Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/02/2009CN100565839C Production method for gate oxide layers with different thickness
12/02/2009CN100565838C Manufacture of dielectric layer of grid
12/02/2009CN100565837C Manufacturing method for display device
12/02/2009CN100565836C Method for manufacturing semiconductor device
12/02/2009CN100565835C Manufacturing method of semiconductor device, evaluation method of semiconductor device, and semiconductor device
12/02/2009CN100565834C Method for implementing air bridge interconnection and chip with air bridge interconnection structure
12/02/2009CN100565833C Side wall pore sealing for low-k dielectrics
12/02/2009CN100565832C Wafer transfer apparatus, polishing apparatus and wafer receiving method
12/02/2009CN100565831C Device and method for picking up semiconductor chip
12/02/2009CN100565830C Spatial packaging structure and method of manufacturing the same
12/02/2009CN100565829C Bonding apparatus
12/02/2009CN100565828C Glue sealing method of sensor chip
12/02/2009CN100565827C Solder bumps formation using solder paste with shape retaining attribute after uv irradiation
12/02/2009CN100565826C Preparation method of Zno back gate nano wire field effect tube
12/02/2009CN100565825C Manufacture of thin-film semiconductor device
12/02/2009CN100565824C Method of fabricating semiconductor device and semiconductor fabricated by the same method
12/02/2009CN100565823C Method for improving transistor performance through reducing the salicide interface resistance
12/02/2009CN100565822C Method of fabricating a bipolar transistor
12/02/2009CN100565821C Laser apparatus and laser annealing method
12/02/2009CN100565820C Silicon wafer and method for producing same
12/02/2009CN100565819C Plasma process for removing excess molding material from a substrate
12/02/2009CN100565818C Method for fabricating semiconductor device capable of preventing damage by wet cleaning process
12/02/2009CN100565817C Method for improve deep plough groove etched oxide hard mask profile
12/02/2009CN100565816C Etching method and device
12/02/2009CN100565815C Method of removing polymer coating from an etched trench
12/02/2009CN100565814C Solvent for treating polysilazane and method of treating polysilazane with the solvent
12/02/2009CN100565813C Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method, and kit for preparing aqueous dispersion for chemical mechanical polishing
12/02/2009CN100565812C Method for reducing large patter sinking in chemical and mechanical grinding of metal and multi-crystal silicon
12/02/2009CN100565811C Semiconductor device having a metal gate electrode formed on an annealing high-k gate dielectric layer
12/02/2009CN100565810C Method of forming a low resistance semiconductor contact and structure therefor
12/02/2009CN100565809C Method for fabricating semiconductor device with improved refresh time
12/02/2009CN100565808C Self alignment semiconductor contact structure and its manufacture method
12/02/2009CN100565807C Process for removing gas of absorbing wavelength in charge erasing optical explosure tool
12/02/2009CN100565806C Laser irradiation apparatus and laser irradiation method
12/02/2009CN100565805C Method for manufacturing semiconductor device
12/02/2009CN100565804C Growth of SiO2 nanometer mask in gallium nitride film by HVPE method and method thereof
12/02/2009CN100565803C Method for manufacturing semiconductor device and epitaxial growth equipment
12/02/2009CN100565802C Method for locating growth quantum point with silicon dioxide as mask
12/02/2009CN100565801C Method for manufacturing semiconductor device
12/02/2009CN100565800C Method for obtaining single crystal nitride substrate containing gallium
12/02/2009CN100565799C Exposure apparatus and method for manufacturing device
12/02/2009CN100565798C Patterning method using coatings containing ionic components
12/02/2009CN100565797C Bearing apparatus and its manufacture method, bearing table apparatus, and exposure apparatus
12/02/2009CN100565796C Method and system for manufacturing semiconductor device
12/02/2009CN100565795C Making method for the storage of charge component
12/02/2009CN100565794C Semiconductor device and method for manufacturing the same
