H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/08/2009	US7629242 Method for fabricating semiconductor device having recess gate
12/08/2009	US7629240 Controlling dopant diffusion in a semiconductor region
12/08/2009	US7629239 Method of fabricating a semiconductor device with a dopant region in a lower wire
12/08/2009	US7629238 Device isolation structure of a semiconductor device and method of forming the same
12/08/2009	US7629237 MBE growth of a semiconductor layer structure
12/08/2009	US7629236 Method for passivating crystal silicon surfaces
12/08/2009	US7629235 Method for manufacturing a semiconductor device that includes adding noble gas to a semiconductor film and then irradiating the semiconductor film with laser light in the presence of a magnetic field
12/08/2009	US7629234 Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling
12/08/2009	US7629232 Semiconductor storage device and manufacturing method thereof
12/08/2009	US7629231 Fabrication method of semiconductor device
12/08/2009	US7629230 Wafer processing method
12/08/2009	US7629229 Laser processing method
12/08/2009	US7629228 Manufacturing method for semiconductor devices, and formation apparatus for semiconductor wafer dicing masks
12/08/2009	US7629227 CVD flowable gap fill
12/08/2009	US7629226 Semiconductor device and manufacturing method thereof
12/08/2009	US7629225 Methods of manufacturing semiconductor devices and structures thereof
12/08/2009	US7629224 VLSI fabrication processes for introducing pores into dielectric materials
12/08/2009	US7629223 Method for manufacturing semiconductor device
12/08/2009	US7629222 Method of fabricating a semiconductor device
12/08/2009	US7629221 Method for forming capacitor of semiconductor device
12/08/2009	US7629220 Method for forming a semiconductor device and structure thereof
12/08/2009	US7629219 Method of fabricating a dual polysilicon gate of a semiconductor device with a multi-plane channel
12/08/2009	US7629218 Method of manufacturing a capacitor and method of manufacturing a semiconductor device using the same
12/08/2009	US7629217 Methods of forming void-free layers in openings of semiconductor substrates
12/08/2009	US7629216 Method for fabricating CMOS image sensor with plasma damage-free photodiode
12/08/2009	US7629215 Semiconductor device and method of manufacturing the same
12/08/2009	US7629214 Method of making a transistor with a sloped drain diffusion layer
12/08/2009	US7629213 Method of manufacturing flash memory device with void between gate patterns
12/08/2009	US7629212 Doped WGe to form dual metal gates
12/08/2009	US7629211 Field effect transistor and method of forming a field effect transistor
12/08/2009	US7629210 Method for fabricating an ESD protection apparatus for discharging electric charge in a depth direction
12/08/2009	US7629209 Methods for fabricating polysilicon film and thin film transistors
12/08/2009	US7629208 Method of manufacturing thin film transistor, thin film transistor, and display unit
12/08/2009	US7629207 Bottom gate thin film transistor and method of manufacturing the same
12/08/2009	US7629206 Patterning self-aligned transistors using back surface illumination
12/08/2009	US7629205 Thin film transistor having double-layered gate electrode and method of manufacturing the thin film transistor
12/08/2009	US7629204 Surface roughening method for embedded semiconductor chip structure
12/08/2009	US7629203 Thermal interface material for combined reflow
12/08/2009	US7629201 Method for fabricating a wafer level package with device wafer and passive component integration
12/08/2009	US7629200 Fingerprint detection device and method of its manufacture, and apparatus for forming a protective film
12/08/2009	US7629199 Method for fabricating semiconductor package with build-up layers formed on chip
12/08/2009	US7629198 Methods for forming nonvolatile memory elements with resistive-switching metal oxides
12/08/2009	US7629197 Spatial light modulator
12/08/2009	US7629196 Method for manufacturing an integrated circuit having increased radiation hardness and reliability
12/08/2009	US7629195 Method of making light emitting diodes (LEDs) with improved light extraction by roughening
12/08/2009	US7629194 Metal contact RF MEMS single pole double throw latching switch
12/08/2009	US7629193 Method of producing acceleration sensor chip package
12/08/2009	US7629192 Passive electrically testable acceleration and voltage measurement devices
12/08/2009	US7629190 Method for making a micromechanical device by using a sacrificial substrate
12/08/2009	US7629188 Flip chip type LED lighting device manufacturing method
