Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/09/2009CN100568101C Lithographic apparatus and device manufacturing method
12/09/2009CN100568100C Checking method and element manufacture method
12/09/2009CN100568099C Checking method and element manufacture method
12/09/2009CN100568098C Radiation-sensitive resin composition, process for producing the same and process for producing semiconductor device therewith
12/09/2009CN100568097C Photosensitive resin composition and laminate
12/09/2009CN100568094C Producing technology for non-rusting agent pattern and thickening material thereof and semiconductor device producing technology
12/09/2009CN100568093C Photolithographic projection assembly, handling apparatus for handling substrates and method of handling substrate
12/09/2009CN100568092C Mask, method of manufacturing mask, device for manufacturing mask, and method of manufacturing film of luminescent material
12/09/2009CN100568091C Translucent stacked film, photomask blank, photomask and fabrication method thereof
12/09/2009CN100568072C Light sensing element, array substrate having the same and liquid crystal display apparatus having the same
12/09/2009CN100567995C Socket for inspection apparatus
12/09/2009CN100567976C Surface acoustic wave sensor assemblies and sensor box
12/09/2009CN100567564C Method and apparatus for forming a high quality low temperature silicon nitride layer
12/09/2009CN100567562C Thin film forming apparatus
12/09/2009CN100567559C Mn-containing copper alloy sputtering target with less occurrence of particle
12/09/2009CN100567535C Ni-Pt alloy and Ni-Pt alloy target
12/09/2009CN100567532C Ultrahigh-purity copper and process for producing the same, and bonding wire comprising ultrahigh-purity copper
12/09/2009CN100567453C Chip-removing solution for integrated circuit packaging after treatment
12/09/2009CN100567441C Abrasive, method of polishing substrate and process for producing semiconductor device
12/09/2009CN100567150C Zeolite sol and its preparation method, composition for forming multiporous film, multiporous film and its preparation method, interlayer insulation membrane and semiconductor device
12/09/2009CN100566992C Metallized polyimide film and preparation method thereof
12/09/2009CN100566931C Cutting device
12/09/2009CN100566907C Device for irradiating laser beam on amorphous silicon film
12/09/2009CN100566905C Thermal processing device and thermal processing method for semiconductor lining
12/09/2009CN100566859C Washing method for removing polymer film adhered on surface of anode alumimium-oxide part
12/09/2009CN100566852C Spin-on protective coatings for wet-etch processing of microelectronic substrates
12/09/2009CN100566847C Air-intake nozzle
12/08/2009US7631288 Optical proximity correction performed with respect to limited area
12/08/2009US7631287 Calculating method, verification method, verification program and verification system for edge deviation quantity, and semiconductor device manufacturing method
12/08/2009US7631279 Semiconductor integrated device and apparatus for designing the same
12/08/2009US7630785 Substrate processing system for setting uniform module cycle length and access control time lag in two pipeline processing systems
12/08/2009US7630178 Semiconductor integrated circuit
12/08/2009US7630118 Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
12/08/2009US7630060 Device manufacturing method, lithographic apparatus and device manufactured thereby
12/08/2009US7630054 Methods and systems to compensate for a stitching disturbance of a printed pattern
12/08/2009US7630052 Exposure processing system, exposure processing method and method for manufacturing a semiconductor device
12/08/2009US7630047 Liquid crystal display and method for manufacturing the same
12/08/2009US7629697 Marker structure and method for controlling alignment of layers of a multi-layered substrate
12/08/2009US7629692 Via hole having fine hole land and method for forming the same
12/08/2009US7629689 Semiconductor integrated circuit having connection pads over active elements
12/08/2009US7629686 Bumped die and wire bonded board-on-chip package
12/08/2009US7629682 Wafer level package configured to compensate size difference in different types of packages
12/08/2009US7629677 Semiconductor package with inner leads exposed from an encapsulant
12/08/2009US7629672 Semiconductor devices and manufacturing method thereof
12/08/2009US7629671 Semiconductor device having a resin protrusion with a depression and method manufacturing the same
12/08/2009US7629667 Semiconductor device including an on-chip coil antenna formed on a device layer which is formed on an oxide film layer