12/02/2009CN100565793C Apparatus and method for treating substrate
12/02/2009CN100565792C Substrate treatment apparatus
12/02/2009CN100565791C Apparatus and method for treating substrates
12/02/2009CN100565790C Plasma processing method and plasma processing apparatus
12/02/2009CN100565789C Heating process apparatus and method
12/02/2009CN100565788C Enhanced process and profile simulator algorithms
12/02/2009CN100565787C Substrate support having temperature control surface
12/02/2009CN100565786C System and method for suppression of wafer temperature drift in cold-wall CVD system
12/02/2009CN100565785C Heated substrate support
12/02/2009CN100565784C Manufacture equipment
12/02/2009CN100565783C Electric device containing at least four semiconductor nano wire
12/02/2009CN100565782C High pressure processing chamber for semiconductor substrate
12/02/2009CN100565715C Conductive ball, method of forming electrode of electronic part, electronic part and electronic equipment
12/02/2009CN100565701C Magnetoresistive random access memory
12/02/2009CN100565700C MTJ random access memory system
12/02/2009CN100565568C RFID tag and manufacturing method thereof
12/02/2009CN100565351C Lithographic apparatus and device manufacturing method
12/02/2009CN100565350C Substrate processing system and substrate processing method
12/02/2009CN100565349C Methods and systems for lithographic beam generation
12/02/2009CN100565348C Substrate placement in immersion lithography
12/02/2009CN100565347C Pattern forming method, semiconductor device manufacturing method and exposure mask set
12/02/2009CN100565346C Lithographic apparatus, device manufacturing method
12/02/2009CN100565345C Method for manufacturing lithographic pringting apparatus and equipment
12/02/2009CN100565344C Photoetching device, manufacturing method for the component, and component therefrom
12/02/2009CN100565343C Coating and developing system and coating and developing method
12/02/2009CN100565341C 抗蚀剂组合物 The resist composition
12/02/2009CN100565338C Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
12/02/2009CN100565312C Array substrate for organic thin film transistor liquid crystal display device and method of manufacturing the same
12/02/2009CN100565307C Semiconductor device and manufacturing method thereof, liquid crystal television system, and EL television system
12/02/2009CN100565306C Liquid crystal display device and method of fabricating the same
12/02/2009CN100565301C Device and method for sticking substrate
12/02/2009CN100565246C Ion beam detection device and method, and ion beam irradiation device
12/02/2009CN100565231C Testing device
12/02/2009CN100565218C Integrated circuit test card
12/02/2009CN100564594C Immersion plating of silver
12/02/2009CN100564592C Apparatus and method of detecting the electroless deposition endpoint
12/02/2009CN100564590C Inductive plasma system with sidewall magnet
12/02/2009CN100564588C Plasma processing method and apparatus thereof
12/02/2009CN100564587C Film formation method for Ti film
12/02/2009CN100564579C Indium oxide/zinc oxide/magnesium oxide sputtering target and transparent conductive film
12/02/2009CN100564577C Apparatus for transferring a tray
12/02/2009CN100564560C Al-ni-b alloy wiring material and element structure using the same
12/02/2009CN100564205C Vacuum absorbing system and its controlling method
12/02/2009CN100564196C Stencil-carrying container
12/02/2009CN100563927C Method of surface polishing and element
12/02/2009CN100563926C Polishing apparatus
12/02/2009CN100563849C Compositions and methods for the electroless deposition of NiFe on a work piece
12/02/2009CN100563791C Method and system for characterizing porous materials
12/01/2009US7627845 Macrocell, integrated circuit device, and electronic instrument
12/01/2009US7627841 Efficient method to predict integrated circuit temperature and power maps
12/01/2009US7627395 Vision system
12/01/2009US7626681 Lithographic apparatus and method
12/01/2009US7626680 Exposure apparatus and device fabrication method using the same
12/01/2009US7626647 Electrostatic discharge protection structure and electrostatic discharge protection device for a liquid crystal display, and method of making the same
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