12/08/2009	US7629187 Fabrication method of semiconductor luminescent device
12/08/2009	US7629186 System and method for identification of a reference integrated circuit for a pick-and-place equipment
12/08/2009	US7629185 Semiconductor laser device manufacturing method and semiconductor laser device
12/08/2009	US7629184 RFID temperature sensing wafer, system and method
12/08/2009	US7629183 Method for manufacturing semiconductor device and computer storage medium
12/08/2009	US7629182 Space and process efficient MRAM and method
12/08/2009	US7629109 Exposure control for phase shifting photolithographic masks
12/08/2009	US7629105 Positive photoresist composition and method of forming resist pattern
12/08/2009	US7629088 Mask defect repairing method and semiconductor device manufacturing method
12/08/2009	US7629056 Circuit-connecting material and circuit terminal connected structure and connecting method
12/08/2009	US7629050 Circuit-connecting material and circuit terminal connected structure and connecting method
12/08/2009	US7629033 Plasma processing method for forming a silicon nitride film on a silicon oxide film
12/08/2009	US7629024 Semiconductor substrates
12/08/2009	US7628932 Wet etch suitable for creating square cuts in si
12/08/2009	US7628931 Processing method for conservation of processing gases
12/08/2009	US7628928 Stress-induced bandgap-shifted semiconductor photoelectrolytic/photocatalytic/photovoltaic surface and method for making same
12/08/2009	US7628906 Method of manufacturing a spectral filter for green and longer wavelengths
12/08/2009	US7628897 Reactive ion etching for semiconductor device feature topography modification
12/08/2009	US7628895 W-patterned tools for transporting/handling pairs of disks
12/08/2009	US7628867 Washing device and its work conveying method
12/08/2009	US7628865 Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus
12/08/2009	US7628864 Substrate cleaning apparatus and method
12/08/2009	US7628863 Heated gas box for PECVD applications
12/08/2009	US7628862 Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle
12/08/2009	US7628861 Pulsed mass flow delivery system and method
12/08/2009	US7628860 Pulsed mass flow delivery system and method
12/08/2009	US7628853 Lithium tantalate substrate and process for its manufacture
12/08/2009	US7628840 Metal nano-particles and method for preparing the same, dispersion of metal nano-particles and method for preparing the same, and thin metallic wire and metal film and method for preparing these substances
12/08/2009	US7628824 Substrate processing apparatus for processing plurality of substrates in succession
12/08/2009	US7628680 Method and apparatus for removing material from microfeature workpieces
12/08/2009	US7628669 Organic light emitting devices with conductive layers having adjustable work function and fabrication methods thereof
12/08/2009	US7628612 Heat treatment apparatus, heat treatment method, and computer readable storage medium
12/08/2009	US7628574 Apparatus and method for processing substrates using one or more vacuum transfer chamber units
12/08/2009	US7628497 Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
12/08/2009	US7627946 Method for fabricating a metal protection layer on electrically connecting pad of circuit board
12/03/2009	WO2009146373A1 Maskless process for solder bumps production
12/03/2009	WO2009146243A1 Transistor with contact over gate active area
12/03/2009	WO2009146229A1 Methods of forming data cells and connections to data cells
12/03/2009	WO2009146187A1 Apparatus and methods for manufacturing thin-film solar cells
12/03/2009	WO2009146136A1 Methods and apparatus for normalizing optical emission spectra
12/03/2009	WO2009146091A1 Apparatus and method for semiconductor wafer alignment
12/03/2009	WO2009146063A1 Method for forming a compound semi-conductor thin-film
12/03/2009	WO2009146014A1 Patterning resolution enhancement combining interference lithography and self-aligned double patterning techniques
12/03/2009	WO2009146008A1 Penetrating implant for forming a semiconductor device
12/03/2009	WO2009146003A1 Predictive diagnostics system, apparatus and method for improved reliability
12/03/2009	WO2009145986A1 Photonic clock stabilized laser comb processing
12/03/2009	WO2009145955A1 Data cells with drivers and methods of making and operating the same
12/03/2009	WO2009145908A1 Control of particles on semiconductor wafers when implanting boron hydrides
12/03/2009	WO2009145892A1 Method for led-module assembly
12/03/2009	WO2009145727A1 A semiconductor structure and a method of manufacturing a semiconductor structure

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