12/08/2009US7629654 Buried guard ring structures and fabrication methods
12/08/2009US7629649 Method and materials to control doping profile in integrated circuit substrate material
12/08/2009US7629644 Insulated gate-type semiconductor device and manufacturing method of the same
12/08/2009US7629640 Two bit/four bit SONOS flash memory cell
12/08/2009US7629638 Semiconductor memory device and manufacturing method thereof
12/08/2009US7629633 Vertical thin film transistor with short-channel effect suppression
12/08/2009US7629630 Electropolished patterned metal layer for semiconductor devices
12/08/2009US7629628 Bipolar transistor including a base layer containing carbon atoms and having three distinct layers being doped with a trivalent substance
12/08/2009US7629626 Semiconductor device having insulated gate bipolar transistor
12/08/2009US7629625 Method for producing ZnTe system compound semiconductor single crystal, ZnTe system compound semiconductor single crystal, and semiconductor device
12/08/2009US7629624 Active matrix EL device with sealing structure housing the device and the peripheral driving circuits
12/08/2009US7629623 Nitride-based semiconductor device and method of fabricating the same
12/08/2009US7629617 Light-emitting device
12/08/2009US7629616 Silicon carbide self-aligned epitaxial MOSFET for high powered device applications
12/08/2009US7629615 Light emitting element and method of making same
12/08/2009US7629612 Semiconductor device
12/08/2009US7629611 Semiconductor element, electronic device
12/08/2009US7629610 Semiconductor display device
12/08/2009US7629557 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer
12/08/2009US7629532 Solar cell having active region with nanostructures having energy wells
12/08/2009US7629292 Composite media for ion processing
12/08/2009US7629275 Multiple-time flash anneal process
12/08/2009US7629274 Method of fabricating a storage node
12/08/2009US7629273 Method for modulating stresses of a contact etch stop layer
12/08/2009US7629272 Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics
12/08/2009US7629271 High stress diamond like carbon film
12/08/2009US7629270 Remote plasma activated nitridation
12/08/2009US7629269 High-k thin film grain size control
12/08/2009US7629268 Method for an improved air gap interconnect structure
12/08/2009US7629267 High stress nitride film and method for formation thereof
12/08/2009US7629266 Tetramethyl ammonium fluoride, reducing agent, and isopropyl alcohol
12/08/2009US7629265 Cleaning method for use in semiconductor device fabrication
12/08/2009US7629264 Structure and method for hybrid tungsten copper metal contact
12/08/2009US7629263 Semiconductor sensor production method and semiconductor sensor
12/08/2009US7629262 Method of forming a lower electrode of a capacitor
12/08/2009US7629261 Patterning metal layers
12/08/2009US7629260 Organosilane hardmask compositions and methods of producing semiconductor devices using the same
12/08/2009US7629259 Method of aligning a reticle for formation of semiconductor devices
12/08/2009US7629258 Method for one-to-one polishing of silicon nitride and silicon oxide
12/08/2009US7629257 Combined etching and doping substances
12/08/2009US7629256 In situ silicon and titanium nitride deposition
12/08/2009US7629255 Method for reducing microloading in etching high aspect ratio structures
12/08/2009US7629254 Semiconductor device
12/08/2009US7629253 Method for implementing diffusion barrier in 3D memory
12/08/2009US7629252 Conformal electroless deposition of barrier layer materials
12/08/2009US7629251 Semiconductor device and a method of manufacturing the same
12/08/2009US7629250 Method for creating electrically conductive elements for semiconductor device structures using laser ablation processes and methods of fabricating semiconductor device assemblies
12/08/2009US7629249 Microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods
12/08/2009US7629248 Multi-layered metal line of semiconductor device for preventing diffusion between metal lines and method for forming the same
12/08/2009US7629247 Method of fabricating a self-aligning damascene memory structure
12/08/2009US7629246 High strength solder joint formation method for wafer level packages and flip applications
12/08/2009US7629245 Method of forming non-volatile memory device
12/08/2009US7629244 Method of fabricating a single electron transistor having memory function
12/08/2009US7629243 Method for manufacturing semiconductor device
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