferring method of the vacuum processing system
11/26/2009WO2009142440A2 Optical component for maskless exposure apparatus
11/26/2009WO2009142400A2 In-line die cleaning device and cleaning method employing plasma
11/26/2009WO2009142325A1 Dielectric film, dielectric element, and process for producing the dielectric element
11/26/2009WO2009142311A1 Group iii nitride semiconductor laminate structure and process for producing the group iii nitride semiconductor laminate structure
11/26/2009WO2009142310A1 Semiconductor device and method for manufacturing the same
11/26/2009WO2009142309A1 Semiconductor device
11/26/2009WO2009142305A1 Method for inspecting defects, and defect inspecting apparatus
11/26/2009WO2009142295A1 Laminated body for manufacturing resin mold, laminated body, resin mold and method for manufacturing magnetic recording medium
11/26/2009WO2009142289A1 Sputtering target, method for forming amorphous oxide thin film using the same, and method for manufacturing thin film transistor
11/26/2009WO2009142281A1 Method for cleaning with fluorine compound
11/26/2009WO2009142265A1 Iii nitride semiconductor light emitting element and method for manufacturing the same, and lamp
11/26/2009WO2009142246A1 Semiconductor light emitting element, method for manufacturing semiconductor light emitting element, and lamp
11/26/2009WO2009142204A1 Amino-acid generator agent and polysiloxane composition containing the same
11/26/2009WO2009142197A1 Vacuum processing apparatus
11/26/2009WO2009142183A1 Novel compound, polymer and radiation-sensitive composition
11/26/2009WO2009142182A1 Radiation-sensitive resin composition, method for forming resist pattern and photoresist film
11/26/2009WO2009142181A1 Radiation-sensitive resin composition for liquid immersion exposure, polymer and method for forming resist pattern
11/26/2009WO2009142165A1 Semiconductor device and method for fabricating the same
11/26/2009WO2009142142A1 Alicyclic structure-containing compound, (meth)acrylate, (meth)acrylic polymer and positive resist composition containing the (meth)acrylic polymer
11/26/2009WO2009142138A1 Plasma processing apparatus
11/26/2009WO2009142133A1 Stage
11/26/2009WO2009142121A1 Semiconductor device and fabrication method thereof
11/26/2009WO2009142103A1 Method for irradiating laser light and laser light irradiation device
11/26/2009WO2009142078A1 Method and apparatus for manufacturing semiconductor device
11/26/2009WO2009142077A1 Process for fabricating semiconductor device
11/26/2009WO2009142062A1 Flow quantity calculating tool, flow quantity calculating method and semiconductor device manufacturing method
11/26/2009WO2009142016A1 Plasma generating apparatus and plasma processing apparatus
11/26/2009WO2009141977A1 Semiconductor device and method for manufacturing the same
11/26/2009WO2009141976A1 Overhead conveying vehicle
11/26/2009WO2009141961A1 Double-head grinding apparatus and wafer manufacturing method
11/26/2009WO2009141954A1 Bonded wafer manufacturing method, and bonded wafer
11/26/2009WO2009141952A1 Semiconductor device and method for manufacturing the same
11/26/2009WO2009141950A1 Semiconductor integrated circuit
11/26/2009WO2009141949A1 Method for manufacturing mounting structure, and mounting structure
11/26/2009WO2009141932A1 Pattern forming method
11/26/2009WO2009141931A1 Barrier film forming material and pattern forming method using same
11/26/2009WO2009141907A1 Wafer unit for testing and testing system
11/26/2009WO2009141906A1 Testing wafer unit and testing system
11/26/2009WO2009141811A2 Semiconductor wafer and method for producing same
11/26/2009WO2009141757A1 A transistor device and a method of manufacturing the same
11/26/2009WO2009141753A1 A method of manufacturing a bipolar transistor semiconductor device and semiconductor devices obtained thereby
11/26/2009WO2009141740A2 Semiconductor wafer and method for producing the same
11/26/2009WO2009141724A1 Formation of substantially pit free indium gallium nitride
11/26/2009WO2009141678A2 Mos device with integrated schottky diode in active region contact trench
11/26/2009WO2009141551A2 Electroplating composition and process for coating a semiconductor substrate using said composition
11/26/2009WO2009141534A2 Device and method for inspecting semiconductor wafers
11/26/2009WO2009141488A1 Magnetically controlled polymer nanocomposite material and methods for applying and curing same, and nanomagnetic composite for rf applications
11/26/2009WO2009141402A1 Method for manufacturing and testing an integrated electronic circuit
11/26/2009WO2009141319A1 Next generation screen printing system
11/26/2009WO2009140798A1 Electronic component package body and its packaging method
11/26/2009WO2009124243A3 Die thinning processes and structures
11/26/2009WO2009119983A3 Fpd substrate and semiconductor wafer inspection system using duplicate images
11/26/2009WO2009116806A9 Method for preparing cerium carbonate
11/26/2009WO2009116735A3 Semiconductor device test system, test handler, and test head, interface block for semiconductor device tester, method for classifying tested semiconductor device and method for supporting semiconductor device test
11/26/2009WO2009111665A3 Use of chained implants in solar cells
11/26/2009WO2009111407A3 Multi-spot scanning system and method
11/26/2009WO2009105635A3 Ceramic paddle
11/26/2009WO2009088565A3 Method of forming a thermo pyrolytic graphite-embedded heatsink
11/26/2009WO2009085564A4 Etch with high etch rate resist mask
11/26/2009WO2009074755A3 Method of fastening lamellae of a lamellar material to a suitable substrate
11/26/2009WO2009062732A3 Multicomponent heat sink
11/26/2009WO2009034008A3 Continuous method for electronic components, modules and led applications
11/26/2009WO2008027634A3 Infrared laser wafer scribing using short pulses
11/26/2009US20090293039 Method for manufacturing a photomask
11/26/2009US20090293038 Method and correction apparatus for correcting process proximity effect and computer program product
11/26/2009US20090292491 Substrate processing apparatus, device inspecting method, device inspecting program and recording medium having the program recorded therein
11/26/2009US20090292387 Surface defect data display and management system and a method of displaying and managing a surface defect data
11/26/2009US20090292386 System and Method for Automatic Virtual Metrology
11/26/2009US20090291623 Polishing head and polishing apparatus
11/26/2009US20090291621 Reclamation method of semiconductor wafer
11/26/2009US20090291620 Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and chemical mechanical polishing aqueous dispersion preparation kit
11/26/2009US20090291573 Probe card assembly and kit, and methods of making same
11/26/2009US20090291569 Laser irradiation method and laser irradiation apparatus
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